JP2009247953A - Ultrasonic cleaning device - Google Patents
Ultrasonic cleaning device Download PDFInfo
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- JP2009247953A JP2009247953A JP2008097054A JP2008097054A JP2009247953A JP 2009247953 A JP2009247953 A JP 2009247953A JP 2008097054 A JP2008097054 A JP 2008097054A JP 2008097054 A JP2008097054 A JP 2008097054A JP 2009247953 A JP2009247953 A JP 2009247953A
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- cleaning
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- ultrasonic
- cleaned
- polishing plate
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Abstract
Description
本発明は、被洗浄体の表面に付着した汚染物質を除去するのに適した超音波洗浄装置に関するに関する。 The present invention relates to an ultrasonic cleaning apparatus suitable for removing contaminants attached to the surface of an object to be cleaned.
超音波振動を利用して物体の表面を洗浄する装置としては特許文献1に見られるように、把持手段を有するハウジングと、洗浄すべき表面上に載置され且つその表面上全体を移動することができる洗浄ヘッドと、ハウジング内に取り付けられ洗浄ヘッドを超音波周波数で振動させる変換器手段とからなり、硬質表面から頑固な汚染物を除去するために
(i)汚れを洗浄組成物と接触させる段階と、
(ii)汚れを超音波洗浄 装置の洗浄ヘッドと接触させる段階と、
(iii)硬質表面を水溶液ですすぐ段階
を実行するように構成されている。
As seen in Patent Document 1, as a device for cleaning the surface of an object using ultrasonic vibration, a housing having a gripping means and a device mounted on the surface to be cleaned and moved on the entire surface. To remove stubborn contaminants from a hard surface (i) contact the soil with the cleaning composition, comprising a cleaning head capable of cleaning and a transducer means mounted within the housing to vibrate the cleaning head at an ultrasonic frequency Stages,
(Ii) contacting the dirt with an ultrasonic cleaning device cleaning head;
(Iii) rinsing the hard surface with an aqueous solution.
しかし自動車のウインドを構成するガラスを洗浄しようとすると、洗浄ヘッドがガラスの表面に平行に振動するため、研磨剤によりガラスに擦り傷が生じたり、またその擦り傷に研磨剤が侵入して再付着したり、さらには研磨剤が外部にそのまま廃棄され環境を汚染するという問題がある。 However, when trying to clean the glass that constitutes the window of an automobile, the cleaning head vibrates parallel to the surface of the glass, so that the abrasive scratches the glass, and the abrasive penetrates into the scratch and reattaches. Furthermore, there is a problem that the abrasive is discarded as it is and contaminates the environment.
このような問題を解消するため、特許文献2に見られるように洗浄液供給管から供給される洗浄液に超音波振動子から発振される超音波振動を噴出口から噴出する洗浄液に集束させる集束板と、超音波振動子を振動させる超音波発振器とを備えて、流水を用いて超音波キャビテーションによる洗浄を行うことも提案されている。
しかしながら、被洗浄体に強固にこびり付いた汚染物質を確実に除去することが困難であるという問題がある。
However, there is a problem that it is difficult to reliably remove contaminants firmly attached to the object to be cleaned.
本発明はこのような問題に鑑みてなされたものであって、その目的とするところは被洗浄体Wの表面を損傷することなく、環境の汚染を可及的に抑えて表面にこびり付いた汚染物質を洗浄できる超音波洗浄装置を提供することである。 The present invention has been made in view of such problems, and the object of the present invention is to prevent contamination of the environment as much as possible without damaging the surface of the object to be cleaned W, and to adhere to the surface. An ultrasonic cleaning apparatus capable of cleaning a substance is provided.
このような課題を達成するために本発明は一端に縦振動モードの超音波振動子が固定されたホーンの他端に被洗浄体の硬度と略同一な粉末を研磨剤とする研磨板が固定され、前記ホーンの少なくも前記研磨板近傍には前記ホーンの振動を阻害せずかつ水密性を維持する筒状体が前記研磨板を被洗浄物の表面に当接できるように配置され、前記筒状体に液を供給する手段が接続されている。 In order to achieve such a problem, in the present invention, a polishing plate using a powder substantially the same as the hardness of the object to be cleaned is fixed to the other end of the horn having a longitudinal vibration mode ultrasonic vibrator fixed to one end. A cylindrical body that does not impede vibration of the horn and maintains water tightness is disposed near the polishing plate so that the polishing plate can be brought into contact with the surface of the object to be cleaned; A means for supplying liquid to the cylindrical body is connected.
本発明によれば、研磨板は被洗浄体Wと略同一硬度の物質により構成され、かつ被洗浄体Wの垂直方向にのみ当接するため、被洗浄体Wに擦過等の損傷を与えることは可及的に抑制される。剥離された汚染物質は、超音波により振動状態となっているため、被洗浄体Wの表面に再付着することはない。このようにして剥離された汚染物質は循環する水により回収される。 According to the present invention, the polishing plate is made of a substance having substantially the same hardness as the object to be cleaned W and contacts only in the vertical direction of the object to be cleaned W. Suppressed as much as possible. The peeled contaminants are vibrated by ultrasonic waves, and therefore do not reattach to the surface of the object to be cleaned W. The contaminants thus peeled off are recovered by circulating water.
そこで以下に本発明の詳細を実施例に基づいて説明する。
図1は、本発明の一実施例を示すものであって軸方向に伸縮する、例えばランジュバン型振動素子を複数積層して構成された超音波振動子1の一端に先端が可及的に平面あるいは被洗浄体の表面形状倣うように成型されたホーン2が固定されている。
Therefore, details of the present invention will be described below based on examples.
FIG. 1 shows an embodiment of the present invention, in which the tip is as flat as possible at one end of an ultrasonic transducer 1 configured to extend and contract in the axial direction, for example, a plurality of Langevin type vibration elements. Alternatively, the horn 2 molded so as to follow the surface shape of the object to be cleaned is fixed.
ホーン2の先端面には、被洗浄体Wであるガラスと略同等の硬度を有する粉末を研磨剤とする研磨板3が粘着層などを介して着脱可能に固定されている。 On the front end surface of the horn 2, a polishing plate 3 using a powder having substantially the same hardness as the glass to be cleaned W as an abrasive is detachably fixed via an adhesive layer or the like.
ホーン2は、先端部側に開口4aし、かつホーン2の周囲との間に水が浸入でき、さらにホーン2の振動を阻害しないように一端が把持部を兼ねる防水ケース5の底部5aに固定された筒状体4により包囲されている。 The horn 2 is fixed to the bottom 5a of the waterproof case 5 having an opening 4a on the front end side and allowing water to enter between the periphery of the horn 2 and one end also serving as a gripping portion so as not to disturb the vibration of the horn 2. The cylindrical body 4 is surrounded.
ホーン2の先端の外周には環状の弾性材からなるシール部材6が設けられている。このシール材6としては多孔質弾性材、例えばスポンジなどが好ましい。すなわち、被洗浄体Wから除去した汚染物質をシール材6により捕捉しつつ若干の水を漏洩させて被洗浄物Wの周囲を湿潤させることができる。 A seal member 6 made of an annular elastic material is provided on the outer periphery of the tip of the horn 2. The sealing material 6 is preferably a porous elastic material such as a sponge. That is, it is possible to wet the surroundings of the object to be cleaned W by leaking some water while capturing the contaminants removed from the object to be cleaned W by the sealing material 6.
筒状体4には給水管7と排水管8とが接続され、図示しない給水ポンプにより水等の液体が循環するように構成されている。 A water supply pipe 7 and a drain pipe 8 are connected to the cylindrical body 4, and a liquid such as water is circulated by a water supply pump (not shown).
なお、図中符号9は、複数の超音波振動板を積層状態に維持してホーン2に固定するためのボルトを示す。 In addition, the code | symbol 9 in a figure shows the volt | bolt for maintaining a some ultrasonic diaphragm in the lamination | stacking state, and fixing to the horn 2. FIG.
この実施例において被洗浄ガラスの表面に洗浄装置を当接させて、給水ポンプを作動させ、超音波振動子1を作動させる、研磨板3が被洗浄体Wの表面に対して垂直(図中の矢印方向)に断続的に当接しする。これにより被洗浄面に付着している汚染物質は、研磨板3の衝撃力で剥離を受け、同時にホーン2の超音波振動による衝撃水をも受けて剥離が促進される。 In this embodiment, a cleaning device is brought into contact with the surface of the glass to be cleaned, the water supply pump is operated, and the ultrasonic vibrator 1 is operated. The polishing plate 3 is perpendicular to the surface of the object to be cleaned W (in the drawing). In the direction of the arrow). As a result, the contaminants adhering to the surface to be cleaned are peeled off by the impact force of the polishing plate 3, and at the same time, the impact water by the ultrasonic vibration of the horn 2 is also received to promote the peeling.
いうまでもなく、研磨板3は被洗浄体Wと略同一硬度の物質により構成され、かつ被洗浄体Wの垂直方向にのみ当接するため、被洗浄体Wに擦過等の損傷を与えることは可及的に抑制される。 Needless to say, the polishing plate 3 is made of a material having substantially the same hardness as the object to be cleaned W and contacts only in the vertical direction of the object to be cleaned W. Suppressed as much as possible.
剥離された汚染物質は、液体中で超音波により振動状態となっているため、被洗浄体Wの表面に再付着することはない。このようにして剥離された汚染物質は循環する水により回収される。
また、一部の水はシール材6を通過して周辺を予め湿潤状態とさせるから洗浄装置をスムーズに移動させることが可能となる。
Since the peeled contaminants are vibrated by ultrasonic waves in the liquid, they do not reattach to the surface of the cleaning object W. The contaminants thus peeled off are recovered by circulating water.
In addition, since a part of the water passes through the sealing material 6 to make the periphery wet in advance, the cleaning device can be moved smoothly.
(比較例)
図2の写真、図3の写真は、本発明の洗浄装置による洗浄結果を示すものであり、また図4、図5、及び図6のは従来装置による洗浄結果を示すものである。
すなわち、シリカが付着した試料(図2)を本発明の洗浄装置により3分程度洗浄したところ、図3の写真に示すようにシリカが除去されたばかりでなく、擦り傷も発生していない。
(Comparative example)
The photographs in FIGS. 2 and 3 show the results of cleaning by the cleaning apparatus of the present invention, and FIGS. 4, 5 and 6 show the results of cleaning by the conventional apparatus.
That is, when the sample with attached silica (FIG. 2) was cleaned for about 3 minutes by the cleaning apparatus of the present invention, the silica was not only removed as shown in the photograph of FIG. 3, but no scratches were generated.
これに対してシリカが付着した試料(図4)を従来の洗浄装置により3分程度洗浄したところ、図5の写真に示すようにシリカは除去できているものの研磨方向(図中 略垂直方向)に擦り傷が発生している。なお、図6の写真は、研磨方向を略水平方向に変えて上述と同様に研磨した結果を示すものである。
このことから、本発明は、従来の洗浄装置と同等以上の洗浄能力を有しつつ、しかも被洗浄体に擦り傷を付けることがなく洗浄することが確認できた。
なお、図2乃至図6において×状の傷は、研磨方向を指示するためのマーカである。
On the other hand, when the sample with the silica adhered (FIG. 4) was washed for about 3 minutes with a conventional washing apparatus, the silica was removed as shown in the photograph of FIG. 5, but the polishing direction (substantially vertical direction in the figure). Abrasion has occurred. The photograph in FIG. 6 shows the result of polishing in the same manner as described above with the polishing direction changed to a substantially horizontal direction.
From this, it has been confirmed that the present invention has a cleaning ability equal to or higher than that of a conventional cleaning apparatus, and that the object to be cleaned is cleaned without being scratched.
2 to 6, the x-shaped scratches are markers for indicating the polishing direction.
1 超音波振動子 2 ホーン 3 研磨板 4 筒状体 5 防水ケース 6 シール部材 7 給水管 8 排水管 W 被洗浄体 DESCRIPTION OF SYMBOLS 1 Ultrasonic vibrator 2 Horn 3 Polishing board 4 Cylindrical body 5 Waterproof case 6 Sealing member 7 Water supply pipe 8 Drain pipe W Washed object
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JP2008097054A JP2009247953A (en) | 2008-04-03 | 2008-04-03 | Ultrasonic cleaning device |
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JP2008097054A JP2009247953A (en) | 2008-04-03 | 2008-04-03 | Ultrasonic cleaning device |
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Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102441820A (en) * | 2011-11-15 | 2012-05-09 | 苏州大学 | Non-contact type ultrasonic surface shape correcting and polishing method and device |
CN103341438A (en) * | 2013-06-18 | 2013-10-09 | 桂林市啄木鸟医疗器械有限公司 | Waterproof energy converter |
CN106427919A (en) * | 2015-08-12 | 2017-02-22 | 林仕杰 | Portable high-pressure steam car washer |
WO2022085716A1 (en) * | 2020-10-23 | 2022-04-28 | 株式会社村田製作所 | Cleaning apparatus, imaging unit comprising cleaning apparatus, and cleaning method |
CN115319645A (en) * | 2022-09-20 | 2022-11-11 | 雷索智能科技(苏州)有限公司 | Device for recycling waste rare earth polishing powder and using method thereof |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04122571A (en) * | 1990-09-12 | 1992-04-23 | Taiho Ind Co Ltd | Precision polishing method for ceramics |
JPH05200659A (en) * | 1992-01-24 | 1993-08-10 | Olympus Optical Co Ltd | Ultrasonic polishing device |
JP2005329501A (en) * | 2004-05-19 | 2005-12-02 | Keisuke Kamijo | Ultrasonic polishing tool and polishing device provided with the same |
JP2006346415A (en) * | 2005-05-17 | 2006-12-28 | Mitsubishi Electric Corp | Washing apparatus |
-
2008
- 2008-04-03 JP JP2008097054A patent/JP2009247953A/en active Pending
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04122571A (en) * | 1990-09-12 | 1992-04-23 | Taiho Ind Co Ltd | Precision polishing method for ceramics |
JPH05200659A (en) * | 1992-01-24 | 1993-08-10 | Olympus Optical Co Ltd | Ultrasonic polishing device |
JP2005329501A (en) * | 2004-05-19 | 2005-12-02 | Keisuke Kamijo | Ultrasonic polishing tool and polishing device provided with the same |
JP2006346415A (en) * | 2005-05-17 | 2006-12-28 | Mitsubishi Electric Corp | Washing apparatus |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102441820A (en) * | 2011-11-15 | 2012-05-09 | 苏州大学 | Non-contact type ultrasonic surface shape correcting and polishing method and device |
CN102441820B (en) * | 2011-11-15 | 2013-10-09 | 苏州大学 | Non-contact type ultrasonic surface shape correcting and polishing method and device |
CN103341438A (en) * | 2013-06-18 | 2013-10-09 | 桂林市啄木鸟医疗器械有限公司 | Waterproof energy converter |
CN106427919A (en) * | 2015-08-12 | 2017-02-22 | 林仕杰 | Portable high-pressure steam car washer |
WO2022085716A1 (en) * | 2020-10-23 | 2022-04-28 | 株式会社村田製作所 | Cleaning apparatus, imaging unit comprising cleaning apparatus, and cleaning method |
CN115319645A (en) * | 2022-09-20 | 2022-11-11 | 雷索智能科技(苏州)有限公司 | Device for recycling waste rare earth polishing powder and using method thereof |
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