JP2007229648A - レンズのスピンコート装置 - Google Patents
レンズのスピンコート装置 Download PDFInfo
- Publication number
- JP2007229648A JP2007229648A JP2006055878A JP2006055878A JP2007229648A JP 2007229648 A JP2007229648 A JP 2007229648A JP 2006055878 A JP2006055878 A JP 2006055878A JP 2006055878 A JP2006055878 A JP 2006055878A JP 2007229648 A JP2007229648 A JP 2007229648A
- Authority
- JP
- Japan
- Prior art keywords
- lens
- spin
- coating
- holding table
- rotation holding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000007788 liquid Substances 0.000 claims abstract description 139
- 238000000576 coating method Methods 0.000 claims abstract description 94
- 239000011248 coating agent Substances 0.000 claims abstract description 78
- 238000000034 method Methods 0.000 claims abstract description 34
- 238000004528 spin coating Methods 0.000 claims abstract description 34
- 238000007599 discharging Methods 0.000 claims abstract description 5
- 238000001514 detection method Methods 0.000 claims description 29
- 238000012937 correction Methods 0.000 claims description 7
- 230000007246 mechanism Effects 0.000 description 27
- 238000012545 processing Methods 0.000 description 23
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 14
- 229920003023 plastic Polymers 0.000 description 13
- 239000004033 plastic Substances 0.000 description 13
- 230000003028 elevating effect Effects 0.000 description 9
- 230000008569 process Effects 0.000 description 9
- 230000004048 modification Effects 0.000 description 8
- 238000012986 modification Methods 0.000 description 8
- 238000004140 cleaning Methods 0.000 description 6
- 238000001723 curing Methods 0.000 description 6
- 230000007547 defect Effects 0.000 description 6
- QTBSBXVTEAMEQO-UHFFFAOYSA-N acetic acid Substances CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 5
- 239000003595 mist Substances 0.000 description 5
- 239000000203 mixture Substances 0.000 description 5
- 230000002093 peripheral effect Effects 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 4
- 230000008859 change Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 230000000149 penetrating effect Effects 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- 230000003373 anti-fouling effect Effects 0.000 description 2
- 230000001174 ascending effect Effects 0.000 description 2
- 239000008199 coating composition Substances 0.000 description 2
- 238000007598 dipping method Methods 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000013007 heat curing Methods 0.000 description 2
- 230000005499 meniscus Effects 0.000 description 2
- 239000003960 organic solvent Substances 0.000 description 2
- 230000002265 prevention Effects 0.000 description 2
- 239000007921 spray Substances 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- 230000004308 accommodation Effects 0.000 description 1
- 239000003963 antioxidant agent Substances 0.000 description 1
- 230000003078 antioxidant effect Effects 0.000 description 1
- 239000002216 antistatic agent Substances 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000037237 body shape Effects 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- 238000007865 diluting Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000004043 dyeing Methods 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000007062 hydrolysis Effects 0.000 description 1
- 238000006460 hydrolysis reaction Methods 0.000 description 1
- 229910052809 inorganic oxide Inorganic materials 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 150000003961 organosilicon compounds Chemical class 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 230000002940 repellent Effects 0.000 description 1
- 239000005871 repellent Substances 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- 239000004094 surface-active agent Substances 0.000 description 1
- 229920002803 thermoplastic polyurethane Polymers 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- 239000006097 ultraviolet radiation absorber Substances 0.000 description 1
Images
Landscapes
- Surface Treatment Of Optical Elements (AREA)
- Coating Apparatus (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006055878A JP2007229648A (ja) | 2006-03-02 | 2006-03-02 | レンズのスピンコート装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006055878A JP2007229648A (ja) | 2006-03-02 | 2006-03-02 | レンズのスピンコート装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2007229648A true JP2007229648A (ja) | 2007-09-13 |
JP2007229648A5 JP2007229648A5 (enrdf_load_stackoverflow) | 2008-12-18 |
Family
ID=38550772
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006055878A Withdrawn JP2007229648A (ja) | 2006-03-02 | 2006-03-02 | レンズのスピンコート装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2007229648A (enrdf_load_stackoverflow) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013140302A (ja) * | 2012-01-06 | 2013-07-18 | Hoya Corp | 眼鏡レンズ用塗布液塗布装置 |
JP2013186349A (ja) * | 2012-03-08 | 2013-09-19 | Hoya Lense Manufacturing Philippine Inc | 光学部材の製造方法 |
CN107399567A (zh) * | 2016-05-19 | 2017-11-28 | 中西金属工业株式会社 | 具有升降功能的台车输送机 |
CN109675744A (zh) * | 2017-09-29 | 2019-04-26 | 临海市劳尔机械有限公司 | 一种镜片镀膜喷涂机 |
CN111487867A (zh) * | 2020-04-16 | 2020-08-04 | 浙江大学 | 一种液体晃动模型参考自适应抑制运动控制方法 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001269609A (ja) * | 2000-03-28 | 2001-10-02 | Tokyo Electron Ltd | 塗布処理装置 |
JP2002177852A (ja) * | 2000-12-15 | 2002-06-25 | Topcon Corp | 眼鏡レンズ用のレンズコーティング装置 |
-
2006
- 2006-03-02 JP JP2006055878A patent/JP2007229648A/ja not_active Withdrawn
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001269609A (ja) * | 2000-03-28 | 2001-10-02 | Tokyo Electron Ltd | 塗布処理装置 |
JP2002177852A (ja) * | 2000-12-15 | 2002-06-25 | Topcon Corp | 眼鏡レンズ用のレンズコーティング装置 |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013140302A (ja) * | 2012-01-06 | 2013-07-18 | Hoya Corp | 眼鏡レンズ用塗布液塗布装置 |
JP2013186349A (ja) * | 2012-03-08 | 2013-09-19 | Hoya Lense Manufacturing Philippine Inc | 光学部材の製造方法 |
CN107399567A (zh) * | 2016-05-19 | 2017-11-28 | 中西金属工业株式会社 | 具有升降功能的台车输送机 |
CN109675744A (zh) * | 2017-09-29 | 2019-04-26 | 临海市劳尔机械有限公司 | 一种镜片镀膜喷涂机 |
CN111487867A (zh) * | 2020-04-16 | 2020-08-04 | 浙江大学 | 一种液体晃动模型参考自适应抑制运动控制方法 |
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Legal Events
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A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20081029 |
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Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20081029 |
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A761 | Written withdrawal of application |
Free format text: JAPANESE INTERMEDIATE CODE: A761 Effective date: 20110119 |