JP2007269906A5 - - Google Patents

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Publication number
JP2007269906A5
JP2007269906A5 JP2006095297A JP2006095297A JP2007269906A5 JP 2007269906 A5 JP2007269906 A5 JP 2007269906A5 JP 2006095297 A JP2006095297 A JP 2006095297A JP 2006095297 A JP2006095297 A JP 2006095297A JP 2007269906 A5 JP2007269906 A5 JP 2007269906A5
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JP
Japan
Prior art keywords
polymer
granular polymer
range
structural unit
granular
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2006095297A
Other languages
English (en)
Japanese (ja)
Other versions
JP2007269906A (ja
JP5285214B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2006095297A priority Critical patent/JP5285214B2/ja
Priority claimed from JP2006095297A external-priority patent/JP5285214B2/ja
Publication of JP2007269906A publication Critical patent/JP2007269906A/ja
Publication of JP2007269906A5 publication Critical patent/JP2007269906A5/ja
Application granted granted Critical
Publication of JP5285214B2 publication Critical patent/JP5285214B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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JP2006095297A 2006-03-30 2006-03-30 粒状架橋重合体 Expired - Lifetime JP5285214B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2006095297A JP5285214B2 (ja) 2006-03-30 2006-03-30 粒状架橋重合体

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006095297A JP5285214B2 (ja) 2006-03-30 2006-03-30 粒状架橋重合体

Publications (3)

Publication Number Publication Date
JP2007269906A JP2007269906A (ja) 2007-10-18
JP2007269906A5 true JP2007269906A5 (cg-RX-API-DMAC10.html) 2009-04-16
JP5285214B2 JP5285214B2 (ja) 2013-09-11

Family

ID=38673036

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006095297A Expired - Lifetime JP5285214B2 (ja) 2006-03-30 2006-03-30 粒状架橋重合体

Country Status (1)

Country Link
JP (1) JP5285214B2 (cg-RX-API-DMAC10.html)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5138234B2 (ja) * 2006-03-30 2013-02-06 東京応化工業株式会社 半導体リソグラフィー用樹脂の製造方法
JP5512091B2 (ja) * 2008-03-13 2014-06-04 ＡｚエレクトロニックマテリアルズＩｐ株式会社 高精細印刷用インキ組成物およびそれを用いた高精細パターンの形成方法
JP6088813B2 (ja) * 2012-12-14 2017-03-01 東京応化工業株式会社 粗樹脂の精製方法、レジスト用樹脂の製造方法、レジスト組成物の製造方法及びレジストパターン形成方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3970562B2 (ja) * 2001-07-10 2007-09-05 ダイセル化学工業株式会社 粒子状フォトレジスト用高分子化合物とその製造法
JP4804730B2 (ja) * 2004-07-26 2011-11-02 ダイセル化学工業株式会社 ２−オキサトリシクロ［４．２．１．０４，８］ノナン−３−オン環を有する繰り返し単位を含む高分子化合物、及びフォトレジスト用樹脂組成物
JP5138234B2 (ja) * 2006-03-30 2013-02-06 東京応化工業株式会社 半導体リソグラフィー用樹脂の製造方法
JP2007269898A (ja) * 2006-03-30 2007-10-18 Tokyo Ohka Kogyo Co Ltd 樹脂の精製方法

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