JP2007161354A - Unpacking system and unpacking method - Google Patents

Unpacking system and unpacking method Download PDF

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JP2007161354A
JP2007161354A JP2005356213A JP2005356213A JP2007161354A JP 2007161354 A JP2007161354 A JP 2007161354A JP 2005356213 A JP2005356213 A JP 2005356213A JP 2005356213 A JP2005356213 A JP 2005356213A JP 2007161354 A JP2007161354 A JP 2007161354A
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slip sheet
substrate
separating
laminate
unpacking
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Toru Takehara
徹 竹原
Katsutoshi Kobayashi
勝利 小林
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Dai Nippon Printing Co Ltd
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Dai Nippon Printing Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide an unpacking system and unpacking method protecting substrates from scratches and damage when unpacking a laminated body and separating the substrates. <P>SOLUTION: In this unpacking system 1, the laminated body 7 is provided. Above the laminated body 7, a substrate transfer device 9 for separating the substrates 3 from the laminated body 7 and an inserting paper separating device 11 for separating inserting paper 5 from the laminated body 7 are provided. A trash box 13 for storing separated inserting paper 5a is provided next to the laminated body 7. Blow devices 15a, 15b and an inserting paper pressing device 17 are provided adjacently to the laminated body 7. When the substrates 3 and the inserting paper 5 are separated from the laminated body 7, the substrate transfer device 9 and the inserting paper separating device 11 are alternately moved above the laminated body 7 to separate the substrates 3 and the inserting paper 5. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

本発明は、開包システムおよび開包方法に関するものである。   The present invention relates to an unpacking system and an unpacking method.

従来、カラーフィルタ基板、薄膜トランジスタ基板等の画像を形成するための表面を持つ基板を保管、移送する場合は、傷や破損から守るため、板同士が接触しないように、カラーフィルタ基板を所定間隔で並列収納できる、箱形の収納容器を用い、基板を装置に組み込む際に容器から取り出していた（特許文献１）。
特開２００２−２６４９９２号公報 Conventionally, when storing and transporting a substrate having a surface for forming an image, such as a color filter substrate and a thin film transistor substrate, the color filter substrate is spaced at a predetermined interval so that the plates do not contact each other in order to protect them from scratches and damage. A box-shaped storage container that can be stored in parallel was used, and the substrate was taken out from the container when incorporated into the apparatus (Patent Document 1).
JP 2002-264992 A

しかしながら、最近では、より大型のカラーフィルタ基板の製造が要求されており、これらを従来と同様に所定間隔で収納すれば、より大きな、収納容器、収納スペースが必要となり、また、輸送により割れやすくなり、現実には、前記のような収納容器を用いて、保管、移送するのは困難である。   However, recently, manufacture of larger color filter substrates has been required, and if these are stored at a predetermined interval as in the past, a larger storage container and storage space are required, and they are more easily broken by transportation. Therefore, in reality, it is difficult to store and transport using the storage container as described above.

そこで、これらの問題点を解消する方法として、本願出願人は複数枚のカラーフィルタ基板を、紙や樹脂フィルムである離間体を介して積層させ、積層体とすることを提案した。しかしながら、このような積層体から逆に基板を分離する場合は、適当な開包装置および開包方法を用いなければ、分離時に基板を傷つけてしまうおそれがある。   Therefore, as a method for solving these problems, the applicant of the present application has proposed that a plurality of color filter substrates are laminated through a separating body such as paper or a resin film to form a laminated body. However, when the substrate is separated from such a laminate, the substrate may be damaged at the time of separation unless an appropriate unpacking apparatus and unpacking method are used.

本発明は、このような問題に鑑みてなされたもので、その目的は、積層体を開包して基板を分離する際に基板を傷、破損から守るような開包システムおよび開包方法を提供するものである。   The present invention has been made in view of such problems, and an object of the present invention is to provide an unpacking system and a unpacking method for protecting a substrate from scratches and breakage when unpacking a laminate and separating the substrate. It is to provide.

前述した目的を達成するために、第１の発明は、基板と合紙とを交互に積層させてなる積層体から、前記基板と前記合紙とを分離する開包システムであって、前記基板を前記積層体から分離して搬送する移送装置と、前記合紙を前記積層体から分離して搬送する合紙剥離装置と、を具備することを特徴とする開包システムである。
前記基板を前記積層体から分離する際に、前記合紙を押さえる合紙押さえ装置を更に具備してもよい。
前記基板を前記積層体から分離する際に、前記基板と前記合紙の隙間をブローするブロー装置を更に具備してもよい。 In order to achieve the above-described object, the first invention is an unwrapping system for separating the substrate and the slip sheet from a laminate in which the substrate and the slip sheet are alternately stacked, wherein the substrate A separating apparatus for separating and conveying the paper from the laminated body, and an interleaf separating apparatus for separating and conveying the interleaving paper from the laminated body.
When separating the said board | substrate from the said laminated body, you may further comprise the slip sheet pressing device which presses down the said slip sheet.
You may further comprise the blow apparatus which blows the clearance gap between the said board | substrate and the said interleaving paper, when isolate | separating the said board | substrate from the said laminated body.

前記移送装置は、各々が独立して上下動可能な複数の吸着部を有し、前記複数の吸着部が前記基板を吸着した状態で、前記基板の端部を吸着している前記吸着部のみを若干上昇させた後に全体を上昇させることにより前記基板を前記積層体から分離してもよい。
前記移送装置は、前記合紙押さえ装置が合紙を押さえた状態で前記基板を前記積層体から分離してもよい。
前記合紙剥離装置は、前記合紙を吸着する合紙吸着部と、前記合紙を保持、剥離するチャック部とを有し、前記合紙吸着部が前記合紙の端部を吸着した状態で前記合紙の端部を折り曲げ、前記チャック部が折り曲げられた前記合紙の端部をつかんで剥離することにより、前記合紙を前記積層体から分離してもよい。
前記合紙を前記積層体から分離する際に、前記基板と前記合紙の隙間をブローするブロー装置を更に具備してもよい。 The transfer device has a plurality of suction portions that can move up and down independently, and only the suction portion that sucks the end portion of the substrate in a state where the plurality of suction portions suck the substrate. The substrate may be separated from the stacked body by raising the whole slightly after raising it.
The transfer device may separate the substrate from the laminate in a state where the slip sheet pressing device presses the slip sheet.
The slip sheet peeling device has a slip sheet suction part that sucks the slip sheet and a chuck part that holds and peels the slip sheet, and the slip sheet suction part sucks an end portion of the slip sheet. The sheet may be separated from the laminated body by folding the end of the slip sheet and gripping and peeling the end of the slip sheet.
You may further provide the blow apparatus which blows the clearance gap between the said board | substrate and the said slip sheet when isolate | separating the said slip sheet from the said laminated body.

第２の発明は、基板と合紙とを交互に積層させてなる積層体から、前記基板と前記合紙とを分離する開包方法であって、基板を前記積層体から分離する工程（ａ）と、合紙を前記積層体から分離する工程（ｂ）と、からなることを特徴とする開包方法である。
前記工程（ａ）は、複数の吸着部によって基板を吸着した後、前記基板の端部を吸着している前記吸着部のみを若干上昇させた後に全体を上昇させることにより基板を分離してもよい。
前記工程（ｂ）は、合紙吸着部が前記合紙の端部を吸着した状態で前記合紙の端部を折り曲げ、チャック部が折り曲げられた前記合紙の端部をつかんで剥離することにより、前記合紙を前記積層体から分離してもよい。 2nd invention is a packaging method which isolate | separates the said board | substrate and the said interleaving paper from the laminated body which laminates | stacks a board | substrate and an interleaving paper alternately, Comprising: The process (a And a step (b) of separating the slip sheet from the laminate.
In the step (a), after the substrate is adsorbed by a plurality of adsorbing portions, only the adsorbing portion adsorbing the end portion of the substrate is slightly raised, and then the substrate is separated by raising the whole. Good.
In the step (b), the end of the slip sheet is folded in a state where the slip sheet adsorbing section sucks the end of the slip sheet, and the end of the slip sheet is gripped and peeled off. Thus, the slip sheet may be separated from the laminate.

本発明によれば、積層体を開包して基板を分離する際に基板を傷、破損から守ることができる。   ADVANTAGE OF THE INVENTION According to this invention, when opening a laminated body and isolate | separating a board | substrate, a board | substrate can be protected from a damage | wound and damage.

以下、図面に基づいて本発明に好適な実施形態を詳細に説明する。
図１は、本実施形態に係る開包システム１を示す斜視図であって、図２は図１の基板移載装置９および積層体７の詳細図、図３は図２の側面図である。また、図４は合紙剥離装置１１および積層体７付近の詳細図、図５は図４の側面図である。 DESCRIPTION OF EMBODIMENTS Hereinafter, preferred embodiments of the present invention will be described in detail based on the drawings.
FIG. 1 is a perspective view showing an unpacking system 1 according to this embodiment, FIG. 2 is a detailed view of the substrate transfer device 9 and the laminated body 7 of FIG. 1, and FIG. 3 is a side view of FIG. . 4 is a detailed view of the vicinity of the slip sheet peeling device 11 and the laminated body 7, and FIG. 5 is a side view of FIG.

図１に示すように、開包システム１は積層体７を有し、積層体７の上方には、積層体７から基板３を分離する基板移載装置９、積層体７から合紙５を分離する合紙剥離装置１１が設けられている。
積層体７の隣には剥離した合紙５ａを保管するゴミ箱１３が設けられている。 As shown in FIG. 1, the unpacking system 1 includes a laminate 7, and a substrate transfer device 9 that separates the substrate 3 from the laminate 7 and a slip sheet 5 from the laminate 7 are disposed above the laminate 7. A separating paper peeling device 11 for separation is provided.
Next to the laminated body 7, a trash box 13 for storing the peeled interleaving paper 5 a is provided.

図２に示すように、積層体７を挟み込むようにしてブロー装置１５ａ、１５ｂおよび合紙押さえ装置１７ａ、１７ｂが設けられている。   As shown in FIG. 2, blow devices 15 a and 15 b and slip sheet pressing devices 17 a and 17 b are provided so as to sandwich the laminate 7.

図３に示すように積層体７は、基板３と合紙５とを交互に積層させた構造を有している。
基板３は例えばカラーフィルタ基板、ガラス基板、プラスチック基板、薄膜トランジスタ基板等である。
合紙５は、基板３同士が接触しないように設けられる緩衝材であり、紙や樹脂フィルム等が用いられる。 As shown in FIG. 3, the laminate 7 has a structure in which the substrates 3 and the interleaving paper 5 are alternately laminated.
The substrate 3 is, for example, a color filter substrate, a glass substrate, a plastic substrate, a thin film transistor substrate, or the like.
The interleaving paper 5 is a cushioning material provided so that the substrates 3 do not contact each other, and paper, a resin film, or the like is used.

ブロー装置１５ａ、１５ｂは後述するように、積層体７から基板３および合紙５を分離する際に基板３と合紙５の間に空気を吹き込む。
合紙押さえ装置１７ａ、１７ｂは積層体７から基板３を分離する際に合紙５を１時的に固定する。 As will be described later, the blow devices 15 a and 15 b blow air between the substrate 3 and the interleaving paper 5 when separating the substrate 3 and the interleaving paper 5 from the laminate 7.
The slip sheet pressing devices 17 a and 17 b temporarily fix the slip sheet 5 when the substrate 3 is separated from the laminate 7.

なお、図１〜３に示すように、基板移載装置９は垂直レール１９ａ、１９ｂ上にＢ１、Ｂ２方向に移動可能に設けられ、垂直レール１９は水平レール状２１ａ、２１ｂにＡ１、Ａ２方向に移動可能に設けられている。
即ち、基板移載装置９はＡ１、Ａ２方向およびＢ１、Ｂ２方向に移動可能となっている。 1 to 3, the substrate transfer device 9 is provided on the vertical rails 19a and 19b so as to be movable in the B1 and B2 directions, and the vertical rail 19 is formed in the horizontal rails 21a and 21b in the A1 and A2 directions. It is provided to be movable.
That is, the substrate transfer device 9 is movable in the A1, A2 direction and the B1, B2 direction.

図３に示すように、基板移載装置９は、フレーム２３上に吸着パッド２５ａ、２５ｂ、２５ｃ、２５ｄ、２５ｅが設けられており、吸着パッド２５ａ、２５ｂ、２５ｃ、２５ｄ、２５ｅはアクチュエータ２７ａ、２７ｂ、２７ｃ、２７ｄ、２７ｅによってそれぞれ独立してＣ１、Ｃ２方向に移動可能となっている。
吸着パッド２５ａ、２５ｂ、２５ｃ、２５ｄ、２５ｅは、基板３を吸着する吸着板であり、真空パッド等が用いられる。 As shown in FIG. 3, the substrate transfer device 9 is provided with suction pads 25a, 25b, 25c, 25d, and 25e on a frame 23. The suction pads 25a, 25b, 25c, 25d, and 25e are actuators 27a, 27b, 27c, 27d, and 27e are independently movable in the C1 and C2 directions.
The suction pads 25a, 25b, 25c, 25d, and 25e are suction plates that suck the substrate 3, and a vacuum pad or the like is used.

合紙押さえ装置１７ａ、１７ｂは、それぞれ吸着パッド２９ａ、２９ｂを有している。
吸着パッド１７ａ、１７ｂは合紙５を吸着する吸着板であり、真空パッド等が用いられる。
合紙押さえ装置１７ａ、１７ｂは図示しないレール上をＤ１、Ｄ２、Ｄ３、Ｄ４およびＥ１、Ｅ２、Ｅ３、Ｅ４方向に移動可能である。 The slip sheet pressing devices 17a and 17b have suction pads 29a and 29b, respectively.
The suction pads 17a and 17b are suction plates that suck the interleaving paper 5, and a vacuum pad or the like is used.
The slip sheet pressing devices 17a and 17b are movable in the directions of D1, D2, D3, D4 and E1, E2, E3, E4 on a rail (not shown).

ブロー装置１５ａ、１５ｂはノズル３１ａ、３１ｂを有しており、ノズル３１ａ、３１ｂからエアーをＦ１、Ｆ２方向に噴射する。   The blow devices 15a and 15b have nozzles 31a and 31b, and inject air in the F1 and F2 directions from the nozzles 31a and 31b.

図４および図５に示すように、合紙剥離装置１１はフレーム３３を有し、フレーム３３上にはチャック装置３５および合紙吸着装置３９が設けられている。
チャック装置３５は合紙５をつかむクランプ３７を有している。
チャック装置３５はフレーム３３上をＩ１、Ｉ２、Ｍ１、Ｍ２方向に移動可能であり、また、フレーム３３上をＬ１、Ｌ２方向に回転可能である。 As shown in FIGS. 4 and 5, the slip sheet peeling device 11 has a frame 33, and a chuck device 35 and a slip sheet suction device 39 are provided on the frame 33.
The chuck device 35 has a clamp 37 that holds the interleaving paper 5.
The chuck device 35 can move on the frame 33 in the directions I1, I2, M1, and M2, and can rotate on the frame 33 in the directions L1 and L2.

合紙吸着装置３９には吸着パッド４１が設けられている。
吸着パッド４１は合紙５を吸着する吸着板であり、真空パッド等が用いられる。合紙吸着装置３９はフレーム３３上をＨ１、Ｈ２方向に移動可能であり、また、フレーム３３上をＪ１、Ｊ２方向に回転可能である。
合紙剥離装置１１は水平レール２１ａ、２１ｂ上をＧ１、Ｇ２方向に移動可能である。 The slip sheet suction device 39 is provided with a suction pad 41.
The suction pad 41 is a suction plate that sucks the interleaving paper 5, and a vacuum pad or the like is used. The slip sheet adsorbing device 39 can move in the H1 and H2 directions on the frame 33, and can rotate in the J1 and J2 directions on the frame 33.
The slip sheet peeling device 11 is movable in the G1 and G2 directions on the horizontal rails 21a and 21b.

なお、基板移載装置９、合紙剥離装置１１、ブロー装置１５ａ、１５ｂ、合紙押さえ装置１７ａ、１７ｂの動作は、図示しない制御装置等によって制御されている。   The operations of the substrate transfer device 9, the slip sheet peeling device 11, the blow devices 15a and 15b, and the slip sheet pressing devices 17a and 17b are controlled by a control device (not shown).

次に開包システム１の動作について説明する。
図６および図７は積層体７から基板３と合紙５を分離する手順を示すフローチャートであって、図８から図２１は図６および図７における各工程を示す図である。 Next, the operation of the unpacking system 1 will be described.
FIGS. 6 and 7 are flowcharts showing a procedure for separating the substrate 3 and the interleaf 5 from the laminate 7, and FIGS. 8 to 21 are diagrams showing respective steps in FIGS.

なお、図６に示すステップ１０１〜ステップ１０７までの各工程は積層体７から基板３を分離する工程であり、図７に示すステップ１０８〜ステップ１１６までの各工程は積層体７から合紙５を剥離する工程である。   Each process from step 101 to step 107 shown in FIG. 6 is a process of separating the substrate 3 from the laminate 7, and each process from step 108 to step 116 shown in FIG. It is the process of peeling.

まず、図８に示すように、基板移載装置９を水平レール２１ａ、２１ｂ上をＡ１方向またはＡ２方向に移動させ、積層体７の直上に配置する（ステップ１０１）。
次に、合紙押さえ装置１７ａ、１７ｂを図８のＤ３およびＥ３方向に移動し、合紙５の端部の直上に配置する（ステップ１０２）。 First, as shown in FIG. 8, the substrate transfer device 9 is moved on the horizontal rails 21a and 21b in the A1 direction or the A2 direction, and is disposed immediately above the stacked body 7 (step 101).
Next, the slip sheet pressing devices 17a and 17b are moved in the directions D3 and E3 in FIG. 8 and arranged just above the end of the slip sheet 5 (step 102).

次に、図９に示すように、合紙押さえ装置１７ａ、１７ｂをＤ２、Ｅ２方向に下降させ、合紙５の端部を吸着パッド２９ａ、２９ｂで吸着する（ステップ１０３）。これは、基板３を分離する際に、合紙５が基板３に付着しないようにするためである。   Next, as shown in FIG. 9, the slip sheet pressing devices 17a and 17b are lowered in the directions D2 and E2, and the end portions of the slip sheet 5 are sucked by the suction pads 29a and 29b (step 103). This is to prevent the slip sheet 5 from adhering to the substrate 3 when the substrate 3 is separated.

次に、図１０に示すように、基板移載装置９をＢ２方向に下降させ、吸着パッド２５ａ、２５ｂ、２５ｃ、２５ｄ、２５ｅで基板３を吸着する（ステップ１０４）。   Next, as shown in FIG. 10, the substrate transfer device 9 is lowered in the B2 direction, and the substrate 3 is sucked by the suction pads 25a, 25b, 25c, 25d, and 25e (step 104).

次に、図１１に示すように、ブロー装置１５ａ、１５ｂによって基板３と合紙５の隙間にエアーを吹き込みながら（図１１のＦ１、Ｆ２方向）基板移載装置９の両端部の吸着パッド２５ａ、２５ｅのみを若干持ち上げ、基板３の端部を積層体７から分離する（ステップ１０５）。   Next, as shown in FIG. 11, the suction pads 25a at both ends of the substrate transfer device 9 are blown into the gap between the substrate 3 and the interleaf 5 by the blow devices 15a and 15b (directions F1 and F2 in FIG. 11). 25e are slightly lifted to separate the end of the substrate 3 from the laminate 7 (step 105).

このように、基板３を分離する前に、吸着パッド２５ａ、２５ｅのみを若干持ち上げることにより、基板３と合紙５の剥離が容易となる。
さらに、基板３と合紙５の隙間にエアーを吹き込むことにより、基板３と合紙５の分離が容易となる。
その後、図１２に示すように、基板移載装置９をＢ１方向に上昇させ、基板３を積層体７から分離する（ステップ１０６）。 Thus, before separating the substrate 3, only the suction pads 25a and 25e are slightly lifted to facilitate separation of the substrate 3 and the interleaf paper 5.
Furthermore, by blowing air into the gap between the substrate 3 and the interleaving paper 5, the separation of the substrate 3 and the interleaving paper 5 becomes easy.
Thereafter, as shown in FIG. 12, the substrate transfer device 9 is raised in the B1 direction, and the substrate 3 is separated from the laminate 7 (step 106).

次に図１２に示すように基板移載装置９をＡ１方向に移動し、図示しない次工程等に基板３を搬送する（ステップ１０７）。   Next, as shown in FIG. 12, the substrate transfer device 9 is moved in the A1 direction, and the substrate 3 is transported to the next step (not shown) or the like (step 107).

次に、図１４に示すように、合紙剥離装置１１を垂直レール１９上をＧ１もしくはＧ２方向に移動させ、合紙５の端部の直上に配置する（ステップ１０８）。
次に、図１５に示すように、合紙吸着装置３９をＨ２方向に下降させ、吸着パッド４１で合紙５を吸着する（ステップ１０９）。 Next, as shown in FIG. 14, the slip sheet peeling device 11 is moved on the vertical rail 19 in the G1 or G2 direction, and is disposed immediately above the end portion of the slip sheet 5 (step 108).
Next, as shown in FIG. 15, the slip sheet suction device 39 is lowered in the H2 direction, and the slip sheet 5 is sucked by the suction pad 41 (step 109).

次に、図１６に示すように、合紙５を吸着した状態で合紙吸着装置３９を、Ｊ２方向に回転させ、合紙５の端部を折り曲げる（ステップ１１０）。
ここで、合紙５の端部を折り曲げるのは、次の工程でクランプ３７が合紙５をつかみ易くするためである。 Next, as shown in FIG. 16, the slip sheet adsorbing device 39 is rotated in the J2 direction while the slip sheet 5 is sucked, and the end portion of the slip sheet 5 is bent (step 110).
Here, the end of the slip sheet 5 is bent so that the clamp 37 can easily grasp the slip sheet 5 in the next step.

次に、図１７に示すように、チャック装置３５をＭ２方向に移動させ、クランプ３７で合紙５の端部をつかむ（ステップ１１１）。   Next, as shown in FIG. 17, the chuck device 35 is moved in the M2 direction, and the end of the slip sheet 5 is grasped by the clamp 37 (step 111).

次に図１８に示すように吸着パッド４１による合紙５の吸着を停止し、合紙吸着装置３９をＨ１方向に上昇させる（ステップ１１２）。これは、吸着パッド４１が合紙５を吸着したままでは、合紙５を剥離する際に邪魔になるからである。   Next, as shown in FIG. 18, the suction of the slip sheet 5 by the suction pad 41 is stopped, and the slip sheet suction device 39 is raised in the H1 direction (step 112). This is because, when the suction pad 41 keeps sucking the interleaving paper 5, it becomes an obstacle when the interleaving paper 5 is peeled off.

次に図１９に示すようにブロー装置１５ａを用いて基板３ａと合紙５の隙間にエアーを吹き込みながら（図１７のＦ１方向）チャック装置３５をＬ１方向に回転させる（ステップ１１３）。
エアーを吹き込む理由は、ステップ１０５と同様、基板３と合紙５の分離を容易にするためである。 Next, as shown in FIG. 19, using the blow device 15a, the chuck device 35 is rotated in the L1 direction while blowing air into the gap between the substrate 3a and the interleaving paper 5 (F1 direction in FIG. 17) (step 113).
The reason why the air is blown is to facilitate separation of the substrate 3 and the interleaving paper 5 as in Step 105.

次に図２０に示すように，エアーを吹き込みながら，合紙剥離装置１１をＧ２方向に移動して合紙５を積層体７から剥離する（ステップ１１４）。   Next, as shown in FIG. 20, while blowing air, the slip sheet peeling device 11 is moved in the G2 direction to peel the slip sheet 5 from the laminate 7 (step 114).

合紙５の剥離が終了すると、図２１に示すように、合紙剥離装置１１は合紙５をゴミ箱１３に保管する（ステップ１１５）。   When the separation of the interleaving paper 5 is completed, as shown in FIG. 21, the interleaving paper peeling device 11 stores the interleaving paper 5 in the trash box 13 (step 115).

ここで、所定の枚数の合紙５と基板３が分離された場合は作業を終了し、所定の枚数が分離されていない場合はステップ１０１に戻る（ステップ１１６）。   If the predetermined number of interleaving papers 5 and the substrate 3 are separated, the operation is terminated, and if the predetermined number of sheets is not separated, the process returns to step 101 (step 116).

このように、本実施の形態によれば、開包システム１が基板移載装置９と合紙剥離装置１１を、これらを交互に積層体７上に移動させ、積層体７から基板３および合紙５を分離することによって積層体７を開包する。
従って、開包時に基板３を傷、破損から守ることができる。 As described above, according to the present embodiment, the unpacking system 1 moves the substrate transfer device 9 and the slip sheet peeling device 11 alternately onto the laminated body 7, and the substrate 7 and the laminated paper are transferred from the laminated body 7. The laminate 7 is opened by separating the paper 5.
Therefore, the substrate 3 can be protected from scratches and breakage during opening.

以上、添付図面を参照しながら、本発明の実施形態を説明したが、本発明の技術的範囲は、前述した実施の形態に左右されない。当業者であれば、特許請求の範囲に記載された技術的思想の範疇内において各種の変更例または修正例に想到し得ることは明らかであり、それらについても当然に本発明の技術的範囲に属するものと了解される。   As mentioned above, although embodiment of this invention was described referring an accompanying drawing, the technical scope of this invention is not influenced by embodiment mentioned above. It is obvious for those skilled in the art that various modifications or modifications can be conceived within the scope of the technical idea described in the claims, and these are naturally within the technical scope of the present invention. It is understood that it belongs.

開包システム１を示す斜視図The perspective view which shows the unpacking system 1 基板移載装置９および積層体７付近の詳細図Detailed view of the substrate transfer device 9 and the vicinity of the laminate 7 図２の側面図Side view of FIG. 合紙剥離装置１１および積層体７付近の詳細図Detailed view of the vicinity of the interleaving device 11 and the laminate 7 図４の側面図Side view of FIG. 積層体７から基板３と合紙５を分離する手順を示すフローチャートA flowchart showing a procedure for separating the substrate 3 and the interleaf 5 from the laminate 7. 積層体７から基板３と合紙５を分離する手順を示すフローチャートA flowchart showing a procedure for separating the substrate 3 and the interleaf 5 from the laminate 7. 各工程を示す図Diagram showing each process 各工程を示す図Diagram showing each process 各工程を示す図Diagram showing each process 各工程を示す図Diagram showing each process 各工程を示す図Diagram showing each process 各工程を示す図Diagram showing each process 各工程を示す図Diagram showing each process 各工程を示す図Diagram showing each process 各工程を示す図Diagram showing each process 各工程を示す図Diagram showing each process 各工程を示す図Diagram showing each process 各工程を示す図Diagram showing each process 各工程を示す図Diagram showing each process 各工程を示す図Diagram showing each process

符号の説明Explanation of symbols

１…………開包システム
３…………基板
５…………合紙
７…………積層体
９…………基板移載装置
１１………合紙剥離装置
１３………ゴミ箱
１５ａ……ブロー装置
１７ａ……合紙押さえ装置
１９ａ……垂直レール
２１ａ……水平レール
２３………フレーム
２５ａ……吸着パッド
２７ａ……アクチュエータ
２９ａ……吸着パッド
３１ａ……ノズル
３３………フレーム
３５………チャック装置
３７………クランプ
３９………合紙吸着装置
４１………吸着パッド 1 ………… Unpacking system 3 ………… Substrate 5 ………… Interleaving paper 7 ………… Laminate 9 ………… Substrate transfer device 11 ………… Interleaving paper peeling device 13 ……… Trash can 15a …… Blow device 17a …… Interleaf presser 19a …… Vertical rail 21a …… Horizontal rail 23 ……… Frame 25a …… Suction pad 27a …… Actuator 29a …… Suction pad 31a …… Nozzle 33 ……… Frame 35 .... Chuck device 37 .... Clamp 39 ..... Interleaf suction device 41 ..... Suction pad

Claims (10)

基板と合紙とを交互に積層させてなる積層体から、前記基板と前記合紙とを分離する開包システムであって、
前記基板を前記積層体から分離して搬送する移送装置と、
前記合紙を前記積層体から分離して搬送する合紙剥離装置と、
を具備することを特徴とする開包システム。 An unwrapping system for separating the substrate and the slip sheet from a laminate obtained by alternately stacking the substrate and the slip sheet,
A transfer device for separating and transporting the substrate from the laminate;
A slip sheet peeling device for separating and transporting the slip sheet from the laminate;
An unwrapping system comprising: 前記基板を前記積層体から分離する際に、前記合紙を押さえる合紙押さえ装置を更に具備することを特徴とする請求項１記載の開包システム。   The unpacking system according to claim 1, further comprising a slip sheet pressing device that presses the slip sheet when separating the substrate from the laminate. 前記基板を前記積層体から分離する際に、前記基板と前記合紙の隙間をブローするブロー装置を更に具備することを特徴とする請求項１記載の開包システム。   The unpacking system according to claim 1, further comprising a blower that blows a gap between the substrate and the interleaf when separating the substrate from the laminate. 前記移送装置は、各々が独立して上下動可能な複数の吸着部を有し、
前記複数の吸着部が前記基板を吸着した状態で、前記基板の端部を吸着している前記吸着部のみを若干上昇させた後に全体を上昇させることにより前記基板を前記積層体から分離することを特徴とする開包システム。 The transfer device has a plurality of suction parts that can move up and down independently,
The substrate is separated from the stacked body by raising only the adsorption portion that is adsorbing the end portion of the substrate in a state where the plurality of adsorption portions are adsorbing the substrate, and then raising the whole. An unwrapping system featuring. 前記移送装置は、前記合紙押さえ装置が合紙を押さえた状態で前記基板を前記積層体から分離することを特徴とする請求項２記載の開包システム。   The unpacking system according to claim 2, wherein the transfer device separates the substrate from the stacked body in a state where the slip sheet pressing device presses the slip sheet. 前記合紙剥離装置は、
前記合紙を吸着する合紙吸着部と、
前記合紙を保持、剥離するチャック部とを有し、
前記合紙吸着部が前記合紙の端部を吸着した状態で前記合紙の端部を折り曲げ、前記チャック部が折り曲げられた前記合紙の端部をつかんで剥離することにより、前記合紙を前記積層体から分離することを特徴とする請求項１記載の開包システム。 The slip sheet peeling device is
An interleaf adsorbing portion for adsorbing the interleaf;
A chuck portion for holding and peeling the slip sheet,
By bending the end of the slip sheet in a state where the slip sheet suction part sucks the end of the slip sheet, the chuck part grips and peels the end of the slip sheet, thereby separating the slip sheet. 2. The unpacking system according to claim 1, wherein the bag is separated from the laminate. 前記合紙を前記積層体から分離する際に、前記基板と前記合紙の隙間をブローするブロー装置を更に具備することを特徴とする請求項１記載の開包システム。   The unpacking system according to claim 1, further comprising a blowing device that blows a gap between the substrate and the slip sheet when the slip sheet is separated from the laminated body. 基板と合紙とを交互に積層させてなる積層体から、前記基板と前記合紙とを分離する開包方法であって、
基板を前記積層体から分離する工程（ａ）と、
合紙を前記積層体から分離する工程（ｂ）と、
からなることを特徴とする開包方法。 An unwrapping method for separating the substrate and the interleaving paper from a laminate obtained by alternately laminating the substrate and interleaving paper,
Separating the substrate from the laminate (a);
Separating the interleaving paper from the laminate (b);
The opening method characterized by comprising. 前記工程（ａ）は、複数の吸着部によって基板を吸着した後、前記基板の端部を吸着している前記吸着部のみを若干上昇させた後に全体を上昇させることにより基板を分離することを特徴とする請求項８記載の開包方法。   In the step (a), after the substrate is adsorbed by a plurality of adsorbing portions, only the adsorbing portion adsorbing the end portion of the substrate is slightly raised, and then the substrate is separated by raising the whole. 9. A method for unpacking according to claim 8. 前記工程（ｂ）は、合紙吸着部が前記合紙の端部を吸着した状態で前記合紙の端部を折り曲げ、チャック部が折り曲げられた前記合紙の端部をつかんで剥離することにより、前記合紙を前記積層体から分離することを特徴とする請求項８記載の開包方法。   In the step (b), the end of the slip sheet is folded in a state where the slip sheet suction part sucks the end of the slip sheet, and the end of the slip sheet is gripped and peeled off. The method according to claim 8, wherein the slip sheet is separated from the laminated body.
JP2005356213A 2005-12-09 2005-12-09 Unpacking system and unpacking method Pending JP2007161354A (en)

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CN109319490A (en) * 2018-11-07 2019-02-12 惠科股份有限公司 Mechanism of delaminating and take piece equipment
CN116161429A (en) * 2023-04-25 2023-05-26 四川托璞勒科技有限公司 Loading attachment of stacking plate
CN116161429B (en) * 2023-04-25 2023-06-23 四川托璞勒科技有限公司 Loading attachment of stacking plate

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