JP2007175689A5 - - Google Patents

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Publication number
JP2007175689A5
JP2007175689A5 JP2006055061A JP2006055061A JP2007175689A5 JP 2007175689 A5 JP2007175689 A5 JP 2007175689A5 JP 2006055061 A JP2006055061 A JP 2006055061A JP 2006055061 A JP2006055061 A JP 2006055061A JP 2007175689 A5 JP2007175689 A5 JP 2007175689A5
Authority
JP
Japan
Prior art keywords
valve
fluid
diaphragm
fluid mixing
mixing device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2006055061A
Other languages
English (en)
Japanese (ja)
Other versions
JP2007175689A (ja
JP4854329B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2006055061A priority Critical patent/JP4854329B2/ja
Priority claimed from JP2006055061A external-priority patent/JP4854329B2/ja
Priority to US11/646,570 priority patent/US20070204913A1/en
Priority to KR1020070007539A priority patent/KR101311485B1/ko
Publication of JP2007175689A publication Critical patent/JP2007175689A/ja
Publication of JP2007175689A5 publication Critical patent/JP2007175689A5/ja
Priority to US12/900,054 priority patent/US20110030815A1/en
Application granted granted Critical
Publication of JP4854329B2 publication Critical patent/JP4854329B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2006055061A 2005-12-02 2006-03-01 流体混合装置 Expired - Fee Related JP4854329B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2006055061A JP4854329B2 (ja) 2005-12-02 2006-03-01 流体混合装置
US11/646,570 US20070204913A1 (en) 2006-03-01 2006-12-28 Fluid mixing system
KR1020070007539A KR101311485B1 (ko) 2006-03-01 2007-01-24 유체혼합장치
US12/900,054 US20110030815A1 (en) 2006-03-01 2010-10-07 Fluid mixing system

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2005349724 2005-12-02
JP2005349724 2005-12-02
JP2006055061A JP4854329B2 (ja) 2005-12-02 2006-03-01 流体混合装置

Publications (3)

Publication Number Publication Date
JP2007175689A JP2007175689A (ja) 2007-07-12
JP2007175689A5 true JP2007175689A5 (enExample) 2009-04-09
JP4854329B2 JP4854329B2 (ja) 2012-01-18

Family

ID=38301400

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006055061A Expired - Fee Related JP4854329B2 (ja) 2005-12-02 2006-03-01 流体混合装置

Country Status (1)

Country Link
JP (1) JP4854329B2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6615662B2 (ja) * 2016-03-18 2019-12-04 株式会社ノリタケカンパニーリミテド 気泡含有液体の製造装置及びその使用方法

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56119255A (en) * 1981-02-02 1981-09-18 Toray Industries Method and device for preparing mixed liquid of ratio accurately adjusted
DE4332125A1 (de) * 1993-09-22 1995-03-23 Wagner Wilhelm Wiwa Verfahren zum Mischen von Werkstoffkomponenten und Vorrichtung zur Durchführung des Verfahrens
JP4033925B2 (ja) * 1996-04-03 2008-01-16 大陽日酸株式会社 混合ガス供給装置
JP3383184B2 (ja) * 1997-06-18 2003-03-04 株式会社アグルー・ジャパン 希薄溶液の製造方法および装置
JP2931289B1 (ja) * 1998-03-04 1999-08-09 日本酸素株式会社 ガス混合装置
JP2000218148A (ja) * 1999-01-29 2000-08-08 Tokico Ltd 混合装置
JP3655155B2 (ja) * 1999-12-22 2005-06-02 アドバンス電気工業株式会社 マニホールド弁構造体
JP3741253B2 (ja) * 1999-12-24 2006-02-01 富士通株式会社 薬品製造装置
JP3995543B2 (ja) * 2002-07-03 2007-10-24 旭有機材工業株式会社 流体制御弁
JP2004164033A (ja) * 2002-11-08 2004-06-10 Asahi Organic Chem Ind Co Ltd 流量制御装置
JP4222821B2 (ja) * 2002-11-27 2009-02-12 旭有機材工業株式会社 定流量弁
JP4417642B2 (ja) * 2003-03-17 2010-02-17 芝浦メカトロニクス株式会社 処理液の製造装置、製造方法及び基板の処理装置
JP4512913B2 (ja) * 2003-04-07 2010-07-28 旭有機材工業株式会社 流体混合装置
JP4247386B2 (ja) * 2003-11-28 2009-04-02 旭有機材工業株式会社 流量調節弁

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