JP2007107604A - Vibration resistant device, and vibration resistant method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a novel vibration resistant device. <P>SOLUTION: The vibration resistant device is provided with a vibration resistant base 3, air springs 1, 2 supporting the vibration resistant base 3, a valve 7 carrying out air supply and exhaust of the air springs 1, 2, a position detecting means 4 for detecting a position of the vibration resistant base 3, an acceleration detecting means 5 for detecting acceleration of the vibration resistant base 3, a position feedback loop using output of the position detecting means 4, and an acceleration feedback loop using output of the acceleration detecting means 5. It also has a pressure change detecting means 13 for detecting pressure change of the air springs 1, 2, and a pressure change feedback loop using output of the pressure change detecting means 13. In the pressure change feedback loop, negative feedback of the output of the pressure change detecting means 13 is carried out through a P compensator. The valve 7 is a nozzle flapper type servo valve. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a novel vibration isolator. The present invention also relates to a novel vibration isolation method using this vibration isolation device.

  Conventionally, an air spring vibration isolator has been used for vibration control of ultra-precision equipment such as a semiconductor exposure apparatus, and the pressure inside the vibration isolator is precisely controlled using a servo valve (for example, Non-patent document 1).

  The air spring type vibration isolator uses a nozzle flapper type pneumatic servo valve, which is a pressure control type valve with a large exhaust flow rate, and controls displacement and acceleration as feedback signals. The nozzle flapper type pneumatic servo valve has high controllability with respect to pressure.

  In order to improve the vibration isolation performance of the air spring vibration isolator, it is important to realize a soft spring. In order to realize this, it is necessary to increase the container volume in the air spring chamber. Therefore, a method has been adopted in which a buffer tank having a volume larger than that of the air spring type vibration isolator is connected to the air spring type vibration isolator so as to increase the container volume in the air spring.

On the other hand, a highly accurate pressure differential meter has been developed (for example, see Non-Patent Documents 2 to 8).
S.Wakui: Incline Compensation Control Using an AirSpring Type Active Isolated Apparatus, Precision Engineering, 27, 170/174 (2003) Kato, Kawashima, Kagawa: Proposal of pressure differential meter using isothermal pressure vessel, SICE System Integration Division Lecture (SI2003), CD-ROM (2003) Kato, Kawashima, Kagawa: Proposal of pressure differential meter using isothermal pressure vessel, Transactions of the Society of Instrument and Control Engineers, 40-6, 642/647 (2004) Tomonori Kato, Kenji Kawashima, Michio Yanagisawa, Toshiharu Kagawa: Application of Pressure Differentiator Using Isothermal Chamber to Isolation Table, SICE Annual Conference, CD-ROM (2004) Yosuke Yamazaki, Kengo Kawashima, Toshiharu Kagawa, Tomonori Kato, Michio Yanagisawa: Control of an air spring vibration isolator using a pressure differential meter, Proceedings of the Autumn Fluid Power System Lecture, pp.221-223 (2004) Kenji Kawashima, Tomonori Kato, Yosuke Yamazaki, Michio Yanagisawa and Toshiharu Kagawa: Development of slit type pressure differentiator using an isothermal chamber, Measurement Science and Technology, Vol. 16, pp. 1150-1156 (2005) Kengo Kawashima, Koichi Igarashi, Ryota Kodama, Tomoki Kato, Toshiharu Kagawa: Development of pressure differential meter using slit-type channel by microfabrication technology, Transactions of the Society of Instrument and Control Engineers, Vol.41, No.5 pp.405 -410 (2005) Kenji Kawashima, Tomonori Kato, Yosuke Yamazaki, Michio Yanagisawa and Toshiharu Kagawa: Development of slit type pressure differentiator using an isothermal chamber, Measurement Science and Technology, Vol. 16, pp. 1150-1156 (2005)

  However, in the conventional method described above, there is a problem that not only the space is taken but also the air in the buffer tank needs to be controlled, and the energy consumption is large.

The present invention has been made in view of such a problem, and an object thereof is to provide a novel vibration isolation device.
Another object of the present invention is to provide a novel vibration isolation method using this vibration isolation device.

  In order to solve the above problems and achieve the object of the present invention, a vibration isolation device of the present invention performs a vibration isolation table, an air spring that supports the vibration isolation table, and supplies and exhausts air to the air spring. A valve, position detection means for detecting the position of the vibration isolation table, acceleration detection means for detecting the acceleration of the vibration isolation table, a position feedback loop using the output of the previous position detection means, and output of the acceleration detection means And a pressure change detection loop for detecting a pressure change of the air spring and a pressure change feedback loop using an output of the pressure change detection means, wherein the valve is a pressure control type. It is a valve.

  Here, the pressure control type valve is preferably a nozzle flapper type servo valve, although not limited thereto. Although not limited, it is preferable that the output of the pressure change detection means is negatively fed back through the P compensator in the pressure change feedback loop. Further, although not limited, the pressure change detection means includes a container, a conduction path that communicates between the inside of the air spring and the inside of the container, and a differential pressure gauge that calculates a pressure difference between the inside of the air spring and the inside of the container. It is preferable to have a pressure differential meter. Moreover, although not necessarily limited, it is preferable that a conduction path is a pipe | tube, a slit, or a clearance channel. Moreover, although not necessarily limited, it is preferable that the flow in the conduction path at the time of measurement is a laminar flow. Moreover, although not necessarily limited, it is preferable that a container is an isothermal pressure vessel. Moreover, although not necessarily limited, it is preferable that the container is filled with the isothermal material. Moreover, although not necessarily limited, it is preferable that the isothermal device material is a thin metal wire. Although not limited, the differential pressure gauge is preferably a diaphragm type differential pressure gauge.

  In the vibration isolation method of the present invention, the vibration isolation table is supported by an air spring, the air spring is supplied and exhausted by a valve, the position of the vibration isolation table is detected by position detection means, and the position detection means In the vibration isolation method of detecting the acceleration of the vibration isolation table by the acceleration detection means and feeding back the output of the acceleration detection means, the pressure change detection means detects the pressure change of the air spring, The output of the pressure change detecting means is fed back, and the valve is a pressure control type valve.

  Here, although not necessarily limited, the pressure control type valve is preferably a nozzle flapper type servo valve. Although not limited, it is preferable to negatively feed back the output of the pressure change detection means through the P compensator. Although not limited, the pressure change detecting means includes a container, a conduction path that communicates between the inside of the air spring and the inside of the container, and a differential pressure gauge that calculates a pressure difference between the inside of the air spring and the inside of the container. It is preferable to have a pressure differential meter.

The present invention has the following effects.
The present invention includes an anti-vibration table, an air spring that supports the anti-vibration table, a valve that supplies and exhausts air to the air spring, a position detection unit that detects a position of the anti-vibration table, and the anti-vibration table. In a vibration isolator having an acceleration detecting means for detecting acceleration of a shaking table, a position feedback loop using the output of the previous position detecting means, and an acceleration feedback loop using the output of the acceleration detecting means, the pressure change of the air spring is detected. Since the pressure change detecting means for detecting and the pressure change feedback loop using the output of the pressure change detecting means are provided and the valve is a pressure control type valve, a novel vibration isolator can be provided.

  In the present invention, the vibration isolator is supported by an air spring, the air spring is supplied and exhausted by a valve, the position of the vibration isolator is detected by a position detector, and the output of the position detector is fed back. In the vibration isolation method for detecting the acceleration of the vibration isolation table by the acceleration detection means and feeding back the output of the acceleration detection means, the pressure change detection means detects the pressure change of the air spring, and the pressure change detection means Since the valve is a pressure control type valve, a novel vibration isolation method can be provided.

  Hereinafter, the best mode for carrying out the invention relating to a vibration isolation device and a vibration isolation method will be described.

  As a vibration isolator and a vibration isolation method, an air spring vibration isolator and a vibration isolation method using a pressure control valve, and an air spring vibration isolation device and a vibration isolation method using a pressure control valve and a pressure differential meter Will be described.

Air spring type vibration isolator using pressure control type valve and vibration isolation method

  In the nozzle flapper type servo valve which is a pressure control type valve, the pressure P of the fixed container is in a first-order lag relationship with respect to the input voltage u. That is, the time waveform of the pressure response when the input voltage changes stepwise is given by the following equation (Equation 1).

Here, K is a proportional gain, and T is a time constant. This relationship is represented by a block diagram in FIG.
An air spring type vibration isolator is usually expressed by a mass, a spring, and a damper. When expressed by the equation of motion, the following equation (Equation 2) is obtained.

  Where x is the displacement of the air spring, m is the load mass on the air spring, A is the area of the air spring that supports the load, P is the pressure in the air spring, k is the spring coefficient, and b is the viscosity coefficient. .

Therefore, if the relationship from the pressure P to the displacement x is expressed by a block diagram from the equation (2), FIG. 2 is obtained. In the control of the air spring type vibration isolator shown in FIG. 2, the displacement x is usually measured using a displacement meter, and the acceleration d ² x / dt ² is measured using an accelerometer. These values are taken into the controller as feedback signals, calculation is performed according to a predetermined control method, and a control signal is given to the nozzle flapper type servo valve, which is a control valve, to control the pressure P and change the displacement and acceleration. Control to keep it to a minimum.

As control method, PI control with respect to the target value x _r with respect to the displacement, it is common to feedback a signal multiplied by the proportional gain K _a for acceleration. That is, the control signal (normal voltage) u to the valve is given by the following equation (Equation 3). Here, K _p is a proportional gain, and T _I is an integration time constant.

  Therefore, the conventional control method is summarized in a block diagram as shown in FIG. Nozzle flapper type servo valves output pressure (incomplete integral value) and are very effective for pressure control.

  The vibration isolation device includes a vibration isolation table, an air spring that supports the vibration isolation table, a valve that supplies and exhausts air to the air spring, a position detection unit that detects a position of the vibration isolation table, An anti-vibration device having an acceleration detection means for detecting an acceleration of a vibration isolation table, a position feedback loop using an output of the position detection means, and an acceleration feedback loop using an output of the acceleration detection means. The valve is a nozzle flapper type servo valve which is a pressure control type valve.

  FIG. 4 shows a configuration of a conventional air spring vibration isolator using an air spring as an actuator. In the figure, reference numeral 1 denotes a buffer tank portion of the air spring, 2 denotes a rubber bellows portion of the air spring, and 3 denotes a vibration isolation table. Air springs 1 and 2 support a vibration isolation table 3. Reference numeral 4 denotes a position sensor (position detection means) for detecting the position of the vibration isolation table. As the position sensor 4, an eddy current displacement sensor, a capacitance sensor, a position detection sensor using a photoelectric conversion element, or the like can be used. Reference numeral 5 denotes an acceleration sensor (acceleration detecting means) for detecting the acceleration of the vibration isolation table. Reference numeral 6 denotes an air supply source. 7 is a nozzle flapper type servo valve that supplies and exhausts air, which is a working fluid, to the air spring.

  Next, the configuration and operation of the feedback device 120 for the air spring type support leg 12 will be described. First, the output of the acceleration sensor 5 passes through the P compensator 15 after passing through the filter 8-b having an appropriate amplification degree and time constant, and then the voltage / current converter 11 for controlling the valve opening of the nozzle flapper type servo valve 7. Negative feedback before. The mechanism is stabilized by this acceleration feedback loop. That is, damping is given.

  Further, the output of the position sensor 4 is input to the comparator 9 with the set displacement through the filter 8-a which also has an appropriate amplification degree and time constant. Here, the displacement is compared with a set displacement that is a target position with respect to the installation surface of the air spring type support leg 12, and the deviation signal is input to the voltage-current converter 11 through the PI compensator 10. The internal pressures of the air springs 1 and 2 are adjusted by changing the valve opening of the servo valve 7, and the vibration isolation table 3 can maintain the target set displacement without a steady deviation. In this way, a position feedback loop using the output of the position detection means is formed. Here, P means proportionality, and I means integration operation.

Air spring type vibration damping device and pressure damping method using pressure control type valve and pressure differential meter

  Here, a pressure differential meter signal capable of measuring a pressure differential value with high resolution is fed back. The rest is the same as the air spring type vibration isolator using the pressure control type valve described above.

  As shown in the block diagram surrounded by the dotted line in FIG. 5, when the differential pressure value is fed back, the time waveform of the pressure response when the input voltage changes stepwise can be given by the following equation (Equation 4).

That is, the time constant can be increased from T to T + K _dp . When the pressure differential value is fed back, the transfer function from voltage to pressure is expressed by P / u = K / ((T + K · K _dp ) s + 1).
The spring constant k of the air spring is given by the following equation (Equation 5).

  Here, P represents the pressure in the air spring, A represents the pressure receiving area V of the air spring, and the volume in the air spring. From the equation (5), it can be seen that a softer spring can be realized by increasing V.

  In the nozzle flapper type valve, the flow rate gain a is given by the following equation (Equation 6) from the pressure change ΔP and the mass flow rate change ΔG at a certain equilibrium pressure P.

  The time constant T is expressed by the following equation (Formula 7). Here, R is a gas constant, and θ is the absolute temperature of the gas.

  That is, increasing the time constant T is proportional to increasing the volume V, and it is clear from the equation (5) that the spring constant k decreases. That is, it means that a soft spring can be realized. Usually, a method of increasing the volume and reducing the spring constant is employed. In the method of FIG. 5, the time constant of the nozzle flapper type valve can be increased by using a pressure differential meter, as apparent from the equation (4). The volume was increased.

  As shown in FIG. 6, the vibration isolator also feeds back a signal from the pressure differential meter (pressure change detection means) 13. The configuration and operation of the feedback device 120 for the air spring support leg 12 of FIG. 6 will be described. First, the outputs of the acceleration sensor 5 and the position sensor 4 are given to the servo valve as in the conventional method of FIG.

  Further, the output of the pressure differential meter 13 for detecting the change in pressure of the air spring passes through the filter 8-c having an appropriate amplification degree and time constant, and is then negatively fed back through the P compensator 14. In this way, a pressure change feedback loop using the output of the pressure change detection means is formed. In the fine pressure control, even if a signal obtained by differentiating the output of the pressure sensor is negatively fed back, it is difficult to use it as an effective signal due to the influence of noise or the like. However, by using the pressure differential meter 13, the pressure change can be measured with high resolution and low noise, which is effective as a negative feedback signal. By these control signals, the pressure in the air springs 1 and 2 is adjusted, and the vibration isolation table 3 can hold the target displacement without a steady deviation.

The volume of the air spring is preferably in the range of 50 cc to 0.1 m ³ . If the volume of the air spring is 50 cc or more, there is an advantage that an effect as an air spring can be expected. When the volume of the air spring is 0.1 m ³ or less, there is an advantage that a space can be secured. The volume of the air spring is a total value of the volume of the buffer tank portion 1 and the volume of the rubber bellows portion 2 of the air spring.

  Next, the pressure differential meter will be described. FIG. 7 shows the configuration of the pressure differential meter. The pressure differential meter has a container, a clearance channel that connects the measurement object and the inside of the container, and a differential pressure gauge that calculates a pressure difference between the measurement object and the container.

  An isothermal pressure vessel 21 can be used as the vessel. The isothermal pressure vessel 21 is filled with an isothermal tool material. As the isothermal tool material, for example, a thin metal wire can be used.

  As the metal fine wire, for example, a copper fine wire can be used. In addition, fine wires such as iron, aluminum, and stainless steel, cotton, and nylon can be used. That is, if the material is fibrous, the diameter thereof is in the range of 10 to 50 μm, and the thermal conductivity is 0.05 W / mK or more, it can be adopted.

  The volume ratio of the isothermal tool material to the isothermal pressure vessel volume is preferably in the range of 3 to 15%. If the volume ratio is 3% or more, there is an advantage that an almost isothermal change can be realized. When the volume ratio is 15% or less, the pressure in the container is not distributed, and there is an advantage that there is no problem even if the pressure is measured at any part of the container.

The volume of the isothermal pressure vessel is preferably in the range of 1.0 × 10 ^{−8 to} 1.0 × 10 ⁻⁴ m ³ . When the volume is 1.0 × 10 ⁻⁸ m ³ or more, there is an advantage that the isothermal pressure vessel is easy to configure. When the volume is 1.0 × 10 ⁻⁴ m ³ or less, there is an advantage that high-response measurement is possible.

  Air can be applied as a measurement target of the pressure differential meter. The measurement target is not limited to air. In addition, it can be applied to all gases such as nitrogen, hydrogen, carbon dioxide, and the like.

The clearance channel (conduction channel) extends to a gap formed between two curved surfaces. In the example of FIG. 7, the curved surface has a cylindrical shape. The clearance channel 26 has a cylindrical shape with an outer radius r ₁ , an inner radius r ₂ , and a length L. The average radius r _m of the cylindrical shape can be expressed by r _m = (r ₁ + r ₂ ) / 2. The thickness h of the clearance channel 6 can be expressed by h = r ₁ -r ₂ .

The average radius r _m of the cylindrical shape is preferably in the range of 1 to 100 mm. If the average radius r _m is at 1mm or more, there is an advantage that machining is easy. If the average radius r _m is at less than 100mm, there is an advantage that the sensor need not be large.

  The thickness h of the clearance channel is preferably in the range of 0.00001 to 0.001 m. When the thickness h is 0.00001 m or more, there are advantages that dynamic characteristics can be secured to some extent and pressure loss does not have to be increased. When the thickness h is 0.001 m or less, there is an advantage that laminar flow can be easily realized.

  The length L of the clearance channel is preferably in the range of 20 to 500 mm. If the length L is 20 mm or more, there is an advantage that the influence of the approach distance can be reduced. When the length L is 500 mm or less, there is an advantage that the time constant is not increased.

  The shape of the clearance channel is not limited to the above-described cylindrical shape (a cylindrical shape having a circular cross section). In addition, as the shape of the clearance channel, a cylindrical shape having an elliptical cross section, a cylindrical shape having a rectangular cross section, or the like can be employed.

  Various shapes can be adopted for the clearance channel as described above. Here, the shape may be the whole or a part thereof. For example, in a cylindrical shape (cylindrical shape) having a circular cross section, the cross section may be not only all circular but also partially lacking (for example, semicircular).

  A plurality of clearance channels may be installed instead of only one. When a plurality of clearance channels are installed, there is an advantage that the time constant can be reduced.

  The flow in the clearance channel at the time of measurement is preferably a laminar flow. The reason is that a proportional relationship is established between the pressure and the flow rate, and a pressure differential meter can be configured.

  As shown in FIG. 7, a differential pressure gauge is used to obtain a pressure difference between the measurement target and the isothermal pressure vessel. As the differential pressure gauge, a diaphragm type differential pressure gauge 22 can be used. The differential pressure gauge is not limited to the diaphragm type differential pressure gauge 22. In addition, any differential pressure gauge such as one using a bellows can be used. The differential pressure gauge is not necessarily built in as shown in FIG. Even if it is externally attached, it is sufficient if the differential pressure between the clearance channels can be measured.

When the pressure P _s in the lower vessel to be measured changes, the pressure P _c in the isothermal pressure vessel changes slightly after passing through the clearance channel, and the differential pressure P _j = P _s -P _c at that time It is possible to obtain the differential value of P _s by measuring with a diaphragm type differential pressure gauge.

  In the above example, a clearance channel is used as the conduction channel. The conduction path is not limited to this clearance path. In addition, a tube having a circular cross section, a slit having a rectangular cross section, or the like can be used. The flow in the conduction path is preferably a laminar flow.

7, is always the isothermal pressure vessel 21 isothermal, the flow of clearance passage is a laminar flow, from the law of energy equation and Hagen Poiseuille, the output of the differential value and the pressure of the pressure P _s of the measurement object The relationship of the following equation (Equation 8) is derived between (Non-patent Document 3).

From the equation (8), a first-order lag relationship is established between the output P _do of the pressure differential meter and the differential value of the pressure P _s to be measured. Here, the P _c pressure isothermal pressure vessel, is P _j is the output signal of the diaphragm-type differential pressure gauge. Output gain of pressure differential meter

Is a constant. In equation (9), μ is the viscosity, R is the gas constant of air, θ is the absolute temperature in the container, ρ _a is the air density under atmospheric pressure, P _a is the pressure under atmospheric pressure, and V is the isothermal pressure. The volume of the container, L is the length of the clearance channel, r ₁ is the outer radius of the clearance channel, and r ₂ is the inner radius of the clearance channel.

When using a pressure differential meter under pressure (P _c ≧ P _a ), the time constant increases as the pressure in the container increases.

Becomes smaller.

  Next, the air spring type vibration isolator using the pressure control type valve and the air spring type vibration isolator using the pressure control type valve and the pressure differential meter were evaluated by experiments. The equipment used and the experimental conditions are as follows.

Air spring type vibration isolator using pressure control type valve

  An experiment was conducted in the vibration isolator shown in FIG. An experiment was performed by connecting a sub-buffer tank (not shown) with a capacity of 1000 cc in parallel with a vibration isolation table to the capacity of 1700 cc of the air spring used. The natural frequency without a sub-buffer tank was 1.4 Hz, and 1.1 Hz when a sub-buffer tank was added.

In the vibration isolator, the following displacement sensors and acceleration sensors were used.
Displacement sensor: PE-LS5, manufactured by Fuji Electric Co., Ltd. Acceleration sensor: MG-102-20, manufactured by Patent Equipment Co., Ltd.

In the experiment, a load was applied to the air spring, and a disturbance was applied by driving a cylinder on the load from a state where the load was lifted at a target position of 3 mm, and the displacement at that time was measured.
As experiment conditions, two types of experiments were conducted: experiment number 1: experiment with the sub-buffer tank attached and experiment number 2: experiment with the sub-buffer tank removed. Table 1 shows the experimental parameters.

Air spring type vibration isolator using pressure control type valve and pressure differential meter

An experiment was conducted in the vibration isolator shown in FIG. The volume of air spring used is 1700cc.
A pressure differential meter was manufactured. The specifications of the manufactured pressure differential meter are as follows.
Container shape: cylindrical (diameter d _v = 20mm, height H _v = 45mm)
V: (π / 4) d _v ⁴ H _v = 8.2 × 10 ⁻⁶ m ³
r ₁ : 10mm
r ₂ : 9.9mm
h: 100μm
L: 25mm
Pressure sensor that measures P _c and P _s : Toyoda Machine Works PD64S500K
Diaphragm type pressure sensor for measuring the P _j: Nagano Keiki KL-17
Isothermal material: φ25μm copper wire, 12g (volume ratio 7.1%,
Mass per unit volume 620kg / m ³ )

  In the experiment, a load was applied to the air spring, and a disturbance was applied by driving a cylinder on the load from a state where the load was lifted at a target position of 3 mm, and the displacement at that time was measured. As an experimental condition, an experiment No. 3: an experiment was conducted when the pressure differential value was fed back with the sub-buffer tank removed. Table 1 shows the experimental parameters.

The experimental results are as shown in FIGS.
FIG. 8 is a diagram comparing the displacement when the sub-buffer tank is attached (experiment number 1) and the displacement when the sub-buffer tank is removed (experiment number 2). After 20 seconds of ascent, the cylinder was driven to give a disturbance. With respect to the target position of 3 mm, after sinking once, it goes back to the steady state after going too far. The line (1) in the figure is the case where the volume is increased (experiment number 1), and it can be seen that the displacement fluctuates more and is a soft spring.

  FIG. 9 is a diagram comparing the displacement when the sub-buffer tank is attached (experiment number 1) and the displacement when the pressure differential value is fed back (experiment number 3) with the sub-buffer tank removed. Both agree well, and it can be seen that an effect equivalent to that obtained when the volume is virtually increased by the method of Experiment No. 3 is obtained.

  The movement of the control valve of the air spring type vibration isolation table can be arbitrarily changed by the method of Experiment No. 3, and a soft movement similar to the case where the sub buffer tank is provided in the air spring can be realized. That is, the state with the sub-buffer tank attached can be virtually realized, and both space saving and energy saving can be realized. Compared with the conventional method of installing a sub-buffer tank, it is possible to realize a space saving of the corresponding volume and reduce the amount of air consumed in the buffer tank. Usually, the sub-buffer bank is often about 10 times the volume of the air spring. Therefore, the space and the amount of air consumed can be reduced accordingly.

  The energy saving can be realized because the air consumption can be reduced because there is no need to fill and discharge the buffer tank with air.

  In the vibration isolator described above, the control of vibration in the vertical direction has been described, but the present invention is not limited to this vertical direction. The vibration isolator of the present invention can also be used for controlling vibrations in all directions including the horizontal direction.

  In the above example, the feedback of the output of the pressure differential meter has been described. However, the present invention is not limited to this method. In addition, the output of the pressure differential value can be integrated and fed back for control. This method can be applied not only to a pressure control type valve (for example, a nozzle flapper type servo valve) but also to a flow rate control type valve (for example, a spool type servo valve).

  The vibration isolator of the present invention can be used not only for vibration control of ultra-precision equipment such as a semiconductor exposure apparatus but also for vibration control of a processing apparatus, a vehicle, and the like.

  From the above, according to the best mode for carrying out the present invention, a vibration isolation table, an air spring that supports the vibration isolation table, a valve that supplies and exhausts air to the air spring, and Position detection means for detecting the position of the vibration isolation table, acceleration detection means for detecting the acceleration of the vibration isolation table, a position feedback loop using the output of the previous position detection means, and acceleration feedback using the output of the acceleration detection means The vibration isolator having a loop has a pressure change detecting means for detecting a pressure change of the air spring and a pressure change feedback loop using an output of the pressure change detecting means, and the valve is a pressure control type valve. A novel vibration isolation device can be provided.

  According to the best mode for carrying out the present invention, the vibration isolator is supported by an air spring, the air spring is supplied and exhausted by a valve, and the position of the vibration isolator is detected by a position detecting means. And detecting the acceleration of the vibration isolation table by the acceleration detection means, and feeding back the output of the acceleration detection means to the pressure change of the air spring. Since it is detected by the change detecting means and the output of the pressure change detecting means is fed back, and the valve is a pressure control type valve, a novel vibration isolation method can be provided.

  The present invention is not limited to the best mode for carrying out the above-described invention, and various other configurations can be adopted without departing from the gist of the present invention.

It is a block diagram of a nozzle flapper type servo valve. It is a block diagram of an air spring type vibration isolator. It is a block diagram of the conventional air spring type vibration isolator using a nozzle flapper type servo valve. It is a figure which shows the conventional air spring type vibration isolator which used the nozzle flapper type servo valve. It is a block diagram of the control method which feeds back a pressure differential value. It is a figure which shows the air spring type vibration isolator which feeds back a pressure differential value. It is a figure which shows the pressure differential meter which has a diaphragm type | formula differential pressure | voltage meter which calculates | requires the pressure difference between the measurement object and the isothermal pressure vessel, and the clearance channel which connects the measurement object and the isothermal pressure vessel. It is the figure which compared the displacement when a subbuffer tank was attached, and the displacement when a subbuffer tank was removed. It is the figure which compared the displacement at the time of feeding back a pressure differential value in the state which removed the subbuffer tank with the subbuffer tank attached.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Buffer tank part of an air spring, 2 ... Rubber bellows part of an air spring, 3 ... Vibration isolator, 4 ... Position sensor, 5 ... Acceleration sensor, 6 ... Air supply source, 7 ... Nozzle flapper type servo valve, 8a, 8b, 8c ... Filter, 9 ... Comparator, 10 ... PI compensator, 11 ... Voltage-current converter, 12 ... Air spring type support leg, 13 ... Pressure differential meter , 14, 15 P compensator, 21 Isothermal pressure vessel, 22 Diaphragm differential pressure gauge, 24 Vessel, 26 Clearance flow path

Claims (14)

A vibration isolation table, an air spring that supports the vibration isolation table, a valve that supplies and exhausts air to the air spring, position detection means that detects the position of the vibration isolation table, and acceleration of the vibration isolation table In an anti-vibration apparatus having an acceleration detecting means for detecting the position, a position feedback loop using the output of the position detecting means, and an acceleration feedback loop using the output of the acceleration detecting means,
A pressure change detecting means for detecting a pressure change of the air spring; and a pressure change feedback loop using an output of the pressure change detecting means,
The vibration isolation device, wherein the valve is a pressure control type valve. The vibration isolator according to claim 1, wherein the pressure control type valve is a nozzle flapper type servo valve. The vibration isolation device according to claim 1, wherein in the pressure change feedback loop, the output of the pressure change detection means is negatively fed back through a P compensator. The pressure change detection means is a pressure differential meter having a container, a conduction path that communicates between the inside of the air spring and the inside of the container, and a differential pressure gauge that obtains a pressure difference between the inside of the air spring and the inside of the container. The vibration isolator according to claim 1. The vibration isolator according to claim 4, wherein the conduction path is a pipe, a slit, or a clearance channel. The vibration isolator according to claim 4, wherein the flow in the conduction path during measurement is a laminar flow. The vibration isolator according to claim 4, wherein the container is an isothermal pressure container. The vibration isolator according to claim 4, wherein the container is filled with an isothermal material. The vibration isolator according to claim 8, wherein the isothermal material is a thin metal wire. The vibration isolator according to claim 4, wherein the differential pressure gauge is a diaphragm type differential pressure gauge. The vibration isolation table is supported by an air spring,
Supply and exhaust air to the air spring by a valve,
Detecting the position of the vibration isolation table by a position detection means, and feeding back the output of the position detection means;
In the vibration isolation method, the acceleration detection unit detects the acceleration of the vibration isolation table and feeds back the output of the acceleration detection unit.
Detecting a pressure change of the air spring by a pressure change detecting means, and feeding back an output of the pressure change detecting means;
The vibration isolation method, wherein the valve is a pressure control type valve. The vibration isolation method according to claim 11, wherein the pressure control type valve is a nozzle flapper type servo valve. The vibration isolation method according to claim 11, wherein the output of the pressure change detection means is negatively fed back through a P compensator. The pressure change detection means is a pressure differential meter having a container, a conduction path that communicates between the inside of the air spring and the inside of the container, and a differential pressure gauge that obtains a pressure difference between the inside of the air spring and the inside of the container. The vibration isolation method according to claim 11.

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