JP2007162734A5 - - Google Patents

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Publication number
JP2007162734A5
JP2007162734A5 JP2005356183A JP2005356183A JP2007162734A5 JP 2007162734 A5 JP2007162734 A5 JP 2007162734A5 JP 2005356183 A JP2005356183 A JP 2005356183A JP 2005356183 A JP2005356183 A JP 2005356183A JP 2007162734 A5 JP2007162734 A5 JP 2007162734A5
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JP
Japan
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Application number
JP2005356183A
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JP4780558B2 (ja
JP2007162734A (ja
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Priority to JP2005356183A priority Critical patent/JP4780558B2/ja
Priority claimed from JP2005356183A external-priority patent/JP4780558B2/ja
Priority to US11/606,974 priority patent/US7841628B2/en
Priority to KR1020060122087A priority patent/KR101428806B1/ko
Priority to TW95145994A priority patent/TWI422768B/zh
Publication of JP2007162734A publication Critical patent/JP2007162734A/ja
Publication of JP2007162734A5 publication Critical patent/JP2007162734A5/ja
Application granted granted Critical
Publication of JP4780558B2 publication Critical patent/JP4780558B2/ja
Active legal-status Critical Current
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JP2005356183A 2005-12-09 2005-12-09 流体制御装置用継手およびそれを用いた流体制御装置 Active JP4780558B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2005356183A JP4780558B2 (ja) 2005-12-09 2005-12-09 流体制御装置用継手およびそれを用いた流体制御装置
US11/606,974 US7841628B2 (en) 2005-12-09 2006-12-01 Joint for use in fluid control apparatus
KR1020060122087A KR101428806B1 (ko) 2005-12-09 2006-12-05 유체 제어 장치용 커플링 및 이를 이용한 유체 제어 장치
TW95145994A TWI422768B (zh) 2005-12-09 2006-12-08 液體控制用接頭及使用其之流體控制裝置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005356183A JP4780558B2 (ja) 2005-12-09 2005-12-09 流体制御装置用継手およびそれを用いた流体制御装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2011072530A Division JP5277278B2 (ja) 2011-03-29 2011-03-29 流体制御装置用継手

Publications (3)

Publication Number Publication Date
JP2007162734A JP2007162734A (ja) 2007-06-28
JP2007162734A5 true JP2007162734A5 (ja) 2010-07-01
JP4780558B2 JP4780558B2 (ja) 2011-09-28

Family

ID=38138553

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005356183A Active JP4780558B2 (ja) 2005-12-09 2005-12-09 流体制御装置用継手およびそれを用いた流体制御装置

Country Status (4)

Country Link
US (1) US7841628B2 (ja)
JP (1) JP4780558B2 (ja)
KR (1) KR101428806B1 (ja)
TW (1) TWI422768B (ja)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4780555B2 (ja) * 2005-09-12 2011-09-28 株式会社フジキン 流体制御装置
JP5020758B2 (ja) * 2007-09-25 2012-09-05 東京エレクトロン株式会社 ガス供給装置、半導体製造装置及びガス供給装置用部品
FR2960160B1 (fr) * 2010-05-19 2012-08-17 Millipore Corp Bloc de liaison fluidique pour dispositif de filtration a jeu d'au moins une cassette filtrante
FR2960162B1 (fr) 2010-05-19 2012-08-17 Millipore Corp Dispositif de filtration a jeu d'au moins une cassette filtrante
JP5785813B2 (ja) 2011-08-10 2015-09-30 株式会社フジキン 流体制御装置
KR101599344B1 (ko) * 2011-09-30 2016-03-03 가부시키가이샤 후지킨 가스 공급 장치
US9454158B2 (en) 2013-03-15 2016-09-27 Bhushan Somani Real time diagnostics for flow controller systems and methods
CN103240557A (zh) * 2013-05-13 2013-08-14 成都海凌达机械有限公司 用于对装载机大梁装配时的定位装置
JP6147113B2 (ja) * 2013-06-27 2017-06-14 株式会社フジキン 流体制御装置用継手および流体制御装置
US10983538B2 (en) 2017-02-27 2021-04-20 Flow Devices And Systems Inc. Systems and methods for flow sensor back pressure adjustment for mass flow controller
EP3392418B1 (de) * 2017-04-19 2020-04-29 Geberit International AG Befestigungssystem
CN115279941A (zh) * 2020-03-23 2022-11-01 株式会社堀场Stec 气化系统
TWI829260B (zh) * 2021-07-28 2024-01-11 美商艾克爾系統公司 模組化配件組件以及包含該組件的系統

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FR2470887A1 (fr) * 1979-11-30 1981-06-12 Telemecanique Electrique Dispositif d'association pour des appareils pneumatiques
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US5383689A (en) * 1993-07-09 1995-01-24 Wilkerson Corporation Separable connector for pressure fluid components
DE69518894T2 (de) * 1994-11-23 2001-04-26 Automotive Fluid Systems Inc Verbindungsblock mit Einlagen
KR100209379B1 (ko) * 1995-11-29 1999-07-15 전주범 모터로터의 쇼트 서큐이트 제조방법
US6394138B1 (en) * 1996-10-30 2002-05-28 Unit Instruments, Inc. Manifold system of removable components for distribution of fluids
JP4022696B2 (ja) * 1996-11-20 2007-12-19 忠弘 大見 遮断開放器
JPH10300000A (ja) * 1997-02-28 1998-11-13 Benkan Corp 集積化ガス制御装置
JP3774800B2 (ja) * 1997-09-24 2006-05-17 株式会社フジキン 下段部材の固定装置およびこれを備えた流体制御装置
JP3814704B2 (ja) * 1997-05-08 2006-08-30 忠弘 大見 流体制御器用継手
CN1289851C (zh) * 1998-03-05 2006-12-13 斯瓦戈洛克公司 歧管系统
JP2000145979A (ja) * 1998-11-16 2000-05-26 Fujikin Inc 下段部材の固定装置およびこれを備えた流体制御装置
JP4244254B2 (ja) * 1999-04-30 2009-03-25 株式会社キッツエスシーティー 集積化ガス制御装置
JP2001140509A (ja) * 1999-11-17 2001-05-22 Sekisui Chem Co Ltd 把手の取付構造
JP2001153290A (ja) * 1999-11-30 2001-06-08 Air Water Inc 集積型ガス供給ユニット用モジュールブロック
JP2001280595A (ja) * 2000-03-29 2001-10-10 Air Water Inc 集積型ガス供給ユニット用モジュールブロック
JP4156184B2 (ja) * 2000-08-01 2008-09-24 株式会社キッツエスシーティー 集積化ガス制御装置
JP2003322127A (ja) 2002-04-26 2003-11-14 Fujikin Inc 流体継手
US7334605B2 (en) * 2002-08-27 2008-02-26 Celerity, Inc. Modular substrate gas panel having manifold connections in a common plane
AU2003291156A1 (en) * 2002-11-26 2004-06-18 Swagelok Company Modular surface mount fluid system
US6874538B2 (en) * 2003-03-26 2005-04-05 Kevin S. Bennett Fluid delivery system
JP4431940B2 (ja) * 2003-04-10 2010-03-17 旭有機材工業株式会社 配管部材の接続構造
US7178556B2 (en) * 2003-08-07 2007-02-20 Parker-Hannifin Corporation Modular component connector substrate assembly system
JP4312088B2 (ja) * 2004-01-27 2009-08-12 シーケーディ株式会社 流路ブロック
US7048008B2 (en) * 2004-04-13 2006-05-23 Ultra Clean Holdings, Inc. Gas-panel assembly
US7458397B2 (en) * 2004-07-09 2008-12-02 Michael Doyle Modular fluid distribution system
US7146999B2 (en) * 2005-03-08 2006-12-12 Gregory C. Giese Modular fluid handling device

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