JP2007132946A5 - - Google Patents

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Publication number
JP2007132946A5
JP2007132946A5 JP2006305043A JP2006305043A JP2007132946A5 JP 2007132946 A5 JP2007132946 A5 JP 2007132946A5 JP 2006305043 A JP2006305043 A JP 2006305043A JP 2006305043 A JP2006305043 A JP 2006305043A JP 2007132946 A5 JP2007132946 A5 JP 2007132946A5
Authority
JP
Japan
Prior art keywords
sensing die
single sensing
sensor
tangential
radial
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2006305043A
Other languages
English (en)
Japanese (ja)
Other versions
JP2007132946A (ja
Filing date
Publication date
Priority claimed from US11/557,661 external-priority patent/US7597005B2/en
Application filed filed Critical
Publication of JP2007132946A publication Critical patent/JP2007132946A/ja
Publication of JP2007132946A5 publication Critical patent/JP2007132946A5/ja
Withdrawn legal-status Critical Current

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JP2006305043A 2005-11-10 2006-11-10 圧力センサハウジング及び形態 Withdrawn JP2007132946A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US73597605P 2005-11-10 2005-11-10
US11/557,661 US7597005B2 (en) 2005-11-10 2006-11-08 Pressure sensor housing and configuration

Publications (2)

Publication Number Publication Date
JP2007132946A JP2007132946A (ja) 2007-05-31
JP2007132946A5 true JP2007132946A5 (enExample) 2009-08-13

Family

ID=37702242

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006305043A Withdrawn JP2007132946A (ja) 2005-11-10 2006-11-10 圧力センサハウジング及び形態

Country Status (3)

Country Link
US (1) US7597005B2 (enExample)
EP (1) EP1785710A3 (enExample)
JP (1) JP2007132946A (enExample)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8175835B2 (en) * 2006-05-17 2012-05-08 Honeywell International Inc. Flow sensor with conditioning-coefficient memory
US7600433B2 (en) 2007-02-23 2009-10-13 Silicon Micro Sensors Gmbh Pressure sensor with roughened and treated surface for improving adhesive strength and method of manufacturing the sensor
JP4916006B2 (ja) * 2007-02-28 2012-04-11 株式会社山武 圧力センサ
US20090288484A1 (en) * 2008-05-21 2009-11-26 Honeywell International Inc. Integrated mechanical package design for combi sensor apparatus
DE202008011684U1 (de) 2008-09-03 2008-12-24 Silicon Micro Sensors Gmbh Drucksensor
US8082797B2 (en) 2009-11-11 2011-12-27 Honeywell International Inc. Pressure sensor assembly
US7985659B1 (en) 2010-03-31 2011-07-26 Freescale Semiconductor, Inc. Semiconductor device with a controlled cavity and method of formation
US8297127B2 (en) 2011-01-07 2012-10-30 Honeywell International Inc. Pressure sensor with low cost packaging
US8718981B2 (en) 2011-05-09 2014-05-06 Honeywell International Inc. Modular sensor assembly including removable sensing module
US20130098160A1 (en) * 2011-10-25 2013-04-25 Honeywell International Inc. Sensor with fail-safe media seal
DE102013110368A1 (de) * 2013-09-19 2015-03-19 Endress + Hauser Gmbh + Co. Kg Druckmessumformer
GB2521163A (en) 2013-12-11 2015-06-17 Melexis Technologies Nv Semiconductor pressure sensor
US10317297B2 (en) * 2013-12-11 2019-06-11 Melexis Technologies Nv Semiconductor pressure sensor
JPWO2020071315A1 (ja) 2018-10-03 2021-09-24 東洋紡株式会社 低吸着性シーラントフィルム、積層体および包装袋
CN209326840U (zh) 2018-12-27 2019-08-30 热敏碟公司 压力传感器及压力变送器

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3123788A (en) * 1964-03-03 Piezoresistive gage
US271701A (en) 1883-02-06 goodwin
US272306A (en) 1883-02-13 Steam-engine
US4321832A (en) * 1980-03-07 1982-03-30 Rockwell International Corporation High accuracy measuring apparatus
EP0195232B1 (en) 1985-03-20 1991-12-11 Hitachi, Ltd. Piezoresistive strain sensing device
US4683755A (en) * 1985-11-15 1987-08-04 Imo Delaval Inc. Biaxial strain gage systems
US5349867A (en) 1991-12-02 1994-09-27 Kavlico Corporation Sensitive resistive pressure transducer
US5459351A (en) * 1994-06-29 1995-10-17 Honeywell Inc. Apparatus for mounting an absolute pressure sensor
WO2003064989A1 (en) * 2002-01-30 2003-08-07 Honeywell International Inc. An absolute micromachined silicon pressure sensor with backside hermetic cover and method of making the same
US7000298B2 (en) 2004-04-20 2006-02-21 Honeywell International Inc. Method a quartz sensor
US7278319B2 (en) * 2005-11-10 2007-10-09 Honeywell International Inc. Pressure and temperature sensing element

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