JP2018105786A - Device and method for environmental testing - Google Patents

Abstract

PROBLEM TO BE SOLVED: To develop an environmental testing device with a plurality of tested objects as a testing object and capable of testing these objects in a simultaneous and parallel manner and capable of performing testing with a plurality of tested objects as objects that generate and adsorb heat.SOLUTION: An interior of a testing room 5 is divided into tested object arrangement rooms 20a, 20b, and 20c. Dedicated fans 21a, 21b, and 21c is provided for supplying the air regulated in temperature by the whole regulating means to the test object arrangement rooms, and for regulating an amount of the air supplied to the tested object arrangement rooms. The tested object arrangement room is provided with arrangement room inner temperature detection means t1, t2, and t3, and the dedicated fans 21a, 21b, and 21c are controlled based on a difference between this detected temperature and the temperature of the air supplied to the tested object arrangement rooms, and the amount of the air introduced into the tested object arrangement rooms are increased and decrease.SELECTED DRAWING: Figure 1

Description

  The present invention relates to an environmental test apparatus in which a test chamber is partitioned into a plurality of DUT placement chambers, and air is introduced from a common air conditioning unit to each DUT placement chamber. The present invention also relates to an environmental test method.

  Environmental testing is known as a measure for examining the performance and durability of products and parts. Environmental tests are performed using equipment called environmental test equipment. The environmental test apparatus artificially creates, for example, a high temperature environment, a low temperature environment, a high humidity environment, and the like.

FIG. 6 conceptually shows a typical environmental test apparatus 100.
The basic configuration of the environmental test apparatus 100 includes a heat insulating tank 3 covered with a heat insulating wall 2 as shown in FIG. A test chamber 5 is formed in a part of the heat insulating tank 3. The test chamber 5 is a space for installing a device under test.
The environmental test apparatus 100 further includes an air conditioner 17 and a main blower 10. The air conditioner 17 includes a humidifying device 6, a cooling device 7, and a heater (heating device) 8.
The environmental test apparatus 100 includes an air conditioning ventilation passage 15 that communicates with the test chamber 5 in a ring shape, and the air conditioning equipment 17 and the main blower 10 described above are incorporated in the air conditioning ventilation passage 15. In the environmental test apparatus 100, air conditioning means (overall air conditioning means) is configured by the air conditioning equipment 17 in the air conditioning ventilation path 15. The main blower 10 constitutes air supply means.

The air-conditioning ventilation path 15 is formed in a part of the heat insulating tank 3 and communicates with the test chamber 5 at two locations of the air blowing section 16 and the air introducing section 25.
Therefore, when the main blower 10 is activated, the air in the test chamber 5 is introduced from the air introduction unit 25 into the air conditioning ventilation path 15. Then, the air conditioning ventilation path 15 enters the ventilation state, air contacts the air conditioning equipment 17 to perform heat exchange and humidity adjustment, and the adjusted air is blown out from the air blowing section 16 into the test chamber 5.
Further, a temperature sensor 12 and a humidity sensor 13 are provided in the vicinity of the air blowing portion 16 of the air conditioning ventilation path 15.
When the environmental test apparatus 100 is used, the main blower 10 is operated to bring the air-conditioning ventilation path 15 into a ventilation state so that the detected values of the temperature sensor 12 and the humidity sensor 13 approach the temperature and humidity of the set environment. The air conditioner 17 is controlled.

By the way, as one form of the environmental test apparatus, there is a structure in which the test chamber is partitioned into a plurality of test object arrangement chambers as in the apparatuses disclosed in Patent Documents 1 and 2. The environmental test apparatus disclosed in Patent Documents 1 and 2 can test a plurality of objects to be tested and simultaneously test them.
The environmental test apparatus disclosed in Patent Document 1 is mainly used for a chemical stability test, and a plurality of specimen installation spaces (test object placement chambers) partitioned by walls are installed in a shelf shape. Yes. In the environmental test apparatus disclosed in Patent Document 1, air whose temperature and the like have been adjusted by passing through a common air conditioning ventilation path (overall air conditioning means) is divided and supplied to each specimen installation space. In the environmental test apparatus disclosed in Patent Document 1, air having the same temperature and humidity is equally supplied to each specimen installation space.

  The environmental test apparatus disclosed in Patent Document 2 mainly evaluates the performance of a secondary battery, and has a plurality of test object arrangement chambers in which test objects are installed. In the environmental test apparatus disclosed in Patent Document 2, the entire air conditioning unit is provided, and air adjusted to a predetermined air blowing target temperature is supplied to each test object arrangement chamber. Further, the environmental test apparatus disclosed in Patent Document 2 has a separate auxiliary heat source corresponding to each of the DUT placement chambers, and the DUT so that the temperature of the DUT becomes a predetermined target temperature of the DUT. Adjust the chamber temperature. Furthermore, in the environmental test apparatus disclosed in Patent Document 2, an auxiliary blower for air agitation is provided in each test object arrangement chamber.

Japanese Patent Laid-Open No. 2015-1405 JP2015-87204A

The environmental test apparatus disclosed in Patent Document 1 can test a plurality of test objects and test them in parallel. In the environmental test apparatus disclosed in Patent Document 1, air of the same temperature and humidity is equally supplied to each specimen installation space. Therefore, the temperature and humidity of each specimen installation space are the same, and these are individually set. It cannot be changed. Therefore, it is unsuitable for testing a test object that generates heat during a test such as an electronic device such as a substrate or a secondary battery.
In other words, since the heat generation time and amount of heat generated by the DUTs installed in each specimen installation space vary, each specimen installation depends on the condition of each DUT in order to keep the temperature of the DUT constant. Although it is necessary to change the temperature of the space, the environmental test apparatus disclosed in Patent Document 1 does not have a function of individually changing the temperature of each specimen installation space.

Also in the environmental test apparatus disclosed in Patent Document 2, it is possible to test a plurality of objects to be tested and simultaneously test them. The environmental test apparatus disclosed in Patent Document 2 has a function of individually changing the temperature of each DUT placement chamber, but each DUT placement chamber is narrow and there is an auxiliary heat source near the DUT. In this case, there is no room for the heat generated by the auxiliary heat source to be evenly diffused, and temperature variations may easily occur in the DUT placement chamber.
In the environmental test apparatus disclosed in Patent Document 2, as a countermeasure, an auxiliary blower for air agitation is provided in each DUT arrangement chamber, and the air in the DUT arrangement room is agitated by driving the auxiliary blower. Temperature variation is eliminated.

However, according to the environmental test apparatus disclosed in Patent Document 2, the supply air temperature varies for each DUT placement chamber according to the heat generation state of the DUT, so that the temperature detection end position in each DUT placement chamber is different. The temperature can be the same, but the temperature in each test object placement chamber may differ greatly at locations other than the temperature detection end, and it is difficult to say that multiple test objects are being tested in the same environment. There is.
Furthermore, according to the environmental test apparatus disclosed in Patent Document 2, the position and angle at which the wind strikes the test object changes depending on whether or not the auxiliary blower is driven, and in addition, as described above, the supply air temperature There is a concern that the test environment during the test will change.

  The present invention pays attention to the above-mentioned problems, and is an environmental test apparatus that can test a plurality of test objects and test them in parallel, such as an electronic device or a secondary battery. The purpose is to develop an environmental test apparatus that can test a test object that generates or absorbs heat.

  Invention of Claim 1 for solving an above-mentioned subject has the test room covered with the heat insulation wall, and the whole air-conditioning means which adjusts the temperature of air to predetermined blast target temperature, The said test room is , Air supply means for supplying air to the DUT placement chamber, which is divided into a plurality of DUT placement chambers for installing the DUT, and whose temperature is adjusted by the whole air conditioning means, and for supplying to the DUT placement chamber An air flow rate adjusting means for adjusting the amount of air, and an arrangement room temperature detecting means is provided in at least one of the inside of the DUT arrangement chamber, downstream thereof, or the DUT itself; The environmental test apparatus is characterized in that the air flow rate adjusting means is controlled based on the temperature difference of the air supplied to the DUT placement chamber, and the amount of air introduced into the DUT placement chamber is increased or decreased.

The environmental test apparatus disclosed in Patent Document 2 described above changes the temperature of the air supplied to the DUT placement chamber according to the heat generation of the DUT, whereas the environmental test apparatus of the present invention. Is to stabilize the temperature of the DUT by changing the supply amount of air supplied to the DUT placement chamber according to the heat generation of the DUT.
In the environmental test apparatus of the present invention, the test chamber is divided into a plurality of test object arrangement chambers, and a plurality of test objects can be tested, and tests can be performed on these simultaneously.
In the environmental test apparatus of the present invention, there is an overall air conditioning unit that adjusts the temperature of air to a predetermined air blowing target temperature, and the air adjusted by the overall air conditioning unit is divided and supplied to a plurality of test object arrangement chambers.
Here, the environmental test apparatus of the present invention has a ventilation amount adjusting means for adjusting the amount of air supplied to the DUT placement chamber. And the arrangement room temperature detection means is provided in the DUT placement chamber, and the ventilation amount adjusting means is controlled based on the temperature difference between the detection temperature of the placement room temperature detection means and the air supplied to the DUT placement room, The amount of air introduced into the DUT placement chamber is increased or decreased.
In the environmental test apparatus of the present invention, the temperature of the blast supplied to each of the DUT placement chambers is basically the same. Therefore, in principle, a plurality of test objects can be placed in the same temperature environment. In the environmental test apparatus of the present invention, the amount of air supplied to the DUT placement chamber is changed according to the temperature change of the DUT, and the thermal energy given to the DUT and the heat energy taken from the DUT are adjusted. And stabilize the temperature of the DUT.

  The invention according to claim 2 has a dedicated blower for supplying air whose temperature is adjusted by the whole air conditioning means to a specific DUT placement chamber, and the dedicated blower is capable of changing the amount of blown air. 2. The environmental test apparatus according to claim 1, wherein the dedicated blower serves as the air supply means and the air flow rate adjustment means.

  The environmental test apparatus of the present invention has a dedicated blower corresponding to the DUT placement chamber, and air conditioned by the dedicated blower is supplied to the DUT placement chamber. Since the dedicated blower employed by the environmental test apparatus of the present invention can change the amount of air blown, it can change the amount of air supplied to the DUT placement chamber according to the temperature change of the DUT, It is possible to stabilize the temperature of the DUT by adjusting the heat energy given to the DUT and the heat energy taken from the DUT.

  The invention described in claim 3 has a main blower that supplies air, the temperature of which has been adjusted by the entire air-conditioning means, to the test chamber, divides the blown air discharged from the main blower, and supplies the air to the DUT placement chamber. The environmental test apparatus according to claim 1, wherein the air flow rate adjusting means is an opening degree adjusting means, and the air amount supplied to the DUT placement chamber is increased or decreased by the opening degree adjusting means. It is.

  The environmental test apparatus of the present invention has a main blower similar to that of the prior art, and divides the blown air discharged from the main blower and supplies air to the device under test arrangement chamber. Here, the environmental test apparatus of the present invention has an opening degree adjusting means, and the amount of air supplied to the DUT placement chamber is increased or decreased by the opening degree adjusting means. Therefore, the supply amount of air supplied to the DUT placement chamber can be changed according to the temperature change of the DUT.

  The invention described in claim 4 has an auxiliary heat source on the downstream side of the entire air conditioning means, and has an introduction side temperature detecting means for detecting the temperature of the air supplied to the DUT placement chamber on the downstream side of the auxiliary heat source. The air flow rate adjusting means is controlled based on the difference between the detection temperature of the arrangement room temperature detection means and the detection temperature of the introduction side temperature detection means, and the amount of air introduced into the DUT arrangement room is increased or decreased. An environmental test apparatus according to any one of claims 1 to 3.

In the environmental test apparatus according to the present invention, since the auxiliary heat source is provided on the downstream side of the entire air conditioning unit, the temperature of the air introduced into the DUT placement chamber can be finely adjusted.
For example, when a configuration including a dedicated blower corresponding to the DUT placement chamber is employed, energy is given to the air by the blower, and the temperature of the air introduced into the DUT placement chamber may increase.
Therefore, there is a concern that the temperature of the air supplied to the DUT placement chamber varies depending on the driving status of the blower.
In the environmental test apparatus of the present invention, for example, the auxiliary heat source is always driven with a small calorific value, and when the blower is driven strongly, the auxiliary heat source is stopped or the calorific value is reduced, and the air temperature caused by the blower is reduced. The rise can be offset.

  In each of the above-mentioned inventions, the apparatus has an introduction side temperature detection means for detecting the temperature of the air supplied to the DUT placement chamber, and is located downstream of the introduction side temperature detection means and downstream of the air flow. The arrangement room temperature detection means is in the vicinity of the object or further downstream from the object, and the ventilation amount adjustment means is controlled based on the difference between the detection temperature of the arrangement room temperature detection means and the detection temperature of the introduction side temperature detection means. It is desirable that the amount of air introduced into the DUT placement chamber is increased or decreased (Claim 5).

  The invention relating to the environmental test method uses the environmental test apparatus according to any one of claims 1 to 5 to place the test object in the test object placement chamber and expose the test object to a desired test temperature for testing. In the environmental test method, the temperature of the air introduced into the DUT placement chamber is adjusted to the test temperature, and is based on the temperature difference between the detection temperature of the placement room temperature detection means and the air supplied to the DUT placement chamber. And controlling the air flow rate adjusting means to increase or decrease the amount of air introduced into the DUT placement chamber.

  According to the environmental test method of the present invention, the test can be performed in a state where the temperature of the DUT is smoothed.

  According to the environmental test apparatus of the present invention, it is possible to test a plurality of test objects and to test them in parallel. Moreover, even if the test object generates heat or absorbs heat during the test, the test can be continued while suppressing the temperature change of the test object.

1 is a conceptual diagram of an environmental test apparatus according to a first embodiment of the present invention. It is a conceptual diagram of the environmental test apparatus which concerns on 2nd Embodiment of this invention. It is a conceptual diagram of the environmental test apparatus which concerns on 3rd Embodiment of this invention. It is a conceptual diagram of the environmental test apparatus which concerns on 4th Embodiment of this invention. It is a conceptual diagram of the environmental test apparatus which concerns on 5th Embodiment of this invention. It is a conceptual diagram of the environmental test apparatus of a prior art.

The first embodiment of the present invention will be described below.
An environmental test apparatus 1 according to a first embodiment of the present invention is an environmental test apparatus that uses an electronic device such as a circuit board or a device that generates heat such as a secondary battery as a test object, and a thermostatic device that mainly controls temperature. Or a constant temperature and humidity device.
The environmental test apparatus 1 has the heat insulation tank 3 covered with the heat insulation wall 2, as shown in FIG. A test chamber 5 is formed in a part of the heat insulating tank 3.
In the environmental test apparatus 1 of the present embodiment, the interior of the test chamber 5 is partitioned into a plurality of test object arrangement chambers 20a, b, and c. For ease of explanation, in the environmental test apparatus 1 shown in FIG. 1, the interior of the test chamber 5 is divided into three test object arrangement chambers 20a, 20b, and 20c. The number is not limited.

  The environmental test apparatus 1 includes an air conditioner 17 as in the prior art. The environmental test apparatus 1 is not equivalent to the main blower 10 of the prior art. Instead, the dedicated blowers 21a, b, c are provided on the upstream side of the test object arrangement chambers 20a, b, c. . The dedicated fans 21a, 21b, and 21c are driven by an inverter-controlled motor or a direct current motor, and can control the number of rotations to increase or decrease the amount of air blown.

The air conditioner 17 includes a humidifier 6, a cooling device 7, and a heater (heating device) 8 as in the prior art.
The environmental test apparatus 1 includes an air conditioning ventilation path 15 and a dividing space 22 that communicate with the test chamber 5 in a ring shape. The air conditioning device 17 is built in the air conditioning ventilation path 15. In the environmental test apparatus 1, the entire air conditioning means is configured by the air conditioning equipment 17 in the air conditioning ventilation path 15.

The air conditioning ventilation path 15 is formed in a part of the heat insulating tank 3, and includes an air introduction part 25 and an air blowing part 16. The air blowing portion 16 of the air conditioning ventilation path 15 communicates with the dividing space 22. The upstream side of each of the DUT placement chambers 20a, b, c in the test chamber 5 communicates with the dividing space 22. Further, the downstream side of each of the DUT placement chambers 20a, b, c is opened in the test chamber 5.
On the other hand, the air introduction part 25 of the air conditioning ventilation path 15 communicates with the test chamber 5.
In the environmental test apparatus 1 according to the present embodiment, the test chamber 5 and the air-conditioning ventilation path 15 are connected in a ring shape via the dividing space 22.

Also, dedicated blowers 21 a, b, c corresponding to the DUT placement chambers 20 a, b, c are provided between the DUT placement chambers 20 a, b, c and the dividing space 22, respectively.
Therefore, when the dedicated blowers 21a, b, c are activated, the air in the test chamber 5 is introduced into the air-conditioning ventilation path 15 from the air introduction section 25. Then, the air conditioning ventilation path 15 enters the ventilation state, air contacts the air conditioning equipment 17, heat exchange and humidity adjustment are performed, and the air is discharged from the air blowing section 16 to the dividing space 22.
Further, the air in the dividing space 22 is sucked into the dedicated blowers 21a, b, and c and supplied to the test object arrangement chambers 20a, b, and c. The supplied air passes through each of the DUT placement chambers 20a, 20b, 20c, and returns to the air conditioning ventilation path 15 via the test chamber 5.
Further, a temperature sensor 12 and a humidity sensor 13 are provided in the vicinity of the air blowing portion 16 of the air conditioning ventilation path 15.

  When the environmental test apparatus 1 is used, the dedicated blowers 21a, 21b, and 21c are operated to bring the air-conditioning ventilation path 15 into a ventilation state, and the detected values of the temperature sensor 12 and the humidity sensor 13 are the temperature and humidity of the set environment. The air conditioner 17 is controlled so as to approach.

In the environmental test apparatus 1 of the present embodiment, two temperature sensors are provided in each of the DUT placement chambers 20a, 20b, 20c.
Specifically, introduction-side temperature sensors T1, T2, and T3 and arrangement room temperature sensors t1, t2, and t3 are provided in each of the DUT placement chambers 20a, b, and c.
The introduction side temperature sensors T1, T2, and T3 detect the temperature of the air introduced into each of the DUT placement chambers 20a, b, and c, and are used for dividing the DUT placement chambers 20a, b, and c. It is installed on the space 22 side. That is, the introduction side temperature sensors T1, T2, and T3 are installed in the respective test object arrangement chambers 20a, 20b, and 20c at positions upstream of the blowing direction.

  In contrast, the arrangement room temperature sensors t1, t2, and t3 are provided downstream of the introduction-side temperature sensors T1, T2, and T3 and close to the DUT 28. The arrangement room temperature sensors t1, t2, and t3 may be attached to the DUT 28.

Moreover, the environmental test apparatus 1 of this embodiment is controlled by a control device (not shown), and the control device detects the detected temperatures of the placement room temperature sensors t1, t2, and t3 and the detected temperatures of the introduction side temperature sensors T1, T2, and T3. To be compared.
And according to the difference of both, the rotational speed of exclusive blower 21a, b, c is increased / decreased. For example, if the detected temperatures of the arrangement room temperature sensors t1, t2, and t3 are equal to the detected temperatures of the introduction side temperature sensors T1, T2, and T3, the dedicated blowers 21a, b, and c have a normal rotation speed (for example, 50% output). Driven.
For example, if the DUT generates heat during the test and the detected temperatures of the arrangement room temperature sensors t1, t2, and t3 are higher than the detected temperatures of the introduction side temperature sensors T1, T2, and T3, the dedicated fans 21a, b, c Increase the rotation speed.

  The rotational speeds of the dedicated fans 21a, b, c may be increased or decreased in proportion to the deviation between the detected temperatures of the arrangement room temperature sensors t1, t2, t3 and the detected temperatures of the introduction side temperature sensors T1, T2, T3. It may be increased or decreased in stages.

When testing an electronic substrate or the like using the environmental test apparatus 1 of the present embodiment, the DUT 28 is installed in each of the DUT placement chambers 20a, 20b, and 20c, respectively, The test object 28 is energized and the change of the test object 28 is observed.
During the test, some things remain unchanged, and some are exothermic. As a result, the internal temperature of the test object placement chambers 20a, 20b, and 20c in which the heated test object 28 is placed rises, and the temperature detected by the placement room temperature sensors t1, t2, and t3 is the introduction side temperature. It becomes higher than the detection temperature of the sensors T1, T2, T3.
When such a phenomenon occurs, the dedicated fans 21a, b, c corresponding to the test object arrangement chambers 20a, b, c in which the heated test object 28 is installed increase in speed, and more air is supplied to the test object. It supplies to test article arrangement | positioning chamber 20a, b, c. As a result, more fresh air is in contact with the DUT 28, and the temperature difference between the DUT 28 and the temperature of the air in contact with the DUT 28 is maintained. Therefore, heat is removed from the DUT 28, and temperature fluctuations of the placement room temperature sensors t1, t2, and t3 are suppressed.

If it adds about the rotation speed of exclusive blower 21a, b, c, it is desirable that the minimum ventilation volume of exclusive blower 21a, b, c is predetermined by the cross-sectional area of the air-conditioning ventilation path 15, or the capacity | capacitance of the air conditioner 17.
For example, when paying attention to one dedicated blower 21a, the amount of blown air F1 of the dedicated blower 21a increases when the difference (t1−T1) between the detected temperature t1 of the arrangement indoor temperature sensor t1 and the detected temperature T1 of the introduction side temperature sensor T1 increases. Inverter control is performed so that the difference becomes a certain value or less. The same applies to the other dedicated fans 21b and 21c.
The ratio between the maximum air volume and the minimum air volume of each of the dedicated fans 21a, 21b, 21c is set so that the difference (t−T) between the detected temperature t of the arrangement indoor temperature sensor t and the detected temperature T of the introduction side temperature sensor T is less than or equal to. Should be determined by what.
For example, among the expected DUTs 28, the minimum airflow of the dedicated fans 21a, b, c should be set to such an extent that the maximum heat generation can be dealt with although the heat generation is expected to be the smallest. is there.
In addition, although the maximum heat generation amount is expected, the maximum airflow amount of the dedicated fans 21a, b, c should be set to such an extent that the maximum heat generation amount can be dealt with.

Next, a second embodiment of the present invention will be described. Since the environmental test apparatus 30 of the second embodiment is common to the environmental test apparatus 1 of the first embodiment described above in many parts, the description of the environmental test apparatus 30 is the same as that of the environmental test apparatus 1 of the first embodiment. Emphasis is placed on the differences, and common portions are given the same reference numerals in the drawings, and redundant description is omitted.
The environmental test apparatus 30 of the second embodiment is provided with dampers 31a, b, c serving as ventilation rate adjusting means instead of the dedicated fans 21a, b, c, and adjusting the opening degree of the dampers 31a, b, c. The amount of air supplied to the DUT placement chambers 20a, 20b, 20c is increased or decreased.
The environmental test apparatus 30 of 2nd Embodiment is equipped with the main air blower 10 similarly to a prior art, and the air conditioning apparatus 17 and the main air blower 10 are incorporated in the air-conditioning ventilation path 15. FIG.

The environmental test apparatus 30 also has an air conditioning ventilation path 15 and a dividing space 22 that communicate with the test chamber 5 in a ring shape. The air blowing portion 16 of the air conditioning ventilation path 15 communicates with the dividing space 22. Dampers 31 a, b, and c are provided at connection portions between the DUT placement chambers 20 a, b, and c and the dividing space 22. The dampers 31a, b, and c are connected to a power source such as a motor, and the opening degree can be changed by the power.
In the environmental test apparatus 30, when the main blower 10 is activated, the air in the test chamber 5 is introduced from the air introduction unit 25 into the air conditioning ventilation path 15 to adjust the temperature and the like, and the air blowing unit 16 enters the dividing space 22. The adjusted air is discharged.
Furthermore, the air in the dividing space 22 passes through the dampers 31a, b, and c and is supplied to the DUT placement chambers 20a, b, and c. The supplied air passes through each of the DUT placement chambers 20a, 20b, 20c, and returns to the air conditioning ventilation path 15 via the test chamber 5.

  When using the environmental test apparatus 30, the main blower 10 is operated to bring the air-conditioning ventilation path 15 into a ventilation state so that the detected values of the temperature sensor 12 and the humidity sensor 13 approach the temperature and humidity of the set environment. The air conditioner 17 is controlled.

Also in the environmental test apparatus 30 of the present embodiment, the detected temperatures of the arrangement room temperature sensors t1, t2, t3 and the detected temperatures of the introduction side temperature sensors T1, T2, T3 are compared by a control device (not shown).
Then, according to the difference between the two, the dampers 31a, b, c corresponding to the DUT placement chambers 20a, 20b, 20c are operated to increase or decrease the opening degree.
For example, if the detected temperatures of the arrangement room temperature sensors t1, t2, and t3 are equal to the detected temperatures of the introduction side temperature sensors T1, T2, and T3, the openings of the dampers 31a, b, and c are set to the intermediate positions (for example, 50%). Opening).
For example, if the DUT generates heat during the test and the detected temperature of any of the placement room temperature sensors t1, t2, t3 becomes higher than the detected temperature of the introduction side temperature sensors T1, T2, T3, the corresponding damper 31a. , B, c are opened.

When testing an electronic substrate or the like using the environmental test apparatus 30 of the present embodiment, the DUT 28 is installed in each of the DUT placement chambers 20a, 20b, and 20c, respectively, The test object 28 is energized and the change in the test object is observed.
During the test, some things remain unchanged, and some are exothermic. As a result, the temperature in any one of the DUT placement chambers 20a, 20b, 20c rises, and the detected temperatures of the placed room temperature sensors t1, t2, t3 are higher than the detected temperatures of the introduction-side temperature sensors T1, T2, T3. Also gets higher.
When such a phenomenon occurs, the opening degree of the dampers 31a, b, c corresponding to the test object placement chambers 20a, b, c in which the test object that generates heat is installed is opened, and more air is tested. It supplies to the object arrangement | positioning chamber 20a, b, c. As a result, more fresh air comes into contact with the test object, and the temperature difference between the test object and the temperature of the air in contact with the test object is maintained. Therefore, heat is removed from the device under test, and temperature fluctuations of the arrangement room temperature sensors t1, t2, and t3 are suppressed.

In the embodiment described above, the air whose temperature is adjusted by the overall air conditioning means (air conditioning equipment 17) is supplied as it is to each of the DUT placement chambers 20a, 20b, 20c, but the temperature correction means may be provided between them. Good.
For example, if it is the structure of 1st Embodiment, you may provide auxiliary | assistant heat source 33a, b, c in the downstream of the air-conditioning equipment 17, and the upstream of exclusive blower 21a, b, c like FIG.
It is desirable that the auxiliary heat sources 33a, b, c be used for the purpose of unifying the temperature of the air introduced into each of the DUT placement chambers 20a, b, c.

For example, when the heat generated by the dedicated blowers 21a, b, c cannot be ignored, the amount of heat generated by the auxiliary heat sources 33a, b, c can be increased or decreased to reduce the amount of air introduced into each of the DUT placement chambers 20a, b, c. Align temperatures.
Specifically, immediately after the start of the test, when all the auxiliary heat sources 33a, b, c are driven and the blast volume of the dedicated fans 21a, b, c is increased, the corresponding DUT placement chamber 20a is applied. , B and c, the outputs of the auxiliary heat sources 33a, b and c are reduced.
As a result, the increase in the heat generation of the dedicated fans 21a, b, c is offset by the decrease in the output of the auxiliary heat sources 33a, b, c, and the change in the temperature of the air introduced into each of the DUT placement chambers 20a, b, c. It is suppressed.

  4 is a conceptual diagram when auxiliary heat sources 33a, b, and c are added to the environmental test apparatus 30 shown in FIG.

In the embodiment described above, the introduction side temperature sensors T1, T2, and T3 corresponding to the respective specimen placement chambers 20a, b, and c are provided, but the introduction side temperature sensors T1, T2, and T3 are not necessarily provided for each specimen. There is no need to provide one for each of the placement chambers 20a, b, c. For example, any one of the introduction side temperature sensors T1, T2, T3 is used to compare with the detected temperatures of the placement chamber temperature sensors t1, t2, t3. May be.
Further, the temperature sensor 12 provided in the vicinity of the air blowing portion 16 of the air conditioning ventilation path 15 may be replaced with the introduction side temperature sensors T1, T2, T3.
Since the arrangement room temperature sensors t1, t2, and t3 detect the temperature of the air after passing through the DUT 28, they are not necessarily in the DUT arrangement rooms 20a, 20b, and 20c, For example, as shown in FIG. 5, it may be on the downstream side of each of the DUT placement chambers 20a, 20b, 20c.
Multiple DUTs 28 may be installed in one DUT placement chamber 20a, b, c.

DESCRIPTION OF SYMBOLS 1,30 Environmental test apparatus 5 Test room 10 Main fan 12 Temperature sensor 13 Humidity sensor 15 Air-conditioning ventilation path 17 Air-conditioning equipment 20a, b, c Test object arrangement room 21a, b, c Dedicated fan 22 Dividing space 28 Test object 31a, b, c Damper 33a, b, c Auxiliary heat source T1, T2, T3 Introduction side temperature sensor t1, t2, t3 Arrangement room temperature sensor

Claims (6)

A test chamber covered with a heat insulating wall and an overall air conditioning means for adjusting the temperature of the air to a predetermined air blowing target temperature,
The test chamber is divided into a plurality of test object arrangement chambers for installing the test object, and an air supply means for supplying air whose temperature is adjusted by the whole air conditioning means to the test object arrangement chamber, and the test object arrangement A ventilation amount adjusting means for adjusting the amount of air supplied to the chamber;
Arrangement room temperature detection means is provided in the DUT placement chamber or downstream thereof or at least in the DUT itself, and the temperature difference between the detection temperature of the placement room temperature detection means and the air supplied to the DUT placement chamber The environmental test apparatus is characterized in that the air flow rate adjusting means is controlled on the basis of the air flow rate and the amount of air introduced into the DUT placement chamber is increased or decreased.   A dedicated blower for supplying air whose temperature is adjusted by the entire air conditioning means to a specific specimen placement chamber, the dedicated blower being capable of changing the amount of air flow, and the dedicated blower is the air supply means The environmental test apparatus according to claim 1, which also serves as the ventilation amount adjusting means.   It has a main blower that supplies air whose temperature is adjusted by the whole air conditioning means to the test chamber, divides the blown air discharged from the main blower and supplies air to the DUT placement chamber, and adjusts the air flow rate The environmental test apparatus according to claim 1, wherein the means is an opening degree adjusting means, and the air amount supplied to the DUT placement chamber is increased or decreased by the opening degree adjusting means. There is an auxiliary heat source on the downstream side of the overall air conditioning means, and there is an introduction side temperature detection means for detecting the temperature of the air supplied to the DUT placement chamber on the downstream side of the auxiliary heat source,
The air flow rate adjusting means is controlled based on the difference between the detection temperature of the arrangement room temperature detection means and the detection temperature of the introduction side temperature detection means, and the amount of air introduced into the DUT arrangement room is increased or decreased. The environmental test apparatus according to any one of claims 1 to 3. It has introduction side temperature detection means for detecting the temperature of the air supplied to the DUT placement chamber, and is located downstream of the flow of air from the introduction side temperature detection means and in the vicinity of the DUT. Furthermore, the arrangement room temperature detection means is located downstream,
The air flow rate adjusting means is controlled based on the difference between the detection temperature of the arrangement room temperature detection means and the detection temperature of the introduction side temperature detection means, and the amount of air introduced into the DUT arrangement room is increased or decreased. The environmental test apparatus according to any one of claims 1 to 4. An environmental test method using the environmental test apparatus according to any one of claims 1 to 5, wherein the test object is placed in a test object placement chamber, and the test object is exposed to a desired test temperature.
The temperature of the air introduced into the DUT placement chamber is adjusted to the test temperature, and the ventilation rate adjustment means is controlled based on the temperature difference between the temperature detected by the placement room temperature detection means and the temperature of the air supplied to the DUT placement room. And increasing or decreasing the amount of air introduced into the DUT chamber.

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