JP2007268679A - Correction implement for polishing pad for double-sided polishing device and double-sided polishing device equipped therewith - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a technical means for correcting the polishing pad capable of simultaneously and simply correcting the polishing pad of upper and lower surface plates of a double-sided polishing device. <P>SOLUTION: The double-sided polishing device 1 is equipped with the upper surface plate 4 and the lower surface plate 5 for polishing a workpiece held by a carrier 8 by clamping it from both sides, and a sun gear and an internal gear 7 for driving the carrier 8. A rod-shape implement body 21 of a correction implement 2A is radially interposed between the upper and the lower surface plates 4, 5, an upper side correction surface 2a and a lower side correction surface 2b formed on the implement body 21 are simultaneously abutted to pad surfaces 18a, 19a of the upper and lower surface plates 4, 5, and the pad surfaces 18a, 19a of the both surface plates 4, 5 are simultaneously corrected with the upper side correction surface 2a and the lower side correction surface 2b by rotating the upper and lower surface plates 4, 5 in the reverse direction to each other in such a state that a load is applied by the upper surface plate 4. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention provides a double-side polishing apparatus for polishing both surfaces of a thin plate-like workpiece such as a semiconductor wafer, a glass wafer, or a ceramic wafer by upper and lower surface plates to which a polishing pad is attached. More particularly, the present invention relates to a technique for simultaneously correcting the pad surfaces of both surface plates.

  As polishing apparatuses for polishing the surface of a thin plate-like workpiece such as a semiconductor wafer, a glass wafer or a ceramic wafer, there are generally known a double-side polishing apparatus for polishing both surfaces of a workpiece and a single-side polishing apparatus for polishing one side of a workpiece. Yes. Among these, a double-side polishing apparatus, particularly a polishing double-side polishing apparatus, as shown in FIG. 15, has an annular upper surface plate 101 and lower surface plate 102 that are concentrically positioned, and a sun gear 104 that planetarily moves the work carrier 103. And the internal gear 105, while rotating the two surface plates 101, 102 around the central axis L, usually in opposite directions to each other, the work W held on the work carrier 103 is transferred to these surface plates 101. , 102 is sandwiched from both sides, and the surface of the workpiece W is polished and flattened by polishing pads 106, 107 attached to both surface plates.

  As described above, since the general double-side polishing apparatus aims to flatten the surface of the workpiece by polishing, the pad surfaces 106a and 107a of the polishing pads 106 and 107 attached to the upper and lower surface plates are always flat. It is managed to be. That is, when it is detected that the flatness of the polished workpiece surface has decreased to a certain limit, a spur gear-shaped correction carrier (dresser) is used as described in, for example, Patent Document 1, With this correction carrier, the pad surfaces of the upper and lower surface plates are corrected and flattened.

  However, recently, even when the surface of the workpiece is finished flat by polishing, the pad surfaces of the upper and lower surface plates do not necessarily have to be flat, and depending on the polishing conditions of the workpiece, for example, as shown in FIG. The pad surfaces 106a and 107a are formed into curved surfaces that are concave or convex along the radius thereof, and the convex and concave curved surfaces that match each other between the upper and lower surface plates 101 and 102 are preferred. I know it can be good.

Further, depending on the type of workpiece, for example, as shown in FIGS. 17 (a) and 17 (b), the surface of the workpiece W may have to be actively polished into a concave or convex curved surface. In such a case, as shown in FIGS. 18 (a) and 18 (b), the pad surfaces 106a and 107a of the surface plates 101 and 102 are not made flat, but along the radius of the polishing pads 106 and 107. For example, it is necessary to form a curved surface suitable for the surface shape of the workpiece, such as a curved surface curved in a convex or concave shape.
In addition, although the uneven | corrugated shape of the pad surface in each said figure is drawn exaggerated for easy understanding, the actual degree of curvature is a magnitude | size of a micrometer unit.

  However, in the conventional method using the correction carrier, the correction carrier is interposed between the pad surfaces of the upper and lower surface plates, and the planetary motion similar to the work carrier, that is, along the annular pad surface while rotating. The pad surface is modified to a flat surface, or a concave or convex conical surface is formed in the entire diameter direction of the surface plates 101 and 102 as shown in FIGS. 19 (a) and 19 (b). However, as described above, it cannot be modified into a convex or concave curved surface along the radius. Moreover, such a correction carrier is usually very heavy, so there is a danger associated with handling it.

  In order to solve such a problem, in Patent Document 2, a shape control mechanism is provided on the upper and lower surface plates, and the shape of the annular pad surface is changed by changing the diameter of the bottom side of the surface plate. Techniques have been proposed for deforming into a concave shape, a convex shape, or a flat surface in the radial direction. If this technique is used, the pad surface of the surface plate can be reliably controlled to an arbitrary shape according to the polishing conditions, but the structure is somewhat complicated.

  On the other hand, Patent Documents 3, 4, 5, and 6 disclose a technique for correcting a pad surface using a roller-shaped dresser. In these technologies, a cylindrical or conical dresser is arranged in the radial direction or diameter direction of the surface plate, pressed against the pad surface, and rotated to correct the pad surface that has been worn or deformed by polishing. Flattening.

  However, these techniques are for correcting the pad surface of one surface plate in the single-side polishing apparatus, and are specific to the single-side polishing apparatus and cannot be directly applied to the double-side polishing apparatus. In particular, as the dresser, a conical dresser having a different diameter on the one end side in the axial direction and a diameter on the other end side is used, or a cylindrical dresser longer than the diameter (or width) of the surface plate is used. Since the entire pad surface is corrected by rolling and rolling, even if those techniques can be used as they are for correcting the pad surface of the upper and lower surface plates in the double-side polishing machine, The pad surfaces of both surface plates must be modified separately, or in some cases, both surface plates must be removed from the device. It cannot be corrected. In addition, the pad surface of both surface plates cannot be modified to a curved surface that curves convexly or concavely along the radius of the surface plate.

JP-A-6-226628 JP 2004-314192 A Japanese Patent Laid-Open No. 9-225812 JP-A-11-300599 JP 2000-15564 A JP 2001-30169 A

  SUMMARY OF THE INVENTION An object of the present invention is to provide a new and effective technical means for correcting a polishing pad that can simultaneously and easily correct polishing pads on upper and lower surface plates in a double-side polishing apparatus.

  In order to solve the above problems, according to the present invention, there is provided a correction jig for correcting polishing pads attached to upper and lower surface plates in a double-side polishing apparatus. The correction jig includes a jig body having an axial length shorter than the radius of the polishing pad but equal to or greater than the width of the pad surface, and a support shaft extending in the axial direction from both ends of the jig body. The jig body is formed with an upper correction surface and a lower correction surface that simultaneously contact the pad surfaces of the upper and lower surface plates to correct these pad surfaces, and both ends of the support shaft. In order to attach the jig body between the upper and lower surface plates in the radial direction of the surface plate in a locked state at a position on the inner peripheral side of the surface plate and a position on the outer peripheral side of the polishing apparatus. A mounting portion is formed.

  Moreover, according to this invention, the double-side polish apparatus provided with the correction jig is provided. This double-side polishing apparatus is attached to an annular upper surface plate and lower surface plate for sandwiching a work held by a carrier from both sides, a sun gear and an internal gear for driving the carrier, and both upper and lower surface plates. And a correction jig for correcting the attached annular polishing pad. The correction jig includes a jig body having an axial length shorter than the radius of the polishing pad but equal to or greater than the width of the pad surface, and a support shaft extending in the axial direction from both ends of the jig body. The jig body is formed with an upper correction surface and a lower correction surface for simultaneously contacting the pad surfaces of the upper and lower surface plates and correcting these pad surfaces. Then, one end of the support shaft is supported by the support mechanism so as to be able to swivel and move up and down by a support mechanism, and the correction jig is interposed between the upper and lower surface plates in the radial direction of the surface plate. It can be displaced between a correction position for correcting the pad surface and a storage position away from these surface plates.

  The upper correction surface and the lower correction surface in the jig main body of the correction jig seem to be symmetrical with respect to the shape of the surface on the one half side in the longitudinal direction and the surface shape on the other half side of the jig main body. Is formed. Each of the upper correction surface and the lower correction surface may be a surface that extends straight in the length direction of the jig body, or a curved surface that is curved to form a concave shape or a convex shape.

  In one specific configuration of the present invention, the jig body has a circular cross section, and part of the circumference is the upper correction surface and the lower correction surface.

  In another specific configuration of the present invention, the jig body has a non-circular cross section and has a pair of outer surfaces facing in opposite directions, and the outer correction surface and the lower correction surface are formed by these outer surfaces. A side correction surface is formed.

  The correction jig of the present invention is configured so that the attachment portions at both ends of the support shaft can be freely engaged with and disengaged from the teeth of the sun gear and the internal gear so that the correction jig can be easily attached to the polishing apparatus. It is desirable to keep it.

According to the present invention, the jig body of the correction jig is interposed between the upper and lower surface plates in the radial direction of the surface plate, and the upper correction surface and the lower correction surface of the jig body are respectively provided on the upper and lower surface plates. The polishing pads on both the upper and lower surface plates can be simultaneously and easily corrected simply by rotating the two surface plates in opposite directions while abutting against the pad surface and applying a load by the upper surface plate.
In addition, by using a jig whose upper and lower correction surfaces form a concave or convex curved surface as the correction jig, the pad surface shape can be changed to the width of the pad surface in accordance with the correction surface shape. It can be modified to form a concave or convex curved surface.

FIGS. 1 to 9 show an embodiment of a polishing pad correction jig 2 </ b> A used by being attached to the double-side polishing apparatus 1.
The double-side polishing apparatus 1 is for polishing both front and back surfaces of a thin plate-like workpiece such as a semiconductor wafer, a glass wafer or a ceramic wafer used for a photomask, and the like. The configuration itself is substantially the same as the known one. That is, as can be seen from FIGS. 1 to 3, the double-side polishing apparatus 1 is located at the center of the annular upper and lower surface plates 4 and 5 and the lower surface plate 5 that are concentrically positioned about the axis L <b> 1. A sun gear 6 and an internal gear 7 positioned so as to surround the outer periphery of the lower surface plate 5, and the surface plates 4, 5 and at least the sun gear 6 of the both gears 6, 7 are respectively It is connected to a motor (not shown) via drive shafts 10, 11, 12, and 13 and is individually driven to rotate at a required speed in a required direction.

  The upper surface plate 4 is attached to a rod 16 of an elevating cylinder via a surface plate receiver 14 and a surface plate suspension 15, and can be moved up and down by the elevating cylinder. When 4 is lowered, the hook 14a attached to the surface plate receiver 14 engages with the driver 10a at the upper end of the drive shaft 10, and is driven to rotate through the driver 10a.

  Circular polishing pads 18 and 19 are attached to the pad attachment surfaces of the upper surface plate 4 and the lower surface plate 5 via a double-sided adhesive sheet. As the polishing pads 18 and 19, for example, those made of hard urethane or hard nonwoven fabric can be used.

  Further, the sun gear 6 and the internal gear 7 are arranged such that a large number of pins 6a and 7a constituting teeth are arranged vertically and annularly at a constant pitch on the outer periphery or inner periphery thereof. It is what has.

  When the workpiece W is polished by the double-side polishing apparatus 1, a plurality of carriers 8 having teeth 8a on the outer periphery are represented by the lower half as shown in the left half of FIG. 1 and FIG. It is arranged on the board 5 at substantially equal intervals in the circumferential direction and meshed with both the gears 6 and 7. Then, the plate-like workpiece W is fitted and held in the workpiece holding hole 8b of each carrier 8, and the sun gear 6 is rotated or both the sun gear 6 and the internal gear 7 are rotated, thereby While rotating and revolving the carrier 8 around the sun gear 6, the polishing liquid is supplied between the upper and lower surface plates 4 and 5, and the annular pad surfaces 18a of the rotating polishing pads 18 and 19 of these surface plates are rotated. In 19a, the front and back surfaces of the workpiece W are polished.

  As shown in the polishing process shown in FIG. 10, the surface shape of the polished workpiece W is measured for each piece or for every fixed number of pieces, and if the surface shape is appropriate (OK), the next workpiece is polished as it is. If the surface shape is inappropriate (NG), it is determined that the pad surfaces 18a and 19a of the upper and lower surface plates 4 and 5 are worn or deformed. Then, the correction jig 2A is attached to the polishing apparatus 1, the pad surfaces 18a and 19a are corrected, and then the workpiece polishing is resumed.

  The correction jig 2 </ b> A is configured to be detachable from the planar polishing apparatus 1. As can be seen from FIGS. 1 to 4, the correction jig 2 </ b> A includes a rod-shaped jig main body 21 elongated in the direction of the axis L <b> 2 formed of a hard material such as metal or ceramics, and the jig main body 21 from both ends. The support shaft 22 extends along the axis L2, and mounting portions 23 and 24 provided at both ends of the support shaft 22. When the pad surfaces 18a and 19a are corrected, the mounting portions 23 and 24 are By attaching to the mounting receiving portions 25 and 26 formed on the inner and outer peripheral sides of the lower surface plate 5 in the polishing apparatus 1, the axis L <b> 2 can be mounted horizontally in the radial direction of the surface plates 4 and 5. The jig main body 21 is rotatably supported by the support shaft 22, and is rotated following the rotation of the upper and lower surface plates 4 and 5 when the pad surfaces 18a and 19a are corrected.

  The length of the jig body 21 is shorter than the radius R of the polishing pads 18 and 19 (and hence the surface plate), but is equal to or longer than the width H of the pad surfaces 18a and 19a. . Accordingly, when the correction jig 2A is attached in the radial direction of the surface plates 4 and 5, the jig body 21 comes into contact with the pad surfaces 18a and 19a over the entire width. The jig body 21 has a circular cross-sectional shape. However, the diameter of the cross section is not constant over the entire length of the jig body 21, and the diameter is the largest in the middle part in the longitudinal direction, like a spindle, and the diameter gradually decreases toward both ends, and the diameters at both ends. Are almost equal. In other words, the shape of the outer peripheral surface of the jig body 21 is a smooth curved surface in which the middle portion in the direction of the axis L2 (length direction) bulges to the most convex shape, and is a surface on the half direction side in the length direction. The shape and the surface shape on the other half side are symmetrical to each other.

  The jig body 21 has an upper correction surface 2a and a lower correction surface 2b that contact the pad surfaces 18a and 19a of the upper and lower surface plates 4 and 5 to correct the pad surfaces 18a and 19a. These correction surfaces 2a and 2b are formed by portions of the outer peripheral surface of the jig main body 21 that are in contact with the pad surfaces 18a and 19a, and accordingly, the jig main body 21 rotates on the outer peripheral surface. The position of the correction surface changes. Further, these correction surfaces 2a and 2b are smooth convex curved surfaces that bulge outwardly at the intermediate portion in the length direction of the jig main body 21, and have a surface shape on one half side in the length direction. The surface shape on the other half side is symmetrical to each other.

  The attachment portions 23 and 24 at both ends of the support shaft 22 are configured to be freely engageable with and disengageable from the teeth of the sun gear 6 and the internal gear 7. That is, these mounting portions 23 and 24 have a configuration in which one or more locking holes 23b and 24b are provided on the lower surface of the block-shaped members 23a and 24a. The sun gear 6 and the internal gear 7 are configured to be engaged with one or a plurality of pins 6a, 7a. Therefore, the attachment receiving portions 25 and 26 on the polishing apparatus 1 side are formed by the pins 6a and 7a constituting the teeth of the sun gear 6 and the internal gear 7.

  The operation of correcting the pad surfaces 18a, 19a of the upper and lower surface plates 4, 5 using the correction jig 2A is as follows. That is, first, as shown in FIGS. 1 and 3, the upper surface plate 4 is raised to a position that does not interfere with work, and a plurality of correction jigs 2 </ b> A are attached to the polishing apparatus 1. The fixing jig 2A is directed on the lower surface plate 5 in the radius R direction of the lower surface plate 5, and the locking holes 23b, 24b formed in the attachment portions 23, 24 on both ends are connected to the sun gear 6 and the internal surface. This is done by engaging the pins 6a and 7a of the gear 7.

The number of correction jigs 2 </ b> A used at this time may be two, but is preferably three or more, and three or more correction jigs 2 </ b> A are arranged at a center angle equal to the center axis L of the lower surface plate 5. It is desirable to arrange them radially. However, there is no particular problem even if the central angles are slightly different.
Accordingly, in the correction jig 2A, the jig main body 21 traverses the annular pad surface 19a of the polishing pad 19 in the radial direction, and the lower correction surface 2b abuts the pad surface 19a over the entire width H. become.

  Next, as shown in FIG. 5, the upper surface plate 4 in the raised position is lowered to a position where the lower pad surface 18a contacts the upper correction surface 2a of the correction jig 2A. Thus, the jig body 21 is sandwiched between the upper surface plate 4 and a necessary load (pressing force) is applied. As a result, the upper correction surface 2 a of the jig body 21 is in pressure contact with the pad surface 18 a of the upper surface plate 4, and the lower correction surface 2 b is in pressure contact with the pad surface 19 a of the lower surface plate 5.

  Then, when the sun gear 6 and the internal gear 7 are fixed in a non-rotating state and only the upper and lower surface plates 4 and 5 are rotated at a constant speed in opposite directions at a slow speed, the jig body 21 is Following the rotation of both surface plates 4, 5, the surface of the surface plates 4, 5 is driven to rotate, and the pad surfaces 18a, 19a of both surface plates 4, 5 are corrected by the upper and lower correction surfaces 2a, 2b of the correction jig 2A. It is finished in a curved surface shape following the shapes of 2a and 2b. In the case of the illustrated example, since the correction surfaces 2a and 2b of the correction jig 2A are convex curved surfaces, the pad surfaces 18a and 19a have a width H as shown in FIG. A curved surface that is concavely curved along the radius of the polishing pads 18 and 19 (and hence the surface plates 4 and 5) is finished.

  When the correction is completed, the upper surface plate 4 is raised, each correction jig 2A is removed and stored in a required place, and then the polishing of the workpiece W is resumed.

  Thus, a plurality of correction jigs 2A are interposed between the upper and lower surface plates 4 and 5 in the radial direction, and a very simple operation is performed simply by rotating both surface plates 4 and 5 in opposite directions with a load applied. Thus, the polishing pads 18 and 19 of the upper and lower surface plates 4 and 5 can be simultaneously and easily corrected to a predetermined surface shape by the correction jig 2A.

  FIG. 6 shows a second embodiment of the correction jig. The correction jig 2B of the second embodiment is different from the correction jig 2A of the first embodiment in that the jig main body 21 has a drum shape. That is, the jig main body 21 has a circular cross section, and has a shape in which the diameter is reduced most at the intermediate portion in the length direction, and the diameter gradually increases toward both ends. Therefore, the shape of the upper correction surface 2a and the lower correction surface 2b formed on the jig body 21 is a smooth recess that curves in a shape that is recessed most inward in the middle portion of the jig body 21 in the length direction. It is a curved surface. Of course, the surface shape on the one half side in the length direction and the surface shape on the other half portion side are symmetrical to each other.

Since the configuration of the correction jig 2B other than the above is substantially the same as the correction jig 2A of the first embodiment, the same components as those of the first embodiment are denoted by the same reference numerals. Description is omitted.
Thus, when the correction jig 2B of the second embodiment is used, the shapes of the pad surfaces 18a and 19a of the upper and lower surface plates 4 and 5 are changed to the pads as shown in FIG. Within the width H of the surfaces 18a and 19a, the curved surface can be modified to a convex curve along the radius of the polishing pads 18 and 19.

  In the correction jigs 2A and 2B of the first and second embodiments, the jig body 21 can be fixed to the support shaft 22 in a non-rotating state.

  Moreover, the cross-sectional shape of the jig main body 21 does not have to be a perfect circle like the correction jigs 2A and 2B of the first and second embodiments, and a horizontally long oval shape or a circle is divided into left and right parts. Then, an oval shape in which upper ends and lower ends are connected by straight lines may be used. Such a cross-sectional shape of the jig main body 21 is included in the category of “non-circular cross-section” described below.

  FIG. 7 shows a third embodiment of the correction jig. In the correction jig 2C of the third embodiment, the jig main body 21 has a non-circular cross-sectional shape and has a pair of outer surfaces facing in opposite directions, and the upper correction surface is formed by these outer surfaces. 2a and a lower correction surface 2b are formed. In the illustrated example, the jig body 21 has a bar shape or a plate shape having a horizontally long rectangular cross-sectional shape, and the corners 2c on both side ends of the upper and lower correction surfaces 2a, 2b are pad surfaces 18a, In order not to get caught in 19a, it is chamfered or rounded. The jig body 21 may be supported so as to be relatively rotatable with respect to the support shaft 22 or may be fixed in a non-rotating state. In any case, the jig body 21 of the first and second embodiments may be used. Unlike the correction jigs 2A and 2B, the jig main body 21 has a non-circular cross-sectional shape. Therefore, the jig main body 21 does not follow and rotate following the rotation of both surface plates 4 and 5 during correction. .

The shape of the upper correction surface 2a and the lower correction surface 2b is a curved surface having a smooth convex shape that bulges to the outermost side in the middle portion of the jig body 21 in the axis L2 direction (length direction). The surface shape on the one half side in the vertical direction and the surface shape on the other half portion side are symmetrical to each other.
Since the other configuration of the correction jig 2C of the third embodiment is substantially the same as that of the correction jig 2A of the first embodiment, the same components as those of the first embodiment are used. The same reference numerals are given and description thereof is omitted.
When the correction jig 2C according to the third embodiment is used, the pad surfaces 18a and 19a of the upper and lower surface plates 4 and 5 are shaped as shown in FIG. 18 (a). , 19a can be modified into a concave curved surface along the radius of the polishing pad 18, 19 within the width H.

  FIG. 8 shows a fourth embodiment of the correction jig. The correction jig 2D of the fourth embodiment is different from the correction jig 2C of the third embodiment in that the shapes of the upper correction surface 2a and the lower correction surface 2b are in the direction of the axis L2 of the jig main body 21 ( This is a smooth concave curved surface that curves in a shape that is indented inward at the intermediate portion in the length direction).

In addition, since it is substantially the same as the correction jig | tool 2C of the said 3rd Embodiment about the structure of the correction jig | tool 2D of this 4th Embodiment other than the above, it is the same as that of 3rd Embodiment in those same components. The same reference numerals are given and description thereof is omitted.
When the correction jig 2D of the fourth embodiment is used, the pad surfaces 18a and 19a of the upper and lower surface plates 4 and 5 are shaped as shown in FIG. 18B. Can be modified into a curved surface having a convex shape along the radius of the polishing pads 18 and 19 within the width H.

  FIG. 9 shows a fifth embodiment of the correction jig. The correction jig 2E of the fifth embodiment is different from the correction jigs 2C and 2D of the third and fourth embodiments in that the upper correction surface 2a and the lower correction surface 2b are convex and concave. They are curved in opposite directions. In this case, it is determined by the correction condition which of the upper correction surface 2a and the lower correction surface 2b is the uneven surface.

When the correcting jig 2E of the fifth embodiment is used, the shape of the pad surfaces 18a, 19a of the upper and lower surface plates 4, 5 is set to the radius of the polishing pads 18, 19 as shown in FIG. It can be corrected to a curved shape that matches the concave shape and the convex shape that match each other.
In addition, the curved surface shape of the correction surface of the correction jig in each of the above drawings is exaggerated for easy understanding.

  Further, when the pad surfaces 18 a and 19 a of the upper and lower surface plates 4 and 5 are corrected to a flat surface, the upper correction surface 2 a and the lower correction surface 2 b of the correction jig are set to the axis L 2 in the length direction of the jig main body 21. It may be formed on a surface that extends straight in parallel with each other. Specifically, when the jig main body 21 has a circular cross section like the correction jig 2A of the first embodiment, the jig main body 21 may be formed in a cylindrical shape having a uniform diameter over the entire length. When the jig body 21 has a non-circular cross section like the correction jig 2c of the third embodiment, the upper correction surface 2a and the lower correction surface 2b may be formed in a plane parallel to the axis L2. . One of the upper correction surface 2a and the lower correction surface 2b may be formed as a surface extending in parallel with the axis L2, and the other may be formed as a concave or convex curved surface.

  In each of the above embodiments, the mounting portions 23 and 24 at both ends of the correction jig have the locking holes 23b and 24b, and the locking holes 23b and 24b are used as mounting receiving portions for the sun gear 6 and the internal gear 7. Although it is made to engage with the pins 6a and 7a which also serve as 25 and 26, the structure of these attachment parts 23 and 24 and the attachment receiving parts 25 and 26 is not limited to such. For example, without using the mounting receiving portions 25 and 26 also as the pins 6a and 7a, pins and protrusions that fit into the locking holes 23b and 24b of the mounting portions 23 and 24 at locations other than the pins 6a and 7a. You may form a convex part for exclusive use. Alternatively, the mounting portions 23 and 24 may be convex portions, and the mounting receiving portions 25 and 26 may be concave portions such as holes to be engaged with each other.

  In the above embodiment, the sun gear 6 and the internal gear 7 have the form of the pins 6a and 7a and the teeth are formed by a large number of pins 6a and 7a. As described above, linear teeth parallel to the central axis L1 may be provided radially on the inner and outer peripheries. Thus, when the sun gear 6 and the internal gear 7 are provided with straight teeth, the mounting portions 23 and 24 in the correction jig are formed to have the same tooth-like irregularities as the straight teeth, It is also possible to configure the projections and recesses to mesh with the straight teeth of the sun gear 6 or the internal gear 7.

FIGS. 11 to 14 show an embodiment of a double-side polishing apparatus 31 provided with a correction jig 32 for a polishing pad. This double-side polishing apparatus 31 includes a correction jig having the same jig body and correction surface as the correction jigs 2A to 2E described in FIGS. 1 to 9 and the jig main body 21 and the correction surfaces 2a and 2b thereof. The tool 32 is incorporated as a part of the apparatus.
Note that the double-side polishing apparatus 31 of this embodiment is substantially the same as the double-side polishing apparatus 1 described in FIGS. 1 to 5 with respect to the configuration for polishing the workpiece W. Therefore, in order to avoid duplication of description, the same components as those of the polishing apparatus 1 of FIGS. 1 to 5 are denoted by the same reference numerals as those of FIGS. .

Moreover, the correction jig | tool 32 incorporated as an example has a form similar to the correction jig | tool 2A of 1st Embodiment shown in FIGS. That is, the correction jig 32 includes a spindle-shaped jig main body 21 having a circular cross-sectional shape and a support shaft 22 that rotatably supports the jig main body 21. The upper correction surface 2a and the lower correction surface 2b are formed of smooth convex curved surfaces that bulge outwardly in the middle portion of the jig body 21 in the longitudinal direction. Then, the attachment portion 24 at one end of the support shaft 22 is attached to an apparatus main body (airframe) 33 via a support mechanism 34 which is an attachment receiving portion, and the support mechanism 34 is driven, whereby FIGS. The position is displaced between a correction position X indicated by a solid line and a storage position Y indicated by a chain line in FIG.
The correction position X is a position where the correction jig 2A is interposed in the radial direction of the upper and lower surface plates 4, 5 to correct the pad surfaces 18a, 19a of the surface plates 4, 5, and the storage position Y is a position for the correction jig 2A to stand by away from the surface plates 4 and 5.

  The support mechanism 34 includes a lifting / lowering actuator 35 formed of a fluid pressure cylinder and the like, and a turning actuator 36 attached to a rod 35a of the lifting / lowering actuator 35. A proximal end portion of the support shaft 22 of the tool 32 is attached. Then, as shown by a chain line in one operation position in FIG. 12, by performing the lifting operation by the lifting actuator 35 and the turning operation by the turning actuator 36, each correction jig 32 is moved to the correction position. It is displaced to X and the storage position Y. The driving of the correction jig 32 by the support mechanism 34 can be performed by an automatic operation or a manual operation.

  At the tip of the support shaft 22 in the correction jig 32, a mounting portion 23 having a locking convex portion or a concave portion is formed. On the other hand, the apparatus main body 33 of the polishing apparatus 1 is provided with the mounting portion 23. When the attachment receiving part 25 provided with the recessed part or convex part which a convex part or a recessed part latches is formed, and the correction jig 32 occupies the said correction position X, in these attachment part 23 and the attachment receiving part 25 The convex portion and the concave portion are engaged with each other. In the illustrated example, the mounting receiving portion 25 is formed on the sun gear 6. In this case, the pin 6a that forms the teeth of the sun gear 6 can also be used as the attachment receiving portion 25, and the attachment portion 23 of the support shaft 22 can be formed with a recess such as a hole that engages with the pin 6a.

  In the illustrated example, three correction jigs 32 and support mechanisms 34 are arranged around the internal gear 7 at substantially equal intervals. However, the number of the correction jigs 32 and the support mechanisms 34 is as follows. There may be two or four or more.

In the double-side polishing apparatus 31, when each correction jig 32 is sent to a predetermined correction position X on the lower surface plate 5 with the upper surface plate 4 raised, the upper surface plate 4 is moved as shown in FIG. It descends and comes into contact with these correction jigs 32. Then, the jig main body 21 is sandwiched between the upper and lower surface plates 4 and 5 and a necessary load (pressing force) is applied to the upper surface plate 4 so that the upper and lower surface plates 4 and 5 are moved in opposite directions at a slow speed. By rotating at a constant speed, the pad surfaces 18 a and 19 a of the upper and lower surface plates 4 and 5 are corrected by the upper correction surface 2 a and the lower correction surface 2 b of the correction jig 32. The action at this time is substantially the same as the action when the pad surfaces 18a, 19a of the upper and lower surface plates 4, 5 are corrected by the correction jig 2A in FIGS.
When the correction of the pad surfaces 18a and 19a is completed, the upper surface plate 4 is raised, and each correction jig 32 is displaced to the storage position Y by the support mechanism 34.

  The correction jig 32 can be replaced with one having a correction surface shape suitable for the shape of the pad surfaces 18a and 19a to be corrected.

It is sectional drawing which shows the principal part of a double-side polish apparatus roughly, Comprising: The right half part is the state which set the correction jig which concerns on this invention, and the left half part is the state which set the carrier holding a workpiece | work . It is a top view of the state which removed the upper surface plate of the double-side polish apparatus of FIG. It is a principal part enlarged view of FIG. It is a bottom view which abbreviate | omits a part of middle and shows 1st Embodiment of the correction jig which concerns on this invention. In the double-side polishing apparatus of FIG. 1, it is principal part sectional drawing which shows the state which has corrected the pad surface of the upper and lower surface plates with a correction jig. It is a perspective view which shows 2nd Embodiment of the correction jig which concerns on this invention. It is a perspective view which abbreviate | omits the attaching part of both ends of a spindle, and shows 3rd Embodiment of the correction jig which concerns on this invention. It is a perspective view which abbreviate | omits the attachment part of both ends of a spindle, and shows 4th Embodiment of the correction jig which concerns on this invention. It is a perspective view which abbreviate | omits the attaching part of both ends of a spindle, and shows 5th Embodiment of the correction jig which concerns on this invention. It is a flowchart which shows the process of the correction of the pad surface of the polishing pad by a correction jig. It is principal part sectional drawing which shows embodiment of the double-side polish apparatus of this invention incorporating the correction jig | tool. It is a principal part enlarged view of FIG. It is a top view of the state which removed the upper surface plate of the double-side polish apparatus of FIG. In the double-side polishing apparatus of FIG. 11, it is principal part sectional drawing which shows the state which has corrected the pad surface of the upper and lower surface plates with a correction jig. It is a schematic principal part sectional view for demonstrating generally the state of the grinding | polishing of the workpiece | work by a double-side polish apparatus. It is principal part sectional drawing explaining the example of a shape of the pad surface of an upper and lower both surface plate. It is sectional drawing explaining an example of the surface shape of a workpiece | work. It is sectional drawing explaining the other example of the surface shape of a workpiece | work. It is principal part sectional drawing explaining the other example of the shape of the pad surface of both upper and lower surface plates. It is principal part sectional drawing explaining the further another example of the shape of the pad surface of both upper and lower surface plates. It is principal part sectional drawing explaining the example of correction of the pad surface of the upper and lower both surface plates by the conventional correction carrier. It is principal part sectional drawing explaining the other modification example of the pad surface of the upper and lower both surface plates by the conventional correction carrier.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1,31 Double-side polish apparatus 2A-2E, 32 Correction jig 2a, 2b Correction surface 4 Upper surface plate 5 Lower surface plate 6 Sun gear 6
7 Internal gear 8 Carrier 18, 19 Polishing pad 18a, 19b Pad surface 21 Jig body 22 Support shaft 23, 24 Mounting portion 33 Device body (machine body)
34 Support mechanism W Work X Sticking position Y Storage position Y
R radius H pad surface width L2 axis of correction jig

Claims (13)

Adhered to both upper and lower surface plates of a double-side polishing machine equipped with an annular upper and lower surface plate that sandwiches the workpiece held by the carrier from both sides, and a sun gear and internal gear for driving the carrier. A correction jig for correcting the pad surface of the annular polishing pad,
A jig body having an axial length shorter than the radius of the polishing pad but equal to or greater than the width of the pad surface, and a support shaft extending in the axial direction from both ends of the jig body;
The jig body is formed with an upper correction surface and a lower correction surface that simultaneously contact the pad surfaces of the upper and lower surface plates to correct these pad surfaces,
At both ends of the support shaft, the jig body is held between the upper and lower surface plates in the radial direction of the surface plate, and is fixed to the position on the inner peripheral side and the outer peripheral side of the surface plate of the polishing apparatus. The attachment part for attaching to the state is formed,
A polishing pad correction jig for a double-side polishing apparatus.   2. The correction jig according to claim 1, wherein attachment portions at both ends of the support shaft are configured to be freely engaged with and disengaged from the teeth of the sun gear and the internal gear.   The upper correction surface and the lower correction surface of the jig main body are characterized in that the surface shape of the jig body in the longitudinal direction on one side and the surface shape on the other half side are symmetrical to each other. The correction jig according to claim 1 or 2.   The correction jig according to claim 3, wherein the upper correction surface and the lower correction surface are curved surfaces that are curved so as to form a concave shape or a convex shape in the length direction of the jig body.   The correction jig according to claim 1, wherein the jig body has a circular cross section, and a part of a circumference is the upper correction surface and the lower correction surface.   The jig body has a non-circular cross section, and has a pair of outer surfaces facing in opposite directions, and the upper correction surface and the lower correction surface are formed by these outer surfaces. The correction jig according to any one of claims 1 to 4. Annular upper and lower surface plates with an annular polishing pad attached and polishing the workpiece held by the carrier from both sides; Sun gear and internal gear for driving the carrier; A correction jig for correcting the annular pad surface in
The correction jig includes a jig body having an axial length shorter than a radius of the polishing pad but equal to or greater than a width of the pad surface, and a support shaft extending in the axial direction from both ends of the jig body. The jig body is formed with an upper correction surface and a lower correction surface that simultaneously contact the pad surfaces of the upper and lower surface plates to correct these pad surfaces, and one end of the support shaft. Is supported by the support mechanism so as to be capable of swiveling and ascending / descending, and the correction jig is interposed between the upper and lower surface plates in the radial direction of the surface plate by these support surfaces. It is possible to displace between the correction position for correcting the position and the storage position away from these surface plates.
A double-side polishing apparatus provided with a polishing pad correction jig.   The double-side polishing apparatus according to claim 7, wherein an attachment portion that engages with an attachment receiving portion formed on the sun gear at the correction position is formed at a tip of the support shaft in the correction jig.   The upper correction surface and the lower correction surface of the jig main body are characterized in that the surface shape of the jig body in the longitudinal direction on one side and the surface shape on the other half side are symmetrical to each other. The correction jig according to claim 7 or 8.   10. The double-side polishing apparatus according to claim 9, wherein the upper correction surface and the lower correction surface are curved surfaces that are curved so as to form a concave shape or a convex shape in the length direction of the jig body.   The double-side polishing apparatus according to any one of claims 7 to 10, wherein the jig body has a circular cross section, and a part of a circumference is the upper correction surface and the lower correction surface.   The jig body has a non-circular cross section, and has a pair of outer surfaces facing in opposite directions, and the upper correction surface and the lower correction surface are formed by these outer surfaces. The double-side polishing apparatus according to any one of claims 7 to 10. In a double-side polishing apparatus comprising an annular upper surface plate and a lower surface plate for sandwiching a workpiece held by a carrier from both sides, and a sun gear and an internal gear for driving the carrier, A correction method for correcting a pad surface of an annular polishing pad attached,
A correction jig in which an upper correction surface and a lower correction surface for correcting the pad surface are formed on a jig body having an axial length shorter than the radius of the polishing pad but equal to or larger than the width of the pad surface. Use
The jig body of the correction jig is interposed between the upper and lower surface plates in the radial direction of the surface plate, and the upper correction surface and the lower correction surface are simultaneously brought into contact with the pad surfaces of the upper and lower surface plates to Double-side polishing characterized by simultaneously correcting the pad surfaces of both surface plates by the upper and lower correction surfaces by rotating the upper and lower surface plates in opposite directions with a load applied on the plate. A method for correcting a polishing pad in an apparatus.

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