JP2007158566A5 - - Google Patents

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Publication number
JP2007158566A5
JP2007158566A5 JP2005348791A JP2005348791A JP2007158566A5 JP 2007158566 A5 JP2007158566 A5 JP 2007158566A5 JP 2005348791 A JP2005348791 A JP 2005348791A JP 2005348791 A JP2005348791 A JP 2005348791A JP 2007158566 A5 JP2007158566 A5 JP 2007158566A5
Authority
JP
Japan
Prior art keywords
vibrating piece
piezoelectric vibrating
chamfered
piezoelectric
tip
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2005348791A
Other languages
English (en)
Japanese (ja)
Other versions
JP2007158566A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2005348791A priority Critical patent/JP2007158566A/ja
Priority claimed from JP2005348791A external-priority patent/JP2007158566A/ja
Publication of JP2007158566A publication Critical patent/JP2007158566A/ja
Publication of JP2007158566A5 publication Critical patent/JP2007158566A5/ja
Pending legal-status Critical Current

Links

JP2005348791A 2005-12-02 2005-12-02 圧電振動片および圧電デバイス Pending JP2007158566A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2005348791A JP2007158566A (ja) 2005-12-02 2005-12-02 圧電振動片および圧電デバイス

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005348791A JP2007158566A (ja) 2005-12-02 2005-12-02 圧電振動片および圧電デバイス

Publications (2)

Publication Number Publication Date
JP2007158566A JP2007158566A (ja) 2007-06-21
JP2007158566A5 true JP2007158566A5 (sv) 2008-12-11

Family

ID=38242375

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005348791A Pending JP2007158566A (ja) 2005-12-02 2005-12-02 圧電振動片および圧電デバイス

Country Status (1)

Country Link
JP (1) JP2007158566A (sv)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7077539B2 (ja) 2017-06-23 2022-05-31 セイコーエプソン株式会社 振動素子、振動子、発振器、電子機器および移動体

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5138407B2 (ja) * 2008-02-14 2013-02-06 セイコーインスツル株式会社 ウエハ及びウエハ研磨方法
JP6051885B2 (ja) * 2013-01-18 2016-12-27 セイコーエプソン株式会社 振動素子、振動子、発振器、電子機器および移動体
JP6435606B2 (ja) * 2013-03-29 2018-12-12 セイコーエプソン株式会社 振動素子、振動子、発振器、電子機器および移動体
JP2017108379A (ja) * 2015-11-27 2017-06-15 株式会社大真空 圧電振動子
JP7365182B2 (ja) * 2019-10-04 2023-10-19 日本電波工業株式会社 振動子及び発振器
JP7396858B2 (ja) * 2019-11-01 2023-12-12 日本電波工業株式会社 圧電デバイス及びその製造方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6363209A (ja) * 1986-09-04 1988-03-19 Matsushima Kogyo Co Ltd 圧電振動子の製造方法
JP2000013169A (ja) * 1998-06-18 2000-01-14 Toyo Commun Equip Co Ltd 圧電振動子
JP2003318697A (ja) * 2002-04-25 2003-11-07 Seiko Instruments Inc Ａｔカット水晶振動子
JP2005012635A (ja) * 2003-06-20 2005-01-13 Toyo Commun Equip Co Ltd 圧電デバイス
JP4360214B2 (ja) * 2004-01-29 2009-11-11 株式会社大真空 圧電振動デバイス

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7077539B2 (ja) 2017-06-23 2022-05-31 セイコーエプソン株式会社 振動素子、振動子、発振器、電子機器および移動体

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