JP2007250639A - Component mounting device - Google Patents

Component mounting device Download PDF

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JP2007250639A
JP2007250639A JP2006069117A JP2006069117A JP2007250639A JP 2007250639 A JP2007250639 A JP 2007250639A JP 2006069117 A JP2006069117 A JP 2006069117A JP 2006069117 A JP2006069117 A JP 2006069117A JP 2007250639 A JP2007250639 A JP 2007250639A
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substrate
component
wafer
recognition
recognizing
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JP4800076B2 (en
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Atsushi Iwase
温資 岩瀬
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Juki Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To raise mounting efficiency while a component recognizing operation is performed immediately before suction and an operation to suck a good component and mount it on a substrate is defined as a basis. <P>SOLUTION: A component mounting device includes: a mounting head 20 for sucking a wafer component W, which is recognized as the good component by a component recognizing camera 18, and mounting it on the positioned substrate S; and a control means 30 for recognizing the quality of the unrecognized wafer component W on a wafer table 16 with the use of the recognizing camera 18 during a waiting period till a substrate detecting sensor 14 detects the arrival of the substrate, preserving the recognition result in a memory as recognition data, and sucking the wafer component to be mounted on the subsequently arriving substrate, based on the preserved recognition data. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

本発明は、部品搭載装置、特にダイシングされたウェハからダイレクトにウェハ部品を吸着して、順次搬送され所定位置に位置決めされた基板に搭載する際に適用して好適な、部品搭載装置に関する。   The present invention relates to a component mounting apparatus, and more particularly to a component mounting apparatus suitable for application when a wafer component is directly picked up from a diced wafer and is sequentially mounted and mounted on a substrate positioned at a predetermined position.

一般に、プリント基板等の配線基板に、チップマウンタにより電子部品を搭載して基板製品を生産することが行なわれている。この生産工程の1つに、ウェハテーブルに載置されているダイシング後の分割されたウェハ部品を基板に搭載する、いわゆるダイボンディングがある。   In general, a board product is produced by mounting electronic components on a wiring board such as a printed board using a chip mounter. As one of the production processes, there is so-called die bonding in which a divided wafer part after dicing placed on a wafer table is mounted on a substrate.

通常、ウェハ部品は、ダイシング後に検査が行なわれ、不良品にはいわゆるBADマークが付された状態で供給される。そのため、従来のダイボンディングにおいては、基板が所定の位置に搬送され、位置決めされた後、搭載ヘッドに取付けられている認識装置により、BADマークが付いていないウェハ部品のみを選択し、該搭載ヘッドにより良品のウェハ部品を吸着し、基板に搭載していた。   Normally, wafer parts are inspected after dicing, and defective products are supplied with so-called BAD marks. Therefore, in the conventional die bonding, after the substrate is transported to a predetermined position and positioned, only the wafer component without the BAD mark is selected by the recognition device attached to the mounting head, and the mounting head The non-defective wafer parts were picked up and mounted on the substrate.

なお、特許文献1には、ダイボンディングの作業効率を上げるために、予めダイシングされたウェハ上のウェハ部品について、良品と不良品の位置を記録したマッピングデータを作成する技術が開示されているが、これは別工程で行なう必要がある上に、使用する装置によってはフォーマット変換する必要があることから、必ずしも効率向上につながらない。   Patent Document 1 discloses a technique for creating mapping data in which the positions of non-defective products and defective products are recorded for wafer parts on a wafer that has been diced in advance in order to increase the work efficiency of die bonding. Since this needs to be performed in a separate process and requires format conversion depending on the apparatus used, the efficiency is not necessarily improved.

特開平11−121476号公報JP-A-11-112476

しかしながら、前記のように位置決めされた基板に、ウェハテーブルからウェハ部品を吸着して搭載する場合、従来は吸着直前にBADマークの認識動作を行なっているため、BADマークが連続している場合には、部品を吸着するまでに認識動作を繰り返すことになるため、非常に時間をロスしてしまうという問題がある。   However, when a wafer part is picked up and mounted on the substrate positioned as described above, since the BAD mark recognition operation has been performed immediately before the picking up conventionally, the BAD mark is continuous. Has a problem that the recognition operation is repeated until the part is picked up, so that time is lost.

本発明は、前記従来の問題点を解決するべくなされたもので、吸着直前にウェハ部品の良否の認識動作を行ない、良部品を吸着して基板に搭載する動作を基本としながら、搭載効率の向上を図ることができる部品搭載方法及びそれに適用する部品搭載装置を提供することを課題とする。   The present invention has been made in order to solve the above-mentioned conventional problems, and performs an operation of recognizing the quality of a wafer part immediately before suction, and is based on the operation of picking up a good part and mounting it on a substrate. It is an object of the present invention to provide a component mounting method that can be improved and a component mounting apparatus applied to the method.

本発明は、部品搭載方法において、所定の位置決め部に基板を搬入するステップと、搬入された基板が、前記位置決め部に到達し、位置決めされたことを検知するステップと、基板到達が検知されると、ウェハテーブル上にセットされているウェハ部品の良否を認識するステップと、良品と認識されたウェハ部品を吸着し、位置決めされた前記基板に搭載するステップと、ウェハ部品が搭載された基板を搬出するステップと、を含む部品搭載方法において、基板の到達が検知されるまでの待機中に、ウェハテーブル上の未認識のウェハ部品の良否を認識するステップと、認識結果を認識データとしてメモリに保存するステップと、保存されている認識データに基づいて、次に到達した基板に搭載するウェハ部品の吸着を行なうステップと、を含むようにしたことにより、前記課題を解決したものである。   According to the present invention, in the component mounting method, a step of loading a substrate into a predetermined positioning unit, a step of detecting that the loaded substrate has reached the positioning unit and has been positioned, and the arrival of the substrate are detected. A step of recognizing the quality of the wafer component set on the wafer table, a step of sucking the wafer component recognized as a non-defective product, mounting the wafer component on the positioned substrate, and a substrate on which the wafer component is mounted A step of recognizing the quality of an unrecognized wafer component on the wafer table during standby until the arrival of the substrate is detected, and the recognition result as a recognition data in a memory. A step of storing, and a step of sucking a wafer component to be mounted on the next reached substrate based on the stored recognition data. By the useless, it is obtained by solving the above problems.

本発明は、又、部品搭載装置において、所定の位置決め部に基板を搬入し、搬出する搬送手段と、該搬送手段により搬入された基板が、前記位置決め部に到達し、位置決めされたことを検知する基板検知センサと、該基板検知センサにより基板到達が検知されると、ウェハテーブル上にセットされているウェハ部品の良否を認識する部品認識手段と、該部品認識手段により良品と認識されたウェハ部品を吸着し、位置決めされた前記基板に搭載する搭載ヘッドとを備えていると共に、前記搬送手段により、ウェハ部品が搭載された基板を搬出する部品搭載装置において、前記基板検知センサにより、基板の到達が検知されるまでの待機中に、前記部品認識手段によりウェハテーブル上の未認識のウェハ部品の良否を認識し、その結果を認識データとしてメモリに保存すると共に、保存されている認識データに基づいて、次に到達した基板に搭載するウェハ部品の吸着を行なう制御手段を備えたことにより、同様に前記課題を解決したものである。   In the component mounting apparatus, the present invention also detects that the board that carries the board into and out of the predetermined positioning part and the board carried by the carrying means reach the positioning part and are positioned. A substrate detection sensor, a component recognition means for recognizing the quality of a wafer part set on a wafer table when the substrate detection sensor detects arrival of the substrate, and a wafer recognized as a non-defective product by the component recognition means A mounting head for picking up a component and mounting it on the positioned substrate, and in a component mounting apparatus for unloading the substrate on which the wafer component is mounted by the transfer means, the substrate detection sensor While waiting until arrival is detected, the component recognition means recognizes the quality of unrecognized wafer components on the wafer table and recognizes the result. The above-mentioned problem is solved in the same manner by providing a control means for sucking a wafer component to be mounted on the next reached substrate based on the stored recognition data. .

本発明によれば、基板毎にウェハ部品の良否を判定した後に良品を吸着・搭載する動作以外に、基板の待機中に収集した認識データに基づいて、吸着・搭載をできるようにしたことにより、ウェハ部品が搭載された基板製品の生産タクトを短縮し、生産効率を向上することができる。   According to the present invention, in addition to the operation of sucking and mounting non-defective products after determining the quality of wafer parts for each substrate, it is possible to perform suction and mounting based on recognition data collected during standby of the substrate. The production tact of the substrate product on which the wafer component is mounted can be shortened and the production efficiency can be improved.

以下、図面を参照して、本発明の実施の形態について詳細に説明する。   Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

図1は、本発明に係る一実施形態の部品搭載装置の概要を模式的に示す平面図である。   FIG. 1 is a plan view schematically showing an outline of a component mounting apparatus according to an embodiment of the present invention.

本実施形態の部品搭載装置は、所定の位置決め部10に基板Sを搬入し、搬出する搬送装置12と、該搬送装置12により搬入された基板Sが、位置決め部10に到達し、位置決め(クランプ)されたことを検知する基板検知センサ14と、該基板検知センサ14により基板到達が検知されると、ウェハテーブル16上にセットされているウェハ部品Wの良否を認識(判定)する部品認識カメラ18と、該部品認識カメラ18により良品と認識されたウェハ部品Wを吸着し、位置決めされた前記基板Sに搭載する搭載ヘッド20とを備えている。   In the component mounting apparatus of the present embodiment, the substrate S is carried into and out of the predetermined positioning unit 10, and the substrate S carried in by the carrying device 12 reaches the positioning unit 10, and is positioned (clamped). ) And a component recognition camera that recognizes (determines) the quality of the wafer component W set on the wafer table 16 when the substrate detection sensor 14 detects the arrival of the substrate. 18 and a mounting head 20 that sucks a wafer part W recognized as a non-defective product by the part recognition camera 18 and mounts it on the substrate S that has been positioned.

又、上記部品認識カメラ18は、搭載ヘッド20と一体的に、XY駆動部22に固定されて平面方向に移動可能になっており、該カメラ18によりウェハをダイシングして分割した(明示せず)ウェハ部品Wに予め付けられているBADマークの有無からその良否を判定する認識を行なうと共に、良品を搭載ヘッド20の吸着ノズル(図示せず)により吸着し、ウェハテーブル18からピックアップした後、その部品を位置決め部10に位置決めされている基板Sに搭載する動作を、制御装置30により自動的に行なうことができるようになっている。   The component recognition camera 18 is fixed to the XY drive unit 22 integrally with the mounting head 20 and is movable in the plane direction. The camera 18 dices and divides the wafer (not shown). ) Recognizing whether or not the BAD mark preliminarily attached to the wafer component W is determined, and adhering the non-defective product by the suction nozzle (not shown) of the mounting head 20 and picking it up from the wafer table 18, The control device 30 can automatically perform the operation of mounting the component on the substrate S positioned on the positioning unit 10.

本実施形態においては、制御装置30により、上述したように基板Sが搬入される毎に部品認識カメラ18により良品を認識し、吸着・搭載するという、吸着直前に部品認識を行なう従来の搭載動作を行なう。   In the present embodiment, a conventional mounting operation in which the controller 30 recognizes a non-defective product by the component recognition camera 18 every time the board S is carried in, as described above, and picks and mounts the component immediately before suction. To do.

本実施形態においては、従来の制御動作以外に、制御装置30により、例えば前記搬送装置12によりウェハ部品Wが搭載された基板を搬出した後、前記基板検知センサ14により、次の基板の搬入が検知されるまでの待機中に、前記部品認識カメラ18によりウェハテーブル16上の未認識のウェハ部品Wの良否(BADマークの有無)を認識して、その認識データをメモリ(図示せず)に保存すると共に、その後、次の基板Sが到達したら、保存されている認識データに基づいて、位置決めされた該基板Sに対してウェハ部品を吸着・搭載する制御動作を行なうようになっている。   In the present embodiment, in addition to the conventional control operation, for example, after the substrate on which the wafer part W is mounted is carried out by the control device 30 by the control device 12, the next substrate is carried in by the substrate detection sensor 14. During standby until detection, the component recognition camera 18 recognizes the quality of the unrecognized wafer component W on the wafer table 16 (presence of BAD mark) and stores the recognition data in a memory (not shown). At the same time, when the next substrate S arrives, a control operation for sucking and mounting the wafer component on the positioned substrate S is performed based on the stored recognition data.

次に、本実施形態の作用を、図2のフローチャートに従って説明する。   Next, the operation of the present embodiment will be described with reference to the flowchart of FIG.

生産を開始すると、制御装置30において、ステップ1で基板搬入待ちか否かを判定し、搬入待ちでない(NO)、即ち基板検知センサ14により基板Sの位置決めが検知されているときには、その基板Sに対して、後述する図3に示されている従来の生産動作を行ない(ステップ2)、次の基板が無い生産完了のときは(ステップ3)、生産を終了する。   When the production is started, the control device 30 determines whether or not waiting for substrate loading in Step 1 and if it is not waiting for loading (NO), that is, if the substrate detection sensor 14 detects the positioning of the substrate S, the substrate S is determined. On the other hand, the conventional production operation shown in FIG. 3 to be described later is performed (step 2), and when the production is completed without the next substrate (step 3), the production is terminated.

一方、基板待ちと判定されたときには(ステップ1でYES)、BADマークの有無が未認識のウェハ部品Wがあるか否かを判定し(ステップ4)、ある場合にはその未認識位置のウェハ部品WについてBADマークの有無を認識し(ステップ5)、認識結果からBADマークが検出された場合は(ステップ6でYES)、その検出位置と結果を認識データとしてメモリに保存する。   On the other hand, when it is determined that the substrate is waiting (YES in step 1), it is determined whether or not there is a wafer part W whose BAD mark is unrecognized (step 4). The presence / absence of a BAD mark is recognized for the component W (step 5), and if a BAD mark is detected from the recognition result (YES in step 6), the detected position and result are stored in the memory as recognition data.

ステップ7の後と、ステップ4とステップ6でNOの場合は、いずれもステップ3に進み、基板搬入待ちの間、この動作を繰り返すことにより、ウェハ部品Wの良品・不良品の認識データをメモリに蓄積する。   After step 7, if both step 4 and step 6 are NO, the process proceeds to step 3 and repeats this operation while waiting for the substrate to be loaded, thereby recognizing the non-defective / defective product recognition data of wafer part W. To accumulate.

次に、前記ステップ1で基板Sが到達しているNOの場合に、ステップ2で行なう生産動作について、図3のフローチャートに従って説明する。   Next, the production operation performed in Step 2 when the substrate S has reached NO in Step 1 will be described with reference to the flowchart of FIG.

まず、ステップ11で次の吸着位置にあるウェハ部WのBADマークが認識済みで、メモリに認識データが保存されているか否かを判定し、既に良品と認識されている場合(YES)はそのウェハ部品Wを吸着し(ステップ12)、基板Sに搭載する(ステップ13)。以上のステップ11〜ステップ13の動作は、可能であれば全部品の搭載動作が完了するまで繰り返される。   First, in step 11, it is determined whether or not the BAD mark of the wafer portion W at the next suction position has been recognized and the recognition data is stored in the memory. If it is already recognized as a non-defective product (YES) Wafer component W is sucked (step 12) and mounted on substrate S (step 13). The above operations of Step 11 to Step 13 are repeated until the mounting operation of all components is completed if possible.

一方、ステップ11で未だ認識していない場合(NO)は、従来と同様にその吸着位置のBADマークを認識し、認識結果から良品と判定された場合(ステップ16でNO)は、そのウェハ部品Wに対してステップ12の吸着とステップ13の搭載を行ない、逆に、認識結果からBADマークがあると判定された場合(ステップ16でYES)、次の吸着位置のウェハ部品Wに移ってBADマークを認識し、ステップ16に戻る。   On the other hand, if it is not yet recognized in step 11 (NO), the BAD mark at the suction position is recognized as in the conventional case, and if it is determined as a non-defective product from the recognition result (NO in step 16), the wafer part Step 12 and step 13 are mounted on W. Conversely, if it is determined from the recognition result that there is a BAD mark (YES in Step 16), the wafer part W at the next suction position moves to BAD. The mark is recognized, and the process returns to step 16.

なお、基板搬送待ち中に認識し、メモリに一時保存したBADマークの位置情報は、ファイルに保存することにより、装置の電源をOFFした後に再度起動した場合に、そのBADマークを再認識する必要がないようにしてもよい。   Note that the BAD mark position information that is recognized while waiting for substrate transport and temporarily stored in the memory needs to be re-recognized by saving the file to a file so that the BAD mark can be re-recognized when the apparatus is turned on again. There may be no.

又、基板搬送待ち中のBADマークの認識時に、ウェハ部品の反射面積の差による反射光量の違いを同時に検出し、その違いから部品の欠け等の形状欠陥を検出する良品・不良品判定を自動的に行なうことにより、生産時に不良部品の吸着位置確認動作をスキップすることができるようにし、更にタクトアップを図るようにしてもよい。   Also, when recognizing a BAD mark waiting for substrate transfer, the difference in the amount of reflected light due to the difference in the reflection area of the wafer component is detected at the same time. By performing the operation, it is possible to skip the operation of confirming the suction position of the defective part during production, and to further improve the tact time.

以上詳述した本実施形態によれば、BADマークの認識動作を行なうタイミングを、基板搬送待ち(搬送中を含む)に自動的に行なうことにより、従来行なっていた吸着動作直前のBADマーク認識動作を可能な限り排除することが可能となることから、ウェハ部品搭載時の生産タクトタイムを短縮し、生産性を向上することが可能となる。当然に、部品吸着時にBADマーク認識済みの部品が無い場合は、従来通り吸着直前にBADマーク認識を行なう。   According to the present embodiment described in detail above, the BAD mark recognition operation immediately before the suction operation, which has been performed conventionally, is performed automatically by waiting for the substrate transfer (including during the transfer) when performing the BAD mark recognition operation. Can be eliminated as much as possible, so that it is possible to shorten the production tact time at the time of mounting the wafer part and improve the productivity. Naturally, when there is no BAD mark recognized component at the time of component suction, BAD mark recognition is performed just before suction.

従って、前工程等の部品切れなどが原因で、基板Sの搬入が長時間停止した場合には、その間まとめてBADマーク認識を行っておくことにより、搬入停止による時間ロスを取り戻すことが可能となる。   Therefore, when the loading of the substrate S is stopped for a long time due to parts being cut off in the previous process or the like, it is possible to recover the time loss due to the stopping of loading by performing the BAD mark recognition during that time. Become.

本発明に係る一実施形態の部品搭載装置の概要を示すブロック図を含む平面図The top view including the block diagram which shows the outline | summary of the component mounting apparatus of one Embodiment which concerns on this invention 本実施形態の作用を説明するフローチャートFlow chart for explaining the operation of this embodiment 本実施形態の作用を説明する他のフローチャートAnother flowchart for explaining the operation of this embodiment

符号の説明Explanation of symbols

10…位置決め部
12…搬送装置
14…基板検知センサ
16…ウェハテーブル
18…部品認識カメラ
20…搭載ヘッド
22…XY駆動部
30…制御装置
DESCRIPTION OF SYMBOLS 10 ... Positioning part 12 ... Conveying device 14 ... Board | substrate detection sensor 16 ... Wafer table 18 ... Component recognition camera 20 ... Mounting head 22 ... XY drive part 30 ... Control apparatus

Claims (2)

所定の位置決め部に基板を搬入するステップと、
搬入された基板が、前記位置決め部に到達し、位置決めされたことを検知するステップと、
基板到達が検知されると、ウェハテーブル上にセットされているウェハ部品の良否を認識するステップと、
良品と認識されたウェハ部品を吸着し、位置決めされた前記基板に搭載するステップと、
ウェハ部品が搭載された基板を搬出するステップと、を含む部品搭載方法において、
基板の到達が検知されるまでの待機中に、ウェハテーブル上の未認識のウェハ部品の良否を認識するステップと、
認識結果を認識データとしてメモリに保存するステップと、
保存されている認識データに基づいて、次に到達した基板に搭載するウェハ部品の吸着を行なうステップと、を含むことを特徴とする部品搭載方法。
Carrying a substrate into a predetermined positioning part;
Detecting that the loaded substrate has reached the positioning portion and has been positioned;
When the arrival of the substrate is detected, the step of recognizing the quality of the wafer component set on the wafer table;
Adsorbing a wafer component recognized as a non-defective product and mounting it on the positioned substrate;
A step of unloading the substrate on which the wafer component is mounted, and a component mounting method comprising:
Recognizing the quality of unrecognized wafer parts on the wafer table during standby until the arrival of the substrate is detected;
Storing the recognition result in memory as recognition data;
And a step of adsorbing a wafer component to be mounted on the next arrived substrate based on the stored recognition data.
所定の位置決め部に基板を搬入し、搬出する搬送手段と、
該搬送手段により搬入された基板が、前記位置決め部に到達し、位置決めされたことを検知する基板検知センサと、
該基板検知センサにより基板到達が検知されると、ウェハテーブル上にセットされているウェハ部品の良否を認識する部品認識手段と、
該部品認識手段により良品と認識されたウェハ部品を吸着し、位置決めされた前記基板に搭載する搭載ヘッドとを備えていると共に、前記搬送手段により、ウェハ部品が搭載された基板を搬出する部品搭載装置において、
前記基板検知センサにより、基板の到達が検知されるまでの待機中に、前記部品認識手段によりウェハテーブル上の未認識のウェハ部品の良否を認識し、その結果を認識データとしてメモリに保存すると共に、保存されている認識データに基づいて、次に到達した基板に搭載するウェハ部品の吸着を行なう制御手段を備えたことを特徴とする部品搭載装置。
Conveying means for carrying the substrate in and out of the predetermined positioning portion;
A substrate detection sensor for detecting that the substrate carried in by the conveying means has reached the positioning portion and has been positioned;
When the substrate detection is detected by the substrate detection sensor, the component recognition means for recognizing the quality of the wafer component set on the wafer table;
A component mounting unit that picks up a wafer component recognized as a non-defective product by the component recognition unit and mounts it on the positioned substrate, and carries out the substrate on which the wafer component is mounted by the transport unit. In the device
While waiting until the substrate detection is detected by the substrate detection sensor, the component recognition means recognizes the quality of the unrecognized wafer components on the wafer table, and stores the result in the memory as recognition data. A component mounting apparatus comprising control means for sucking a wafer component to be mounted on the substrate that has arrived next based on the stored recognition data.
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011249646A (en) * 2010-05-28 2011-12-08 Fuji Mach Mfg Co Ltd Operating time adjusting method
KR101183101B1 (en) 2011-05-06 2012-09-21 주식회사 프로텍 Method of die bonding for flip chip

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0812879B2 (en) * 1985-09-30 1996-02-07 株式会社東芝 Semiconductor pellet mounter

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0812879B2 (en) * 1985-09-30 1996-02-07 株式会社東芝 Semiconductor pellet mounter

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011249646A (en) * 2010-05-28 2011-12-08 Fuji Mach Mfg Co Ltd Operating time adjusting method
KR101183101B1 (en) 2011-05-06 2012-09-21 주식회사 프로텍 Method of die bonding for flip chip

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