JP2007176162A5 - - Google Patents

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Publication number
JP2007176162A5
JP2007176162A5 JP2006320248A JP2006320248A JP2007176162A5 JP 2007176162 A5 JP2007176162 A5 JP 2007176162A5 JP 2006320248 A JP2006320248 A JP 2006320248A JP 2006320248 A JP2006320248 A JP 2006320248A JP 2007176162 A5 JP2007176162 A5 JP 2007176162A5
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JP
Japan
Prior art keywords
photosensitive material
material layer
light
wavelength
manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2006320248A
Other languages
English (en)
Japanese (ja)
Other versions
JP4845692B2 (ja
JP2007176162A (ja
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Publication date
Application filed filed Critical
Priority to JP2006320248A priority Critical patent/JP4845692B2/ja
Priority claimed from JP2006320248A external-priority patent/JP4845692B2/ja
Publication of JP2007176162A publication Critical patent/JP2007176162A/ja
Publication of JP2007176162A5 publication Critical patent/JP2007176162A5/ja
Application granted granted Critical
Publication of JP4845692B2 publication Critical patent/JP4845692B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2006320248A 2005-12-02 2006-11-28 液体吐出ヘッドの製造方法 Expired - Fee Related JP4845692B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2006320248A JP4845692B2 (ja) 2005-12-02 2006-11-28 液体吐出ヘッドの製造方法

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2005349487 2005-12-02
JP2005349487 2005-12-02
JP2006320248A JP4845692B2 (ja) 2005-12-02 2006-11-28 液体吐出ヘッドの製造方法

Publications (3)

Publication Number Publication Date
JP2007176162A JP2007176162A (ja) 2007-07-12
JP2007176162A5 true JP2007176162A5 (enrdf_load_stackoverflow) 2010-01-14
JP4845692B2 JP4845692B2 (ja) 2011-12-28

Family

ID=38301789

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006320248A Expired - Fee Related JP4845692B2 (ja) 2005-12-02 2006-11-28 液体吐出ヘッドの製造方法

Country Status (1)

Country Link
JP (1) JP4845692B2 (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5159336B2 (ja) * 2008-01-25 2013-03-06 キヤノン株式会社 インクジェット記録ヘッドおよびその製造方法
JP5495954B2 (ja) * 2010-05-31 2014-05-21 キヤノン株式会社 微細パターンの製造方法
JP5701119B2 (ja) * 2011-03-23 2015-04-15 キヤノン株式会社 液体吐出ヘッドの製造方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000318167A (ja) * 1999-05-07 2000-11-21 Canon Inc インクジェット記録ヘッド及びその製造方法
JP4532785B2 (ja) * 2001-07-11 2010-08-25 キヤノン株式会社 構造体の製造方法、および液体吐出ヘッドの製造方法

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