JP2007229648A - レンズのスピンコート装置 - Google Patents

レンズのスピンコート装置 Download PDF

Info

Publication number
JP2007229648A
JP2007229648A JP2006055878A JP2006055878A JP2007229648A JP 2007229648 A JP2007229648 A JP 2007229648A JP 2006055878 A JP2006055878 A JP 2006055878A JP 2006055878 A JP2006055878 A JP 2006055878A JP 2007229648 A JP2007229648 A JP 2007229648A
Authority
JP
Japan
Prior art keywords
lens
spin
coating
holding table
rotation holding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2006055878A
Other languages
English (en)
Japanese (ja)
Other versions
JP2007229648A5 (enrdf_load_stackoverflow
Inventor
Isao Karasawa
勲 唐沢
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP2006055878A priority Critical patent/JP2007229648A/ja
Publication of JP2007229648A publication Critical patent/JP2007229648A/ja
Publication of JP2007229648A5 publication Critical patent/JP2007229648A5/ja
Withdrawn legal-status Critical Current

Links

Images

Landscapes

  • Surface Treatment Of Optical Elements (AREA)
  • Coating Apparatus (AREA)
JP2006055878A 2006-03-02 2006-03-02 レンズのスピンコート装置 Withdrawn JP2007229648A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2006055878A JP2007229648A (ja) 2006-03-02 2006-03-02 レンズのスピンコート装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006055878A JP2007229648A (ja) 2006-03-02 2006-03-02 レンズのスピンコート装置

Publications (2)

Publication Number Publication Date
JP2007229648A true JP2007229648A (ja) 2007-09-13
JP2007229648A5 JP2007229648A5 (enrdf_load_stackoverflow) 2008-12-18

Family

ID=38550772

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006055878A Withdrawn JP2007229648A (ja) 2006-03-02 2006-03-02 レンズのスピンコート装置

Country Status (1)

Country Link
JP (1) JP2007229648A (enrdf_load_stackoverflow)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013140302A (ja) * 2012-01-06 2013-07-18 Hoya Corp 眼鏡レンズ用塗布液塗布装置
JP2013186349A (ja) * 2012-03-08 2013-09-19 Hoya Lense Manufacturing Philippine Inc 光学部材の製造方法
CN107399567A (zh) * 2016-05-19 2017-11-28 中西金属工业株式会社 具有升降功能的台车输送机
CN109675744A (zh) * 2017-09-29 2019-04-26 临海市劳尔机械有限公司 一种镜片镀膜喷涂机
CN111487867A (zh) * 2020-04-16 2020-08-04 浙江大学 一种液体晃动模型参考自适应抑制运动控制方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001269609A (ja) * 2000-03-28 2001-10-02 Tokyo Electron Ltd 塗布処理装置
JP2002177852A (ja) * 2000-12-15 2002-06-25 Topcon Corp 眼鏡レンズ用のレンズコーティング装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001269609A (ja) * 2000-03-28 2001-10-02 Tokyo Electron Ltd 塗布処理装置
JP2002177852A (ja) * 2000-12-15 2002-06-25 Topcon Corp 眼鏡レンズ用のレンズコーティング装置

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013140302A (ja) * 2012-01-06 2013-07-18 Hoya Corp 眼鏡レンズ用塗布液塗布装置
JP2013186349A (ja) * 2012-03-08 2013-09-19 Hoya Lense Manufacturing Philippine Inc 光学部材の製造方法
CN107399567A (zh) * 2016-05-19 2017-11-28 中西金属工业株式会社 具有升降功能的台车输送机
CN109675744A (zh) * 2017-09-29 2019-04-26 临海市劳尔机械有限公司 一种镜片镀膜喷涂机
CN111487867A (zh) * 2020-04-16 2020-08-04 浙江大学 一种液体晃动模型参考自适应抑制运动控制方法

Similar Documents

Publication Publication Date Title
JP2007229648A (ja) レンズのスピンコート装置
US5626675A (en) Resist processing apparatus, substrate processing apparatus and method of transferring a processed article
US12111575B2 (en) Coater with automatic cleaning function and coater automatic cleaning method
EP1577930A1 (en) Coating device and coating film forming method
US20070296063A1 (en) Spin coating apparatus and coating method of composition for antireflection layer
BRPI0607122A2 (pt) processo para aplicar uma pelÍcula revestida ou nço revestida sobre pelo menos uma superfÍcie de um substrato de lente
KR20090028414A (ko) 기판처리장치 및 기판처리방법
KR102110065B1 (ko) 기판 처리 방법 및 기판 처리 장치
US8613982B2 (en) Method of producing coated lenses
JP6971587B2 (ja) 光学素子及びその製造方法、光学機器
WO2007052732A1 (ja) コーティング装置
JP4859463B2 (ja) 塗布方法及び調光レンズの製造方法
JP6655882B2 (ja) 遮光層付きレンズの製造装置
CN113495431B (zh) 喷嘴装置及基板处理装置
KR101977771B1 (ko) 기판 처리 장치
CN213612183U (zh) 一种含顶盖激光雷达外表面加硬处理装置
JP6655881B2 (ja) 遮光層付きレンズの製造方法
TWI708641B (zh) 基板處理方法
US20110008533A1 (en) Coater and method of manufacturing plastic lens
KR102046872B1 (ko) 기판 처리 장치 및 방법
JP2008116348A (ja) プラスチックレンズの有機反射防止膜の適否判定方法およびプラスチックレンズの製造方法
JP2000140745A (ja) 成膜方法及び成膜装置
KR20220085412A (ko) 차량용 카메라의 이물질 제거장치
JP5927037B2 (ja) 薄膜製造方法
JP2008168282A (ja) 層形成方法および層形成装置

Legal Events

Date Code Title Description
A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20081029

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20081029

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20101118

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20101124

A761 Written withdrawal of application

Free format text: JAPANESE INTERMEDIATE CODE: A761

Effective date: 20110119