JP2007308775A5 - - Google Patents
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- Publication number
- JP2007308775A5 JP2007308775A5 JP2006140138A JP2006140138A JP2007308775A5 JP 2007308775 A5 JP2007308775 A5 JP 2007308775A5 JP 2006140138 A JP2006140138 A JP 2006140138A JP 2006140138 A JP2006140138 A JP 2006140138A JP 2007308775 A5 JP2007308775 A5 JP 2007308775A5
- Authority
- JP
- Japan
- Prior art keywords
- deposited film
- exhaust
- reaction vessel
- substrate
- film forming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 12
- 239000002994 raw material Substances 0.000 claims 3
- 238000000034 method Methods 0.000 claims 2
- 101100116570 Caenorhabditis elegans cup-2 gene Proteins 0.000 claims 1
- 101100116572 Drosophila melanogaster Der-1 gene Proteins 0.000 claims 1
- 238000007599 discharging Methods 0.000 claims 1
- 238000009832 plasma treatment Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006140138A JP4827608B2 (ja) | 2006-05-19 | 2006-05-19 | 堆積膜形成装置、堆積膜形成方法および電子写真感光体の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006140138A JP4827608B2 (ja) | 2006-05-19 | 2006-05-19 | 堆積膜形成装置、堆積膜形成方法および電子写真感光体の製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2007308775A JP2007308775A (ja) | 2007-11-29 |
| JP2007308775A5 true JP2007308775A5 (https=) | 2009-06-25 |
| JP4827608B2 JP4827608B2 (ja) | 2011-11-30 |
Family
ID=38841908
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2006140138A Expired - Fee Related JP4827608B2 (ja) | 2006-05-19 | 2006-05-19 | 堆積膜形成装置、堆積膜形成方法および電子写真感光体の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4827608B2 (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5555077B2 (ja) * | 2010-07-05 | 2014-07-23 | キヤノン株式会社 | 処理容器の設置方法 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59170259A (ja) * | 1983-03-17 | 1984-09-26 | Minolta Camera Co Ltd | 容量結合型グロ−放電分解装置 |
| JPH0334061A (ja) * | 1989-06-30 | 1991-02-14 | Mitsubishi Electric Corp | 文書編集方式 |
| JPH09330884A (ja) * | 1996-06-07 | 1997-12-22 | Sony Corp | エピタキシャル成長装置 |
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2006
- 2006-05-19 JP JP2006140138A patent/JP4827608B2/ja not_active Expired - Fee Related