JP2007199687A5 - - Google Patents
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- Publication number
- JP2007199687A5 JP2007199687A5 JP2006335526A JP2006335526A JP2007199687A5 JP 2007199687 A5 JP2007199687 A5 JP 2007199687A5 JP 2006335526 A JP2006335526 A JP 2006335526A JP 2006335526 A JP2006335526 A JP 2006335526A JP 2007199687 A5 JP2007199687 A5 JP 2007199687A5
- Authority
- JP
- Japan
- Prior art keywords
- electrically connected
- wiring
- forming
- source
- drain electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- 239000010408 film Substances 0.000 claims 37
- 239000004065 semiconductor Substances 0.000 claims 25
- 230000001681 protective effect Effects 0.000 claims 12
- 239000010409 thin film Substances 0.000 claims 9
- 239000011521 glass Substances 0.000 claims 8
- 239000004973 liquid crystal related substance Substances 0.000 claims 8
- 239000000758 substrate Substances 0.000 claims 8
- 239000003990 capacitor Substances 0.000 claims 6
- 238000004519 manufacturing process Methods 0.000 claims 6
- 238000004544 sputter deposition Methods 0.000 claims 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 4
- 229910052814 silicon oxide Inorganic materials 0.000 claims 4
- 238000001312 dry etching Methods 0.000 claims 2
- 238000000034 method Methods 0.000 claims 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006335526A JP5121221B2 (ja) | 2005-12-26 | 2006-12-13 | 半導体装置 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005372586 | 2005-12-26 | ||
| JP2005372586 | 2005-12-26 | ||
| JP2006335526A JP5121221B2 (ja) | 2005-12-26 | 2006-12-13 | 半導体装置 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2012063042A Division JP5417473B2 (ja) | 2005-12-26 | 2012-03-21 | 半導体装置の作製方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2007199687A JP2007199687A (ja) | 2007-08-09 |
| JP2007199687A5 true JP2007199687A5 (enExample) | 2009-11-12 |
| JP5121221B2 JP5121221B2 (ja) | 2013-01-16 |
Family
ID=38454316
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2006335526A Active JP5121221B2 (ja) | 2005-12-26 | 2006-12-13 | 半導体装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5121221B2 (enExample) |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5292066B2 (ja) | 2007-12-05 | 2013-09-18 | 株式会社半導体エネルギー研究所 | 表示装置 |
| KR101999970B1 (ko) * | 2008-09-19 | 2019-07-15 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 |
| CN101719493B (zh) | 2008-10-08 | 2014-05-14 | 株式会社半导体能源研究所 | 显示装置 |
| EP2180518B1 (en) * | 2008-10-24 | 2018-04-25 | Semiconductor Energy Laboratory Co, Ltd. | Method for manufacturing semiconductor device |
| CN103984176B (zh) * | 2009-10-09 | 2016-01-20 | 株式会社半导体能源研究所 | 液晶显示装置及包括该液晶显示装置的电子设备 |
| JP5679143B2 (ja) * | 2009-12-01 | 2015-03-04 | ソニー株式会社 | 薄膜トランジスタならびに表示装置および電子機器 |
| US8598586B2 (en) * | 2009-12-21 | 2013-12-03 | Semiconductor Energy Laboratory Co., Ltd. | Thin film transistor and manufacturing method thereof |
| JP5821481B2 (ja) * | 2011-09-30 | 2015-11-24 | 東レ株式会社 | ネガ型感光性樹脂組成物およびそれを用いた保護膜およびタッチパネル部材 |
| TWI782259B (zh) | 2012-10-24 | 2022-11-01 | 日商半導體能源研究所股份有限公司 | 半導體裝置及其製造方法 |
| KR102571610B1 (ko) | 2017-02-13 | 2023-08-30 | 삼성디스플레이 주식회사 | 반도체 장치 및 이의 제조방법 |
| JP7508336B2 (ja) * | 2020-10-26 | 2024-07-01 | 株式会社ジャパンディスプレイ | 半導体基板及び表示装置 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1996030801A1 (en) * | 1995-03-29 | 1996-10-03 | Hitachi, Ltd. | Liquid crystal display |
| JP3582193B2 (ja) * | 1995-12-08 | 2004-10-27 | カシオ計算機株式会社 | 液晶表示素子 |
-
2006
- 2006-12-13 JP JP2006335526A patent/JP5121221B2/ja active Active
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