JP2007136248A - Fixture for washing sheet-like parts, washing apparatus and washing method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a washing fixture which damages no object to be washed (especially sheet-like object) even when pressurization washing is performed and can enhance a flow speed of detergents and realize a high washability. <P>SOLUTION: The fixture J has no communication hole other than a detergent feeding port I and a detergent discharge port O, a support part D for supporting the object to be washed is provided on a wall surface of a storage space part in the fixture J and a means J3 for pressing the object to be washed is provided on a side opposed to the support part D. Thereby, the object to be washed is retained/fixed into the fixture J in the state that a flow passage S is formed such that both surfaces of the object to be washed can be contacted with the detergent. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

The present invention relates to a thin plate-shaped component cleaning jig, a cleaning apparatus, and a cleaning method. More specifically, the present invention relates to a cleaning jig used for cleaning thin plate parts such as a silicon wafer and a glass wafer, a cleaning apparatus using the jig, and a cleaning method using the jig.

  In recent years, with the miniaturization of various electric and electronic products, the miniaturization of various parts has progressed. For example, electronic parts such as flip chip BGA, HDD spindle motor fluid bearing parts, optical connector ferrules and precision processed parts are miniaturized and densified, and extremely narrow gaps compared to the overall size of the parts, Extremely narrow through-holes and bag holes are present in the parts. However, when these parts are cleaned with a conventional cleaning apparatus such as an ultrasonic wave or shower, the cleaning liquid does not penetrate into the gaps and the bag holes, and the cleaning cannot be performed at all. Therefore, the present applicant has proposed a cleaning method using a direct cleaning apparatus in order to clean such parts. A direct-type cleaning device is forcibly flowing a fluid such as a cleaning agent into a limited space where there is no escape area other than the fluid inlet / outlet, and the parts to be cleaned stored in the space are relatively compressed under pressure. The cleaning effect is enhanced by contacting the component to be cleaned at a high flow rate (see Patent Document 1).

  However, when a thin plate-like component such as a silicon wafer is housed in a conventional jig as shown in FIG. 11 and a pressure cleaning is performed at a pressure exceeding 0.01 MPa using a direct cleaning device, the cleaning effect is obtained. However, since there is a clearance S2 between the jig and the part to be cleaned, there is a concern that the part to be cleaned vibrates and the object to be cleaned is damaged. In addition, components called MEMS (Micro Electro Mechanical Systems), micromachines, etc., which are being developed in recent years, have a more complex and finer structure because they have a mechanical function in addition to an IC function. For example, it has a narrower gap than the flip chip or the like, or a narrow and narrow through hole that is narrower than the fluid bearing part. Therefore, these parts are cleaned by using a direct-type cleaning device, etc., forcing the cleaning liquid into contact with the object to be cleaned under a certain amount of pressure, and not relying solely on the chemical cleaning power of the cleaning agent. It is thought that it is necessary to wash with an additional effect.

JP-A-7-328565

  In the present invention, even when cleaning is performed by a cleaning device that forcibly distributes the cleaning liquid as described above to the object to be cleaned, or when cleaning is performed by applying other pressure, the thin object to be cleaned is damaged. An object of the present invention is to provide a cleaning jig that can be cleaned to a high degree without doing so.

  The present inventor has intensively studied to solve the above problems, and by providing a support portion for supporting a specific thin plate-shaped object to be cleaned and a means for pressing the object to be cleaned, inside the jig, I found that the problem could be solved.

That is, the present invention has a space that can store a cleaning agent supply port, a cleaning agent discharge port, and a thin plate-like object to be cleaned, and has no liquid passage holes other than the cleaning agent supply port and the cleaning agent discharge port. A jig for cleaning, wherein both surfaces of the object to be cleaned are provided on the inner wall of the space portion by providing a support part for supporting the object to be cleaned and means for pressing the object to be cleaned on the side facing the support part. A jig for cleaning parts, wherein a cleaning object is fixed in a state in which a flow path of a cleaning agent is formed so as to be able to come into contact with;
An object to be cleaned is housed in a container that is disposed in a cleaning tower incorporated in a cleaning agent circulation line and has a body passage hole and no passage hole at the bottom, and the cleaning agent is placed in the container. In the cleaning device forcibly distributed, the cleaning device described above, wherein the part cleaning jig is inserted into the container;
The above-mentioned cleaning jig containing a thin plate-like object to be cleaned is inserted into a container having a body passage hole not provided in the washing tower and having a passage hole only at the bottom, and the container is washed. The present invention is intended to provide a method for cleaning a thin plate-like component, which is incorporated in an agent circulation line and forcibly causes a cleaning liquid to flow through the container.

According to the cleaning jig for thin plate-like parts according to the present invention, even when performing pressure cleaning or the like, the supporting portion for supporting the thin plate-like object to be cleaned inside the cleaning jig and the supporting portion are opposed. Since the pressing means is provided on the side to be fixed, and the thin plate-like object to be cleaned is sandwiched and fixed thereby, the vibration of the thin plate-like object to be generated that occurs at the time of cleaning can be suppressed and the damage is caused. The parts can be cleaned without any trouble. In addition, the jig has no liquid passage holes other than the cleaning agent supply port and the cleaning agent discharge port, and the cleaning liquid flow path allows both surfaces of the object to be cleaned to be in contact with the cleaning agent. Since the object to be cleaned is fixed in the state of forming, the cleaning agent surely passes through the surface of the object to be cleaned, and a high cleaning effect can be realized. Accordingly, the object to be cleaned can be obtained with a high cleanliness, and is particularly preferably used as an electronic component or the like.
Furthermore, the parts cleaning jig according to the present invention is provided in a so-called direct-type cleaning device, specifically, it is disposed in a cleaning tower (container) incorporated in a cleaning agent circulation line, There is no device, and the cleaning jig of the present invention is inserted as a single layer or a plurality of layers in a container for storing an object to be cleaned that has a liquid passage hole only at the bottom. Therefore, since the inside of the container is occupied by a jig without any gap, almost all of the cleaning agent introduced by the circulation line will surely pass through the parts cleaning surface, and the cleaning by the direct cleaning device is more effective. It can be a typical one.

  Embodiments of the present invention will be described in detail with reference to the drawings. FIG. 1 shows an overall outline of a direct-type cleaning apparatus provided with a cleaning jig according to this embodiment.

  The cleaning apparatus includes a liquid tank 1 in which the cleaning agent 2 is stored, a liquid feeding pump 5 that is one type of liquid feeding means for feeding the cleaning agent 2 from a liquid outlet 1a formed in the liquid tank 1, and a target to be cleaned. A cleaning tower 4 for cleaning the container 7 storing the cleaning jig J, which will be described in detail after the objects are stored, with the cleaning agent 2, and the cleaning residual liquid from the cleaning tower 4 is returned to the liquid return 1b of the liquid tank 1 again. The return circulation path 3 and the like are provided.

The cleaning tower 4 is not provided with a body passage hole, and a container 7 for storing a jig having a passage hole only at the bottom is accommodated in a loosely inserted state. That is, the container 7 has a flange portion 8 that is engaged with and suspended from an annular member 9 that protrudes inward from the upper end of the inner peripheral surface of the cleaning tower 4. It is in the loose insertion state. The container 7 is provided with a component cleaning jig described in detail later.
In addition, FIG. 1 shows an example in which only one container 7 is stored in the cleaning tower 4, but the number is not particularly limited and can be appropriately changed according to specifications.

  The flange portion 8 and the annular member 9 of the container 7 form a surface contact seal portion 10, and the cleaning tower 4 is partitioned into an upper chamber 4a and a lower chamber 4b with the surface contact seal portion 10 as a boundary. ing.

  In order to clean the object to be cleaned in the container 7 arranged in the cleaning tower 4 through the circulation path 3, the liquid feed pump 5 is operated to send out the cleaning agent 2 in the liquid tank 1 and forcibly circulate it. At that time, the valves V1 and V2 are opened, and the valves V3 to V5 are closed.

  Furthermore, the cleaning apparatus of this embodiment is configured to drain the object to be cleaned and dry it, so that the wind or hot air supply line 11 and the exhaust line 12 branched from the middle of the circulation path 3 and the forward path 3a of the circulation path 3 respectively. It is provided on the return path 3b. The wind or hot air supply line 11 includes a blower 13 and a heater 14 on the downstream side. But the air blower 13 may be provided in the downstream of the heater 14, and may be provided in the downstream of the gas-liquid separation apparatus 15 provided in the exhaust line 12.

  At the time of drying, wind or hot air is introduced into the upper chamber a of the washing tower 4 through the supply line 11 by switching operation of the valves V1 and V3, and further sent to the lower end of the container 7 to remove the liquid to be washed. Drying and peeling of the attached cleaning agent are performed. Further, a vacuum device may be provided on the downstream side of the gas-liquid separation device 15 provided in the exhaust line 12 so that liquid draining and drying treatment can be performed in a reduced pressure state.

  The wind or hot air is then sent to the gas-liquid separator 15 through the exhaust line 12, the separated liquid is returned to the liquid tank 1 through the return line 16 by the open state of the valve V6, and the gas is released to the atmosphere. The When the cleaning is completed, the liquid feed pump 5 is stopped to stop the circulation of the cleaning agent 2, the valves V1 and V2 are closed, and the valves V3 to V5 are opened to remove the cleaning residual liquid from the cleaning tower 4 and the container 7 Return to the liquid tank 1 through the return line 6.

  Reference numeral 17 denotes an upper cover of the cleaning tower 4. Moreover, you may connect the filter apparatus 19 which purifies the contaminated washing | cleaning liquid in the middle of the circulation path 3a.

In the cleaning apparatus having the above-described configuration, the container 7 has a shape and size that allows the cleaning jig J according to the present invention to be inserted with substantially no gap in a single layer or a plurality of stacked layers. Is made. By configuring the container 7 and the cleaning jig J in such a configuration, the cleaning agent supply port of the jig J (see FIG. 6) is such that almost all of the cleaning agent that has been pressurized to some extent and has flowed into the container. Is passed through the narrow space S (flow path S) formed between the thin plate-shaped component housed and housed in the jig and the inner wall of the jig J at a high flow rate, and the detergent discharge port ( And is discharged into the cleaning tower lower chamber 4b through the bottom liquid passage port of the container. Therefore, a high physical cleaning power is applied to the cleaning surface of the component, and almost all of the cleaning agent surely passes through the cleaning surface of the component, so that the cleaning effect by the direct cleaning device can be made more effective. it can.

  As shown in FIG. 8, the component cleaning jig J of the present invention is usually mounted on the upper side of the container (that is, on the flange side) as shown in FIG. The container 7 is inserted into the container 7 so that the cleaning agent discharge port O is at the bottom.

  Next, the jig | tool J used for the said washing | cleaning apparatus is demonstrated. The jig J of the present invention is provided at the time of cleaning by providing a support part for supporting the object to be cleaned and means for pressing the object to be cleaned on the side facing the support part, fixing the object to be cleaned inside the jig. It suppresses the vibration of the object to be cleaned caused by pressure fluctuation or turbulent flow.

  A jig J shown in FIG. 2 has a jig part J1 that can support a thin plate-like object to be cleaned B, and a pressing means J3 for fixing the object to be cleaned together with the jig part J1. It consists of a component part J2.

  The jig part J1 has a pair of support portions D formed in steps along the inner wall of the jig, and the object B to be cleaned and the jig part J1 are mounted on the support part D horizontally. A flow path S is formed between the inner surface and the inner surface.

  Since the pressing means J3 provided on the jig part J2 is in contact with the object to be cleaned, it is usually preferable to use a material that does not damage the object to be cleaned and that is not affected by the cleaning agent. As such a thing, it is preferable that it consists of a resin material which has elasticity, and specifically, it is preferable to use polyolefin raw materials, such as polyethylene, a polypropylene, polyethylene-polypropylene, for example. The size of the pressing means J3 is preferably as small as possible so as not to affect the liquid flow of direct cleaning or other pressure cleaning.

For example, as shown in FIG. 2, the pressing means J3 has a thin plate shape as a whole and has an overall shape having a bent portion in the longitudinal direction, and is fixed to the jig J2 with the bent portion as a boundary. And a pressing part for pressing and holding the object to be cleaned with an appropriate force. That is, the pressing means fixed to the jig J2 by the mounting portion extends obliquely toward the part to be cleaned, and when the jig J is assembled by superimposing the jig part J1 and the jig part J2. Further, the surface of the object to be cleaned placed on the support part D of the jig part J1 is pressed with an appropriate force while the pressing part is elastically deformed. Thereby, the vibration of the parts to be cleaned generated by the passage of the pressurized cleaning fluid flowing into the jig can be suppressed, and the damage can be prevented. Further, when the jig J is assembled, an excessive force is not applied to the component to be cleaned, and the component to be cleaned is prevented from being damaged during the assembly.
The gentle angle is preferably an acute angle with respect to the inner wall of the jig to which the pressing means is fixed, and is particularly preferably 10 to 30 °. In addition, when fixing the pressing means J3 to the jig part J2, when fixing with a screw, it is possible to prevent the pressing means from coming off by fixing two or more locations of the pressing means J3. The pressing means J3 is not particularly limited as long as the pressing means J3 can be fixed so as to press the peripheral edge of the object to be cleaned and prevent vibration of the object to be cleaned. For example, FIG. The installation method as shown can be adopted. Specifically, it is preferable to provide the pressing means J3 at two or more locations, and the installation locations are preferably provided so as to be symmetrical on the cleaning agent supply port I side and the cleaning agent discharge port O side, which will be described later. From the viewpoint of enhancing the cleaning effect, it is preferable to provide the object to be cleaned so that it can be fixed symmetrically at four locations.
However, the shape of the pressing means J3 is not limited to the above-described thin plate shape having a bent portion, and as another example, an overall shape that can be deformed by pressing is a disc spring shape as appropriate. be able to.

As shown in FIG. 2B, the jig J on which the parts to be cleaned are mounted has a cleaning agent flow path S (gap S) so that both surfaces of the object to be cleaned can come into contact with the cleaning agent. Since the object to be cleaned is fixed in a state, both surfaces of the thin plate-shaped object to be cleaned can be reliably cleaned by the cleaning agent passing through the flow path.
The gap through which the cleaning agent or the like flows is referred to as a cleaning agent supply port I, and the gap through which the cleaning agent or the like is discharged is referred to as a cleaning agent discharge port O.

Further, it is preferable to provide a stopper F in the vicinity of the cleaning agent discharge port O in order to prevent the cleaning object B from flowing out of the cleaning agent discharge port from the jig during cleaning.
For example, in FIG. 6, the stopper F is formed in a columnar shape extending in the jig thickness direction. The stopper F is preferably made of the same material as the pressing means J3 because the object to be cleaned B is pressed by the stopper F. In addition, if the stopper F is too large, the flow of the cleaning liquid or the like is hindered. Therefore, the diameter of the stopper F is preferably about 1 to 5 mm. In addition, it is preferable to provide the stopper F in the vicinity of the discharge port O at least two or more.

Further, by providing a second support portion P that supports the object to be cleaned B in the vicinity of the cleaning agent supply port I and the cleaning agent discharge port O, vibration suppression efficiency generated during direct cleaning or pressure cleaning is improved. Can do.
In particular, when the component to be cleaned is a substantially circular thin plate-like component such as a silicon wafer, the peripheral portion and the support portion of the thin plate-like component are formed only by the support portion D formed of a step portion extending linearly on the jig wall surface. The overlapping contact surfaces cannot be secured sufficiently, and the support may become unstable. The holding force applied by the pressing means alone cannot resist the force generated by pressure fluctuation or turbulent flow during cleaning. May vibrate. In such a case, the vibration can be effectively suppressed by providing the second support portion P that supports the peripheral region of the thin plate component.
For example, in FIG. 9, the second support portion P has a flow direction of the cleaning agent (a direction parallel to a line connecting the cleaning agent supply port and the cleaning agent discharge port) so as not to disturb the flow of the cleaning agent. It is formed in a rib shape in the direction along. By forming such a second support portion P, even a substantially circular thin plate-like component such as a silicon wafer is sandwiched between the support portion D, the second support portion P, and the pressing means, and a jig J can be stably held in the accommodation space of J, and the vibration of the thin plate-like component being cleaned can be remarkably suppressed. Furthermore, efficient cleaning can be realized without impairing the flow of the cleaning agent and without losing the advantages of the cleaning by the direct cleaning device that forcibly distributes the cleaning liquid and the other pressure cleaning.
The rib P (second support portion) is preferably as narrow as possible (thickness) so as not to hinder the flow of the cleaning liquid or the like. Usually, when cleaning a silicon wafer, the width is about 1 to 2 mm. It is preferable that Further, the length is not particularly limited, and is long enough that one end of the rib P (second support portion) can reliably contact the peripheral edge of the silicon wafer and the object to be cleaned can be sandwiched between the pressing means J3. That's fine.

Moreover, as a different aspect of the jig of the present invention, there is a jig J as shown in FIG. The jig J of this embodiment includes a jig part J0 in which an H-shaped jig part J2 'and a jig part J1 having a support portion on which an object to be cleaned is placed when viewed from the front, The jig part J0 can be fitted into the cutout part of the tool part J0, and is composed of a jig part J5 provided with a pressing means J3. In this jig J, the object to be cleaned B is inserted into the cleaning agent supply port I formed between the jig parts J2 ′ and J0 and is stored therein (in addition, the cleaning agent). Since the stopper O is usually provided on the discharge port O side, it cannot be inserted.) Thereafter, the jig part J5 provided with the two pressing means J3 is fitted into the notch portions of J0 to fix the article to be cleaned B, and the jig J is obtained. Even in this case, it is preferable to provide the second support portion P and the stopper F as in the jig of FIG.
By stacking the jig J shown in FIG. 5 as shown in FIG. 7, workability in the cleaning process can be improved. That is, a plurality of jig parts J0 are laminated in the thickness direction of the jig, and a plurality of jig parts J0 can be fitted to each of the jig parts J0 laminated in advance. A jig J5 ′ to which the jig J5 is fixed is created. By using such a jig J5 ′, the jig J5 can be fitted into the plurality of jig parts J0 in one operation, and a large number of objects to be cleaned can be easily washed.

  The material of the jig of the present invention is not particularly limited, and plastic, metal, etc. can be used. As the metal, an alloy such as SUS, aluminum, or the like can be used. From the viewpoint of workability, it is preferable to use a lightweight metal such as aluminum or an alloy thereof. In the case of using plastic, since there are problems of thermal expansion and deformation, any cleaning conditions that do not cause such problems can be used.

  In addition, it does not specifically limit as a cleaning agent used for the washing | cleaning of this invention, What is necessary is just to select suitably according to the kind of washing | cleaning target object. Specific examples include water-based cleaning agents, semi-aqueous cleaning agents, and non-aqueous (solvent-based) cleaning agents.

The results of tests to confirm the cleaning effect of the cleaning jig for thin plate parts of the present invention are described below.
Test sample for cleaning test As shown in FIG. 10, a resist solution is laminated on a 6-inch silicon wafer having a thickness of 0.6 mm, and three uncured regions UR (length: 70 mm, diameter: about 90 μm) are left in the resist. Was cured. Next, a hole (diameter of about 90 μm) is formed from both sides of each uncured region UR from the resist forming surface, and a communication hole filled with an uncured resist solution is formed inside. It was set as the test sample for a washing test.

Example 1
A test sample was placed on the support portion D of the jig J2 shown in FIG. 9, the jig J1 was overlaid and fixed by the pressing means J3, and the jig A containing the test sample was assembled. Jig J0 is inserted into a container of a cleaning device, and a resist cleaning water (trade name: Pine Alpha ST-380) is used with a direct cleaning device (trade name: Direct Pass, manufactured by Arakawa Chemical Industries, Ltd.). Arakawa Chemical Industries, Ltd.) was used for 10 minutes at 80 ° C. and 0.05 MPa, followed by rinsing with pure water at 50 ° C. and 0.05 MPa for 10 minutes. Drying was performed for a minute. The results are shown in Table 1.
The approximate dimensions and materials of the jig A are shown below.
Jig A external dimensions 190 mm × 170 mm × thickness 20 mm, made of SUS304.
Pressing means 80 mm × 15 mm × thickness 1 mm, gentle angle 20 °, made of polypropylene.
Support section (stepped section) provided on the side wall 5 mm wide and 1 mm clearance
Stopper diameter 3mm, made of SUS304.
Second support part (rib) Width was 1 mm, and was integrally molded with the main body.

Comparative Example 1
Using a jig B (manufactured by SUS) shown in FIG. 11 and performing a cleaning test at 80 ° C. and 0.01 MPa for 10 minutes using the same cleaning apparatus and cleaning agent as in Example 1, 50 ° C. and 0.01 MPa Then, rinsing was performed using pure water for 10 minutes, and drying was performed at 80 ° C. for 10 minutes. The results are shown in Table 1.
The approximate dimensions and material of the jig B are the same as those of the jig A except that the pressing means and the second support portion are not provided.

Comparative Example 2
Using a jig B (manufactured by SUS) shown in FIG. 11 and performing a cleaning test at 80 ° C. and 0.05 MPa for 10 minutes using the same cleaning apparatus and cleaning agent as in Example 1, the wafer was damaged during cleaning. The test was stopped because of this.

  In the case of Comparative Example 1 which is a conventional cleaning condition, the wafer was not damaged, but the resist could not be completely removed. Further, in Comparative Example 2 in which the forced flow pressure cleaning was performed using the conventional jig, the wafer was damaged during the cleaning. On the other hand, when pressure cleaning was performed using the jig of the present invention, the resist solution could be completely removed without damaging the wafer.

1 is a schematic overall configuration diagram of a cleaning apparatus including a cleaning jig according to an embodiment of the present invention. (A) is a perspective view of the jig | tool for washing | cleaning a thin plate-shaped component used for the apparatus, (b) is a side view of the jig. It is an example of attachment of the pressing means to the jig for thin plate parts cleaning, and the upper part of the figure shows the cleaning liquid discharge port and the lower part shows the cleaning agent supply port. (A) When one pressing means is attached to each of the cleaning liquid supply port side and the cleaning agent discharge port side, (b) Three pressing means are attached to both the cleaning liquid supply port side and the cleaning agent discharge port side. In the case, (c) shows a case where pressing means are attached to each of the cleaning liquid supply port side and the cleaning agent discharge port side, and further to the cleaning liquid flow side in a direction perpendicular to the flow of the cleaning liquid. It is the (a) front view and (b) side view of the Example from which the setting jig | tool differs. 5 is a method of mounting an object to be cleaned on the jig shown in FIG. It is a figure which shows the mode of washing | cleaning using the jig | tool of this invention. It is an example in the case of using the jig | tool shown in FIG. 4 laminated | stacked. It is a perspective view explaining the state which accommodates a jig | tool in a container. It is the (a) front view of the cleaning jig used in the cleaning experiment, (b) a sectional view at aa ′, and (c) a side view. It is (a) front view of the test wafer used for the cleaning test, (b) It is sectional drawing in bb ', (c) It is sectional drawing in cc'. It is a figure which shows the conventional jig | tool for washing | cleaning.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Liquid tank 1a Liquid outlet 1b Liquid return port 2 Cleaning agent 3 Circulation path 3a Outbound path 3b Return path 4 Washing tower 4a Upper chamber 4b Lower chamber 5 Liquid feeding means 6 Return line 7 Container 8 Flange part 9 Annular member 10 Surface contact seal part DESCRIPTION OF SYMBOLS 11 Hot-air supply line 12 Exhaust line 13 Blower 14 Heater 15 Gas-liquid separation apparatus 16 Return line 17 Upper cover 19 Filter apparatus B To-be-washed object D Support part (step part)
F Stopper I Supply port for cleaning agent J Thin plate component cleaning jig J0-J2 Thin plate component cleaning jig component J2 'Thin plate component cleaning jig component J3 Pressing means J5 Thin plate component cleaning jig component J5 'Jig parts for thin plate parts cleaning H Stopper fixing hole N Holding means fixing screw O Cleaning agent discharge port P Second support (rib)
R Resist cured layer S Channel S2 Clearance UR Resist non-cured region V1 to V6 Valve W Silicon wafer

Claims (6)

A cleaning jig having a cleaning agent supply port, a cleaning agent discharge port, and a space for accommodating a thin plate-like object to be cleaned, and having no liquid passage holes other than the cleaning agent supply port and the cleaning agent discharge port The both surfaces of the object to be cleaned are in contact with the cleaning agent by providing the inner wall of the space part with a support part for supporting the object to be cleaned and means for pressing the object to be cleaned on the side facing the support part. A jig for cleaning parts, wherein an object to be cleaned is fixed in a state where a cleaning agent flow path is formed. 2. The component cleaning jig according to claim 1, wherein the pressing means is formed in a thin plate shape and is slanted from the inner wall of the jig toward the thin plate-shaped object to be cleaned. 3. The component cleaning jig according to claim 1, wherein the pressing means is made of an elastic resin material. The component cleaning jig according to claim 1, wherein the support portion is a pair of step portions formed on a side wall of the jig. A thin plate-like object to be cleaned is housed in a container that is disposed in a cleaning tower incorporated in a cleaning agent circulation line and has a body passage hole but no passage hole at the bottom, A cleaning apparatus for forcedly circulating in a container, wherein the component cleaning jig according to any one of claims 1 to 4 is fitted in the container. The jig according to any one of claims 1 to 5, wherein a thin plate-like object to be cleaned is accommodated in a container having no through-hole passage hole disposed in the washing tower and having a through-hole only at the bottom. A method for cleaning parts, comprising incorporating the container into a cleaning agent circulation line and forcing a cleaning liquid to flow through the container.

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