JP2007198815A5 - - Google Patents

Download PDF

Info

Publication number
JP2007198815A5
JP2007198815A5 JP2006015812A JP2006015812A JP2007198815A5 JP 2007198815 A5 JP2007198815 A5 JP 2007198815A5 JP 2006015812 A JP2006015812 A JP 2006015812A JP 2006015812 A JP2006015812 A JP 2006015812A JP 2007198815 A5 JP2007198815 A5 JP 2007198815A5
Authority
JP
Japan
Prior art keywords
cantilever
probe unit
cusp
measured
unit according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2006015812A
Other languages
Japanese (ja)
Other versions
JP2007198815A (en
JP4810241B2 (en
Filing date
Publication date
Application filed filed Critical
Priority to JP2006015812A priority Critical patent/JP4810241B2/en
Priority claimed from JP2006015812A external-priority patent/JP4810241B2/en
Publication of JP2007198815A publication Critical patent/JP2007198815A/en
Publication of JP2007198815A5 publication Critical patent/JP2007198815A5/ja
Application granted granted Critical
Publication of JP4810241B2 publication Critical patent/JP4810241B2/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Claims (8)

尖点を被測定物に近接させたときに前記尖点と前記被測定物とに生じる原子間の力を検出することにより前記被測定物の面形状を計測するためのプローブユニットであって、
前記プローブユニットの基準部材に支持された第１のカンチレバーと、前記基準部材に支持された第２のカンチレバーと、各カンチレバーに固定された尖点と、各カンチレバーの変位を検出する検出手段と、各尖点に発生する前記力を一定に保つために、各カンチレバーを独立して駆動する駆動手段と、前記第１のカンチレバーを前記基準部材上で走査する走査手段と、を有し、
前記第１のカンチレバーの変位に基づいて前記被測定物の面形状を計測し、前記第２のカンチレバーの変位に基づいて、前記被測定物に対する前記基準部材の相対位置の変化を検出し、その検出値から前記面形状の計測値を補正することを特徴とするプローブユニット。 A probe unit for measuring a surface shape of the object to be measured by detecting a force between atoms generated at the point and the object to be measured when the point is brought close to the object to be measured,
A first cantilever supported by a reference member of the probe unit; a second cantilever supported by the reference member; a cusp fixed to each cantilever; and a detecting means for detecting displacement of each cantilever; In order to keep the force generated at each cusp constant, driving means for independently driving each cantilever, and scanning means for scanning the first cantilever on the reference member,
Measuring the surface shape of the object to be measured based on the displacement of the first cantilever, detecting the change in the relative position of the reference member with respect to the object to be measured based on the displacement of the second cantilever , A probe unit that corrects a measurement value of the surface shape from a detection value . 前記第１のカンチレバーの尖点は、複数の前記第２のカンチレバーの尖点を結ぶ直線上に配設されていることを特徴とする請求項１記載のプローブユニット。   The probe unit according to claim 1, wherein the cusp of the first cantilever is disposed on a straight line connecting the cusps of the plurality of second cantilevers. 前記第１のカンチレバーの尖点の周辺に、同一直線上に無い少なくとも３個の前記第２のカンチレバーの尖点が２次元的に配設されていることを特徴とする請求項１または２記載のプローブユニット。 The cusp of at least 3 said 2nd cantilever which is not on the same straight line is arrange | positioned two-dimensionally around the cusp of the said 1st cantilever. Probe unit. 前記駆動手段は、前記第１および前記第２のカンチレバーをそれぞれ前記被測定物に垂直な方向に駆動するように同軸的に配設された複数の円管状の圧電素子を有することを特徴とする請求項１ないし３いずれか１項記載のプローブユニット。   The driving means includes a plurality of circular piezoelectric elements arranged coaxially so as to drive the first and second cantilevers in a direction perpendicular to the object to be measured. The probe unit according to any one of claims 1 to 3. 前記第２のカンチレバーの尖点は、球形状であることを特徴とする請求項１ないし４いずれか１項記載のプローブユニット。   The probe unit according to any one of claims 1 to 4, wherein the cusp of the second cantilever has a spherical shape. 前記第２のカンチレバーの尖点は、三角柱形状であることを特徴とする請求項１ないし４いずれか１項記載のプローブユニット。   The probe unit according to any one of claims 1 to 4, wherein the cusp of the second cantilever has a triangular prism shape. 前記第２のカンチレバーの尖点は、複数の針状突起を有することを特徴とする請求項１ないし４いずれか１項記載のプローブユニット。   The probe unit according to any one of claims 1 to 4, wherein the cusp of the second cantilever has a plurality of needle-like protrusions. 請求項１ないし７いずれか１項記載のプローブユニットと、前記プローブユニットを前記被測定物に対して相対的に移動させるプローブユニット移動手段と、を備えたことを特徴とする原子間力顕微鏡。   8. An atomic force microscope comprising: the probe unit according to claim 1; and probe unit moving means for moving the probe unit relative to the object to be measured.
JP2006015812A 2006-01-25 2006-01-25 Probe unit and atomic force microscope Expired - Fee Related JP4810241B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2006015812A JP4810241B2 (en) 2006-01-25 2006-01-25 Probe unit and atomic force microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006015812A JP4810241B2 (en) 2006-01-25 2006-01-25 Probe unit and atomic force microscope

Publications (3)

Publication Number Publication Date
JP2007198815A JP2007198815A (en) 2007-08-09
JP2007198815A5 true JP2007198815A5 (en) 2009-03-12
JP4810241B2 JP4810241B2 (en) 2011-11-09

Family

ID=38453571

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006015812A Expired - Fee Related JP4810241B2 (en) 2006-01-25 2006-01-25 Probe unit and atomic force microscope

Country Status (1)

Country Link
JP (1) JP4810241B2 (en)

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3675158D1 (en) * 1985-11-26 1990-11-29 Ibm METHOD AND MICROSCOPE FOR GENERATING TOPOGRAPHIC IMAGES USING ATOMIC INTERACTIONS WITH SUB-RESOLUTION.
JP2896794B2 (en) * 1988-09-30 1999-05-31 キヤノン株式会社 Scanning tunnel current detector, scanning tunnel microscope, and recording / reproducing device
JPH0315704A (en) * 1989-06-13 1991-01-24 Olympus Optical Co Ltd Scanning tunnelling microscope
DE4344499C2 (en) * 1993-12-24 1998-09-10 Forschungszentrum Juelich Gmbh Scanning probe microscope with detector probe
JPH08184600A (en) * 1994-12-28 1996-07-16 Hitachi Ltd Scanning probe microscope
JPH10267943A (en) * 1997-03-27 1998-10-09 Shimadzu Corp Scanning type probe microscope

Similar Documents

Publication Publication Date Title
US8196458B2 (en) Nanoindenter
JP5546952B2 (en) Force monitoring method and apparatus
WO2008052065A3 (en) Three-dimensional nanoscale metrology using firat probe
CN100405040C (en) Film stretching loading device under scanning microscopy environment and film distortion measurement method
CN101226121B (en) Precision charger for material nano metric bending mechanical properties test
CN104297082B (en) The most micro-nano impression/scarification tester
EP1351256A3 (en) Scanning probe system with spring probe
EP1793197A3 (en) Micro force measuring device, micro force measuring method, and surface shape measuring probe
JP2009014517A5 (en)
US20110047661A1 (en) Microprobe, measurement system and method
CN102778589A (en) Cantilever for magnetic force microscope and method of manufacturing the same
Geng et al. A probe-based force-controlled nanoindentation system using an axisymmetric four-beam spring
CN103454454A (en) Laser force measuring system for double-probe atomic force microscope
US9021897B2 (en) Versatile, flexible, and robust MEMS/NEMS sensor for decoupled measuring of three-dimensional forces in air or liquids
JP5009564B2 (en) Surface following type measuring instrument
JP2007198815A5 (en)
Patil et al. Characterization of MEMS piezoresistive pressure sensors using AFM
JP5112314B2 (en) Sensor module for probe of tactile coordinate measuring device
CN103398805A (en) Three-dimensional nanometer measurement head elastic supported by spiral leaf spring
RU2510009C1 (en) Device to measure parameters of surface relief and mechanical properties of materials
CN201266162Y (en) Tap type high-sensitivity SPM gauge head based on PVDF
JP2007218677A5 (en)
CN108693034A (en) The mechanical property in-situ test auxiliary device of flexible substrates film concentrfated load
KR20080110234A (en) The head module of atomic force microscope
JP2007232544A (en) Method of actually measuring spring constant of microcantilever