JP2007152259A - Liquid drop delivery apparatus, manufacturing method for electro-optical apparatus, electro-optical apparatus and electronic equipment - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a liquid drop delivery apparatus capable of suitably vaporizing a solvent of a function liquid drop drawn on a work while eliminating a thermal influence to the work and the function liquid, a manufacturing method for an electro-optical apparatus, an electro-optical apparatus and electronic equipment. <P>SOLUTION: The liquid drop delivery apparatus is provided with a drawing means for performing drawing by delivering the function liquid drop on the work while relatively moving the function liquid drop delivery head introducing the function liquid; an air blowing out port facing to the work following the moving function liquid drop delivery head and dry air of ordinary temperature for drying the function liquid on the work; an air suction port for sucking the dry air of ordinary temperature blown to the work; a chamber room for storing these; and a chamber apparatus having a clean air feeding unit having an air feeding side communicated with an air feeding chamber in a ceiling of the chamber room and an air suction side communicated with an air discharge port of the chamber room. The air blowing out port is communicated with the air feeding chamber in the ceiling and the air suction port is communicated with the outside of the chamber room through an exclusive air discharge port. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a droplet discharge device for forcibly vaporizing a solvent of a functional droplet drawn on a workpiece while drawing on a workpiece such as a substrate by a functional droplet discharge head, a method for manufacturing an electro-optical device, and an electro-optical device And electronic devices.

Conventionally, as this type of liquid droplet ejection device, functional liquid is ejected from a functional liquid droplet ejection head into which a functional liquid has been introduced and drawn on the substrate, while hot air is blown onto the substrate by a blower, One that vaporizes the solvent of the droplet (drys the functional liquid) is known (see Patent Document 1). The blower used for this has a hood that covers the upper surface of the substrate, and an air outlet and an exhaust port provided in the hood, and the hot air blown from the air outlet is blown to the substrate. The solvent is vaporized, and then the warm air containing the vaporized solvent is exhausted from the exhaust port.
JP 2002-207113 A

  However, since such a conventional droplet discharge device is configured to blow warm air, the temperature of the substrate rises and the substrate is thermally deformed. For this reason, there has been a problem that wrinkles occur in the functional liquid in the surface-dried state during cooling, resulting in poor drawing. In addition, there is a problem that it cannot be applied to a functional liquid that is altered by heat.

  The present invention relates to a droplet discharge device, a method for manufacturing an electro-optical device, and an electro-optical device that can appropriately vaporize a solvent of a functional droplet drawn on the workpiece while eliminating the thermal influence on the workpiece and the functional liquid. It is an object to provide an apparatus and an electronic device.

  The liquid droplet ejection apparatus of the present invention includes a drawing means for performing drawing by ejecting functional liquid droplets onto a work while moving a functional liquid droplet ejection head introduced with a functional liquid relative to the work, and functional liquid droplets. The air droplet outlet that blows the room temperature dry air to dry the functional liquid on the workpiece, and the room temperature dry that sprays the workpiece. An air suction port for sucking in air, a chamber room for housing drawing means, an air blowing port and an air suction port, an air supply side communicated with an air supply chamber in the ceiling of the chamber room, and an air intake side on an exhaust port of the chamber room A chamber device having a clean air supply unit that communicates with the air supply port, the air blowing port communicates with the air supply chamber in the ceiling, and the air suction port is connected via a dedicated air exhaust port. Characterized in that it communicates with the outside of Nbarumu.

  According to this configuration, the normal temperature dry air is supplied from the clean air supply unit to the air blowing port via the air supply port, and the normal temperature dry air is blown from the air blowing port to the functional liquid on the workpiece. Thereby, since the dry air of the same temperature as the inside of the chamber room is blown to the workpiece, the solvent of the functional droplet can be vaporized without the workpiece being thermally deformed. Further, by using room temperature dry air, the temperature of the functional liquid droplets does not increase, and the alteration of the functional liquid due to heat can be prevented. Furthermore, since the vaporized solvent is sucked and exhausted from the air suction port, contamination of the chamber room with the solvent can be prevented without drifting into the chamber room. The air outlet and the air inlet may be formed integrally with a sheet metal or the like, or may be formed separately.

  In this case, it is preferable that an air outlet flow rate adjusting means is interposed in the air outlet passage that communicates the air outlet and the air supply chamber in the ceiling.

  According to this configuration, by adjusting the flow rate of the normal temperature dry air supplied from the air supply chamber in the ceiling, the normal temperature dry air can be blown out from the air outlet with a wind pressure suitable for vaporizing the solvent of the functional liquid droplets. it can.

  In this case, it is preferable that an air suction means is interposed in the air suction flow path connecting the air suction port and the air exhaust port.

  According to this configuration, the solvent evaporated from the air suction port by the air suction means can be forcibly sucked. Thereby, blowing air and suction air flow smoothly, and it can prevent that the inside of a chamber room is contaminated with the vaporized solvent.

  Another liquid droplet ejection apparatus according to the present invention comprises a drawing means for performing drawing by ejecting functional liquid droplets on a substrate while moving a functional liquid droplet ejection head introduced with a functional liquid relative to a workpiece, and a functional liquid. An air outlet that blows room temperature dry air to dry the functional liquid on the workpiece, following the functional droplet ejection head that moves relatively with the ejection of the droplet, and a normal temperature on the air outlet An air supply means for supplying dry air, an air suction port for sucking room temperature dry air sprayed on the workpiece, and an air suction means connected to the air suction port are provided.

  According to this configuration, the room temperature dry air is blown from the air supply means to the work through the air blowing port. Accordingly, since the dry air having the same temperature as that in the atmosphere is blown onto the work, the work droplets can be vaporized without thermally deforming the work. Further, by using room temperature dry air, the temperature of the functional liquid droplets does not increase, and the alteration of the functional liquid due to heat can be prevented. Further, the air containing the solvent can be forcibly exhausted. When the solvent is strongly acidic or strongly alkaline or toxic, it is preferable to connect the exhaust side of the air suction means to an exhaust treatment facility.

  In this case, a drawing device, an air blowing port, an air supply device, an air suction port, and an air suction device are accommodated, and further provided with a chamber device in which the internal atmosphere is composed of room temperature dry air, and the upstream side of the air supply device is It is preferable to communicate with the inside of the chamber apparatus, and the downstream side of the air suction means communicates with the outside of the chamber apparatus through a dedicated air exhaust port.

  According to this configuration, the air supply means can blow out the normal temperature dry air having the same temperature as the temperature inside the chamber apparatus by taking in the atmosphere inside the chamber apparatus, and the dry air source can also be used as the chamber apparatus. .

  In this case, it is preferable that the work is set on the set table, and the air blowing port and the air suction port are disposed so as to cross the maximum work that can be set on the set table.

  According to this configuration, by moving the work relatively in one direction, it is possible to blow and suck room temperature dry air over the entire surface of the work.

  In this case, it is preferable that a plurality of partition plates extending in the blowing direction are provided inside the air blowing port.

  According to this configuration, the room temperature dry air blown from the air blowing port can be made into a laminar flow, and the air pressure of the room temperature dry air hitting the work can be reduced even if the air blowing port has a lower expanded shape like a hood. It can be made uniform.

  In this case, it is preferable that the air outlet and the air inlet are integrally formed by partitioning the inside of the common case with a partition plate.

  According to this configuration, the air outlet and the air inlet can be formed close to each other, and the number of parts can be reduced.

  In this case, the air outlet has a plurality of outlet nozzles, the air inlet has a plurality of inlet nozzles, and the plurality of outlet nozzles and the plurality of inlet nozzles alternately in the moving direction of relative movement. It is preferable that it is disposed.

  According to this configuration, normal temperature dry air can be blown evenly over the entire surface of the work and normal temperature dry air blown over the entire surface of the work can be sucked in, so that the functional liquid discharged over the entire surface of the work can be reduced. Can be dried.

  According to another aspect of the invention, there is provided a method for manufacturing an electro-optical device, wherein the droplet discharge device is used to form a film-forming portion using the functional droplets on the workpiece.

  In addition, an electro-optical device according to the present invention is characterized in that the above-described droplet discharge device is used, and a film forming portion using the functional droplet is formed on the workpiece.

  According to these configurations, since the above-described droplet discharge device is used, the solvent of the functional droplet drawn on the workpiece can be vaporized without deformation of the workpiece, and the electro-optical device can be efficiently manufactured. Can do. Examples of the electro-optical device (device) include a liquid crystal display device, an organic EL (Electro-Luminescence) device, an electron emission device, a PDP (Plasma Display Panel) device, and an electrophoretic display device. The electron emission device is a concept including a so-called FED (Field Emission Display) device or SED (Surface-Conduction Electron-Emitter Display) device. Further, as the electro-optical device, devices including metal wiring formation, lens formation, resist formation, light diffuser formation, and the like are conceivable.

  An electronic apparatus according to an aspect of the invention includes the electro-optical device manufactured by the above-described electro-optical device manufacturing method or the above-described electro-optical device.

  In this case, the electronic apparatus corresponds to various electric products in addition to a mobile phone and a personal computer equipped with a so-called flat panel display.

  Hereinafter, a droplet discharge device of the present invention will be described with reference to the accompanying drawings. The droplet discharge device is incorporated in a flat panel display production line, and a color filter of an LCD device or an organic EL device is printed by a printing technique (inkjet method) using a functional droplet discharge head which is an inkjet head. A light emitting element or the like to be each pixel is formed on a substrate. Specifically, the droplet discharge device of the present embodiment discharges and lands a functional liquid that constitutes a light emitting element or the like on a large number of pixel regions on a substrate, and further dries (semi-drys) this functional liquid. is there.

  As shown in FIGS. 1 and 2, the droplet discharge device 1 is widely mounted on the machine base 2 and the entire area on the machine base 2, and has a functional liquid droplet discharge head 17 and a substrate W (workpiece). The drawing apparatus 3 that has been set, the suction / blowout hood 8 that integrally forms the air suction port 5 and the air blowing port 6 that face the set substrate W, the maintenance device 4 that is used for maintenance of the drawing apparatus 3, and the drawing apparatus 3 And a chamber device 7 that accommodates the suction / blowout hood 8 and the maintenance device 4 and maintains the internal atmosphere (dry air) at a predetermined cleanliness. The suction / blowout hood 8 is arranged on the opposite side of the substrate W at the home position with the functional liquid droplet ejection head 17 interposed therebetween, and is arranged so as to cover the substrate W facing directly under the suction / blowout hood 8 after drawing from above. It is installed.

  The droplet discharge device 1 performs maintenance processing (function maintenance / recovery) of the functional droplet discharge head 17 by the maintenance device 4 and functions on the substrate W (work) carried from the outside of the chamber device 7 by the drawing device 3. A drawing operation for discharging droplets is performed. Although not shown, the droplet discharge device 1 is configured by an air supply device that supplies compressed air for driving and control to each component, a personal computer, and the like, and controls each part of the droplet discharge device 1. Equipment etc. are incorporated.

  The drawing apparatus 3 includes an XY moving mechanism 11 including an X-axis table 12 and a Y-axis table 13 (head moving means) orthogonal to the X-axis table 12, a carriage 14 movably attached to the Y-axis table 13, a carriage 14 and a head unit 15 suspended from the head 14. A functional liquid droplet ejection head 17 is mounted on the head unit 15. On the other hand, the substrate W is mounted on the X-axis table 12 by a pair of substrate recognition cameras (not shown) facing the end of the X-axis table 12. In the present embodiment, the single functional liquid droplet ejection head 17 is mounted, but the number thereof is arbitrary.

  The X-axis table 12 includes a motor-driven X-axis slider 21 that constitutes a drive system in the X-axis direction. A set table 22 including a suction table 23 and a substrate θ table 24 is movably mounted on the X-axis table 21. It is configured. Similarly, the Y-axis table 13 has a motor-driven Y-axis slider 26 that constitutes a drive system in the Y-axis direction, and the head unit 15 is movably mounted on the carriage 14 via the carriage 14. Has been. The X-axis table 12 is supported by four X-axis columns 28 erected on the machine base 2, while the Y-axis table 13 is similarly provided with four Y-axis columns 27 erected on the machine table 2. It extends so as to straddle the X-axis table 12 and the maintenance device 4.

  The Y-axis table 13 includes the head unit 15 mounted on the Y-axis table 13 between the drawing area 91 positioned immediately above the X-axis table 12 and the maintenance area 92 positioned directly above the maintenance device 4. Move as appropriate. In other words, the Y-axis table 13 is used when performing the drawing operation on the substrate W set on the X-axis table 12 when the head unit 15 faces the drawing area 91 and the maintenance process of the functional liquid droplet ejection head 17 is performed. Causes the head unit 15 to face the maintenance area 92. The X-axis table 12 is located on the left side of the drawing, and is between the substrate setting area 93 on which the substrate W is set, the drawing area 91, and the drying area 94 located immediately below the suction / blowout hood 8. , Move as appropriate. That is, when the substrate W is carried in and out, the substrate W is exchanged by facing the substrate setting area 93, and when performing the drawing operation on the set substrate W, the substrate W is caused to face the drawing area 91. In addition, when the solvent of the functional liquid droplets discharged onto the substrate W is vaporized, it is allowed to face the drying area 94.

  The chamber device 7 includes a chamber room 30 that houses the drawing device 3, the suction / blowout hood 8, and the maintenance device 4, and a clean air supply unit that is provided in the chamber room 30 and supplies room temperature dry air into the chamber room 30. 31.

  The chamber room 30 is formed in a substantially rectangular shape by a side wall 33, a floor wall 34, and a top wall 35 that surround four sides, and a substrate with a shutter for loading and unloading the substrate W on the side wall 33 on the substrate set area 93 side. A carry-in / out port 36 is formed (inspection port is omitted). A plurality of HEPA filters 37 are provided over substantially the entire top surface of the chamber room 30, and the air supply chamber 38 in the ceiling, which is the back side space of the HEPA filter 37, is connected to the air supply side of the clean air supply unit 31. A circular air supply port 39 that communicates is formed. A circular exhaust port 40 communicating with the intake side of the clean air supply unit 31 is formed in the lower portion of the side wall of the chamber room 30. Further, an air exhaust port 42 through which air sucked from the air suction port 5 of the suction / blowout hood 8 is exhausted is provided on the upper side wall of the chamber room 30. As shown in the figure, the ceiling air supply chamber 38 is provided with a plurality of ceiling air direction plates 41 extending from the air supply port 39 toward the HEPA filter 37 so that air is uniformly guided to the HEPA filter 37. It may be. Thereby, the air which flows toward the component apparatus from the HEPA filter 37 becomes a uniform downflow.

  Although not shown, the clean air supply unit 31 incorporates a fan, a coil, and a filter, takes in outside air as appropriate, and generates and sends clean air adjusted to a predetermined temperature and humidity. The air supply side of the clean air supply unit 31 is connected to the air supply port 39 through the air supply duct 45, and the air intake side is connected to the exhaust port 40 through the intake duct 46. That is, the clean air supply unit 31 circulates the atmosphere in the chamber room 30 with a predetermined number of ventilations, and maintains the inside of the chamber room 30 at a predetermined temperature, humidity, cleanliness, and positive pressure. The clean air supply unit 31 of the embodiment supplies so-called room temperature dry clean air (dry air) into the chamber room 30, but depending on the functional liquid used, a room temperature inert gas (instead of room temperature dry air) Nitrogen, carbon dioxide, helium, neon, argon, krypton, xenon, and radon).

  Here, the suction / blowout hood 8 will be described in detail with reference to FIGS. 2 and 3. The suction / blowout hood 8 includes a rectangular parallelepiped hood main body 51 formed by partitioning the air blowout port 6 and the air suction port 5 with a plurality of partition plates 50, an air blowout flow path 52 extending upward from the hood main body 51, and a hood. An air suction passage 53 extending laterally from the main body 51, and is integrally formed of sheet metal or the like.

  The air outlet passage 52 is formed in a deformed duct shape, and its upstream end is opened to the in-ceiling air supply chamber 38 in the vicinity of the air supply port 39. The downstream end of the air blowing channel 52 is fixed from above to the lattice frame 54 (one mass) for mounting the HEPA filter 37, while the upper end of the hood main body 51 is located below the lattice frame 54. Is fixed. Thereby, the downstream side of the air blowing channel 52 communicates with the air blowing port 6 of the hood main body 51. Note that the HEPA filter 37 taken into the air blowing channel 52 may be omitted.

  An air supply damper 55 (blowout flow rate adjusting means) is provided at the upstream end of the air outlet passage 52 opened to the air supply chamber 38 in the ceiling, and the air supply damper 55 is constituted by a volume damper. Yes. By adjusting the angle of the blades of the air supply damper 55, the flow rate of the blown air is adjusted between fully closed and fully open. For this reason, normal temperature dry air can be blown out with the wind pressure suitable for the vaporization of the solvent of the functional droplet discharged on the substrate W. On the other hand, the air suction passage 53 extends laterally from the entire side surface of the hood main body 51 in a funnel shape, and communicates with the outside of the chamber room 30 through a dedicated air exhaust port 42.

  In the hood main body 51, a plurality of partition plates 50, an air blowing port 6 that guides blown air (room temperature dry air) from the top to the bottom, and an air suction port 5 that guides suction air (room temperature dry air) from the bottom to the side. And are built. Further, the plurality of partition plates 50 define four blowing nozzles 60 that are downstream ends of the air blowing ports 6, and three suction nozzles 61 that are upstream ends of the air suction ports 5. ing. The four blowing nozzles 60 and the three suction nozzles 61 are alternately arranged in the X-axis direction, and the respective slit-like nozzle ports 62 are wider than the maximum substrate W that can be set on the set table 22 (Y Long in the axial direction). As a result, each blowing nozzle 60 can spray room temperature dry air from each blowing nozzle 60 over the entire surface of the substrate W when the substrate W is scanned in the X-axis direction, and is vaporized from each suction nozzle 61 to form a solvent. Room temperature dry air containing can be sucked.

  Further, a plurality of partition plates 63 for restricting the air blowing direction are provided at the lower portion of each blowing nozzle 60 on the nozzle port 62 side (see FIG. 3B). With the plurality of partition plates 63, the nozzle port 62 is in a uniform positive pressure state in the extending direction (Y-axis direction), and normal temperature dry air can be uniformly blown toward the substrate W. Similarly, a plurality of partition plates 63 for restricting the air suction direction are provided at the lower portion of each suction nozzle 61 on the nozzle port 62 side (see FIG. 3A). With the plurality of partition plates 63, the nozzle port 62 is in a uniform negative pressure state in the extending direction (Y-axis direction), and normal temperature dry air can be uniformly sucked from the substrate W.

  The drying operation of the substrate W in the embodiment is performed following the drawing on the substrate W. That is, drawing (droplet discharge) is performed by the functional droplet discharge head 17 in synchronization with the movement of the substrate W in the X-axis direction by the X-axis table 12, but the substrate W after drawing is discharged as is. It passes through the head 17 and moves to a position directly below the suction / blowout hood 8. Then, immediately before the substrate W reaches the position directly below the suction / blowout hood 8, the air supply damper 55 in the closed state is opened. When the air supply damper 55 is opened, normal temperature dry air is supplied from the in-ceiling air supply chamber 38 toward the four blowing nozzles 60, and normal temperature dry air is blown onto the substrate W. When the normal temperature dry air is sprayed, the solvent of the functional droplet drawn on the substrate W is vaporized. The evaporated solvent is sucked from the three suction nozzles 61 and exhausted to the outside of the chamber room 30 through the air exhaust port 42. When the size of the substrate W is completely covered by the suction / blowout hood 8, the substrate W is stopped when the substrate W reaches just below the suction / blowout hood 8, and the air supply damper 55 is opened. It is preferable. Conversely, when the substrate W is larger (longer) than the suction / blowout hood 8, the air supply damper 55 is opened, and the substrate W passes through the reciprocating motion directly under the suction / blowout hood 8. It is preferable to move to.

  According to the above configuration, since normal temperature dry air is used, when the solvent of the functional droplet drawn on the substrate W is vaporized, thermal deformation of the substrate W and alteration due to heat of the functional liquid can be prevented. it can. Further, since the vaporized functional droplet solvent can be exhausted to the outside of the chamber room 30, the functional droplet solvent does not drift directly above the substrate W and in the chamber room 30. In the present embodiment, the air outlet 6 and the air inlet 5 are integrated, but they may be separated.

  Next, a second embodiment of the present invention will be described with reference to FIG. In order to avoid duplicate descriptions, only different parts will be described. In the droplet discharge device of this embodiment, an exhaust fan 70 is interposed in the downstream portion of the air suction channel 53 of the first embodiment. The exhaust fan 70 is constituted by an axial fan or the like and forcibly exhausts the intake air from the air exhaust port 42.

  When the exhaust fan 70 is driven, air containing the solvent of the functional droplets evaporated from the suction nozzle 61 is forcibly sucked and exhausted to the outside of the chamber room 30. According to this configuration, the solvent evaporated more smoothly can be introduced into the suction nozzle 61, and the inside of the chamber room 30 is not contaminated by the evaporated solvent.

  Next, a third embodiment of the present invention will be described with reference to FIG. In the droplet discharge device of this embodiment, the air suction flow channel 53 of the second embodiment communicates with the side surface of the hood main body 51. That is, the air suction passage 53 is connected to the side surface of the hood main body 51 in front of the drawing, and the air outlet passage 52 is connected to the side surface in the drawing. Thereby, blowing air is guide | induced downward from this side, and suction | inhalation air is guide | induced to the side from the bottom. An air blower 71 and a filter 72 for sending air to the air outlet 6 are provided at the upstream end of the air suction passage 53, and the intake side of the air blower 71 is the chamber room 30. It is open inside.

  When the exhaust air blower 70 and the air supply air blower 71 are driven, the air supply air blower 71 takes in the normal temperature dry air from the chamber room 30 and supplies the air to each blow nozzle 60 with a predetermined air volume. Spray dry air at room temperature. Thereafter, the solvent of the functional liquid evaporated by the blown air is forcibly sucked from the suction nozzle 61 and exhausted outside the chamber room 30.

  According to the above configuration, the air flow rate can be controlled by the air supply blower 71 without using the air supply damper 55, and the solvent of the functional droplet can be obtained by using the normal temperature dry air in the chamber room 30. Can be vaporized. Thereby, since the air sprayed on the functional liquid and the substrate W has the same temperature as that in the chamber room 30, it is possible to prevent the functional liquid and the substrate W from being altered or deformed by the heat.

  Next, as an electro-optical device (flat panel display) manufactured using the droplet discharge device 1 of this embodiment, a color filter, a liquid crystal display device, an organic EL device, a plasma display (PDP device), an electron emission device ( FED devices, SED devices), and active matrix substrates formed in these display devices will be described as an example for their structures and manufacturing methods. Note that an active matrix substrate refers to a substrate on which a thin film transistor, a source line electrically connected to the thin film transistor, and a data line are formed.

First, a method for manufacturing a color filter incorporated in a liquid crystal display device, an organic EL device or the like will be described. FIG. 6 is a flowchart showing the manufacturing process of the color filter, and FIG. 7 is a schematic cross-sectional view of the color filter 500 (filter base body 500A) of the present embodiment shown in the order of the manufacturing process.
First, in the black matrix forming step (S101), a black matrix 502 is formed on a substrate (W) 501 as shown in FIG. The black matrix 502 is formed of metal chromium, a laminate of metal chromium and chromium oxide, resin black, or the like. A sputtering method, a vapor deposition method, or the like can be used to form the black matrix 502 made of a metal thin film. Further, when forming the black matrix 502 made of a resin thin film, a gravure printing method, a photoresist method, a thermal transfer method, or the like can be used.

Subsequently, in the bank formation step (S102), a bank 503 is formed in a state of being superimposed on the black matrix 502. That is, first, as shown in FIG. 7B, a resist layer 504 made of a negative transparent photosensitive resin is formed so as to cover the substrate 501 and the black matrix 502. Then, an exposure process is performed with the upper surface covered with a mask film 505 formed in a matrix pattern shape.
Further, as shown in FIG. 7C, the resist layer 504 is patterned by etching an unexposed portion of the resist layer 504 to form a bank 503. When the black matrix is formed from resin black, it is possible to use both the black matrix and the bank.
The bank 503 and the black matrix 502 below the partition wall 507b partitioning each pixel region 507a, and in the subsequent colored layer forming step, the colored liquid layers (film forming portions) 508R, 508G, When forming 508B, the landing area of the functional droplet is defined.

The filter substrate 500A is obtained through the above black matrix forming step and bank forming step.
In the present embodiment, as the material for the bank 503, a resin material whose surface is lyophobic (hydrophobic) is used. Since the surface of the substrate (glass substrate) 501 is lyophilic (hydrophilic), the droplets into each pixel region 507a surrounded by the bank 503 (partition wall portion 507b) in the colored layer forming step described later. Variations in landing position can be automatically corrected.

  Next, in the colored layer forming step (S103), as shown in FIG. 7D, functional droplets are ejected by the functional droplet ejecting head 17 and each pixel region 507a is surrounded by the partition wall portion 507b. Let it land. In this case, the functional liquid droplet ejection head 17 is used to introduce functional liquids (filter materials) of three colors of R, G, and B to eject functional liquid droplets. Note that the three-color arrangement pattern of R, G, and B includes a stripe arrangement, a mosaic arrangement, and a delta arrangement.

Thereafter, the functional liquid is fixed through a drying process (a process such as heating), and three colored layers 508R, 508G, and 508B are formed. When the colored layers 508R, 508G, and 508B are formed, the process proceeds to the protective film forming step (S104), and as shown in FIG. A protective film 509 is formed so as to cover the upper surface.
That is, after the protective film coating liquid is discharged over the entire surface of the substrate 501 where the colored layers 508R, 508G, and 508B are formed, the protective film 509 is formed through a drying process.
Then, after forming the protective film 509, the color filter 500 moves to a film forming process such as ITO (Indium Tin Oxide) which becomes a transparent electrode in the next process.

  FIG. 8 is a cross-sectional view of a principal part showing a schematic configuration of a passive matrix liquid crystal device (liquid crystal device) as an example of a liquid crystal display device using the color filter 500 described above. By attaching auxiliary elements such as a liquid crystal driving IC, a backlight, and a support to the liquid crystal device 520, a transmissive liquid crystal display device as a final product can be obtained. Since the color filter 500 is the same as that shown in FIG. 7, the corresponding parts are denoted by the same reference numerals and description thereof is omitted.

The liquid crystal device 520 is roughly configured by a color filter 500, a counter substrate 521 made of a glass substrate, and a liquid crystal layer 522 made of an STN (Super Twisted Nematic) liquid crystal composition sandwiched between them, The filter 500 is arranged on the upper side (observer side) in the figure.
Although not shown, polarizing plates are provided on the outer surfaces of the counter substrate 521 and the color filter 500 (surfaces opposite to the liquid crystal layer 522 side), and the polarizing plates located on the counter substrate 521 side are also provided. A backlight is disposed outside.

On the protective film 509 (liquid crystal layer side) of the color filter 500, a plurality of strip-shaped first electrodes 523 elongated in the left-right direction in FIG. 8 are formed at a predetermined interval, and the color of the first electrode 523 is A first alignment film 524 is formed so as to cover the surface opposite to the filter 500 side.
On the other hand, a plurality of strip-shaped second electrodes 526 elongated in a direction orthogonal to the first electrode 523 of the color filter 500 are formed on the surface of the counter substrate 521 facing the color filter 500 at a predetermined interval. A second alignment film 527 is formed so as to cover the surface of the two electrodes 526 on the liquid crystal layer 522 side. The first electrode 523 and the second electrode 526 are made of a transparent conductive material such as ITO.

The spacer 528 provided in the liquid crystal layer 522 is a member for keeping the thickness (cell gap) of the liquid crystal layer 522 constant. The sealing material 529 is a member for preventing the liquid crystal composition in the liquid crystal layer 522 from leaking to the outside. Note that one end of the first electrode 523 extends to the outside of the sealing material 529 as a lead-out wiring 523a.
A portion where the first electrode 523 and the second electrode 526 intersect with each other is a pixel, and the color layers 508R, 508G, and 508B of the color filter 500 are located in the portion that becomes the pixel.

  In a normal manufacturing process, patterning of the first electrode 523 and application of the first alignment film 524 are performed on the color filter 500 to create a portion on the color filter 500 side. Patterning of the electrode 526 and application of the second alignment film 527 are performed to create a portion on the counter substrate 521 side. Thereafter, a spacer 528 and a sealing material 529 are formed in the portion on the counter substrate 521 side, and the portion on the color filter 500 side is bonded in this state. Next, liquid crystal constituting the liquid crystal layer 522 is injected from the inlet of the sealing material 529, and the inlet is closed. Thereafter, both polarizing plates and the backlight are laminated.

  The droplet discharge device 1 according to the embodiment applies, for example, a spacer material (functional liquid) that constitutes the cell gap, and before the portion on the color filter 500 side is bonded to the portion on the counter substrate 521 side, the sealing material Liquid crystal (functional liquid) can be uniformly applied to the region surrounded by 529. Further, the printing of the sealing material 529 can be performed by the functional liquid droplet ejection head 17. Further, the first and second alignment films 524 and 527 can be applied by the functional liquid droplet ejection head 17.

FIG. 9 is a cross-sectional view of a principal part showing a schematic configuration of a second example of a liquid crystal device using the color filter 500 manufactured in the present embodiment.
The liquid crystal device 530 is significantly different from the liquid crystal device 520 in that the color filter 500 is arranged on the lower side (the side opposite to the observer side) in the figure.
The liquid crystal device 530 is generally configured by sandwiching a liquid crystal layer 532 made of STN liquid crystal between a color filter 500 and a counter substrate 531 made of a glass substrate or the like. Although not shown, polarizing plates and the like are provided on the outer surfaces of the counter substrate 531 and the color filter 500, respectively.

On the protective film 509 of the color filter 500 (on the liquid crystal layer 532 side), a plurality of strip-shaped first electrodes 533 elongated in the depth direction in the figure are formed at predetermined intervals, and the liquid crystal of the first electrodes 533 is formed. A first alignment film 534 is formed so as to cover the surface on the layer 532 side.
A plurality of strip-shaped second electrodes 536 extending in a direction orthogonal to the first electrode 533 on the color filter 500 side are formed on the surface of the counter substrate 531 facing the color filter 500 at a predetermined interval. A second alignment film 537 is formed so as to cover the surface of the second electrode 536 on the liquid crystal layer 532 side.

The liquid crystal layer 532 is provided with a spacer 538 for keeping the thickness of the liquid crystal layer 532 constant and a sealing material 539 for preventing the liquid crystal composition in the liquid crystal layer 532 from leaking to the outside. Yes.
Similarly to the liquid crystal device 520 described above, a portion where the first electrode 533 and the second electrode 536 intersect with each other is a pixel, and the colored layers 508R, 508G, and 508B of the color filter 500 are located at the portion that becomes the pixel. Is configured to do.

FIG. 10 shows a third example in which a liquid crystal device is configured using a color filter 500 to which the present invention is applied, and is an exploded perspective view showing a schematic configuration of a transmissive TFT (Thin Film Transistor) type liquid crystal device. It is.
In the liquid crystal device 550, the color filter 500 is arranged on the upper side (observer side) in the figure.

The liquid crystal device 550 includes a color filter 500, a counter substrate 551 disposed so as to face the color filter 500, a liquid crystal layer (not shown) sandwiched therebetween, and an upper surface side (observer side) of the color filter 500. The polarizing plate 555 and the polarizing plate (not shown) arranged on the lower surface side of the counter substrate 551 are roughly configured.
A liquid crystal driving electrode 556 is formed on the surface of the protective film 509 of the color filter 500 (the surface on the counter substrate 551 side). The electrode 556 is made of a transparent conductive material such as ITO, and is a full surface electrode that covers the entire region where a pixel electrode 560 described later is formed. An alignment film 557 is provided so as to cover the surface of the electrode 556 opposite to the pixel electrode 560.

  An insulating layer 558 is formed on the surface of the counter substrate 551 facing the color filter 500, and the scanning lines 561 and the signal lines 562 are formed on the insulating layer 558 in a state of being orthogonal to each other. A pixel electrode 560 is formed in a region surrounded by the scanning lines 561 and the signal lines 562. In an actual liquid crystal device, an alignment film is provided on the pixel electrode 560, but the illustration is omitted.

  In addition, a thin film transistor 563 including a source electrode, a drain electrode, a semiconductor, and a gate electrode is incorporated in a portion surrounded by the cutout portion of the pixel electrode 560 and the scanning line 561 and the signal line 562. . The thin film transistor 563 is turned on / off by application of signals to the scanning line 561 and the signal line 562 so that energization control to the pixel electrode 560 can be performed.

  Note that the liquid crystal devices 520, 530, and 550 in the above examples are transmissive, but a reflective liquid crystal device or a transflective liquid crystal device is provided by providing a reflective layer or a transflective layer. You can also

  Next, FIG. 11 is a cross-sectional view of a main part of a display region (hereinafter simply referred to as a display device 600) of the organic EL device.

The display device 600 is schematically configured with a circuit element portion 602, a light emitting element portion 603, and a cathode 604 laminated on a substrate (W) 601.
In the display device 600, light emitted from the light emitting element portion 603 to the substrate 601 side is transmitted through the circuit element portion 602 and the substrate 601 and emitted to the observer side, and the light emitting element portion 603 is opposite to the substrate 601. After the light emitted to the side is reflected by the cathode 604, the light passes through the circuit element portion 602 and the substrate 601 and is emitted to the observer side.

  A base protective film 606 made of a silicon oxide film is formed between the circuit element portion 602 and the substrate 601, and an island-shaped semiconductor film 607 made of polycrystalline silicon is formed on the base protective film 606 (on the light emitting element portion 603 side). Is formed. In the left and right regions of the semiconductor film 607, a source region 607a and a drain region 607b are formed by high concentration cation implantation, respectively. A central portion where no positive ions are implanted is a channel region 607c.

  In the circuit element portion 602, a transparent gate insulating film 608 covering the base protective film 606 and the semiconductor film 607 is formed, and a position corresponding to the channel region 607c of the semiconductor film 607 on the gate insulating film 608 is formed. For example, a gate electrode 609 made of Al, Mo, Ta, Ti, W or the like is formed. On the gate electrode 609 and the gate insulating film 608, a transparent first interlayer insulating film 611a and a second interlayer insulating film 611b are formed. Further, contact holes 612a and 612b are formed through the first and second interlayer insulating films 611a and 611b and communicating with the source region 607a and the drain region 607b of the semiconductor film 607, respectively.

A transparent pixel electrode 613 made of ITO or the like is patterned and formed in a predetermined shape on the second interlayer insulating film 611b, and the pixel electrode 613 is connected to the source region 607a through the contact hole 612a. .
A power supply line 614 is disposed on the first interlayer insulating film 611a, and the power supply line 614 is connected to the drain region 607b through the contact hole 612b.

  Thus, the driving thin film transistors 615 connected to the pixel electrodes 613 are formed in the circuit element portion 602, respectively.

The light emitting element portion 603 includes a functional layer 617 stacked on each of the plurality of pixel electrodes 613, and a bank portion 618 provided between each pixel electrode 613 and the functional layer 617 to partition each functional layer 617. It is roughly structured.
The pixel electrode 613, the functional layer 617, and the cathode 604 provided on the functional layer 617 constitute a light emitting element. Note that the pixel electrode 613 is formed by patterning in a substantially rectangular shape in plan view, and a bank portion 618 is formed between the pixel electrodes 613.

The bank unit 618 is laminated on the inorganic bank layer 618a (first bank layer) 618a formed of an inorganic material such as SiO, SiO ₂ , TiO _{2, and the} like, and is made of an acrylic resin, a polyimide resin, or the like. It is composed of an organic bank layer 618b (second bank layer) having a trapezoidal cross section formed of a resist having excellent heat resistance and solvent resistance. A part of the bank unit 618 is formed on the peripheral edge of the pixel electrode 613.
An opening 619 that gradually expands upward with respect to the pixel electrode 613 is formed between the bank portions 618.

The functional layer 617 includes a hole injection / transport layer 617a formed in a stacked state on the pixel electrode 613 in the opening 619, and a light emitting layer 617b formed on the hole injection / transport layer 617a. Has been. Note that another functional layer having other functions may be further formed adjacent to the light emitting layer 617b. For example, it is possible to form an electron transport layer.
The hole injection / transport layer 617a has a function of transporting holes from the pixel electrode 613 side and injecting them into the light emitting layer 617b. The hole injection / transport layer 617a is formed by discharging a first composition (functional liquid) containing a hole injection / transport layer forming material. A known material is used as the hole injection / transport layer forming material.

  The light emitting layer 617b emits light in red (R), green (G), or blue (B), and discharges a second composition (functional liquid) containing a light emitting layer forming material (light emitting material). Is formed. As the solvent (nonpolar solvent) of the second composition, a known material that is insoluble in the hole injection / transport layer 617a is preferably used, and such a nonpolar solvent is used as the second composition of the light emitting layer 617b. By using the light emitting layer 617b, the light emitting layer 617b can be formed without re-dissolving the hole injection / transport layer 617a.

  The light emitting layer 617b is configured such that the holes injected from the hole injection / transport layer 617a and the electrons injected from the cathode 604 are recombined in the light emitting layer to emit light.

  The cathode 604 is formed so as to cover the entire surface of the light emitting element portion 603, and plays a role of flowing current to the functional layer 617 in a pair with the pixel electrode 613. Note that a sealing member (not shown) is disposed on the cathode 604.

Next, the manufacturing process of said display apparatus 600 is demonstrated with reference to FIGS.
As shown in FIG. 12, the display device 600 includes a bank part forming step (S111), a surface treatment step (S112), a hole injection / transport layer forming step (S113), a light emitting layer forming step (S114), It is manufactured through an electrode formation step (S115). In addition, a manufacturing process is not restricted to what is illustrated, and when other processes are removed as needed, it may be added.

First, in the bank part forming step (S111), as shown in FIG. 13, an inorganic bank layer 618a is formed on the second interlayer insulating film 611b. The inorganic bank layer 618a is formed by forming an inorganic film at a formation position and then patterning the inorganic film by a photolithography technique or the like. At this time, a part of the inorganic bank layer 618 a is formed so as to overlap with the peripheral edge of the pixel electrode 613.
When the inorganic bank layer 618a is formed, an organic bank layer 618b is formed on the inorganic bank layer 618a as shown in FIG. The organic bank layer 618b is also formed by patterning using a photolithography technique or the like in the same manner as the inorganic bank layer 618a.
In this way, the bank portion 618 is formed. Accordingly, an opening 619 opening upward with respect to the pixel electrode 613 is formed between the bank portions 618. The opening 619 defines a pixel region.

In the surface treatment step (S112), a lyophilic process and a lyophobic process are performed. The regions to be subjected to the lyophilic treatment are the first stacked portion 618aa of the inorganic bank layer 618a and the electrode surface 613a of the pixel electrode 613. These regions are made lyophilic by, for example, plasma treatment using oxygen as a treatment gas. Is done. This plasma treatment also serves to clean the ITO that is the pixel electrode 613.
In addition, the lyophobic treatment is performed on the wall surface 618s of the organic bank layer 618b and the upper surface 618t of the organic bank layer 618b, and the surface is fluorinated (treated to be liquid repellent) by plasma treatment using, for example, tetrafluoromethane as a processing gas. )
By performing this surface treatment process, when forming the functional layer 617 using the functional liquid droplet ejection head 17, the functional liquid droplets can be landed more reliably on the pixel area. It is possible to prevent the functional droplets from overflowing from the opening 619.

  Then, the display device base 600A is obtained through the above steps. The display device base 600A is placed on the set table 22 of the droplet discharge device 1 shown in FIG. 2, and the following hole injection / transport layer forming step (S113) and light emitting layer forming step (S114) are performed. .

  As shown in FIG. 15, in the hole injection / transport layer forming step (S113), the first composition containing the hole injection / transport layer forming material is transferred from the functional liquid droplet ejection head 17 to each opening 619 that is a pixel region. Discharge inside. Thereafter, as shown in FIG. 16, a drying process and a heat treatment are performed to evaporate the polar solvent contained in the first composition, and a hole injection / transport layer 617a is formed on the pixel electrode (electrode surface 613a) 613.

Next, the light emitting layer forming step (S114) will be described. In this light emitting layer forming step, as described above, in order to prevent re-dissolution of the hole injection / transport layer 617a, the hole injection / transport layer 617a is used as a solvent for the second composition used in forming the light emitting layer. A non-polar solvent insoluble in.
However, since the hole injection / transport layer 617a has a low affinity for the nonpolar solvent, the hole injection / transport layer 617a has a low affinity even if the second composition containing the nonpolar solvent is discharged onto the hole injection / transport layer 617a. There is a possibility that the injection / transport layer 617a and the light emitting layer 617b cannot be adhered to each other, or the light emitting layer 617b cannot be applied uniformly.
Therefore, in order to increase the surface affinity of the hole injection / transport layer 617a with respect to the nonpolar solvent and the light emitting layer forming material, it is preferable to perform surface treatment (surface modification treatment) before forming the light emitting layer. In this surface treatment, a surface modifying material which is the same solvent as the non-polar solvent of the second composition used in the formation of the light emitting layer or a similar solvent is applied on the hole injection / transport layer 617a, and this is applied. This is done by drying.
By performing such treatment, the surface of the hole injection / transport layer 617a is easily adapted to the nonpolar solvent. In the subsequent step, the second composition containing the light emitting layer forming material is added to the hole injection / transport layer. It can be uniformly applied to 617a.

  Next, as shown in FIG. 17, the second composition containing the light emitting layer forming material corresponding to one of the colors (blue (B) in the example of FIG. 17) is used as a functional droplet as a pixel region ( A predetermined amount is driven into the opening 619). The second composition driven into the pixel region spreads on the hole injection / transport layer 617a and fills the opening 619. Even if the second composition deviates from the pixel region and lands on the upper surface 618t of the bank portion 618, the upper composition 618t is subjected to the liquid repellent treatment as described above. Things are easy to roll into the opening 619.

  Thereafter, by performing a drying process or the like, the discharged second composition is dried, the nonpolar solvent contained in the second composition is evaporated, and as shown in FIG. 18, the hole injection / transport layer 617a A light emitting layer 617b is formed thereon. In this figure, a light emitting layer 617b corresponding to blue (B) is formed.

  Similarly, using the functional liquid droplet ejection head 17, as shown in FIG. 19, the same steps as in the case of the light emitting layer 617b corresponding to the blue (B) described above are sequentially performed, and other colors (red (R) and red (R) and A light emitting layer 617b corresponding to green (G) is formed. Note that the order in which the light-emitting layers 617b are formed is not limited to the illustrated order, and may be formed in any order. For example, the order of formation can be determined according to the light emitting layer forming material. In addition, the arrangement pattern of the three colors R, G, and B includes a stripe arrangement, a mosaic arrangement, a delta arrangement, and the like.

  As described above, the functional layer 617, that is, the hole injection / transport layer 617a and the light emitting layer 617b are formed on the pixel electrode 613. And it transfers to a counter electrode formation process (S115).

In the counter electrode forming step (S115), as shown in FIG. 20, a cathode 604 (counter electrode) is formed on the entire surface of the light emitting layer 617b and the organic bank layer 618b by, for example, vapor deposition, sputtering, CVD, or the like. In the present embodiment, the cathode 604 is configured by, for example, laminating a calcium layer and an aluminum layer.
On top of the cathode 604, an Al film, an Ag film as an electrode, and a protective layer such as SiO ₂ or SiN for preventing oxidation thereof are appropriately provided.

  After forming the cathode 604 in this way, the display device 600 is obtained by performing other processes such as a sealing process for sealing the upper part of the cathode 604 with a sealing member and a wiring process.

Next, FIG. 21 is an exploded perspective view of a main part of a plasma display device (PDP device: hereinafter simply referred to as a display device 700). In the figure, the display device 700 is shown with a part thereof cut away.
The display device 700 is schematically configured to include a first substrate 701, a second substrate 702, and a discharge display portion 703 formed between them, which are disposed to face each other. The discharge display unit 703 includes a plurality of discharge chambers 705. Among the plurality of discharge chambers 705, the three discharge chambers 705 of the red discharge chamber 705R, the green discharge chamber 705G, and the blue discharge chamber 705B are arranged to form one pixel.

Address electrodes 706 are formed in stripes at predetermined intervals on the upper surface of the first substrate 701, and a dielectric layer 707 is formed so as to cover the address electrodes 706 and the upper surface of the first substrate 701. On the dielectric layer 707, partition walls 708 are provided so as to be positioned between the address electrodes 706 and along the address electrodes 706. The partition 708 includes one extending on both sides in the width direction of the address electrode 706 as shown, and one not shown extending in the direction orthogonal to the address electrode 706.
A region partitioned by the partition 708 is a discharge chamber 705.

  A phosphor 709 is disposed in the discharge chamber 705. The phosphor 709 emits red (R), green (G), or blue (B) fluorescence, and the red phosphor 709R is disposed at the bottom of the red discharge chamber 705R, and the green discharge chamber 705G. A green phosphor 709G and a blue phosphor 709B are disposed at the bottom of the blue discharge chamber 705B and the bottom, respectively.

On the lower surface of the second substrate 702 in the drawing, a plurality of display electrodes 711 are formed in stripes at predetermined intervals in a direction orthogonal to the address electrodes 706. A dielectric layer 712 and a protective film 713 made of MgO or the like are formed so as to cover them.
The first substrate 701 and the second substrate 702 are bonded so that the address electrodes 706 and the display electrodes 711 face each other in a state of being orthogonal to each other. The address electrode 706 and the display electrode 711 are connected to an AC power source (not shown).
When the electrodes 706 and 711 are energized, the phosphor 709 emits light in the discharge display portion 703, and color display is possible.

In the present embodiment, the address electrode 706, the display electrode 711, and the phosphor 709 can be formed by using the droplet discharge device 1 shown in FIG. Hereinafter, a process of forming the address electrode 706 on the first substrate 701 will be exemplified.
In this case, the following steps are performed with the first substrate 701 placed on the set table 22 of the droplet discharge device 1.
First, a liquid material (functional liquid) containing a conductive film wiring forming material is landed on the address electrode formation region as a functional liquid droplet by the functional liquid droplet ejection head 17. This liquid material is obtained by dispersing conductive fine particles such as metal in a dispersion medium as a conductive film wiring forming material. As the conductive fine particles, metal fine particles containing gold, silver, copper, palladium, nickel, or the like, a conductive polymer, or the like is used.

  When the replenishment of the liquid material is completed for all the address electrode forming regions to be replenished, the address material 706 is formed by drying the discharged liquid material and evaporating the dispersion medium contained in the liquid material. .

By the way, although the formation of the address electrode 706 has been exemplified in the above, the display electrode 711 and the phosphor 709 can also be formed through the above steps.
In the case of forming the display electrode 711, as in the case of the address electrode 706, a liquid material (functional liquid) containing a conductive film wiring forming material is landed on the display electrode formation region as a functional droplet.
Further, in the case of forming the phosphor 709, a liquid material (functional liquid) containing a fluorescent material corresponding to each color (R, G, B) is ejected as droplets from the functional liquid droplet ejection head 17, and it corresponds. Land in the color discharge chamber 705.

Next, FIG. 22 is a cross-sectional view of an essential part of an electron emission device (also referred to as an FED device or SED device: hereinafter simply referred to as a display device 800). In the drawing, a part of the display device 800 is shown as a cross section.
The display device 800 is schematically configured to include a first substrate 801, a second substrate 802, and a field emission display portion 803 formed therebetween, which are disposed to face each other. The field emission display unit 803 includes a plurality of electron emission units 805 arranged in a matrix.

  On the upper surface of the first substrate 801, a first element electrode 806a and a second element electrode 806b constituting the cathode electrode 806 are formed so as to be orthogonal to each other. In addition, a conductive film 807 having a gap 808 is formed in a portion partitioned by the first element electrode 806a and the second element electrode 806b. That is, the first element electrode 806a, the second element electrode 806b, and the conductive film 807 constitute a plurality of electron emission portions 805. The conductive film 807 is made of, for example, palladium oxide (PdO), and the gap 808 is formed by forming after forming the conductive film 807.

  An anode electrode 809 that faces the cathode electrode 806 is formed on the lower surface of the second substrate 802. A grid-like bank portion 811 is formed on the lower surface of the anode electrode 809, and a phosphor 813 is disposed in each downward opening 812 surrounded by the bank portion 811 so as to correspond to the electron emission portion 805. Yes. The phosphor 813 emits fluorescence of any one of red (R), green (G), and blue (B), and each opening 812 has a red phosphor 813R, a green phosphor 813G, and a blue color. The phosphors 813B are arranged in the predetermined pattern described above.

  The first substrate 801 and the second substrate 802 configured as described above are bonded together with a minute gap. In this display device 800, electrons that jump out of the first element electrode 806 a or the second element electrode 806 b that are cathodes through the conductive film (gap 808) 807 are formed on the phosphor 813 formed on the anode electrode 809 that is an anode. When excited, it emits light and enables color display.

  Also in this case, as in the other embodiments, the first element electrode 806a, the second element electrode 806b, the conductive film 807, and the anode electrode 809 can be formed using the droplet discharge device 1 and each color. The phosphors 813R, 813G, and 813B can be formed using the droplet discharge device 1.

  The first element electrode 806a, the second element electrode 806b, and the conductive film 807 have the planar shape shown in FIG. 23A, and when these are formed, as shown in FIG. In addition, the bank portion BB is formed (photolithographic method), leaving portions where the first element electrode 806a, the second element electrode 806b, and the conductive film 807 are previously formed. Next, the first element electrode 806a and the second element electrode 806b were formed in the groove portion constituted by the bank portion BB (inkjet method using the droplet discharge device 1), and the solvent was dried to form a film. After that, a conductive film 807 is formed (an ink jet method using the droplet discharge device 1). Then, after forming the conductive film 807, the bank portion BB is removed (ashing peeling process), and the process proceeds to the above forming process. As in the case of the organic EL device described above, it is preferable to perform a lyophilic process on the first substrate 801 and the second substrate 802 and a lyophobic process on the bank portions 811 and BB.

  As other electro-optical devices, devices such as metal wiring formation, lens formation, resist formation, and light diffuser formation are conceivable. By using the above-described droplet discharge device 1 for manufacturing various electro-optical devices (devices), various electro-optical devices can be efficiently manufactured.

It is a top view of the droplet discharge device according to the present embodiment. It is a side view of the droplet discharge device concerning this embodiment. (A) is a top view of the suction / blowout hood, and (b) is an AA ′ sectional view of the suction / blowout hood. It is a top view of a droplet discharge device according to a second embodiment. It is a top view of the droplet discharge apparatus which concerns on 3rd Embodiment. It is a flowchart explaining a color filter manufacturing process. (A)-(e) is a schematic cross section of the color filter shown to the manufacturing process order. It is principal part sectional drawing which shows schematic structure of the liquid crystal device using the color filter to which this invention is applied. It is principal part sectional drawing which shows schematic structure of the liquid crystal device of the 2nd example using the color filter to which this invention is applied. It is principal part sectional drawing which shows schematic structure of the liquid crystal device of the 3rd example using the color filter to which this invention is applied. It is principal part sectional drawing of the display apparatus which is an organic electroluminescent apparatus. It is a flowchart explaining the manufacturing process of the display apparatus which is an organic electroluminescent apparatus. It is process drawing explaining formation of an inorganic bank layer. It is process drawing explaining formation of an organic substance bank layer. It is process drawing explaining the process in which a positive hole injection / transport layer is formed. It is process drawing explaining the state in which the positive hole injection / transport layer was formed. It is process drawing explaining the process in which a blue light emitting layer is formed. It is process drawing explaining the state in which the blue light emitting layer was formed. It is process drawing explaining the state in which the light emitting layer of each color was formed. It is process drawing explaining formation of a cathode. It is a principal part disassembled perspective view of the display apparatus which is a plasma type display apparatus (PDP apparatus). It is principal part sectional drawing of the display apparatus which is an electron emission apparatus (FED apparatus). It is the top view (a) around the electron emission part of a display apparatus, and the top view (b) which shows the formation method.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 ... Droplet discharge device 3 ... Drawing apparatus 5 ... Air suction inlet 6 ... Air blowing outlet 7 ... Chamber apparatus 8 ... Suction / blow-off hood 17 ... Functional droplet discharge head 22 ... Set table 30 ... Chamber room 31 ... Clean air supply Unit 37 ... HEPA filter 39 ... Air supply port 40 ... Exhaust port 42 ... Air exhaust port 50 ... Partition plate 52 ... Air blowing channel 53 ... Air suction channel 55 ... Air supply damper 60 ... Blowing nozzle 61 ... Suction nozzle 63 ... Separator 70 ... exhaust fan 71 ... air supply fan 72 ... filter W ... substrate

Claims (12)

A drawing means for performing drawing by discharging functional liquid droplets onto the work while moving the functional liquid droplet discharge head introduced with the functional liquid relative to the work;
An air outlet that faces the workpiece following the functional droplet ejection head that moves relatively with the ejection of the functional droplet, and blows normal temperature dry air to dry the functional liquid on the workpiece;
An air suction port for sucking the room temperature dry air sprayed on the workpiece;
A chamber room accommodating the drawing means, the air outlet and the air inlet, and a clean air which communicates the air supply side with the air supply chamber in the ceiling of the chamber room and the air intake side with the exhaust port of the chamber room A chamber apparatus having an air supply unit,
The air outlet communicates with the air supply chamber in the ceiling,
The liquid droplet ejection apparatus, wherein the air suction port communicates with the outside of the chamber room through a dedicated air exhaust port.   The droplet discharge device according to claim 1, wherein a blow flow rate adjusting means is interposed in an air blow flow channel communicating the air blow opening and the ceiling air supply chamber.   3. The droplet discharge device according to claim 1, wherein an air suction means is interposed in an air suction channel connecting the air suction port and the air exhaust port. 4. A drawing means for performing drawing by discharging functional liquid droplets on the substrate while relatively moving the functional liquid droplet discharge head introduced with the functional liquid to the workpiece;
An air outlet that faces the workpiece following the functional droplet ejection head that moves relatively with the ejection of the functional droplet, and blows normal temperature dry air to dry the functional liquid on the workpiece;
Air supply means for supplying the room temperature dry air to the air outlet;
An air suction port for sucking the room temperature dry air sprayed on the workpiece;
And a liquid suction device connected to the air suction port. A chamber apparatus that houses the drawing means, the air outlet, the air supply means, the air suction port, and the air suction means, and that has an internal atmosphere composed of the room temperature dry air, further includes:
The upstream side of the air supply means communicates with the inside of the chamber device,
The droplet discharge device according to claim 4, wherein the downstream side of the air suction means communicates with the outside of the chamber device via a dedicated air exhaust port. The workpiece is set on a set table,
6. The liquid droplet ejection device according to claim 1, wherein the air blowing port and the air suction port are disposed so as to cross a maximum workpiece that can be set on the set table. .   The droplet discharge device according to any one of claims 1 to 6, wherein a plurality of partition plates extending in a blowing direction are provided inside the air blowing port.   8. The droplet discharge device according to claim 1, wherein the air blowing port and the air suction port are integrally formed by partitioning a common case with a partition plate. The air outlet has a plurality of outlet nozzles,
The air suction port has a plurality of suction nozzles,
9. The liquid droplet ejection apparatus according to claim 1, wherein the plurality of blowing nozzles and the plurality of suction nozzles are alternately arranged in a movement direction of the relative movement.   10. A method for manufacturing an electro-optical device, wherein the droplet discharge device according to claim 1 is used to form a film forming portion with the functional droplets on the workpiece.   An electro-optical device using the droplet discharge device according to claim 1, wherein a film-forming portion made of the functional droplet is formed on the workpiece.   An electronic apparatus comprising the electro-optical device manufactured by the method for manufacturing the electro-optical device according to claim 10 or the electro-optical device according to claim 11.

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