JP2007132727A - 干渉測定装置 - Google Patents

干渉測定装置 Download PDF

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Publication number
JP2007132727A
JP2007132727A JP2005324349A JP2005324349A JP2007132727A JP 2007132727 A JP2007132727 A JP 2007132727A JP 2005324349 A JP2005324349 A JP 2005324349A JP 2005324349 A JP2005324349 A JP 2005324349A JP 2007132727 A JP2007132727 A JP 2007132727A
Authority
JP
Japan
Prior art keywords
light
optical fiber
reflected
measurement
wavelength
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
JP2005324349A
Other languages
English (en)
Japanese (ja)
Other versions
JP2007132727A5 (enExample
Inventor
Shigeki Kato
成樹 加藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2005324349A priority Critical patent/JP2007132727A/ja
Priority to US11/557,609 priority patent/US20070103694A1/en
Priority to EP06123709A priority patent/EP1785691A3/en
Publication of JP2007132727A publication Critical patent/JP2007132727A/ja
Publication of JP2007132727A5 publication Critical patent/JP2007132727A5/ja
Abandoned legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02075—Reduction or prevention of errors; Testing; Calibration of particular errors
    • G01B9/02078—Caused by ambiguity
    • G01B9/02079—Quadrature detection, i.e. detecting relatively phase-shifted signals
    • G01B9/02081—Quadrature detection, i.e. detecting relatively phase-shifted signals simultaneous quadrature detection, e.g. by spatial phase shifting
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02007—Two or more frequencies or sources used for interferometric measurement
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/45—Multiple detectors for detecting interferometer signals
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70—Using polarization in the interferometer

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP2005324349A 2005-11-09 2005-11-09 干渉測定装置 Abandoned JP2007132727A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2005324349A JP2007132727A (ja) 2005-11-09 2005-11-09 干渉測定装置
US11/557,609 US20070103694A1 (en) 2005-11-09 2006-11-08 Interferometry system
EP06123709A EP1785691A3 (en) 2005-11-09 2006-11-08 Interferometry system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005324349A JP2007132727A (ja) 2005-11-09 2005-11-09 干渉測定装置

Publications (2)

Publication Number Publication Date
JP2007132727A true JP2007132727A (ja) 2007-05-31
JP2007132727A5 JP2007132727A5 (enExample) 2008-12-18

Family

ID=37835247

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005324349A Abandoned JP2007132727A (ja) 2005-11-09 2005-11-09 干渉測定装置

Country Status (3)

Country Link
US (1) US20070103694A1 (enExample)
EP (1) EP1785691A3 (enExample)
JP (1) JP2007132727A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015072136A (ja) * 2013-10-01 2015-04-16 株式会社 光コム 光学式計測装置
JP2015072137A (ja) * 2013-10-01 2015-04-16 株式会社 光コム 光学式計測装置

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4914040B2 (ja) * 2005-07-28 2012-04-11 キヤノン株式会社 干渉測定装置
US7292347B2 (en) * 2005-08-01 2007-11-06 Mitutoyo Corporation Dual laser high precision interferometer
US9880377B1 (en) * 2016-09-09 2018-01-30 Photonicsys Ltd. Multiple wavelengths real time phase shift interference microscopy
CN112556579A (zh) * 2020-12-25 2021-03-26 深圳市中图仪器股份有限公司 一种六自由度空间坐标位置和姿态测量装置
CN112583481B (zh) * 2020-12-30 2024-10-25 王健 光缆纤芯光信号采集装置、资源检测设备和平台

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5153669A (en) * 1991-03-27 1992-10-06 Hughes Danbury Optical Systems, Inc. Three wavelength optical measurement apparatus and method
DE19528676C2 (de) * 1995-08-04 1997-05-22 Zeiss Carl Jena Gmbh Interferometeranordnung zur absoluten Distanzmessung
US20030035112A1 (en) * 2001-08-20 2003-02-20 Nevis Elizabeth A. Birefringent beam combiners for polarized beams in interferometers
US6914682B2 (en) * 2001-10-25 2005-07-05 Canon Kabushiki Kaisha Interferometer and position measuring device
US6859283B2 (en) * 2002-06-17 2005-02-22 Lightwave Electronics Corporation Apparatus and method for measuring phase response of optical detectors using multiple-beatnote optical heterodyne
US7277180B2 (en) * 2004-11-09 2007-10-02 Zygo Corporation Optical connection for interferometry
JP2006162366A (ja) * 2004-12-06 2006-06-22 Fujinon Corp 光断層映像装置
US7292347B2 (en) * 2005-08-01 2007-11-06 Mitutoyo Corporation Dual laser high precision interferometer

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015072136A (ja) * 2013-10-01 2015-04-16 株式会社 光コム 光学式計測装置
JP2015072137A (ja) * 2013-10-01 2015-04-16 株式会社 光コム 光学式計測装置

Also Published As

Publication number Publication date
EP1785691A3 (en) 2010-06-02
US20070103694A1 (en) 2007-05-10
EP1785691A2 (en) 2007-05-16

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