JP2007238376A5

JP2007238376A5 -

Info

Publication number: JP2007238376A5
Application number: JP2006063350A
Authority: JP
Filing date: 2006-03-08
Publication date: 2010-11-25
Anticipated expiration: 2026-03-08

Description

（１）上記の目的を達成するため、本発明に係る圧電セラミックス用焼結助剤は、ｘ（Ｂｉ_０．５Ｎａ_０．５ＴｉＯ_３）−（１−ｘ）ＢａＴｉＯ_３（ただし、０＜ｘ＜１）で表されるペロブスカイト型化合物を主成分とするＢＮＴ−ＢＴ系圧電セラミックスの製造に用いられる焼結助剤であって、少なくとも酸化ビスマスと酸化亜鉛とを有し、残部が酸化ホウ素からなることを特徴としている。 (1) To achieve the above object, a piezoelectric ceramic for sintering aid according to the present _{_{_{invention, x (Bi 0.5 Na 0.5 TiO}}} 3) - (1-x) BaTiO 3 ( where 0 < A sintering aid used in the production of a BNT-BT piezoelectric ceramic mainly composed of a perovskite type compound represented by x <1), having at least bismuth oxide and zinc oxide, with the remainder being boron oxide It is characterized by consisting of.

（３）また、本発明に係るＢＮＴ−ＢＴ系圧電セラミックスは、ｘ（Ｂｉ_０．５Ｎａ_０．５ＴｉＯ_３）−（１−ｘ）ＢａＴｉＯ_３（ただし、０＜ｘ＜１）で表されるペロブスカイト型化合物を主成分とするＢＮＴ−ＢＴ系圧電セラミックスであって、ＢＮＴ−ＢＴ系圧電セラミックス材料に対して、上記の圧電セラミックス用焼結助剤を３．０重量％以上添加し、１１００℃以下で焼成して得られ、密度が５．７×１０^３ｋｇ／ｍ^３以上であることを特徴としている。 (3) The BNT-BT piezoelectric ceramic according to the present invention is represented by x (Bi _0.5 Na _0.5 TiO ₃ )-(1-x) BaTiO ₃ (where 0 <x <1). A BNT-BT piezoelectric ceramic mainly comprising a perovskite type compound, wherein 3.0% by weight or more of the above-mentioned sintering aid for piezoelectric ceramic is added to the BNT-BT piezoelectric ceramic material. It is obtained by firing at a temperature of not higher than ° C., and has a density of 5.7 × 10 ³ kg / m ³ or more.

（５）また、本発明に係るｘ（Ｂｉ_０．５Ｎａ_０．５ＴｉＯ_３）−（１−ｘ）ＢａＴｉＯ_３（ただし、０＜ｘ＜１）で表されるペロブスカイト型化合物を主成分とするＢＮＴ−ＢＴ系圧電セラミックス材料の仮焼粉末に対して、上記の圧電セラミックス用焼結助剤を３．０重量％以上添加する添加工程と、前記添加工程により得られた材料の成形体を１１００℃以下で焼成する焼成工程と、を含むことを特徴としている。 (5) The perovskite type compound represented by x (Bi _0.5 Na _0.5 TiO ₃ )-(1-x) BaTiO ₃ (where 0 <x <1) according to the present invention is used as a main component. An addition step of adding 3.0% by weight or more of the sintering aid for piezoelectric ceramics to the calcined powder of the BNT-BT piezoelectric ceramic material, and a molded body of the material obtained by the addition step And a firing step of firing at 1100 ° C. or lower.

本発明に係るＢＢＺ圧電セラミックス焼結助剤（以下、「ＢＢＺ焼結助剤」という）は、少なくとも酸化ビスマスと酸化亜鉛とを有し、残部が酸化ホウ素からなり、ＢＮＴ−ＢＴ系圧電セラミックスを緻密化させるのに適している。このＢＢＺ焼結助剤をＢＮＴ−ＢＴ系圧電セラミックスの製造工程において圧電セラミックスに添加することで、ＢＮＴ−ＢＴ系圧電セラミックスについて１１００℃以下での緻密化を可能にしている。なお、ＢＮＴ−ＢＴ系圧電セラミックスとは、ｘ（Ｂｉ_０．５Ｎａ_０．５ＴｉＯ_３）−（１−ｘ）ＢａＴｉＯ_３（ただし、０＜ｘ＜１）で表されるペロブスカイト型化合物を主成分とする圧電セラミックスである。 The BBZ piezoelectric ceramic sintering aid (hereinafter referred to as “BBZ sintering aid”) according to the present invention has at least bismuth oxide and zinc oxide, and the balance is made of boron oxide. Suitable for densification. By adding this BBZ sintering aid to the piezoelectric ceramic in the manufacturing process of the BNT-BT piezoelectric ceramic, the BNT-BT piezoelectric ceramic can be densified at 1100 ° C. or lower. The BNT-BT piezoelectric ceramic is mainly a perovskite type compound represented by x (Bi _0.5 Na _0.5 TiO ₃ )-(1-x) BaTiO ₃ (where 0 <x <1). Piezoelectric ceramics as a component.

ＢＢＺ焼結助剤の添加によりＢＮＴ−ＢＴ系圧電セラミックスを低温で焼成可能であることを実証するために、本発明者らは以下の実験を行った。図３は、実験の条件および結果をまとめた表である。まず、Ｂｉ：Ｂ：Ｚｎ＝３：３：４の元素比で各酸化物を混合し、ＢＢＺ焼結助剤を作製した。そして、Ｂｉ_０．５Ｎａ_０．５ＴｉＯ_３：ＢａＴｉＯ_３＝８６：１４の組成比となるように作製されたＢＮＴ−ＢＴ仮焼粉末にＢＢＺ焼結助剤を添加した。助剤添加割合は、母材の重量（Ｅ）に対する焼結助剤の重量（Ｈ）の割合（Ｈ／Ｅ）である。なお、仮焼温度は８００℃とした。 In order to demonstrate that the BNT-BT piezoelectric ceramic can be fired at a low temperature by adding the BBZ sintering aid, the present inventors conducted the following experiment. FIG. 3 is a table summarizing the experimental conditions and results. First, each oxide was mixed at an element ratio of Bi: B: Zn = 3: 3: 4 to prepare a BBZ sintering aid. _{_{_{_{Then, Bi 0.5 Na 0.5 TiO 3:}}}} BaTiO 3 = 86: addition of BBZ sintering aid BNT-BT calcined powder fabricated such that the 14 proportion of. The auxiliary agent addition ratio is the ratio (H / E) of the weight (H) of the sintering auxiliary agent to the weight (E) of the base material. The calcining temperature was 800 ° C.

Claims

Production of BNT-BT piezoelectric ceramics mainly composed of perovskite type compounds represented by x (Bi _0.5 Na _0.5 TiO ₃ )-(1-x) BaTiO ₃ (where 0 <x <1) A sintering aid used in
A sintering aid for piezoelectric ceramics, comprising at least bismuth oxide and zinc oxide, the balance being boron oxide.

The metal composition ratio of the bismuth oxide, zinc oxide and boron oxide is 10% Bi ≦ 40, 20 ≦ Zn ≦ 90, and 0 ≦ B ≦ 40 (total 100% by mole) in mol%. The sintering aid for piezoelectric ceramics according to claim 1.

x (Bi _0.5 Na _0.5 TiO ₃ )-(1-x) BaTiO ₃ (where 0 <x <1) is a BNT-BT piezoelectric ceramic mainly composed of a perovskite type compound. And
The BNT-BT piezoelectric ceramic material is obtained by adding 3.0% by weight or more of the sintering aid for piezoelectric ceramics according to claim 1 or claim 2 and firing at 1100 ° C. or lower.
A BNT-BT piezoelectric ceramic characterized by having a density of 5.7 × 10 ³ kg / m ³ or more.

4. A laminated piezoelectric device comprising: piezoelectric layers made of BNT-BT piezoelectric ceramics according to claim 3 and internal electrode layers made of Ag—Pd which are alternately laminated and integrally fired.

x (Bi _0.5 Na _0.5 TiO ₃ )-(1-x) BaTiO ₃ (where 0 <x <1) as a main component of a BNT-BT piezoelectric ceramic material mainly composed of a perovskite compound An addition step of adding 3.0% by weight or more of the sintering aid for piezoelectric ceramic according to claim 1 or 2 to the calcined powder;
And a firing step of firing the molded body of the material obtained by the addition step at 1100 ° C. or lower. A method for producing a BNT-BT piezoelectric ceramic, comprising: