CN110925309A - Air bearing with active control of air film shape - Google Patents
Air bearing with active control of air film shape Download PDFInfo
- Publication number
- CN110925309A CN110925309A CN201811111896.5A CN201811111896A CN110925309A CN 110925309 A CN110925309 A CN 110925309A CN 201811111896 A CN201811111896 A CN 201811111896A CN 110925309 A CN110925309 A CN 110925309A
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- China
- Prior art keywords
- air
- air bearing
- bearing
- gas
- film
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- 238000001514 detection method Methods 0.000 claims abstract description 15
- 238000009826 distribution Methods 0.000 claims abstract description 5
- 230000001050 lubricating effect Effects 0.000 claims description 5
- 230000009471 action Effects 0.000 claims description 4
- 238000006073 displacement reaction Methods 0.000 claims description 4
- 230000003068 static effect Effects 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 abstract description 13
- 230000008859 change Effects 0.000 abstract description 4
- 238000005461 lubrication Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 230000008602 contraction Effects 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 230000010355 oscillation Effects 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000000725 suspension Substances 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 229910000906 Bronze Inorganic materials 0.000 description 1
- 230000002238 attenuated effect Effects 0.000 description 1
- 229910052790 beryllium Inorganic materials 0.000 description 1
- ATBAMAFKBVZNFJ-UHFFFAOYSA-N beryllium atom Chemical compound [Be] ATBAMAFKBVZNFJ-UHFFFAOYSA-N 0.000 description 1
- 239000010974 bronze Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical compound [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 description 1
- 238000007667 floating Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000005764 inhibitory process Effects 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
- F16C32/0603—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion
- F16C32/0614—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
- F16C32/0662—Details of hydrostatic bearings independent of fluid supply or direction of load
- F16C32/067—Details of hydrostatic bearings independent of fluid supply or direction of load of bearings adjustable for aligning, positioning, wear or play
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Magnetic Bearings And Hydrostatic Bearings (AREA)
Abstract
The invention discloses an air bearing device for actively controlling the shape of an air film. The air bearing body mainly comprises an upper body and a lower body; the air film shape control unit mainly comprises an actuation control unit, a detection unit and a position sensor, wherein the actuation control unit generates a control signal according to signals of the detection unit and the position sensor and then actuates the flexible hinge structure to deform; the deformation of the flexible structure can change the shape of an air film of the air bearing, and the purpose of changing the pressure distribution of the air film gap is achieved, so that the bearing capacity and the dynamic stiffness of the air bearing are improved. The invention not only can obviously improve the bearing capacity and dynamic stiffness of the air bearing, but also can effectively inhibit the micro-amplitude vibration of the air bearing and realize the high stability of the air bearing; in addition, the air film shape active control air bearing has the advantages of simple and compact structure, high stability, high precision and the like, and is particularly suitable for the fields of integrated circuit manufacturing, ultra-precise numerical control machine tools and the like.
Description
Technical Field
The invention relates to an air bearing with an actively controlled air film shape, which is mainly applied to ultra-precise manufacturing equipment such as integrated circuit manufacturing, ultra-precise processing machine tools and the like, and belongs to the field of ultra-precise manufacturing equipment.
Background
Background description of the related Art paragraphs.
In the traditional air bearing, external high-pressure gas enters a tiny gap between two parallel bearing surfaces after passing through a throttling port, a gas film with specific pressure is formed in the gap, the supported object is suspended in a non-contact manner, and the gas is discharged from the peripheral edges of the air bearing, so that static pressure gas bearing and lubrication are formed.
The air bearing is used as a key supporting part of ultra-precise movement equipment, has the advantages of high speed, high precision, long service life and the like, reduces the problems of contact collision, friction heating and the like, and is widely applied to the ultra-precise manufacturing fields of integrated circuit manufacturing equipment, semiconductor manufacturing equipment, nano processing and manufacturing technology and the like.
However, the compressibility of the gas may result in low air bearing load capacity, low stiffness, and poor stability. On one hand, turbulent flow at the outlet of the throttling port can cause self micro-amplitude oscillation, and the micro-amplitude oscillation of the air bearing can influence the dynamic characteristics of the ultra-precise motion system. On the other hand, the micro-vibration caused by the disturbance of the traditional air-float support is difficult to be attenuated quickly, and the system is difficult to be stabilized quickly.
The dynamic characteristics can be improved by adopting a surface microstructure or a porous throttling mode, but the surface microstructure and the porous throttling mode are complex to process. The method has great industrial application value for improving the ultra-precision motion performance and the dynamic property and stability of the air bearing.
Disclosure of Invention
Summary of the invention paragraphs.
Aiming at the defects and improvement requirements of the prior art, the invention aims to improve the dynamic characteristics of the air bearing and overcome the defects that the existing air bearing has weak inhibition capability on micro-vibration and the system is difficult to quickly and stably; in addition, the air film shape active control air bearing not only can improve the dynamic characteristic, but also has the characteristic of simple and compact system structure, thereby being particularly suitable for the ultra-precise manufacturing fields of integrated circuit manufacturing equipment, semiconductor manufacturing equipment, nano processing and manufacturing technology and the like.
In order to achieve the purpose, the invention is realized by the following technical means:
the utility model provides an air supporting bearing of air film shape active control, including air supporting bearing body, air film shape control unit, actuate the control unit, wherein:
the air bearing structure with the active control of the air film shape mainly comprises an upper body, an air film shape control unit and a lower body; the air-floating bearing upper body is provided with an air channel, high-pressure air enters the air channel from an air inlet, flows through a throttling hole, enters a gap between two parallel bearing surfaces, forms a layer of air lubricating film with certain pressure in the gap after diffusing and flowing to the periphery, and finally discharges the air in the air film through an external boundary, thereby forming a static pressure air lubricating bearing and realizing the suspension of a supported object;
the detection unit is a displacement sensor, the upper end and the lower end of the detection unit are respectively connected with the upper body and the actuating unit, and the optimal measurement resolution of the sensor is more than 20 nanometers; the actuating unit can adopt piezoelectric ceramics or electromagnetic actuators and the like, and the upper end and the lower end of the actuating unit are respectively connected with the detection unit and the lower body flexible mechanism part;
the actuating unit correspondingly stretches according to the signals of the air bearing actuating controller, and the flexible structure connected with the actuating unit deforms due to stretching of the actuating unit; the flexible structure deforms to change the properties of the air film and change the pressure distribution of the air lubrication film, so that the dynamic characteristics of the air bearing are actively controlled.
In general, compared with the prior art, the gas bearing with the actively controlled air film shape provided by the invention adopts flexible structure deformation to realize the active control of the air film shape so as to directly change the pressure distribution of the air film inside the air bearing, and compared with the prior art, the dynamic characteristics (bearing capacity and rigidity) of the air bearing can be more obviously improved, and tests show that the amplitude and the frequency bandwidth of the dynamic rigidity of the active air bearing can be effectively improved; intelligent adjustment is performed aiming at micro-amplitude self-excited vibration of the air bearing and external complex disturbance, and tests show that the dynamic characteristics of the air bearing can be obviously improved, and high stability and high robustness of the air bearing are realized; in addition, the air film shape active control air bearing can effectively inhibit the micro-amplitude self-excited vibration and external disturbance of the air bearing, and has the advantages of simple and compact structure, strong robustness and the like, so the air film shape active control air bearing is particularly suitable for the ultra-precision machining fields of integrated circuit manufacturing, ultra-precision numerical control machine tools and the like.
Drawings
FIG. 1 is a schematic view of an active gas bearing for controlling the shape of a gas film according to the present invention.
1. An air bearing upper body; 2a, an air bearing lower body; 2b, a lower flexible hinge; 2c, an upper flexible hinge; 3. a choke; 4. a gas film; 5. a base; 6. a chamber; 7. an actuating unit; 8. a detection unit; 9. a gas channel; 10. an air inlet; 11. an actuation controller; 12. a position sensor.
Detailed Description
In order to explain the objects, aspects and advantages of the invention in more detail, the invention is explained in more detail below with the aid of exemplary embodiments and the accompanying drawings. The embodiments described herein are merely illustrative, not restrictive, and the scope of the invention is not limited to these embodiments.
As shown in fig. 1, an air film shape active control air bearing includes an air bearing body (1) and air film shape control units (7, 8, 11, 12), wherein the air bearing body is divided into an upper body (1) and a lower body (2 a, 2b, 2 c).
As shown in figure 1, high-pressure gas enters a gas channel (9) from a gas inlet (10), flows through a throttling hole (3), enters a gap between two bearing surfaces, and then is diffused in the radial direction to form a gas film (4) with specific pressure, and the gas in the gas film is finally discharged through an external boundary, so that the static pressure gas lubrication bearing is formed, and the non-contact suspension of a carrier is realized.
As shown in fig. 1, the air bearing bodies (1, 2) with actively controlled air film shape in this embodiment are made of metal material (Al 7075 or beryllium bronze, etc.), the upper body (1) and the lower body (2) of the air bearing are coaxially mounted by bolts, and the joint is sealed by rubber, etc. to ensure the sealing property.
As shown in fig. 1, the orifice (3) of the lower body in this embodiment may be a small orifice, a circular or square slit, or other orifice.
As shown in fig. 1, the air film shape control unit (7, 8, 11, 12) in this embodiment includes four parts, namely, an actuation controller (11), a position sensor (12), a detection unit (8), and an actuation unit (7). The position sensor is a laser displacement sensor or an eddy current sensor and the like, the resolution is preferably more than 0.1 micron, the position sensor is fixed on the base (5), the position fluctuation value between the base (5) and the air floatation support upper body (1) is measured and sent to the action controller (11); the detection unit (8) is a displacement sensor, the resolution ratio is preferably more than 0.1 micron, one end of the detection unit is connected with the upper body (1), the other section of the detection unit is connected with the actuating unit (7), and the telescopic amplitude of the actuating unit (7) is measured; one end of the actuating unit (7) is connected with the detection unit (8), and the other end is connected with the lower body (2); the actuating unit (7) generates expansion and contraction according to a control signal of the actuating controller (11); the flexible mechanism (2) is deformed by the expansion and contraction of the actuating unit (7), and the deformation changes the shape of the air film (4).
As shown in fig. 1, the controller (11) in this embodiment filters, amplifies, and processes the detection signals of the detection unit (8) and the position sensor (12) to generate corresponding control signals, and the actuation unit (7) changes the shape of the flexible structure (2) through its own stretching motion to realize active control of the shape of the air film, dynamically adjust the pressure distribution in the air film gap of the air bearing, and thereby improve the dynamic characteristics of the air bearing.
The above description is a preferred embodiment of the present invention, but the present invention should not be limited to the disclosure of the embodiment and the drawings. Therefore, it is intended that all equivalents and modifications which do not depart from the spirit of the invention disclosed herein are deemed to be within the scope of the invention.
Claims (6)
1. An air bearing device for actively controlling the shape of an air film comprises air bearing bodies (1, 2) and air film shape control units (7, 8, 11, 12), wherein the air bearing bodies are divided into an upper body (1) and lower bodies (2 a, 2b, 2 c).
2. The active air bearing of claim 1, wherein: the lower body (2) of the air bearing is provided with lower chambers (6 a, 6 b).
3. The active air bearing of claim 1, wherein: the gas bearing upper body (1), the gas film shape control units (7, 8), the gas bearing lower body (2) and the throttling port (3) are coaxially arranged or machined.
4. The active air bearing of claim 1, wherein: high-pressure gas flows through the gas channel (9) and the throttling opening (3) from the gas inlet (10), then is diffused to the gap (4) between the two supporting surfaces (2 and 5 a) to form a gas lubricating film with certain pressure, and the gas in the gas lubricating film is finally discharged through the outer boundary, so that the static pressure gas lubricating support is formed, and the supported object is suspended without rigid contact.
5. The active air bearing of claim 1, wherein: the throttling port of the lower body can adopt a small-hole throttling mode, a circular or square slit throttling mode and other throttling modes.
6. The active air bearing of claim 1, wherein: the air film shape control units (7, 8, 11, 12) comprise an action controller (11), a position sensor (12), a detection unit (8) and an action unit (7); the action controller (11) generates a control signal according to signals of the displacement sensor (12) and the detection unit (8); the flexible structure (2) of the lower body is deformed by controlling the stretching of the actuating unit through the control signal, so that the shape of the air film (4) is changed, the pressure distribution in the air film gap of the air bearing is dynamically controlled, and the bearing capacity and the dynamic stiffness of the air bearing are improved.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811111896.5A CN110925309A (en) | 2018-09-19 | 2018-09-19 | Air bearing with active control of air film shape |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811111896.5A CN110925309A (en) | 2018-09-19 | 2018-09-19 | Air bearing with active control of air film shape |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN110925309A true CN110925309A (en) | 2020-03-27 |
Family
ID=69856393
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811111896.5A Withdrawn CN110925309A (en) | 2018-09-19 | 2018-09-19 | Air bearing with active control of air film shape |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110925309A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114251363A (en) * | 2020-09-24 | 2022-03-29 | 武汉科技大学 | Aerostatic motorized spindle suitable for active control under vacuum environment condition |
| CN114635920A (en) * | 2020-12-15 | 2022-06-17 | 中国科学院宁波材料技术与工程研究所 | Suspension bearing, control method and application thereof |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH1113760A (en) * | 1997-04-28 | 1999-01-22 | Ntn Corp | Hydrostatic magnetic composite bearing |
| JP2008111447A (en) * | 2005-10-21 | 2008-05-15 | Yaskawa Electric Corp | Squeeze air bearing and plane actuator using it |
| CN103836070A (en) * | 2014-03-18 | 2014-06-04 | 华中科技大学 | Active air-floatation support device |
| CN105179480A (en) * | 2015-09-09 | 2015-12-23 | 华中科技大学 | Air-floatation supporting device for actively regulating and controlling air pressure of throttling hole inlet |
-
2018
- 2018-09-19 CN CN201811111896.5A patent/CN110925309A/en not_active Withdrawn
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH1113760A (en) * | 1997-04-28 | 1999-01-22 | Ntn Corp | Hydrostatic magnetic composite bearing |
| JP2008111447A (en) * | 2005-10-21 | 2008-05-15 | Yaskawa Electric Corp | Squeeze air bearing and plane actuator using it |
| CN103836070A (en) * | 2014-03-18 | 2014-06-04 | 华中科技大学 | Active air-floatation support device |
| CN105179480A (en) * | 2015-09-09 | 2015-12-23 | 华中科技大学 | Air-floatation supporting device for actively regulating and controlling air pressure of throttling hole inlet |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114251363A (en) * | 2020-09-24 | 2022-03-29 | 武汉科技大学 | Aerostatic motorized spindle suitable for active control under vacuum environment condition |
| CN114251363B (en) * | 2020-09-24 | 2024-05-03 | 武汉科技大学 | Gas static pressure motorized spindle suitable for active control under vacuum environment condition |
| CN114635920A (en) * | 2020-12-15 | 2022-06-17 | 中国科学院宁波材料技术与工程研究所 | Suspension bearing, control method and application thereof |
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| Date | Code | Title | Description |
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| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| WW01 | Invention patent application withdrawn after publication | ||
| WW01 | Invention patent application withdrawn after publication |
Application publication date: 20200327 |