JP2007162734A5 - - Google Patents
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- Publication number
- JP2007162734A5 JP2007162734A5 JP2005356183A JP2005356183A JP2007162734A5 JP 2007162734 A5 JP2007162734 A5 JP 2007162734A5 JP 2005356183 A JP2005356183 A JP 2005356183A JP 2005356183 A JP2005356183 A JP 2005356183A JP 2007162734 A5 JP2007162734 A5 JP 2007162734A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005356183A JP4780558B2 (ja) | 2005-12-09 | 2005-12-09 | 流体制御装置用継手およびそれを用いた流体制御装置 |
US11/606,974 US7841628B2 (en) | 2005-12-09 | 2006-12-01 | Joint for use in fluid control apparatus |
KR1020060122087A KR101428806B1 (ko) | 2005-12-09 | 2006-12-05 | 유체 제어 장치용 커플링 및 이를 이용한 유체 제어 장치 |
TW95145994A TWI422768B (zh) | 2005-12-09 | 2006-12-08 | 液體控制用接頭及使用其之流體控制裝置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005356183A JP4780558B2 (ja) | 2005-12-09 | 2005-12-09 | 流体制御装置用継手およびそれを用いた流体制御装置 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2011072530A Division JP5277278B2 (ja) | 2011-03-29 | 2011-03-29 | 流体制御装置用継手 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2007162734A JP2007162734A (ja) | 2007-06-28 |
JP2007162734A5 true JP2007162734A5 (ja) | 2010-07-01 |
JP4780558B2 JP4780558B2 (ja) | 2011-09-28 |
Family
ID=38138553
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2005356183A Active JP4780558B2 (ja) | 2005-12-09 | 2005-12-09 | 流体制御装置用継手およびそれを用いた流体制御装置 |
Country Status (4)
Country | Link |
---|---|
US (1) | US7841628B2 (ja) |
JP (1) | JP4780558B2 (ja) |
KR (1) | KR101428806B1 (ja) |
TW (1) | TWI422768B (ja) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4780555B2 (ja) * | 2005-09-12 | 2011-09-28 | 株式会社フジキン | 流体制御装置 |
JP5020758B2 (ja) * | 2007-09-25 | 2012-09-05 | 東京エレクトロン株式会社 | ガス供給装置、半導体製造装置及びガス供給装置用部品 |
FR2960160B1 (fr) * | 2010-05-19 | 2012-08-17 | Millipore Corp | Bloc de liaison fluidique pour dispositif de filtration a jeu d'au moins une cassette filtrante |
FR2960162B1 (fr) | 2010-05-19 | 2012-08-17 | Millipore Corp | Dispositif de filtration a jeu d'au moins une cassette filtrante |
JP5785813B2 (ja) | 2011-08-10 | 2015-09-30 | 株式会社フジキン | 流体制御装置 |
KR101599344B1 (ko) * | 2011-09-30 | 2016-03-03 | 가부시키가이샤 후지킨 | 가스 공급 장치 |
US9454158B2 (en) | 2013-03-15 | 2016-09-27 | Bhushan Somani | Real time diagnostics for flow controller systems and methods |
CN103240557A (zh) * | 2013-05-13 | 2013-08-14 | 成都海凌达机械有限公司 | 用于对装载机大梁装配时的定位装置 |
JP6147113B2 (ja) * | 2013-06-27 | 2017-06-14 | 株式会社フジキン | 流体制御装置用継手および流体制御装置 |
US10983538B2 (en) | 2017-02-27 | 2021-04-20 | Flow Devices And Systems Inc. | Systems and methods for flow sensor back pressure adjustment for mass flow controller |
EP3392418B1 (de) * | 2017-04-19 | 2020-04-29 | Geberit International AG | Befestigungssystem |
CN115279941A (zh) * | 2020-03-23 | 2022-11-01 | 株式会社堀场Stec | 气化系统 |
TWI829260B (zh) * | 2021-07-28 | 2024-01-11 | 美商艾克爾系統公司 | 模組化配件組件以及包含該組件的系統 |
Family Cites Families (29)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2257846B1 (ja) * | 1973-07-03 | 1976-05-28 | Legris France Sa | |
US4082324A (en) * | 1976-10-04 | 1978-04-04 | Obrecht Robert E | Connection arrangement for manifold blocks |
FR2470887A1 (fr) * | 1979-11-30 | 1981-06-12 | Telemecanique Electrique | Dispositif d'association pour des appareils pneumatiques |
JPH0726040Y2 (ja) * | 1992-03-30 | 1995-06-14 | 桐生機械株式会社 | 加圧鋳造装置 |
US5383689A (en) * | 1993-07-09 | 1995-01-24 | Wilkerson Corporation | Separable connector for pressure fluid components |
DE69518894T2 (de) * | 1994-11-23 | 2001-04-26 | Automotive Fluid Systems Inc | Verbindungsblock mit Einlagen |
KR100209379B1 (ko) * | 1995-11-29 | 1999-07-15 | 전주범 | 모터로터의 쇼트 서큐이트 제조방법 |
US6394138B1 (en) * | 1996-10-30 | 2002-05-28 | Unit Instruments, Inc. | Manifold system of removable components for distribution of fluids |
JP4022696B2 (ja) * | 1996-11-20 | 2007-12-19 | 忠弘 大見 | 遮断開放器 |
JPH10300000A (ja) * | 1997-02-28 | 1998-11-13 | Benkan Corp | 集積化ガス制御装置 |
JP3774800B2 (ja) * | 1997-09-24 | 2006-05-17 | 株式会社フジキン | 下段部材の固定装置およびこれを備えた流体制御装置 |
JP3814704B2 (ja) * | 1997-05-08 | 2006-08-30 | 忠弘 大見 | 流体制御器用継手 |
CN1289851C (zh) * | 1998-03-05 | 2006-12-13 | 斯瓦戈洛克公司 | 歧管系统 |
JP2000145979A (ja) * | 1998-11-16 | 2000-05-26 | Fujikin Inc | 下段部材の固定装置およびこれを備えた流体制御装置 |
JP4244254B2 (ja) * | 1999-04-30 | 2009-03-25 | 株式会社キッツエスシーティー | 集積化ガス制御装置 |
JP2001140509A (ja) * | 1999-11-17 | 2001-05-22 | Sekisui Chem Co Ltd | 把手の取付構造 |
JP2001153290A (ja) * | 1999-11-30 | 2001-06-08 | Air Water Inc | 集積型ガス供給ユニット用モジュールブロック |
JP2001280595A (ja) * | 2000-03-29 | 2001-10-10 | Air Water Inc | 集積型ガス供給ユニット用モジュールブロック |
JP4156184B2 (ja) * | 2000-08-01 | 2008-09-24 | 株式会社キッツエスシーティー | 集積化ガス制御装置 |
JP2003322127A (ja) | 2002-04-26 | 2003-11-14 | Fujikin Inc | 流体継手 |
US7334605B2 (en) * | 2002-08-27 | 2008-02-26 | Celerity, Inc. | Modular substrate gas panel having manifold connections in a common plane |
AU2003291156A1 (en) * | 2002-11-26 | 2004-06-18 | Swagelok Company | Modular surface mount fluid system |
US6874538B2 (en) * | 2003-03-26 | 2005-04-05 | Kevin S. Bennett | Fluid delivery system |
JP4431940B2 (ja) * | 2003-04-10 | 2010-03-17 | 旭有機材工業株式会社 | 配管部材の接続構造 |
US7178556B2 (en) * | 2003-08-07 | 2007-02-20 | Parker-Hannifin Corporation | Modular component connector substrate assembly system |
JP4312088B2 (ja) * | 2004-01-27 | 2009-08-12 | シーケーディ株式会社 | 流路ブロック |
US7048008B2 (en) * | 2004-04-13 | 2006-05-23 | Ultra Clean Holdings, Inc. | Gas-panel assembly |
US7458397B2 (en) * | 2004-07-09 | 2008-12-02 | Michael Doyle | Modular fluid distribution system |
US7146999B2 (en) * | 2005-03-08 | 2006-12-12 | Gregory C. Giese | Modular fluid handling device |
-
2005
- 2005-12-09 JP JP2005356183A patent/JP4780558B2/ja active Active
-
2006
- 2006-12-01 US US11/606,974 patent/US7841628B2/en not_active Expired - Fee Related
- 2006-12-05 KR KR1020060122087A patent/KR101428806B1/ko active IP Right Grant
- 2006-12-08 TW TW95145994A patent/TWI422768B/zh not_active IP Right Cessation
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