JP2007218677A - 走査型プローブ顕微鏡 - Google Patents
走査型プローブ顕微鏡 Download PDFInfo
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- JP2007218677A JP2007218677A JP2006038164A JP2006038164A JP2007218677A JP 2007218677 A JP2007218677 A JP 2007218677A JP 2006038164 A JP2006038164 A JP 2006038164A JP 2006038164 A JP2006038164 A JP 2006038164A JP 2007218677 A JP2007218677 A JP 2007218677A
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- 239000007788 liquid Substances 0.000 description 1
- WPBNNNQJVZRUHP-UHFFFAOYSA-L manganese(2+);methyl n-[[2-(methoxycarbonylcarbamothioylamino)phenyl]carbamothioyl]carbamate;n-[2-(sulfidocarbothioylamino)ethyl]carbamodithioate Chemical compound [Mn+2].[S-]C(=S)NCCNC([S-])=S.COC(=O)NC(=S)NC1=CC=CC=C1NC(=S)NC(=O)OC WPBNNNQJVZRUHP-UHFFFAOYSA-L 0.000 description 1
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006038164A JP2007218677A (ja) | 2006-02-15 | 2006-02-15 | 走査型プローブ顕微鏡 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006038164A JP2007218677A (ja) | 2006-02-15 | 2006-02-15 | 走査型プローブ顕微鏡 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2007218677A true JP2007218677A (ja) | 2007-08-30 |
| JP2007218677A5 JP2007218677A5 (https=) | 2008-07-10 |
Family
ID=38496158
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2006038164A Withdrawn JP2007218677A (ja) | 2006-02-15 | 2006-02-15 | 走査型プローブ顕微鏡 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2007218677A (https=) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2018131343A1 (ja) * | 2017-01-10 | 2018-07-19 | 国立大学法人大阪大学 | スキャナ及び走査型プローブ顕微鏡 |
| KR102270289B1 (ko) * | 2021-04-06 | 2021-06-28 | (주)참트레이딩 | 미립자 계측 시스템 |
| JP2023025706A (ja) * | 2020-03-27 | 2023-02-22 | 株式会社Kokusai Electric | 基板処理装置、半導体装置の製造方法、基板処理方法及びプログラム |
| JP2023137774A (ja) * | 2022-03-18 | 2023-09-29 | 株式会社島津製作所 | 走査型プローブ顕微鏡 |
| JP7852319B2 (ja) | 2022-03-18 | 2026-04-28 | 株式会社島津製作所 | 走査型プローブ顕微鏡 |
-
2006
- 2006-02-15 JP JP2006038164A patent/JP2007218677A/ja not_active Withdrawn
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2018131343A1 (ja) * | 2017-01-10 | 2018-07-19 | 国立大学法人大阪大学 | スキャナ及び走査型プローブ顕微鏡 |
| EP3570045A4 (en) * | 2017-01-10 | 2020-01-29 | Osaka University | SCANNER AND FOR GRID PROBE MICROSCOPE |
| JPWO2018131343A1 (ja) * | 2017-01-10 | 2020-02-06 | 国立大学法人大阪大学 | スキャナ及び走査型プローブ顕微鏡 |
| US10884022B2 (en) | 2017-01-10 | 2021-01-05 | Osaka University | Scanner and scanning probe microscope |
| JP2023025706A (ja) * | 2020-03-27 | 2023-02-22 | 株式会社Kokusai Electric | 基板処理装置、半導体装置の製造方法、基板処理方法及びプログラム |
| JP7443476B2 (ja) | 2020-03-27 | 2024-03-05 | 株式会社Kokusai Electric | 基板処理装置、半導体装置の製造方法、基板処理方法、プログラム及び排気装置 |
| US11935762B2 (en) | 2020-03-27 | 2024-03-19 | Kokusai Electric Corporation | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium |
| US12518981B2 (en) | 2020-03-27 | 2026-01-06 | Kokusai Electric Corporation | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium |
| KR102270289B1 (ko) * | 2021-04-06 | 2021-06-28 | (주)참트레이딩 | 미립자 계측 시스템 |
| JP2023137774A (ja) * | 2022-03-18 | 2023-09-29 | 株式会社島津製作所 | 走査型プローブ顕微鏡 |
| JP7852319B2 (ja) | 2022-03-18 | 2026-04-28 | 株式会社島津製作所 | 走査型プローブ顕微鏡 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20080528 |
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| A621 | Written request for application examination |
Effective date: 20080528 Free format text: JAPANESE INTERMEDIATE CODE: A621 |
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| A761 | Written withdrawal of application |
Effective date: 20091228 Free format text: JAPANESE INTERMEDIATE CODE: A761 |