JP2007269009A5 - - Google Patents
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- Publication number
- JP2007269009A5 JP2007269009A5 JP2007020905A JP2007020905A JP2007269009A5 JP 2007269009 A5 JP2007269009 A5 JP 2007269009A5 JP 2007020905 A JP2007020905 A JP 2007020905A JP 2007020905 A JP2007020905 A JP 2007020905A JP 2007269009 A5 JP2007269009 A5 JP 2007269009A5
- Authority
- JP
- Japan
- Prior art keywords
- liquid discharge
- layer
- wiring layer
- discharge head
- liquid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- 239000007788 liquid Substances 0.000 claims 27
- 239000010410 layer Substances 0.000 claims 24
- 238000004519 manufacturing process Methods 0.000 claims 9
- 239000011347 resin Substances 0.000 claims 5
- 229920005989 resin Polymers 0.000 claims 5
- 238000007599 discharging Methods 0.000 claims 4
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims 4
- 239000010931 gold Substances 0.000 claims 4
- 229910052737 gold Inorganic materials 0.000 claims 4
- 239000011241 protective layer Substances 0.000 claims 4
- 229910052751 metal Inorganic materials 0.000 claims 3
- 239000002184 metal Substances 0.000 claims 3
- 239000000758 substrate Substances 0.000 claims 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims 2
- 229910000838 Al alloy Inorganic materials 0.000 claims 1
- 239000000853 adhesive Substances 0.000 claims 1
- 230000001070 adhesive Effects 0.000 claims 1
- 229910052782 aluminium Inorganic materials 0.000 claims 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminum Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 1
- 238000006073 displacement reaction Methods 0.000 claims 1
- 238000007772 electroless plating Methods 0.000 claims 1
- 229910052759 nickel Inorganic materials 0.000 claims 1
- ABLZXFCXXLZCGV-UHFFFAOYSA-N phosphorous acid Chemical compound OP(O)=O ABLZXFCXXLZCGV-UHFFFAOYSA-N 0.000 claims 1
- 238000007650 screen-printing Methods 0.000 claims 1
- 238000006467 substitution reaction Methods 0.000 claims 1
- 229920001169 thermoplastic Polymers 0.000 claims 1
- 239000004416 thermosoftening plastic Substances 0.000 claims 1
Claims (9)
前記第一の電極パッドの一部となる第一の配線層と、前記第二の電極パッドである第二の配線層とが形成された基板を用意する第1工程と、
前記第二の配線層の上に、前記第二の配線層を被覆する保護層を設ける第2工程と、
前記第一の配線層の表面に無電解めっき法により金属膜を形成して前記第一の電極パッドとする第3工程と、
前記第3工程の後に、前記保護層を除去する第4工程と、
前記第4工程の後に、前記第二の配線層の上に、前記第二の配線層を被覆する樹脂からなる層を設ける第5工程と、
を有する液体吐出ヘッドの製造方法。 Driving the liquid discharge energy generating element for generating energy used for discharging liquid, and a liquid discharge port for discharging liquid, a liquid flow path communicating with the liquid discharge port, the liquid discharge energy generating elements and an electric circuit for, there in the first electrode pad, manufacturing method of a liquid discharge head that having a second electrode pad, for testing the electric circuit for exchanging with the outside electric signal And
A first step of preparing a substrate on which a first wiring layer that is a part of the first electrode pad and a second wiring layer that is the second electrode pad are formed ;
On the second wiring layer, and a second step of forming a protective layer covering the front Stories second wiring layer,
A third step of forming a metal film on the surface of the first wiring layer by electroless plating to form the first electrode pad ;
A fourth step of removing the protective layer after the third step ;
A fifth step of providing a layer made of a resin covering the second wiring layer on the second wiring layer after the fourth step;
A method of manufacturing a liquid discharge head having
第一の配線層、無電解ニッケル・リン層、無電解置換金層および無電解還元金層をこの順に設けて形成される、外部と電気信号を授受するための第一の電極パッドと、
第二の配線層で形成される、前記電気回路をテストするための第二の電極パッドと、
前記第二の配線層の上に樹脂からなる密着層を介して形成される、前記液体流路を形成するための流路壁形成部材と、
を含む液体吐出ヘッド。 Driving the liquid discharge energy generating element for generating energy used for discharging liquid, and a liquid discharge port for discharging liquid, a liquid flow path communicating with the liquid discharge port, the liquid discharge energy generating elements and an electric circuit for, a liquid discharge head have a,
A first electrode pad for exchanging electrical signals with the outside, formed by providing a first wiring layer , an electroless nickel / phosphorous layer, an electroless displacement gold layer and an electroless reduced gold layer in this order ;
A second electrode pad for testing the electrical circuit formed of a second wiring layer ;
A flow path wall forming member for forming the liquid flow path, which is formed on the second wiring layer via an adhesive layer made of a resin ;
Including a liquid discharge head.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007020905A JP4822353B2 (en) | 2006-03-09 | 2007-01-31 | Liquid discharge head and manufacturing method thereof |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006064167 | 2006-03-09 | ||
JP2006064167 | 2006-03-09 | ||
JP2007020905A JP4822353B2 (en) | 2006-03-09 | 2007-01-31 | Liquid discharge head and manufacturing method thereof |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2007269009A JP2007269009A (en) | 2007-10-18 |
JP2007269009A5 true JP2007269009A5 (en) | 2010-03-18 |
JP4822353B2 JP4822353B2 (en) | 2011-11-24 |
Family
ID=38672267
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007020905A Expired - Fee Related JP4822353B2 (en) | 2006-03-09 | 2007-01-31 | Liquid discharge head and manufacturing method thereof |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP4822353B2 (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5202373B2 (en) * | 2008-06-16 | 2013-06-05 | キヤノン株式会社 | Inkjet recording head substrate, inkjet recording head substrate manufacturing method, inkjet recording head, and inkjet recording apparatus |
US8291576B2 (en) * | 2008-06-18 | 2012-10-23 | Canon Kabushiki Kaisha | Method of manufacturing liquid ejection head |
JP6066612B2 (en) * | 2012-08-06 | 2017-01-25 | キヤノン株式会社 | Liquid discharge head and manufacturing method thereof |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4168558B2 (en) * | 1999-11-29 | 2008-10-22 | カシオ計算機株式会社 | Integrated circuit board |
JP3772886B2 (en) * | 2003-12-22 | 2006-05-10 | ブラザー工業株式会社 | Printed circuit board and inkjet head |
-
2007
- 2007-01-31 JP JP2007020905A patent/JP4822353B2/en not_active Expired - Fee Related
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