JP2007324348A - Aligner - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an aligner capable of performing exposure transfer precisely by performing the exposure transfer of a substrate and loading the substrate to a substrate stage simultaneously, reducing cycle time, and excluding influence to exposure precision by vibration generated when loading the substrate. <P>SOLUTION: The aligner PE comprises: a mask stage 10 for holding a mask M, a main bed 19 positioned at the lower portion of the mask stage 10, a first sub bed 15 and a second sub bed 16 arranged at the side of the main bed 19, first and second substrate stages 11, 12 capable of moving between the main bed 19 and the first and second sub beds 15, 16, and an irradiator 13 for irradiating the substrate W with light for pattern exposure via the mask M. The first and second sub beds 21, 22 have pieces of active damping apparatus 53, 54, respectively, having a vibration detector 51 for detecting vibration, and a shaker 52 for oscillating vibration in an opposite phase to that detected by the vibration detector 51. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to an exposure apparatus, and more particularly to an exposure apparatus used when manufacturing a large flat panel display such as a semiconductor, a liquid crystal display panel, or a plasma display.

  As a conventional exposure apparatus, light (electron beam) for pattern exposure is irradiated through a mask in a state where a mask (reticle) and a substrate (wafer) are brought close to each other, thereby exposing and transferring the mask pattern onto the substrate. An apparatus is known (for example, refer to Patent Documents 1 and 2).

  The exposure apparatus described in Patent Document 1 corresponds to each of two frames on which a mask is arranged, two substrate stages on which a substrate is placed corresponding to each of the two frames, and two substrate stages. There is known a stage moving mechanism that includes two alignment mechanisms arranged in this manner, and in which the frame bodies and the substrate stage are combined and moved to an exposure position and exposed and transferred alternately. As a result, the stage moving mechanism simultaneously performs alignment and exposure on the two substrate stages to shorten the tact time.

In the exposure apparatus described in Patent Document 2, a vibration control actuator and a vibration control mass are arranged on the slider of the biaxial stage to reduce stage vibration, thereby shortening the stage settling time and positioning accuracy. We are trying to improve.
JP-A 63-87725 JP 2005-183876 A

  By the way, in the exposure apparatus described in Patent Document 1, the tact time is reduced by simultaneously performing exposure transfer of the substrate and loading and unloading of the substrate to and from the substrate stage by using two substrate stages. The vibration generated during loading / unloading is not taken into consideration, and this vibration may affect the exposure accuracy, and there is room for further improvement.

  In addition, the exposure apparatus described in Patent Document 2 reduces residual vibration in one substrate stage and shortens the settling time of the stage, but does not take into account vibration that occurs during loading and unloading of the substrate. There is no description about the use of two substrate stages.

  The present invention has been made in view of the above-described problems, and its purpose is to simultaneously perform exposure transfer of a substrate and loading of a substrate onto a substrate stage, thereby reducing tact time and occurring at the time of substrate loading. It is an object of the present invention to provide an exposure apparatus that can perform exposure transfer with high accuracy by eliminating the influence of vibrations on exposure accuracy.

The above object of the present invention can be achieved by the following constitution.
(1) a mask stage for holding a mask;
A main bed located below the mask stage;
A first sub-bed and a second sub-bed disposed on the side of the main bed;
A first substrate stage movable between the main bed and the first sub-bed;
A second substrate stage movable between the main bed and the second sub-bed;
An irradiation apparatus for irradiating the substrate held on the first and second substrate stages located on the main bed with light for pattern exposure through a mask;
An exposure apparatus comprising:
Each of the first and second sub-beds includes an active damping device having a vibration detector that detects vibration and a vibrator that oscillates vibration having a phase opposite to that of the vibration detected by the vibration detector. Exposure equipment to do.

(2) a mask stage for holding a mask;
A first substrate stage movable between an exposure position located below the mask stage and a first standby position;
A second substrate stage movable between an exposure position and a second standby position;
An irradiation device that irradiates the substrate held by the first and second substrate stages moved to the exposure position with light for pattern exposure through a mask;
A first substrate loader for loading and unloading a substrate with respect to a first substrate stage located at a first standby position;
A second substrate loader for loading and unloading the substrate with respect to the second substrate stage located at the second standby position;
An exposure apparatus comprising:
Each of the first and second substrate loaders includes an active damping device having a vibration detector that detects vibration and a vibrator that oscillates vibration having a phase opposite to that of the vibration detected by the vibration detector. An exposure apparatus.

(3) a mask stage for holding a mask;
A substrate stage movable between an exposure position below the mask stage and a standby position;
An irradiation device that irradiates the substrate held by the substrate stage moved to the exposure position with light for pattern exposure through a mask;
A substrate loader for loading and unloading the substrate with respect to the substrate stage located at the standby position;
An exposure apparatus comprising:
An exposure apparatus, wherein a mask stage, a substrate stage, and a substrate loader are supported by a base, and the base is disposed on a floor surface via a vibration isolation device.

  According to the exposure apparatus of the present invention, the first substrate stage movable between the main bed located below the mask stage and the first sub-bed arranged on the side thereof, and the main bed and the side thereof are arranged. By providing the second substrate stage movable between the second sub-beds, the exposure transfer of the substrate and the loading and unloading of the substrate to and from the first and second substrate stages are performed at the same time, and the tact time is shortened. And the first and second sub-beds each have an active vibration control device having a vibration detector that detects vibration and a vibration exciter that oscillates in a phase opposite to that detected by the vibration detector. Thus, it is possible to prevent the vibration generated on the first and second subbeds from being transferred to the main bed during exposure when the substrates are carried in and out of the first and second substrate stages. Thus, the influence of vibration on the exposure accuracy can be eliminated and the mask pattern of the mask can be exposed and transferred to the substrate with high accuracy.

  According to the exposure apparatus of the present invention, the first substrate stage movable between the exposure position located below the mask stage and the first standby position, and the second movable between the exposure position and the second standby position. The substrate stage, the exposure transfer of the substrate and the loading and unloading of the substrate to and from the first and second substrate stages can be performed simultaneously, and the tact time can be shortened. Since the substrate loader includes active vibration control devices each including a vibration detector that detects vibration and a vibration generator that oscillates vibration in the opposite phase to the vibration detected by the vibration detector, the first and second substrates are provided. It is possible to prevent vibration generated by the first and second substrate loaders when the substrate is carried in and out of the stage from being transmitted to the substrate stage during exposure. Thus, the influence of vibration on the exposure accuracy can be eliminated and the mask pattern of the mask can be exposed and transferred to the substrate with high accuracy.

  Hereinafter, embodiments of an exposure apparatus according to the present invention will be described in detail with reference to the drawings.

(First embodiment)
FIG. 1 is a plan view schematically showing the overall configuration of an exposure apparatus according to the first embodiment of the present invention, FIG. 2 is a front view of the main part of the exposure apparatus of FIG. 1, and FIG. 3 is a side view of first and second substrate loaders. It is.

  As shown in FIGS. 1 and 2, the exposure apparatus PE of the first embodiment includes a mask stage 10, a first stage 11, a second substrate stage 12, an irradiation device 13, a first substrate loader 14, and a second substrate loader 15. , And a mask loader 16, each mounted on a base 17. Further, on the base 17, a main bed 19 disposed below the mask stage 10, and first and second subbeds 21 disposed on the side of the main bed 19 so as to face each other with respect to the main bed 19. The first substrate stage 11 moves between the main bed 19 and the first sub-bed 21, and the second substrate stage 12 moves between the main bed 19 and the second sub-bed 22, respectively.

  The mask stage 10 is supported on the main bed by a plurality of columns 23 provided on the main bed 19. The plurality of support columns 23 form a space above the main bed 19 so that the first and second substrate stages 11 and 12 can move in the Y direction (left and right direction in FIG. 1) and advance below the mask stage 10. is doing.

  The mask stage 10 has a rectangular opening 25a in the center, and includes a mask holding portion 25 supported so that the position of the mask stage 10 can be adjusted in the X, Y, and θ directions, and has a pattern to be exposed. M is held by the mask holding portion 25 so as to face the opening 25a. The mask stage 10 includes a mask alignment camera (not shown) that detects the position of the mask M with respect to the mask holding unit 25 and a gap sensor (not shown) that detects a gap between the mask M and the substrate W. ) And are provided.

  As shown in FIG. 2, the first and second substrate stages 11 and 12 have substrate holding portions 31a and 31b for holding a substrate W as an exposed material on the upper surface, respectively. A substrate stage including a Y-axis table 33, a Y-axis feed mechanism 34, an X-axis table 35, an X-axis feed mechanism 36, and a Z-tilt adjustment mechanism 37 below the first and second substrate stages 11 and 12. Movement mechanisms 32 and 32 are provided, respectively.

  The Y-axis feed mechanism 34 includes a linear guide 38 and a feed drive mechanism 39, and a slider 40 attached to the back surface of the Y-axis table 33 is connected to the main bed 19 via a rolling element (not shown). The Y-axis table 33 is extended along the guide rail 41 by a linear motor having a stator 42 and a mover 43 while straddling the two guide rails 41 extending over the first and second side beds 21 and 22. Drive.

  The X-axis feed mechanism 36 has the same configuration as the Y-axis feed mechanism 34, and the Z-tilt adjustment mechanism 37 is constituted by a movable wedge mechanism that is a combination of a wedge-shaped moving body and a feed drive mechanism. . The feed drive mechanism may be a linear motor having a stator and a mover, or may be a combination of a motor and a ball screw device.

  Thereby, the substrate stage moving mechanisms 32 and 32 feed and drive the first and second substrate stages 11 and 12 in the X direction and the Y direction, respectively, and finely adjust the gap between the mask M and the substrate W. Then, the first and second substrate stages 11 and 12 are finely moved and tilted in the Z-axis direction.

  Further, on the first and second substrate stages 11 and 12, bar mirrors 61 and 62 are respectively attached to the X direction side portion and the Y direction side portion of each substrate holding portion 31a and 31b. In addition, three laser interferometers 63, 64, and 65 are provided on both ends in the Y-axis direction of the first subbed 21 and the second subbed 22 and on one side in the X-axis direction of the main bed 19. As a result, the laser light is irradiated from the laser interferometers 63, 64, 65 to the bar mirrors 61, 62, the laser light reflected by the bar mirror 62 is received, and the laser light and the laser light reflected by the bar mirrors 61, 62 are received. And the positions of the first and second stages 11 and 12 are detected.

  As shown in FIG. 2, the illumination device 13 is disposed above the opening 25a of the mask holding unit 25 and is a light source for ultraviolet irradiation, such as a high-pressure mercury lamp, a concave mirror, an optical integrator, a plane mirror, a spherical mirror, and for exposure control. It is configured with a shutter or the like. The illumination device 13 masks pattern exposure light on the exposure position EP, that is, the substrate W held on the substrate holding portions 31a and 31b of the first and second substrate stages 11 and 12 moved on the main bed 19. Irradiate through M. As a result, the mask pattern P of the mask M is exposed and transferred onto the substrate W.

  The first substrate loader 14 and the second substrate loader 15 include a substrate cassette (not shown), a first substrate stage 11 located on the first subbed 21, and a second substrate stage 12 located on the second subbed 22. The mask loader 17 carries in and out the mask M between a mask cassette (not shown) and the mask stage 10.

  As shown in FIG. 3, the first and second substrate loaders 14 and 15 have a plurality of transfer units 82 and 83 swingably disposed on a column 81 erected on a column support base 80 on the base 21. Loader robot. The plurality of transport units 82 and 83 are moved up and down along the column 81 by an elevating mechanism (not shown), and each is provided with a servo motor and driven independently from each other. Each transport unit 82, 83 has first and second arms 84, 85, and a substrate mounting table 87 in which a plurality of rod-like members 86 are implanted in parallel at the tip of the first arm 84. Then, by controlling and operating each servo motor, the substrate mounting table 87 is moved up, down, rotated, and moved, and the substrate W on the substrate mounting table 87 is transferred. The mask loader 17 has the same configuration as the first and second substrate loaders 14 and 15.

  Here, the first and second sub-beds 21 and 22 are active having a vibration detector 51 that detects vibration, and an exciter 52 that oscillates vibration having a phase opposite to that of the vibration detected by the vibration detector 51. Vibration control devices 53 and 54 are provided, respectively. The active vibration control devices 53 and 54 are provided near the main bed 19 in the first and second sub-beds 21 and 22, and a detection signal detected by the vibration detector 51 is sent to a control device (not shown). The exciter 52 oscillates vibration having a phase opposite to that of the detected vibration based on a command from the control device. Thereby, the vibration generated in the first and second sub-beds 21 and 22 is canceled by the vibration generated by the vibrator 52, and the vibration transmitted from the first and second sub-beds 21 and 22 to the main bed 19 is reduced. The

  The first and second substrate loaders 14 and 15 also have an active vibration detector 55 that detects vibrations, and an exciter 56 that oscillates vibrations in the opposite phase to the vibrations detected by the vibration detectors 55. Vibration control devices 57 and 58 are provided, respectively. The active vibration damping devices 57 and 58 are provided in a column support base 80 that supports the column 81 on the base 17, and a detection signal detected by the vibration detector 55 is sent to a control device (not shown) to be added. The vibrator 56 oscillates vibration having a phase opposite to that of the detected vibration based on a command from the control device. As a result, the vibration generated in the first and second substrate loaders 14 and 15 is canceled by the vibration generated by the vibrator 56, and the main bed 19 is transferred from the first and second substrate loaders 14 and 15 via the base 17. The vibration transmitted to is reduced.

  In the exposure apparatus PE of the present embodiment, the first substrate stage 11 is moved between the exposure position EP and the first standby position WP1 by the substrate stage moving mechanism 32 of the first and second substrate stages 11 and 12. The stage 12 is interlocked between the exposure position EP and the second standby position WP2. When the first substrate stage 11 is positioned at the exposure position EP (chain line position in FIG. 2) and the second substrate stage 12 is positioned at the second standby position WP2 (solid line position in FIG. 2), the first substrate stage 11 The mask pattern P of the mask M is exposed and transferred onto the held substrate W, and the second substrate stage 12 replaces the substrate W by the second substrate loader 15, that is, the substrate W after the exposure is carried out to the substrate cassette. Loading of the substrate W from the substrate cassette to the substrate holder 31b is performed simultaneously.

  Here, in the second substrate stage 12 during the replacement work, when vibration occurs in the second subbed 22, the vibration detector 51 of the active vibration damping device 54 detects the vibration generated in the second subbed 22 and detects it in the control device. Send a detection signal. Then, the vibrator 52 generates a vibration having a phase opposite to that of the vibration detected by the vibration detector 51 based on a command from the control device, and cancels the vibration of the second sub-bed 22. As a result, the vibration of the second sub-bed 22 is isolated, and the vibration generated in the second sub-bed 22 is not transmitted to the main bed 19 and affects the substrate W being exposed on the first substrate stage 11. There is nothing.

  Further, during the replacement work, when the second substrate loader 15 is driven to vibrate during the replacement work, the vibration detector 55 of the active vibration isolator 58 generates the vibration generated in the second substrate loader 15. Is detected and a detection signal is transmitted to the control device, and the vibrator 56 generates a vibration having a phase opposite to that of the vibration detected by the vibration detector 55 based on a command from the control device. To cancel the vibration. Thereby, the vibration of the second substrate loader 15 is isolated, and the vibration generated in the second substrate loader 15 is not transmitted to the main bed 19 via the base 21, and exposure is performed on the first substrate stage 11. The substrate W inside is not affected.

  Further, when the second substrate stage 12 is located at the exposure position EP (chain line position in FIG. 2) and the first substrate stage 11 is located at the first standby position WP1 (solid line position in FIG. 2), the second substrate stage 12 The mask pattern P of the mask M is exposed and transferred to the held substrate W, and in the first substrate stage 11, the substrate W is replaced by the first substrate loader 14, that is, the substrate W after exposure is carried out to the substrate cassette. The loading of the substrate W from the substrate cassette to the substrate holder 31a is performed simultaneously.

  Also in this case, in the first substrate stage 11 being replaced, the active vibration damping device 53 removes the vibration of the first subbed 21 as in the above-described active vibration damping device 54, and the first substrate loader Similarly to the above-described active vibration damping device 58, the active vibration damping device 57 disposed in 14 also removes vibrations generated by driving the first substrate loader 14. Thereby, vibration generated in the first subbed 21 and the first substrate loader 14 is not transmitted to the main bed 19, and the substrate W being exposed on the second substrate stage 12 is not affected.

  As described above, according to the exposure apparatus PE of the present embodiment, the main bed 19 (exposure position EP) located below the mask stage 10 and the first sub-bed 21 (first standby position WP1) arranged on the side thereof. ), A second substrate stage 12 movable between a main bed 19 (exposure position) and a second sub-bed 22 (second standby position WP2) disposed on the side thereof. , The exposure transfer of the substrate W and the loading and unloading of the substrate W to and from the first and second substrate stages 11 and 12 can be performed simultaneously, and the tact time can be shortened.

  The first and second sub-beds 21 and 22 also have an active vibration suppression device including a vibration detector 51 that detects vibrations, and an exciter 52 that oscillates in a phase opposite to that detected by the vibration detector 51. Since the apparatuses 53 and 54 are provided, vibrations generated on the first and second sub-beds 21 and 22 when the substrate W is carried into and out of the first and second substrate stages 11 and 12 are transmitted to the main bed 19 during exposure. Can be prevented. Thus, the influence of vibration on the exposure accuracy can be eliminated and the mask pattern P of the mask M can be exposed and transferred onto the substrate W with high accuracy.

  Further, the first and second substrate loaders 14 and 15 also have an active control having a vibration detector 55 that detects vibration and a vibrator 56 that oscillates vibration having a phase opposite to that detected by the vibration detector 55. Since the vibration devices 57 and 58 are provided, vibrations generated in the first and second substrate loaders 14 and 15 when the substrate W is carried in and out of the first and second substrate stages 11 and 12 are exposed through the main bed 19. Transmission to the first and second substrate stages 11 and 12 at the time can be prevented. Thus, the influence of vibration on the exposure accuracy can be eliminated and the mask pattern P of the mask M can be exposed and transferred onto the substrate W with high accuracy.

(Second Embodiment)
Next, an exposure apparatus according to the second embodiment of the present invention will be described in detail with reference to FIGS. The second embodiment is characterized in that a vibration isolator 90 is disposed between the base 17 and the floor surface FL. For this reason, the same parts as those in the first embodiment are denoted by the same reference numerals, and description thereof is omitted or simplified. Further, although the active vibration damping devices 53, 54, 57, and 58 of the first embodiment are not shown, they can be applied in combination with this embodiment.

  As shown in FIG. 5, the base 17 is formed by a concrete surface plate, and supports the components of the above-described exposure apparatus PE including a substrate cassette and a mask cassette (not shown).

  As shown in FIGS. 4 and 5, a plurality of air spring systems, which are vibration isolation devices 90, are arranged between the base 17 and the floor surface FL. It is arranged at substantially the same height as the slab floor 91 located further upward.

  The air spring system is a spring that utilizes the elasticity of air by enclosing compressed air in a rubber film, and a bellows type, a diaphragm type, a rolling seal type, and the like are known. The air spring has a flexible structure and can insulate vibrations not only in the axial direction but also in the lateral and rotational directions.

Therefore, according to the present embodiment, since the vibration isolator 90 is disposed between the base 17 that supports the components of the exposure apparatus PE and the floor surface FL, the base made up of the exposure apparatus PE and the concrete bottom board. The platform 17 can be lifted from the floor surface FL, and various vibrations generated from the periphery can be isolated. For example, when the substrate W is carried into and out of the first and second substrate stages 11 and 12, Prevents vibrations generated by various components such as the second subbeds 21 and 22 and the first and second substrate loaders 14 and 15 from being transmitted from the floor surface FL to the first and second substrate stages 11 and 12 during exposure. can do. Thus, the influence of vibration on the exposure accuracy can be eliminated and the mask pattern P of the mask M can be exposed and transferred onto the substrate W with high accuracy.
Other configurations and operations are the same as those in the first embodiment. Further, the vibration isolator 90 according to the present embodiment includes an exposure apparatus that includes two substrate stages and can perform exposure work and replacement work at the same time, as well as an exposure apparatus that alternately performs exposure work and replacement work on a single substrate stage. It is also applicable to.

In addition, this invention is not limited to embodiment mentioned above, A deformation | transformation, improvement, etc. are possible suitably.
In the first embodiment, the vibration detectors 51 of the active vibration control devices 53 and 54 are disposed adjacent to the vibration exciter 52, but are disposed at arbitrary positions of the first and second sub-beds 21 and 22. It does not have to be built-in. Moreover, the vibrator 52 should just be arrange | positioned in the position which can vibrate efficiently inside the 1st and 2nd subbeds 21 and 22. FIG.

  Furthermore, the vibration detector 55 of the active vibration damping devices 57 and 58 may be disposed at any position of the first and second substrate loaders 14 and 15 and may not be a built-in type. The vibrator 56 may also be disposed in the first and second substrate loaders 14 and 15 at a position where vibration can be efficiently performed.

1 is a plan view schematically showing the overall configuration of an exposure apparatus that is a first embodiment of the present invention. It is a principal part front view of the exposure apparatus of FIG. It is a side view of the 1st and 2nd substrate loader. It is a top view which shows schematically the whole structure of the exposure apparatus which is 2nd Embodiment of this invention. It is a front view of the exposure apparatus of FIG.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Mask stage 11 1st board | substrate stage 12 2nd board | substrate stage 13 Irradiation device 19 Main bed 21 1st subbed 22 2nd subbed 51,55 Vibration detector 52,56 Vibrator 53,54,57,58 Active damping device 90 Vibration isolation device M Mask PE Exposure device W Substrate

Claims (2)

A mask stage for holding the mask;
A main bed located below the mask stage;
A first subbed and a second subbed disposed on a side of the main bed;
A first substrate stage movable between the main bed and the first sub-bed;
A second substrate stage movable between the main bed and the second sub-bed;
An irradiation device for irradiating the substrate held on the first and second substrate stages located on the main bed with light for pattern exposure through the mask;
An exposure apparatus comprising:
Each of the first and second sub-beds includes an active vibration suppression device having a vibration detector that detects vibration and a vibration generator that oscillates vibration having a phase opposite to that of the vibration detected by the vibration detector. A featured exposure apparatus. A mask stage for holding the mask;
A first substrate stage movable between an exposure position below the mask stage and a first standby position;
A second substrate stage movable between the exposure position and a second standby position;
An irradiation device that irradiates the substrate held by the first and second substrate stages moved to the exposure position with light for pattern exposure through the mask;
A first substrate loader for loading and unloading the substrate with respect to the first substrate stage located at the first standby position;
A second substrate loader for loading and unloading the substrate with respect to the second substrate stage located at the second standby position;
An exposure apparatus comprising:
Each of the first and second substrate loaders includes an active vibration suppression device having a vibration detector that detects vibration and a vibrator that oscillates vibration having a phase opposite to that of the vibration detected by the vibration detector. An exposure apparatus characterized by the above.

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