WO2012014744A1

WO2012014744A1 - Panel conveyance device

Info

Publication number: WO2012014744A1
Application number: PCT/JP2011/066437
Authority: WO
Inventors: 昇江刺
Original assignee: シャープ株式会社
Priority date: 2010-07-28
Filing date: 2011-07-20
Publication date: 2012-02-02

Abstract

A panel conveyance device (10) comprises a loading platform (21) whereon an inclined plane (26) is formed, and an air supply unit (40). A plurality of glass substrates (51) is stacked on the inclined plane (26) in a state wherein slip sheets (56) are sandwiched between the glass substrates (51). The air supply unit (40) supplies air in the space between the topmost stacked glass substrate (51) and the slip sheet (56) interposed thereunder. Such a configuration allows providing a panel conveyance device that conveys panels with a simple structure.

Description

Panel conveyor

TECHNICAL FIELD The present invention generally relates to a panel transport device, and more specifically, a panel transport device for taking out panels stacked in multiple stages via buffer sheets one by one and transporting them to a production line in the next process. About.

Regarding a conventional panel transport apparatus, for example, Japanese Patent Laid-Open No. 2002-308422 discloses that a clean area can be minimized without increasing the footprint of a transport line and a processing apparatus, and further, bending and dirt of a flat panel can be prevented. A flat panel transport system for the purpose of preventing this is disclosed (Patent Document 1). The flat panel transfer system disclosed in Patent Document 1 includes a transfer device, and the transfer device transfers a glass substrate in a vertical form for each sheet.

JP-T-2009-502661 discloses a high-density packaging system for liquid crystal display glass sheets intended to package glass sheets flexibly and stably by manual or automatic operation ( Patent Document 2). The high-density packing system disclosed in Patent Document 2 is configured by a container. The container has a pallet that supports a bundle of glass sheets and a cover that is provided to cover the bundle of glass sheets supported by the pallet.

Japanese Patent Application Laid-Open No. 2010-1049 discloses a state in which a large number of glass substrates are stacked so that a processing surface on which predetermined processing is performed is on the lower side, and a glass substrate so that the processing surface is on the upper side. Discloses a glass substrate reversing device for reversing the glass substrate when the glass substrate is transferred between the state in which the glass substrate is accommodated in the substrate storage tray (Patent Document 3).

The glass substrates before being reversed by the glass substrate reversing device are stacked in a slanting manner on the pallet. A slip sheet as a cushioning material is inserted between the stacked glass substrates. The uppermost glass substrate is taken out and placed on the stage of the glass substrate inverting device. At this time, the glass substrate is taken out by sucking the back surface of the glass substrate with a suction hand having a plurality of suction pads and lifting the glass substrate while maintaining the suction state.

JP 2002-308422 A Special table 2009-502661 JP 2010-1049 A

When a panel-like part such as a glass substrate or a liquid crystal panel or a panel-like product is shipped to a factory, a packaging box that accommodates a plurality of stacked panels is used. In this case, in the factory where the packaging box has been picked up, it is first necessary to take out the panels one by one from the packaging box and transport them to the production line. As such a panel transfer device, a robot arm can be considered as a typical example of picking up and holding a panel. However, when a robot arm is used, the device becomes large and equipment costs increase, There is a concern that the installation area of the system will be large.

Therefore, an object of the present invention is to solve the above-described problem and to provide a panel transport device that transports a panel with a simple structure.

The panel transport device according to the present invention includes a mounting table on which an inclined surface is formed, and a first gas supply unit. On the inclined surface, a plurality of panels are stacked with a buffer sheet sandwiched between the panels. A 1st gas supply part supplies gas between the panel laminated | stacked on the uppermost stage, and the buffer sheet inserted under it.

According to the panel transport device configured as described above, the gas is supplied between the panel stacked in the uppermost stage by the first gas supply unit and the buffer sheet interposed below the panel, whereby the panel Floats on the buffer sheet and is conveyed along the inclination direction of the inclined surface. For this reason, a panel can be conveyed by a simple structure.

Also preferably, the panel transport device further includes a stopper portion provided so as to protrude from the inclined surface, and a moving mechanism portion. A top surface is formed at the tip protruding from the inclined surface of the stopper. The stopper part supports a plurality of panels from the vertically lower side along the inclined surface. The moving mechanism moves the mounting table or the stopper so that the relative height between the panel stacked on the uppermost stage and the top surface is kept constant as the panel is transported.

According to the panel transport device configured as described above, the state in which a plurality of panels are stacked on the inclined surface can be more reliably held by the stopper. At this time, the relative height between the top panel and the panel stacked on the uppermost stage by the moving mechanism is kept constant to prevent interference between the panel transported from the inclined surface and the stopper. it can.

Preferably, the first gas supply unit is fixed to a mounting table or a stopper unit that is moved by the moving mechanism unit. According to the panel transport apparatus configured as described above, the first gas supply unit is also moved together with the mounting table or the stopper unit as the panel is transported. For this reason, it is possible to maintain a relative height relationship between the first gas supply unit and the panel stacked on the uppermost stage and the buffer sheet interposed thereunder.

Also preferably, the panel transport device further includes a first detection unit that detects the acceptance state of the panel at the transport destination. When the first detection unit detects that the panel cannot be received, the movement of the mounting table or the stopper unit by the movement mechanism unit is restricted. According to the panel transport apparatus configured as described above, the panel can be transported in accordance with the state of acceptance of the panel at the transport destination.

Preferably, the panel transport device is provided on the panel transport path, and is provided in contact with the second detection unit that detects that the panel is transported from the inclined surface and the panel stacked on the uppermost stage. And a feeding mechanism that feeds the panel from the inclined surface when the second detection unit does not detect the conveyance of the panel. According to the panel transport apparatus configured as described above, it is possible to avoid a situation in which the transport of the panel is delayed by providing the feed mechanism unit for feeding the panel from the inclined surface as an auxiliary.

Preferably, the first gas supply unit is provided so that gas is supplied along the peripheral edge of the panel. According to the panel transport apparatus configured as described above, the panel stacked on the uppermost stage can be more reliably floated on the buffer sheet.

Also preferably, the panel is a glass substrate and the buffer sheet is a slip sheet. According to the panel transport device configured as described above, the glass substrate that is in close contact with the buffer sheet due to static electricity can be detached from the buffer sheet by supplying gas from the first gas supply unit.

Also preferably, the panel transport device further includes a second gas supply unit that supplies gas between the uppermost buffer sheet and the panel disposed therebelow after the panel is transported. According to the panel conveyance device configured as described above, the gas is supplied between the uppermost buffer sheet and the panel disposed below by the second gas supply unit, so that the buffer sheet is placed on the panel. And is conveyed along the inclination direction of the inclined surface. This makes it possible to automate the collection of the buffer sheet.

Also preferably, the mounting table has an accommodating portion for accommodating the buffer sheet. The panel transport device further includes a guide mechanism unit that guides the buffer sheet transported from the inclined surface to the storage unit. According to the panel transport apparatus configured as described above, the transported buffer sheet can be collected again in the storage section provided on the mounting table.

As described above, according to the present invention, it is possible to provide a panel transport device that transports a panel with a simple structure.

It is a side view which shows the panel conveying apparatus in Embodiment 1 of this invention. It is a top view which shows the panel conveying apparatus seen from the direction shown by the arrow II in FIG. It is a side view which shows the range enclosed by the dashed-two dotted line III in FIG. It is a side view which shows the process of conveying a glass substrate. It is a side view which shows the state in which one glass substrate was conveyed from the panel conveying apparatus shown in FIG. It is a side view which shows the process of collect | recovering slip sheets. It is a side view which shows the collection structure of a slip sheet. It is a top view which shows the 1st modification of the panel conveying apparatus in FIG. It is a functional block diagram which shows the structure of the panel conveying apparatus in FIG. It is a functional block diagram which shows the structure of the 2nd modification of the panel conveying apparatus in FIG. It is a side view which shows the 3rd modification of the panel conveying apparatus in FIG. It is a side view which shows the 4th modification of the panel conveying apparatus in FIG. It is a side view which shows the 5th modification of the panel conveying apparatus in FIG. It is sectional drawing which expands and shows the range enclosed by the dashed-two dotted line XIV in FIG. It is a side view which shows the 6th modification of the panel conveying apparatus in FIG. It is a side view which shows the 7th modification of the panel conveying apparatus in FIG.

Embodiments of the present invention will be described with reference to the drawings. In the drawings referred to below, the same or corresponding members are denoted by the same reference numerals.

(Embodiment 1)
FIG. 1 is a side view showing a panel transport apparatus according to Embodiment 1 of the present invention. FIG. 2 is a top view showing the panel transport device viewed from the direction indicated by arrow II in FIG. FIG. 3 is a side view showing a range surrounded by a two-dot chain line III in FIG.

With reference to FIGS. 1 to 3, first, the structure of the panel conveyance device in the first embodiment of the present invention will be described. The panel conveyance device 10 in the present embodiment interposes an interleaf 56 as a buffer sheet. It is an apparatus for taking out the glass substrates 51 one by one from a plurality of stacked glass substrates 51 and transporting them to the production line. The glass substrate 51 is used for manufacturing a liquid crystal panel.

The panel transport apparatus 10 includes a mounting table 21, an air supply unit 40, and a conveyor 60 as a transport unit.

The dense pack 20 is used as a returnable box when transporting a plurality of glass substrates 51 between factories. The dense pack 20 is used as a packing box for packing a plurality of glass substrates 51. In the present embodiment, a plurality of glass substrates 51 are transported from the substrate factory to the panel factory in a state packed in the dense pack 20 and set in the panel transport apparatus 10.

The glass substrate 51 is provided as a thin panel. The glass substrate 51 is made of glass. The glass substrate 51 has a rectangular shape when the surface is viewed from the front. As shown in FIG. 2, the glass substrate 51 has a rectangular shape having a short side 51a and a long side 51b longer than the short side 51a. The glass substrate 51 has a thickness of 1 mm or less, for example. For example, the glass substrate 51 is a large substrate having a size of 2160 × 2460 mm or 2850 × 3050 mm.

The panel to which the present invention is applied is not limited to the glass substrate 51, and may be a liquid crystal panel used for manufacturing a liquid crystal display device, for example. In this case, the liquid crystal panel is transported from the panel factory to the liquid crystal display assembly factory in a state of being packed in the dense pack 20. The panel may be a color filter. Furthermore, the panel to which the present invention is applied may be a component not related to the liquid crystal display device, for example, a plasma display panel, a solar cell panel, a semiconductor wafer or a thin resin plate. It may be a shaped part.

An inclined surface 26 is formed on the mounting table 21. The inclined surface 26 is formed to extend in an oblique direction with respect to the horizontal direction. The inclined surface 26 is formed extending in an oblique direction with respect to the vertical direction. The inclined surface 26 is formed in a flat shape. A plurality of glass substrates 51 are stacked on the inclined surface 26. In the present embodiment, a plurality of glass substrates 51 are stacked on the inclined surface 26 via the dense pack 20. The plurality of glass substrates 51 are stacked on the inclined surface 26 in a direction away from the inclined surface 26.

As shown in FIG. 3, the glass substrate 51 has a front surface 51m and a back surface 51n. A thin film transistor (TFT) is formed on the front surface 51m in a subsequent production line, and the back surface 51n is disposed on the back side of the front surface 51m. The plurality of glass substrates 51 are stacked on the inclined surface 26 so that the back surface 51 n faces the inclined surface 26. The front surface 51m is generally surface-finished by polishing or chemicals, and has a higher flatness than the back surface 51n.

Interleaf paper 56 is interposed between the glass substrates 51 adjacent to each other in the stacking direction. The interleaving paper 56 is provided as a cushioning material or a spacer for preventing the glass substrates 51 adjacent in the stacking direction from coming into direct contact with each other and being damaged. The interleaf paper 56 is formed from paper. Instead of the interleaf paper 56, a flexible sheet member such as a resin sheet may be used. The interleaf paper 56 has a rectangular shape when the surface thereof is viewed from the front. The interleaf paper 56 is formed in a size slightly larger than the size of the glass substrate 51 to be packed. The glass substrate 51 and the slip sheet 56 are aligned with each other so that the slip sheet 56 protrudes from the periphery of the glass substrate 51.

In FIG. 3, a glass substrate 51p stacked on the uppermost stage on the inclined surface 26, a glass substrate 51q disposed below the glass substrate 51p, and a glass substrate 51r disposed below the glass substrate 51q. It is shown. A slip sheet 56p is interposed between the glass substrate 51p and the glass substrate 51q, and a slip sheet 56q is interposed between the glass substrate 51q and the glass substrate 51r.

As shown in FIG. 2, the glass substrate 51 is arranged so that the long side 51 b extends along the inclination direction of the inclined surface 26. The glass substrate 51 may be arranged such that the short side 51 a extends along the inclination direction of the inclined surface 26.

The conveyor 60 is provided so as to relay between the mounting table 21 and various production lines such as a semiconductor production line for forming a thin film transistor. The conveyor 60 is provided as a transport unit for transporting the glass substrate 51 from the mounting table 21 toward the production line.

The conveyor 60 has a plurality of rotating rollers 61. The plurality of rotating rollers 61 are arranged at intervals from each other along the conveyance direction of the glass substrate 51. The plurality of rotating rollers 61 are provided on the vertically lower side of the inclined surface 26. The plurality of rotating rollers 61 include a driving roller that can be rotationally driven by a driving source such as a motor. By rotating the driving roller, the glass substrate 51 is moved and conveyed on the conveyor 60.

A slip paper collection box 71 is detachably installed below the conveyor 60. The structure for collecting the slip sheet 56 using the slip sheet collection box 71 will be described in detail later.

The air supply unit 40 is provided so as to be able to supply air between the glass substrate 51p stacked on the uppermost stage on the inclined surface 26 and the interleaf paper 56p inserted therebelow.

The air supply unit 40 includes an air nozzle 42, an air supply rod 44, and a compressor 41. The compressor 41 is provided as a compressed air generating source that generates compressed air. The air nozzle 42 and the compressor 41 are connected to each other by an air supply rod 44. Although not shown, a valve for sending air to the air nozzle 42 at an appropriate timing is provided on the path of the air supply rod 44 based on a command from a control unit (not shown).

The air nozzle 42 is formed with an air supply port 43 for ejecting air. The air supply port 43 is disposed at a position facing the glass substrate 51p and the interleaf paper 56p. The air supply port 43 is disposed on the opposite side of the glass substrate 51q with respect to the interleaf 56p.

In the present embodiment, the air supply unit 40 is provided so as to be able to supply air along the periphery of the glass substrate 51. More specifically, the air supply unit 40 is provided with a plurality of air nozzles 42. The plurality of air nozzles 42 are arranged along the periphery of the glass substrate 51 having a rectangular shape. The plurality of air nozzles 42 are disposed along the short side 51 a of the glass substrate 51, and the plurality of air nozzles 42 are disposed along the long side 51 b of the glass substrate 51.

Note that the arrangement of the air nozzles 42 is not limited to the form shown in the figure, and is appropriately determined in consideration of the size of the glass substrate 51, the inclination of the inclined surface 26, the shape of the air supply port 43, and the like.

FIG. 4 is a side view showing the process of transporting the glass substrate. In the figure, a range surrounded by a two-dot chain line IV in FIG. 1 is shown. With reference to FIGS. 1, 2, and 4, panel conveyance device 10 further includes a stopper 31 and a movement mechanism 36.

The stopper 31 has a block shape. The stopper 31 is disposed at an end portion on the vertically lower side of the inclined surface 26 and is provided so as to protrude from the inclined surface 26. A top surface 32 and a side surface 33 are formed on the stopper 31. The top surface 32 is formed at the tip of the stopper 31 that protrudes from the inclined surface 26. The side surface 33 is formed so as to rise from an end portion on the lower side of the inclined surface 26. The side surface 33 is orthogonal to the inclined surface 26.

When the plurality of glass substrates 51 are stacked on the inclined surface 26 with the interleaf paper 56 interposed therebetween, the end portion of the interleaf paper 56 comes into contact with the side surface 33 of the stopper 31. Thereby, the plurality of glass substrates 51 are supported by the stoppers 31 from the vertically lower side of the inclined surface 26.

The moving mechanism 36 moves the stopper 31 so that the length between the inclined surface 26 and the top surface 32, that is, the height of the top surface 32 when the inclined surface 26 is used as a reference, is changed.

An example of the structure of the moving mechanism unit 36 will be described. The moving mechanism unit 36 includes a shaft 35 and a motor 34. The end of the shaft 35 is connected to the stopper 31. In order to transmit the rotational motion generated by the motor 34 to the shaft 35 as a linear motion, the shaft 35 and the motor 34 are connected to each other using a rack and pinion mechanism. With such a configuration, as the motor 34 is driven, the stopper 31 can be moved in a direction perpendicular to the inclined surface 26 as indicated by an arrow 101 in FIG.

As shown in FIG. 2, in the present embodiment, the air nozzle 42 is fixed to the stopper 31 by a frame 38. The air nozzle 42 moves in the direction indicated by the arrow 101 together with the stopper 31 as the motor 34 is driven. In addition, it is not restricted to such a structure, In addition to the movement mechanism part 36, the movement mechanism part for moving the air nozzle 42 may be provided.

FIG. 5 is a side view showing a state in which one glass substrate is transferred from the panel transfer apparatus shown in FIG. In FIG. 5, as a result of the conveyance of the glass substrate 51 p in FIG. 3, the interleaf paper 56 p is disposed on the uppermost stage on the inclined surface 26.

Referring to FIGS. 1 and 5, panel transport device 10 in the present embodiment further includes an air supply unit 50 as a second air supply unit. The air supply unit 50 is provided so as to be able to supply air between the slip sheet 56p stacked on the uppermost stage on the inclined surface 26 and the glass substrate 51q disposed therebelow.

The air supply unit 50 includes an air nozzle 45, an air supply rod 48, and a compressor 41. The air nozzle 45 and the compressor 41 are connected to each other by an air supply rod 48. Although not shown, a valve for sending air to the air nozzle 45 at an appropriate timing is provided on the path of the air supply rod 48 based on a command from a control unit (not shown).

The air nozzle 45 is formed with an air supply port 46 for ejecting air. The air supply port 46 is disposed at a position facing the interleaf paper 56p and the glass substrate 51q. The air supply port 46 is disposed on the same side as the glass substrate 51q with respect to the interleaf 56p.

The air nozzle 45 is disposed such that the air supply port 46 faces the interleaf paper 56p and the short side 51a of the glass substrate 51q (see FIG. 2). The air nozzle 45 may be provided in the same form as the air nozzle 42 in FIG. Although not shown in the drawing, the air nozzle 45 is fixed to the stopper 31 in the same manner as the air nozzle 42.

Then, the process of conveying the glass substrate 51 toward a production line with the panel conveying apparatus 10 in this Embodiment is demonstrated.

Referring to FIG. 1, the dense pack 20 in which a plurality of glass substrates 51 are packed is carried into a panel factory. The dense pack 20 is installed on the mounting table 21 on the upstream side of the conveyor 60, and the

air supply units

40 and 50 are set on the mounting table 21. 2 and 3, air is supplied through the air nozzle 42 between the glass substrate 51p and the interleaf 56p.

Referring to FIG. 4, glass substrate 51p and interleaf paper 56p are in close contact with each other due to static electricity. When the air enters between the two, the glass substrate 51p slightly floats on the interleaf paper 56p. The floated glass substrate 51p is conveyed toward the conveyor 60 through the top surface 32 of the stopper 31 while sliding on the surface of the interleaf paper 56p. The conveyance direction of the glass substrate 51 p is a direction along the inclination direction of the inclined surface 26.

In this embodiment, the glass substrate 51 is packed in the dense pack 20 in such a posture that the surface 51m faces upward. For this reason, there is no need to reverse the glass substrate 51 when transporting from the mounting table 21 to the production line, and the transport device and the process can be simplified.

FIG. 6 is a side view showing a process of collecting slip sheets. Next, referring to FIGS. 5 and 6, air is supplied through the air nozzle 45 toward the gap between the interleaf paper 56 p and the glass substrate 51 q. By supplying air between the interleaving paper 56p and the glass substrate 51q, the interleaving paper 56p is detached from the glass substrate 51q and conveyed toward the conveyor 60.

Next, the stopper 31 is moved by driving the moving mechanism 36. At this time, the stopper 31 is moved so that the top surface 32 approaches the inclined surface 26 by a length obtained by adding the thickness of the glass substrate 51 and the thickness of the interleaf 56. As a result, the height relationship between the glass substrate 51p and the top surface 32 shown in FIG. 4 is equal to the height relationship between the glass substrate 51q and the top surface 32 ′ shown in FIG. This prevents the glass substrate 51q and the interleaf 56q that are subsequently conveyed from interfering with the stopper 31.

Thereafter, by alternately repeating the supply of air through the air nozzle 42 and the supply of air through the air nozzle 45, the glass substrate 51 and the interleaf paper 56 are conveyed one by one toward the conveyor 60.

In the present embodiment, the

air nozzles

42 and 45 are fixed to the stopper portion 31. For this reason, the

air nozzles

42 and 45 move together with the stopper 31 as the stopper 31 is moved by the moving mechanism 36. Thereby, the positional relationship between the air nozzle 42 and the uppermost glass substrate 51 and the lower interleaf paper 56 is kept constant despite the glass substrate 51 and interleaf paper 56 being sequentially conveyed, The positional relationship between the air nozzle 45 and the uppermost interleaf paper 56 and the glass substrate 51 therebelow can be kept constant.

An electrostatic remover (ionizer) that adds positive and negative ions to the air supplied from the

air supply units

40 and 50 in order to more reliably eliminate the adhesion between the glass substrate 51 and the interleaf 56 due to static electricity. May be provided.

Subsequently, the collection structure of the interleaf paper 56 provided in the panel conveyance device 10 in FIG. 1 will be described.

FIG. 7 is a side view showing a slip sheet collecting structure. Referring to FIGS. 1 and 7, panel conveyance device 10 further includes a moving mechanism 65 for a rotating roller. In FIG. 7, a rotating roller 61s, a rotating roller 61t, and a rotating roller 61u are sequentially arranged in the transport direction of the glass substrate 51. The moving mechanism unit 65 is provided so that the rotating roller 61t can be moved so as to provide an entrance path 62 for the interleaf paper 56 between the rotating roller 61s and the rotating roller 61u.

An example of the structure of the moving mechanism unit 65 will be described. The moving mechanism unit 65 includes an arm 67 and a motor 66. One end of the arm 67 is connected to the rotating roller 61 t, and the other end of the arm 67 is connected to the output shaft of the motor 66. When the arm 67 swings as the motor 66 is driven, the rotating roller 61t is retracted from the first position between the rotating roller 61s and the rotating roller 61u and between the rotating roller 61s and the rotating roller 61u. Move between the second positions.

According to such a configuration, when the glass substrate 51 is conveyed from the mounting table 21, the rotating roller 61t is positioned at the first position. Thereby, the glass substrate 51 is conveyed to the production line through the

rotation rollers

61s, 61t, 61u in order. On the other hand, when the interleaf 56 is conveyed from the mounting table 21, the rotation roller 61t is positioned at the second position, whereby an entrance path 62 is formed between the rotation roller 61s and the rotation roller 61u. A slip sheet collection box 71 is disposed below the approach path 62. The interleaf paper 56 is collected in the interleaf paper collection box 71 through the entrance path 62.

The structure of the panel transport apparatus 10 according to the first embodiment of the present invention described above will be described together. The panel transport apparatus 10 according to the present embodiment includes a mounting table 21 on which an inclined surface 26 is formed, and a first stage. And an air supply unit 40 as a gas supply unit. On the inclined surface 26, glass substrates 51 as a plurality of panels are stacked in a state in which a slip sheet 56 as a buffer sheet is sandwiched between the glass substrates 51. The air supply unit 40 supplies air as a gas between the glass substrate 51 stacked in the uppermost stage and the interleaf paper 56 interposed therebelow.

According to the panel transport apparatus 10 in Embodiment 1 of the present invention configured as described above, the mounting table 21 having the inclined surface 26 and the air supply unit 40 for floating the glass substrate 51 on the interleaf 56. A plurality of glass substrates 51 can be sequentially transported toward the production line. Thereby, compared with the case where a robot arm is used, an installation cost can be reduced or the footprint of an installation can be made small. Moreover, since the glass substrate 51 is directly conveyed from the mounting base 21 used as a returnable box between factories, a conveyance apparatus and a process can be simplified.

(Embodiment 2)
In the present embodiment, various modifications of the panel transport apparatus 10 in the first embodiment will be described.

FIG. 8 is a top view showing a first modification of the panel transport apparatus in FIG. FIG. 9 is a functional block diagram showing the configuration of the panel transport apparatus in FIG.

Referring to FIGS. 8 and 9, the panel transport device in this modification further includes a rotating roller 76 and a motor 78. The rotating roller 76 is provided in contact with the glass substrate 51 stacked on the uppermost stage on the inclined surface 26. The rotating roller 76 is provided in contact with the long side 51 b of the glass substrate 51. The rotation roller 76 is provided so that the glass substrate 51 on the inclined surface 26 can be sent out toward the conveyor 60 along with the rotation. The motor 78 rotates the rotating roller 76 in accordance with the driving.

The panel conveyance device in this modification further includes a control unit 81 and a conveyance confirmation sensor 77 as a second detection unit. The conveyance confirmation sensor 77 is provided on the conveyance path of the glass substrate 51 in the panel conveyance device. In the present embodiment, a conveyance confirmation sensor 77 is provided on the top surface 32 of the stopper 31. The conveyance confirmation sensor 77 is composed of, for example, a proximity sensor, and is provided so as to detect the glass substrate 51 passing over the top surface 32 of the stopper 31 during conveyance.

The control unit 81 is electrically connected to the motor 78 and the conveyance confirmation sensor 77. The control unit 81 sends a command to supply air to the air supply unit 40 during the conveyance process of the glass substrate 51. If a detection signal for the glass substrate 51 does not arrive from the conveyance confirmation sensor 77 after a predetermined time has elapsed from this command, the control unit 81 sends a drive command to the motor 78. Thereby, even when the close contact state between the glass substrate 51 and the interleaf paper 56 is not properly eliminated by the air supply by the air supply unit 40, the glass substrate 51 remaining on the inclined surface 26 is forced by the rotating roller 76. Can be sent out.

FIG. 10 is a functional block diagram showing the configuration of the second modification of the panel transport apparatus in FIG. Referring to FIG. 10, the panel transport apparatus in the present modification further includes a control unit 81 and a substrate detection sensor 79 as a first detection unit. The substrate detection sensor 79 detects the acceptance state of the glass substrate 51 at the transport destination. For example, the substrate detection sensor 79 includes a proximity switch installed in a semiconductor manufacturing line in the next process, and the presence of the glass substrate 51 on the line is detected, so that the next glass substrate 51 cannot be received. It is judged.

The control unit 81 is electrically connected to the motor 34 and the substrate detection sensor 79. The control unit 81 stops transmitting the drive signal to the motor 34 while receiving a signal indicating that the glass substrate 51 cannot be received from the substrate detection sensor 79. Thereby, since the movement of the stopper part 31 is stopped, it can prevent that the glass substrate 51 is conveyed to the production line where an acceptance state is not arranged.

FIG. 11 is a side view showing a third modification of the panel transport apparatus in FIG. Referring to FIG. 11, in this modification, the mounting table 21 includes a base portion 82 and a driving table 83. The base portion 82 supports the drive base 83. An inclined surface 26 is formed on the drive base 83.

The panel transport device in this modification has a moving mechanism unit 85 instead of the moving mechanism unit 36 in FIG. The moving mechanism unit 85 moves the drive base 83 so that the length between the inclined surface 26 and the top surface 32 of the stopper 31, that is, the height of the inclined surface 26 with respect to the top surface 32 is changed. Move. An example of the structure of the moving mechanism unit 36 will be described. The moving mechanism unit 36 includes a cylinder 86. The end of the shaft 87 extending from the cylinder 86 is connected to the drive base 83. As the cylinder 86 is driven, the drive base 83 can be moved in a direction orthogonal to the inclined surface 26.

As shown in this modification, the moving mechanism for maintaining a constant height relationship between the glass substrate 51 stacked on the uppermost stage and the top surface 32 of the stopper 31 is only the stopper 31 side. Instead, it may be provided on the mounting table 21 side.

FIG. 12 is a side view showing a fourth modification of the panel transport apparatus in FIG. Referring to FIG. 12, in this modification, the mounting table 21 includes a base portion 89, a swinging table 90, and a rotating shaft 88. The base part 89 supports the swing base 90. An inclined surface 26 is formed on the swing base 90. The rocking base 90 is rotatably connected to the base portion 89 via a rotating shaft 88.

According to such a configuration, the inclined surface 26 can be set to an appropriate inclination in accordance with the size and type of the panel packed on the mounting table 21.

FIG. 13 is a side view showing a fifth modification of the panel transport apparatus in FIG. FIG. 14 is an enlarged cross-sectional view of a range surrounded by a two-dot chain line XIV in FIG.

Referring to FIGS. 13 and 14, in this modification, a slip sheet storage portion 94 as a storage portion is formed on the mounting table 21. The slip sheet storage portion 94 is provided on the opposite side of the plurality of glass substrates 51 stacked on the inclined surface 26 with respect to the inclined surface 26. The stopper 31 has a hollow portion 91.

The panel transport device in this modification further includes a guide roller 93 as a guide mechanism unit. The guide roller 93 is provided so that it can be rotationally driven. The guide roller 93 is disposed in the hollow portion 91. An opening 92 and an opening 95 are formed in the stopper 31. The opening 92 opens to the top surface 32 and is formed to communicate between the external space and the hollow portion 91. The guide roller 93 is disposed adjacent to the opening 92. The opening 95 is formed so as to allow communication between the hollow portion 91 and the slip sheet storage portion 94.

The guide roller 93 has an outer peripheral surface 96. The guide roller 93 is formed with a suction hole 98 that opens to the outer peripheral surface 96. The suction hole 98 is connected to an electric pump (not shown) for sucking air.

When the slip sheet 56 is conveyed from the mounting table 21, the slip sheet 56 enters the hollow portion 91 through the opening 92. At this time, the interleaf 56 is drawn to the outer peripheral surface 96 of the guide roller 93 as air is sucked from the suction holes 98. The slip sheet 56 drawn to the outer peripheral surface 96 is guided to the slip sheet storage section 94 through the opening 95 by the rotating guide roller 93. As a result, the slip sheet 56 can be stored in the slip sheet storage portion 94.

FIG. 15 is a side view showing a sixth modification of the panel transport apparatus in FIG. Referring to FIG. 15, the panel conveyance device in the present modification further includes a rotating roller 110. The rotating roller 110 is provided in contact with the glass substrate 51 stacked on the uppermost stage on the inclined surface 26. The rotating roller 110 is provided in contact with the long side 51 b of the glass substrate 51. The rotating roller 110 rotates as the glass substrate 51 is conveyed toward the conveyor 60. As a result, the glass substrate 51 is guided by the rotating roller 110 so that the conveyance direction thereof is a direction along the inclination direction of the inclined surface 26.

FIG. 16 is a side view showing a seventh modification of the panel transport apparatus in FIG. Referring to FIG. 16, in this modification, the mounting table 21 includes a base portion 89, a swinging table 90, and a rotating shaft 88. The base part 89 supports the swing base 90. An inclined surface 26 is formed on the swing base 90. The rocking base 90 is rotatably connected to the base portion 89 via a rotating shaft 88. The rocking table 90 has a position where the inclined surface 26 extends in parallel around the rotation axis 88 (the rocking table 90 indicated by a two-dot chain line in the figure) and the inclined surface 26 is inclined with respect to the parallel direction. And the position (swing table 90 indicated by the solid line in the figure).

According to the panel conveyance device in the second embodiment of the present invention configured as described above, the effects described in the first embodiment can be obtained similarly.

The embodiment disclosed this time should be considered as illustrative in all points and not restrictive. The scope of the present invention is defined by the terms of the claims, rather than the description above, and is intended to include any modifications within the scope and meaning equivalent to the terms of the claims.

This invention is mainly used in the manufacturing process of panel-like parts or panel-like products such as glass substrates and liquid crystal panels.

10 panel transport device, 20 dense pack, 21 mounting table, 26 inclined surface, 31 stopper part, 32 top surface, 33 side surface, 34, 66, 78 motor, 35, 87 shaft, 36, 65, 85 moving mechanism part, 38 frame, 40, 50 air supply unit, 41 compressor, 42, 45 air nozzle, 43, 46 air supply port, 44, 48 air supply rod, 51 glass substrate, 51a short side, 51b long side, 51m surface, 51n back surface, 56 slip sheet, 60 conveyor, 61, 110 rotating roller, 62 entry path, 67 arm, 71 slip sheet collection box, 76 rotating roller, 77 transport confirmation sensor, 79 substrate detection sensor, 81 control unit, 82, 89 base unit, 83 drive base, 86 cylinder, 88 rotary shaft, 90 swing base, 91

hollow part

92 and 95 opening, 93 guide rollers, 94 slip sheet accommodating portion, 96 an outer peripheral surface, 98 suction holes.

Claims

An inclined surface (26) is formed, and on the inclined surface (26), a mounting table (21) on which a plurality of panels (51) are stacked with a buffer sheet (56) sandwiched between the panels (51),
A panel conveying apparatus provided with the 1st gas supply part (40) which supplies gas between the panel (51) stacked in the uppermost stage, and the buffer sheet (56) inserted under it.
Provided to protrude from the inclined surface (26), a top surface (32) is formed at a tip protruding from the inclined surface (26), and a plurality of sheets are formed from a vertically lower side along the inclined surface (26). A stopper (31) for supporting the panel (51);
As the panel (51) is transported, the mounting table (21) or the above-described table is provided so that the relative height between the panel (51) stacked on the uppermost stage and the top surface (32) is kept constant. The panel transport apparatus according to claim 1, further comprising a moving mechanism section (36, 85) for moving the stopper section (31).
The said 1st gas supply part (40) is fixed to the said mounting base (21) or the said stopper part (31) moved by the said moving mechanism part (36,85), The said stop part (31) of Claim 2 Panel transport device.
A first detector (79) for detecting the acceptance state of the panel (51) at the transport destination;
When the first detector (79) detects that the panel (51) cannot be received, the moving mechanism (36, 85) is used to place the mounting table (21) or the stopper (31). The panel conveyance apparatus of Claim 2 or 3 with which a movement is controlled.
A second detection unit (77) provided on the conveyance path of the panel (51) and detecting that the panel (51) is conveyed from the inclined surface (26);
When the conveyance of the panel (51) is not detected by the second detection unit (77), the panel (51) is placed in contact with the inclined surface (26). 5. The panel transport device according to claim 1, further comprising a feed mechanism section (76) that feeds out from the head.
The panel transport device according to any one of claims 1 to 5, wherein the first gas supply unit (40) is provided so that gas is supplied along a peripheral edge of the panel (51).
The panel (51) is a glass substrate,
The panel conveyance device according to any one of claims 1 to 6, wherein the buffer sheet (56) is a slip sheet.
After the panel (51) is transported, it further includes a second gas supply unit (50) for supplying gas between the uppermost buffer sheet (56) and the panel (51) disposed therebelow. The panel conveyance apparatus of any one of Claim 1 to 7.
The mounting table (21) includes a storage portion (94) for storing the buffer sheet (56), and
The panel transport apparatus according to claim 8, further comprising a guide mechanism section (93) for guiding the buffer sheet (56) transported from the inclined surface (26) to the housing section (94).