JP2007225496A - Environmental testing device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a device capable of performing an environmental test in a more similar state to an actual using environment by reproducing temperature variation generated in a test object. <P>SOLUTION: This device includes a temperature dispersion detection means 35 for monitoring the temperature dispersion on a substrate in addition to a constant-temperature constant-humidity tank 3 for adjusting the internal environment. The temperature dispersion detection means 35 comprises three temperature sensors 36, 37, 38. An air blower 20 is controlled so that the temperature dispersion is in a proper range, and the air blowing amount is increased/decreased. When the temperature dispersion is small, wind velocity is lowered. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to an environmental test apparatus, and more particularly to a test apparatus that performs a test for placing an electronic device or the like in a predetermined environment and energizing the electronic device or the like in this state.

  For electronic devices such as IC and LSI, an environmental test called a burn-in test is often performed before shipment. The burn-in test is a test performed by placing an electronic device in a predetermined environment such as a high temperature and inputting a power supply voltage or a predetermined signal to the electronic device.

Since the burn-in test requires the electronic device to be placed in a high temperature environment or the like, an environmental test device equipped with a constant temperature and humidity chamber is used. That is, in the burn-in test, an electronic device is placed in a constant temperature and humidity chamber, and in this state, power supply power and a signal are input from the outside to the electronic device.
By the way, the environmental test apparatus generally includes a blower in addition to a heater and a refrigerator. And in order to reduce the temperature dispersion | variation in a constant temperature and humidity tank, the air in a tank is circulated with an air blower. The environmental test apparatus (burn-in test apparatus) provided with the air blower is disclosed by patent document 1,2.
Japanese Patent Laid-Open No. 3-48780 JP 2001-147251 A

Also in the environmental test apparatus disclosed in Patent Documents 1 and 2, the blower is used exclusively to eliminate temperature variations in the constant temperature and humidity chamber.
In general, in an environmental test apparatus, the rotational speed of a blower is constant.

By the way, in recent years, there is a demand for not only a burn-in test on a single unit such as an IC but also an environmental test on a substrate in which an electronic element such as an IC is incorporated.
In other words, a substrate on which electronic elements such as ICs, memories, transistors, resistors, capacitors, coils, etc. are wired is placed in an environmental test apparatus, and power supply power and signals are input to the substrate while exposed to high or low temperature environments. Check the operation.
The substrate described above includes an element that generates heat when energized. For this reason, in an environment where the substrate actually operates, temperature variation occurs throughout the substrate. For example, when a substrate is used by being incorporated in a housing of a personal computer, the substrate in the housing has a temperature variation as a whole. That is, when a specific element generates heat, the element becomes high in temperature, and the heat generated from the element propagates to the surroundings to raise the temperature around the element. Further, since the heat is not transmitted to the part away from the element, the temperature is low.
However, according to the environmental test apparatus of the prior art, such a state in which the temperature variation occurs cannot be reproduced.

In other words, the conventional environmental test apparatus blows air to keep the internal environment at a constant temperature and humidity. Therefore, it can be said that the inside of the environmental test apparatus is always in a blowing state. Further, as described above, in the environmental test apparatus, the rotational speed of the blower is constant. Therefore, in the conventional environmental test apparatus, a constant wind speed is always blown during the test.
Therefore, the heat generated from a specific element on the substrate is taken away by the air blowing, and the temperature of the element is lowered. In addition, heat propagation from the element to the surroundings is reduced, and the substrate becomes a uniform temperature as a whole.
FIG. 11 is a conceptual diagram showing a change in temperature distribution when a substrate is tested using a conventional environmental testing apparatus, and a dark shaded portion represents a high temperature portion.
As shown in FIG. 11, when the temperature in the test apparatus changes, the heat generated by the DUT is taken away by the air blow, and when the temperature in the test apparatus reaches a high temperature or a low temperature, the substrate temperature changes. It will be smoothed.

  Accordingly, the present invention focuses on the above-mentioned problems of the prior art, and develops an environmental test apparatus that can reproduce the temperature variation generated in the DUT and can perform a test in a state closer to the actual use environment. It is what.

  The invention described in claim 1 for solving the above-described problem is an environment test apparatus having an environment adjusting means for adjusting an environment in which the DUT is placed and an energizing means for energizing the DUT. Temperature variation detecting means for directly or indirectly detecting temperature variation in a single object, and the environment adjusting means has at least a blowing means and a blowing environment control means, and the temperature variation of the DUT is predetermined. It is an environmental test apparatus characterized by changing a ventilation environment by the said ventilation environment control means so that it may be maintained at a value.

Here, the air blowing environment is, for example, a total air volume, a wind speed, a wind direction, or the like.
The environmental test apparatus of the present invention has temperature variation detection means and monitors the temperature variation of the DUT. And a ventilation environment is changed so that the temperature dispersion | variation in a to-be-tested object may be maintained. Therefore, temperature variations occur in the DUT as in the actual usage environment, and a more realistic environmental test can be performed.

  According to the second aspect of the present invention, there is provided an environmental test apparatus having environmental control means for adjusting the environment in which the DUT is placed, and energization means for supplying current to the DUT. Or a temperature variation detecting means for indirectly detecting, the environment adjusting means having at least a blowing means and a blowing environment control means, and when the temperature variation of the DUT is larger than a predetermined value, the DUT The environmental test apparatus is characterized in that the airflow in contact with the test object is increased and the airflow in contact with the test object is decreased when the temperature variation of the test object is smaller than a predetermined value.

In the environmental test apparatus of the present invention, when the temperature variation of the DUT is larger than a predetermined value such as a target value, the air flow contacting the DUT is increased. The increase in the air volume may be performed in stages according to the amount of temperature variation, or may be increased in proportion to the value of temperature variation. The same applies when the air volume is reduced.
In the present invention, when the temperature variation of the DUT is large, the air flow in contact with the DUT is increased, so the amount of heat taken away from the substrate increases, and the temperature variation tends to decrease.
Moreover, in the environmental test apparatus of this invention, when the temperature variation of a to-be-tested object is smaller than a predetermined value, the ventilation which contacts a to-be-tested object is reduced. For this reason, the amount of heat taken away by the air flow decreases, and the temperature variation tends to increase.
Therefore, according to the environmental test apparatus of the present invention, the temperature variation of the DUT is controlled within a desired range.

  The temperature variation detecting means may measure the temperature of two or more parts of the single object under test (claim 3).

  Further, the temperature variation detecting means may indirectly detect the temperature variation based on a change in electrical characteristics of each part of the single DUT (claim 4).

  According to a fifth aspect of the present invention, there is provided an environmental test apparatus including an environmental adjustment unit that adjusts an environment in which the DUT is placed, and an energization unit that energizes the DUT. It has environmental control means, and it blows with a predetermined air flow until the environment where the DUT is placed becomes a predetermined environment, and after the environment for the DUT becomes a predetermined environment, the DUT The environmental test apparatus is characterized in that the air flow in contact with the object to be tested is adjusted so that the temperature variation becomes a predetermined value.

  In the environmental test apparatus according to the present invention, the air blown in contact with the test object is adjusted according to the temperature variation after the environment with respect to the test object becomes a predetermined environment. Therefore, a temperature variation within a desired range is generated in the DUT, and this is maintained.

  The invention according to claim 6 preliminarily tests the temperature variation of the DUT that occurs when the DUT is energized in a predetermined environment, and uses the data extracted based on the test to test the DUT. The environmental test apparatus according to claim 5, wherein the air blowing is adjusted so that the temperature variation of the object becomes a predetermined value based on the extracted data.

  According to the present invention, the probability that the temperature variation reaches a certain standard increases, and it can be made closer to the actual temperature variation.

  The invention described in claim 7 is characterized in that the air blowing environment control means can change at least one of the air blowing amount, the wind speed, and the wind direction. This is an environmental test device.

  The environmental test apparatus of the present invention can reproduce the temperature distribution generated when the DUT is actually used, and has the effect of creating an environment closer to the actual environment.

Hereinafter, embodiments of the present invention will be described.
FIG. 1 is a configuration diagram of an environmental test apparatus according to an embodiment of the present invention.
The environmental test apparatus 1 according to the present embodiment includes a constant temperature and humidity chamber 3 surrounded by a heat insulating material 2, and the environment inside the constant temperature and humidity tank 3 is controlled by the control device 4.
As described above, the constant temperature and humidity chamber 3 has a function of arbitrarily adjusting the internal environment such as the internal temperature and humidity. First, a schematic configuration of the thermostatic chamber 3 and means for adjusting the environment in the thermostatic chamber 3 will be described.

  The interior of the constant temperature and humidity chamber 3 is divided up and down by a partition plate 9 and divided into a DUT placement chamber 5 and an air conditioning passage 6 as shown in FIG. The air conditioning passage 6 is located below the DUT placement chamber 5 and has openings 7 and 8 communicating with the DUT placement chamber 5 on both sides. One opening 7 functions as a suction side opening, and the other opening 8 functions as an opening for ventilation.

An indoor temperature detection sensor 11 and a humidity detection sensor 12 are provided in the DUT placement chamber 5 and in the vicinity of the ventilation opening 8.
The indoor temperature detection sensor 11 is specifically a thermocouple.
Detection signals from the indoor temperature detection sensor 11 and the humidity detection sensor 12 are input to the control device 4 as shown in FIG.

A humidifier 15, an air cooling heat exchanger 16, a dehumidifying heat exchanger 17, a heater 18 and a blower 20 are arranged in the lower air conditioning passage 6.
As the humidifier 15, the air cooling heat exchanger 16, the dehumidifying heat exchanger 17 and the heater 18, all known ones can be adopted.
In the present embodiment, a blower 20 that can arbitrarily change the rotation speed is employed. That is, the motor 21 that rotates the blower 20 is a DC motor or an inverter-controlled AC motor, and the number of rotations is variable.
The humidifier 15, the air cooling heat exchanger 16, the dehumidifying heat exchanger 17, the heater 18, and the blower 20 are each connected to a driving device such as a relay, and a signal from the control device 4 as shown in FIG. 1. To work.

  In the environmental test apparatus 1 of this embodiment, the air in the constant temperature and humidity chamber 3 is circulated by the blower 20 and passes through the air conditioning passage 6 to create a desired environment. That is, the air in the constant temperature and humidity chamber 3 is sucked from the suction side opening 7 of the air conditioning passage 6 by the blower 20, passes through the air conditioning passage 6, and exits to the ventilation opening 8. At this time, the air passes through the air cooling heat exchanger 16 and the dehumidifying heat exchanger 17 and further touches the heater 18. Moreover, water vapor | steam is supplied from the humidifier 15 as needed.

  A setting input means 22 such as a numeric keypad or a touch panel is connected to the control device 4 of the environmental test apparatus 1 so that a desired environment in the constant temperature and humidity chamber 3 can be set and input. Moreover, the display means 23 is connected to the control apparatus 4, and the setting content and the environment in the constant temperature and humidity chamber 3 are displayed numerically.

In the environmental test apparatus 1, the temperature and humidity in the DUT placement chamber 5 are monitored by the indoor temperature detection sensor 11 and the humidity detection sensor 12. When the temperature in the DUT placement chamber 5 is lower than the temperature of the set environment, the heater 18 is energized to raise the temperature of the air, and the temperature in the DUT placement chamber 5 is higher than the temperature of the set environment. When the temperature is high, the refrigerant is passed through the air cooling heat exchanger 16 to lower the temperature of the air cooling heat exchanger 16 and take heat away from the circulating air.
Further, when the humidity in the DUT placement chamber 5 is lower than the humidity of the set environment, steam is injected from the humidifier 15 and mixed into the passing air.
Conversely, when the humidity in the DUT placement chamber 5 is higher than the humidity in the set environment, the dehumidifying heat exchanger 17 condenses the water vapor.

Next, the configuration and functions unique to the environmental test apparatus 1 of the present embodiment will be described.
The environmental test apparatus 1 of the present embodiment can test a substrate 30 on which an electronic device such as an IC is mounted, and has a specific configuration for that purpose. That is, the environmental test apparatus 1 according to the present embodiment includes power supply terminals 32 and 33 for supplying power to the substrate 30. Further, a temperature variation detecting means 35 for monitoring the temperature variation of the substrate is provided. The temperature variation detection means 35 is specifically three temperature sensors 36, 37, and 38 (first temperature sensor 36, second temperature sensor 37, and third temperature sensor 38). Known sensors such as thermocouples and thermistors can be used as the temperature sensors 36, 37, and 38.
The number of temperature sensors constituting the temperature variation detection means 35 is arbitrary, but at least two sensors are required to detect the variation. Of course, it can be said that the larger the number of temperature sensors constituting the temperature variation detecting means 35, the better.
The temperature sensors 36, 37, and 38 are connected to terminals 40, 41, and 42, and are further connected to the control device 4 by signal lines.

  Further, the control device 4 employed in the present embodiment includes a calculation unit that calculates a difference in temperature detected by the temperature sensors 36, 37, 38 from signals detected by the temperature sensors 36, 37, 38. In reality, the control device 4 has a built-in CPU, and the calculation unit is configured by software.

Further, the control device 4 includes a determination unit that determines whether or not the difference in temperature detected from each temperature sensor 36, 37, 38 is within a set range. The determination unit is also configured by software.
And the control apparatus 4 issues the signal which increases the ventilation volume of the air blower 20, when the difference of the temperature of each part of the board | substrate 30 which each temperature sensor 36,37,38 detects is larger than the setting range. That is, when the temperature variation of the substrate 30 exceeds the set range, the air flow rate is increased.
On the contrary, when the difference in temperature of each part of the substrate 30 detected by each temperature sensor 36, 37, 38 is smaller than the set range, a signal for reducing the amount of air blown by the blower 20 is issued. That is, when the temperature variation of the substrate 30 is smaller than the set range, the blowing amount is reduced.

  Next, functions of the environmental test apparatus 1 according to the present embodiment will be described in accordance with actual test procedures with reference to FIGS. FIG. 2 is a flowchart showing the operation of the environmental test apparatus of this embodiment. FIG. 3 is a time chart showing the operation of the environmental test apparatus of the present embodiment.

The environmental test apparatus 1 of this embodiment inspects the substrate 30 as described above, and sets test conditions as a test preparation stage. That is, the temperature and humidity in the constant temperature and humidity chamber 3 on which the substrate 30 is installed and their allowable ranges are set. In addition, when the temperature and humidity are repeatedly changed, the cycle, the time for keeping it constant, and the like are set.
Further, as a characteristic of the present embodiment, temperature variations of each part of the substrate 30 are set.
Specifically, an appropriate range of temperature differences detected by the first temperature sensor 36, the second temperature sensor 37, and the third temperature sensor 38 is set. For example, the difference between the detected temperature of the first temperature sensor 36 and the second temperature sensor 37 is 2 ° C to 4 ° C, and the difference between the second temperature sensor 37 and the third temperature sensor 38 is 1 ° C to 2 ° C. Yes, the setting is such that the difference between the third temperature sensor 38 and the first temperature sensor 36 is 5 ° C. to 6 ° C. Of the detected temperatures of the three temperature sensors 36, 37, and 38, a difference between the highest value and the lowest value may be set.

  Subsequently, a substrate 30 as a test object is placed in the constant temperature and humidity chamber 3. Specifically, the substrate 30 is placed in the DUT placement chamber 5. Then, the power supply terminals 32 and 33 provided in the DUT placement chamber 5 are connected to a power supply terminal (not shown) of the substrate 30.

When the preparation is completed, the environmental test apparatus 1 is activated and the test is started. Hereinafter, the environmental test apparatus 1 functions as shown in the flowchart of FIG.
That is, when the environmental test apparatus 1 is activated, each temperature control function or the like starts operating in step 1. Specifically, the humidifier 15, the air cooling heat exchanger 16, the dehumidifying heat exchanger 17, and the heater 18 are activated to try to bring the environment closer to the set environment. In step 2, the blower 20 starts rotating. The rotation speed of the blower 20 at this time is full rotation as shown in FIG.
In step 3, it waits for the set environment.

  If time a has elapsed as shown in the time chart of FIG. 3 and the set environment is reached, the process proceeds to step 4 and energization of the substrate 30 is started. Thereafter, the temperature variation of the substrate 30 is monitored in steps 5 to 8, and the air flow rate is increased or decreased so that the temperature variation falls within an appropriate range.

Specifically, in step 5, it is determined whether or not the temperature variation of the substrate 30 is larger than the set range. If the variation is large beyond the set range, the process proceeds to step 6 to increase the air flow, and then the process proceeds to step 9. If step 5 is NO, the process proceeds to step 7 to determine whether or not the variation is excessive. If the variation is too small, the process proceeds to step 8 to reduce the air flow, and then the process proceeds to step 9.
If step 7 is NO, the temperature variation of the substrate 30 is within the appropriate range, and the process proceeds to step 9 without changing the air flow rate.
In step 9, it is determined whether or not the environment (temperature and humidity) other than the air flow rate is within an appropriate range. If the environment such as temperature is within an allowable range, the process proceeds to step 11 to determine whether there is a test end signal. For example, it is determined whether or not a certain time or certain repetition has been completed.

If step 9 is NO and the environment such as temperature is out of the allowable range, the process proceeds to step 10, and the process proceeds to step 11 after issuing a signal such as increasing the heat generation amount.
If step 11 is NO and the test has not been completed yet, the process returns to step 5, and whether or not the variation and the environment are appropriate is monitored by steps 5 to 10. It should be noted that since a considerable delay time is required for the temperature of the substrate 30 to vary or change, it is desirable to provide a timer or the like that allows for the delay time.

  If a signal indicating the end of the test is confirmed in step 11, the test is terminated.

According to the series of tests described above, a desired test can be performed in a state where the temperature of the substrate 30 varies, and the environment in which the substrate 30 is actually placed can be reproduced.
Further, even in the case of performing a test in which the temperature environment in the constant temperature and humidity chamber 3 is repeatedly changed from a low temperature to a high temperature, and further from a high temperature to a low temperature, the heat dissipation from the substrate 30 side when the temperature changes as shown in FIG. The temperature variation of the substrate 30 is ensured at both low and high temperatures. FIG. 4 is a conceptual diagram showing a change in temperature distribution when the substrate is tested using the environmental test apparatus of the present invention, and the dark shaded portion represents a high temperature portion.

In the embodiment described above, the air flow rate is adjusted by changing the number of revolutions of the motor 21 of the blower 20, but it is also possible to increase or decrease the air flow rate by providing a damper or the like and adjusting the opening of the damper. is there.
Further, a wind direction plate or the like for controlling the direction of the wind may be provided, and the actual air volume in contact with the substrate may be increased or decreased by changing the wind direction.
Further, as in the embodiment shown in FIG. 5, a wind speed sensor 45 is provided in the DUT placement chamber 5, and the rotational speed of the motor 21 and the opening of the damper are controlled while monitoring the wind speed detected by the wind speed sensor 45. May be. Since the environmental test apparatus 50 shown in FIG. 5 is the same as the environmental test apparatus 1 in FIG. 1 except that the wind speed sensor 45 is provided, detailed description will be given by attaching the same numbers to the same members. Replace.

  The apparatus shown in FIG. 5 detects the overall wind speed of the air flowing through the DUT placement chamber 5 by the wind speed sensor 45, but by devising the position, direction and number of the wind speed sensors 45, It is good also as a structure which detects the wind speed of the wind which contacts the board | substrate 30 directly, the wind speed of the surface direction of the board | substrate 30, or an air volume.

  In the embodiment described above, the air flow rate is changed stepwise, but the air flow rate may be increased or decreased according to a deviation from the target variation amount. That is, the air flow rate and the wind speed may be proportionally controlled according to the temperature variation of the substrate 30.

  In the above-described embodiment, the heater 18 is placed in the air conditioning passage 6, and the temperature environment in the constant temperature and humidity chamber 3 is adjusted by raising the temperature of the air passing through the heater 18. Although temperature is controlled, the present invention is not limited to this. For example, the temperature of the substrate 30 may be controlled by irradiating the substrate 30 with infrared rays using a halogen lamp or the like, and controlling the temperature of the substrate 30 or placing the substrate 30 on a temperature-controlled hot plate. Further, temperature-controlled air may be blown directly onto the test object.

  In the above-described embodiment, the temperature variation detecting means 35 is constituted by the temperature sensors 36, 37, 38 such as thermocouples, and the temperature variation is detected by attaching the temperature sensors 36, 37, 38 directly to the substrate 30. However, the present invention is not limited to this, and the temperature of each part of the substrate 30 may be detected by detecting infrared rays or the like emitted from the substrate 30. Furthermore, a temperature distribution measuring device that directly measures the temperature distribution without contact, such as a device called a thermoviewer, may be used as the temperature variation detecting means.

In addition, it is possible to indirectly detect a variation in temperature from a change in resistance of each part of the substrate 30 or a change in flowing current value.
That is, as shown in FIG. 6, the resistance value between each part (for example, ai) of the board | substrate 30 is monitored. Here, since the resistance value of the DUT such as the substrate 30 generally changes slightly depending on the temperature, the temperature variation of the substrate 30 can be indirectly detected by monitoring the change in the resistance value of each part. .
In particular, since the environmental test apparatus of the present invention performs a test while energizing the substrate 30, it is easy to monitor changes in current and voltage flowing through each part. By monitoring changes in current and voltage, changes in electrical characteristics can be detected, and temperature variations can be indirectly known.

  Moreover, although the environmental test apparatus of the above-described embodiment has measured the temperature variation of the substrate 30 by any means and controlled the air volume and the like based on this, a preliminary test was performed in advance, and based on this test data. The air volume and the like may be controlled.

For example, when performing a test such that the DUT is repeatedly changed from a low temperature to a high temperature, and further from a high temperature to a low temperature, a preliminary test is performed in advance, and information on temperature variation and air blowing at this time (wind speed, air volume, Measure the orientation, timing of strength, etc.). Then, the air flow rate is adjusted so that the temperature variation of the DUT is reproduced based on the data extracted based on the test.
That is, an air blowing environment (wind speed, air volume, direction, strength timing, etc.) that causes a desired temperature variation in the DUT is programmed based on the data, and this program is stored in the control device. Actual environmental tests are conducted in accordance with this program. For example, when the heating amount and the heating time are programmed and heating for a certain time is completed, the rotation speed of the blower is decreased for a certain time. Alternatively, the rotational speed of the blower may be reduced when the environment in the constant temperature and humidity chamber 3 reaches a certain region.

Further, in the flowchart shown in FIG. 2 and the time chart of FIG. 3, the substrate 30 as the test object is energized after the environment in which the test object is placed becomes the desired test environment, but energization is started at an earlier time. May be.
For example, as shown in the flowchart in FIG. 7 and the time chart in FIG. 8, the air flow environment after the substrate 30 is energized when the temperature controller or the blower is activated and the environment in which the DUT is placed becomes a predetermined environment. May be adjusted.

Next, experiments conducted for confirming the effects of the present invention will be described.
FIG. 9 is a graph showing changes in temperature distribution at three points of the substrate when the environmental test of the substrate is performed using the environmental test apparatus shown in FIG. FIG. 10 is a graph showing changes in temperature distribution at three points of the substrate when the environmental test of the substrate is performed using a conventional environmental test apparatus.
As is apparent from a comparison of FIGS. 9 and 10, when the environmental test apparatus of the present embodiment is used, the temperature variation of the substrate can be reproduced. Therefore, the environmental test apparatus according to the present embodiment can perform a more useful test.

It is a block diagram of the environmental test apparatus of embodiment of this invention. It is a flowchart which shows operation | movement of the environmental test apparatus of this embodiment. It is a time chart which shows operation | movement of the environmental test apparatus of this embodiment. It is a conceptual diagram which shows the change of the temperature distribution at the time of testing a board | substrate using the environmental test apparatus of this invention. It is a block diagram of the environmental test apparatus of other embodiment of this invention. It is explanatory drawing which shows the policy which measures the temperature variation of a board | substrate. It is a flowchart which shows operation | movement of the environmental test apparatus of other embodiment of this invention. It is a time chart which shows operation | movement of the environmental test apparatus of other embodiment of this invention. It is a graph which shows the change of the temperature distribution of three points | pieces of a board | substrate at the time of performing the environmental test of a board | substrate using the environmental test apparatus shown in FIG. It is a graph which shows the change of the temperature distribution of 3 points | pieces of a board | substrate at the time of performing the environmental test of a board | substrate using the environmental test apparatus of a prior art. It is a conceptual diagram which shows the change of the temperature distribution at the time of testing a board | substrate using the environmental test apparatus of a prior art.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1,50 Environmental test apparatus 3 Constant temperature / humidity tank 4 Control apparatus 11 Indoor temperature detection sensor 12 Humidity detection sensor 15 Humidifier 16 Air-cooling heat exchanger 17 Dehumidification heat exchanger 18 Heater 20 Blower 21 Motor 22 Setting input means 23 Display device 30 Substrate (test object)
35 Temperature variation detection means 36 First temperature sensor 37 Second temperature sensor 38 Third temperature sensor 45 Wind speed sensor

Claims (7)

  Temperature variation detection that directly or indirectly detects temperature variations in a single DUT in an environmental test apparatus that has environmental adjustment means for adjusting the environment in which the DUT is placed and energization means for energizing the DUT. And the environment adjusting means includes at least a blowing means and a blowing environment control means, and changes the blowing environment by the blowing environment control means so that the temperature variation of the DUT is maintained at a predetermined value. An environmental test apparatus characterized by that.   Temperature variation detection that directly or indirectly detects temperature variations in a single DUT in an environmental test apparatus that has environmental adjustment means for adjusting the environment in which the DUT is placed and energization means for energizing the DUT. The environmental control means has at least a blower means and a blower environment control means, and when the temperature variation of the DUT is larger than a predetermined value, the blown air contacting the DUT is increased, and the DUT An environmental test apparatus characterized in that, when the temperature variation of an object is smaller than a predetermined value, the air flow contacting the object to be tested is reduced.   The environmental test apparatus according to claim 1 or 2, wherein the temperature variation detection means measures the temperature of two or more parts of a single object to be tested.   3. The environmental test apparatus according to claim 1, wherein the temperature variation detecting means indirectly detects the temperature variation based on a change in electrical characteristics of each part of the single DUT.   In an environmental test apparatus having an environmental adjustment means for adjusting an environment in which the DUT is placed and an energization means for energizing the DUT, the environmental adjustment means has at least a blowing means and a blowing environment control means, Until the environment where the object is placed becomes a predetermined environment, the air is blown at a predetermined air flow rate. After the environment for the DUT becomes a predetermined environment, the temperature variation of the DUT becomes a predetermined value. In this way, the environmental test apparatus is characterized by adjusting the air flow in contact with the test object.   Data in which the temperature variation of the DUT is extracted based on the data extracted based on the test conducted in advance for the temperature variation of the DUT that occurs when the DUT is energized in the specified environment. The environmental test apparatus according to claim 5, wherein the air blowing is adjusted so as to be a predetermined value based on the above. The environmental test apparatus according to any one of claims 1 to 6, wherein the air blowing environment control means is capable of changing at least one of an air blowing amount, a wind speed, and a wind direction.

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