CN110925308A - Active air bearing with changeable air film shape - Google Patents
Active air bearing with changeable air film shape Download PDFInfo
- Publication number
- CN110925308A CN110925308A CN201811094713.3A CN201811094713A CN110925308A CN 110925308 A CN110925308 A CN 110925308A CN 201811094713 A CN201811094713 A CN 201811094713A CN 110925308 A CN110925308 A CN 110925308A
- Authority
- CN
- China
- Prior art keywords
- air
- bearing
- gas
- pressure
- film shape
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
- F16C32/0603—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion
- F16C32/0607—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being retained in a gap, e.g. squeeze film bearings
Abstract
The invention discloses an active air-bearing device with a variable air film shape, which comprises an air-bearing body and a pressure control unit, wherein the air-bearing body mainly comprises an upper body and a lower body, the pressure control unit mainly comprises an actuating unit and a detection unit, the actuating unit generates a control signal according to a pressure signal detected by the detection unit to change the pressure in a cavity, and a flexible hinge structure deforms under the action of the pressure difference between the upper surface and the lower surface to change the air film shape of the air-bearing, so that the purpose of controlling the pressure distribution of the air film gap is achieved, and the dynamic characteristics of the air-bearing are improved. The invention not only can obviously improve the dynamic characteristics of the air bearing, but also can effectively attenuate the micro-vibration of the air bearing, thereby realizing the high stability of the air bearing; in addition, the active air bearing with the variable air film shape has the advantages of high stability, high precision and the like, and is particularly suitable for the fields of semiconductor equipment, micro/nano electromechanical systems and the like.
Description
Technical Field
The invention relates to an air bearing with a variable air film shape, which can improve the bearing capacity and the dynamic stiffness, can quickly attenuate the micro-vibration of the air bearing, and is mainly applied to the fields of integrated circuit manufacturing, high-speed spindles and the like.
Background
The air bearing has the advantages of high speed, high precision, long service life and the like, reduces the problems of friction heating and the like of a mechanical bearing, and is widely applied to the fields of ultraprecise manufacturing such as nano processing and manufacturing technology, high-speed spindles and the like.
However, the gas bearing has problems of low bearing capacity, weak rigidity, and micro-vibration: on the one hand, micro-vibration caused by turbulent flow of high-speed gas can influence the dynamic characteristics of the ultra-precise motion system. On the other hand, the traditional air floatation support has weak damping and is difficult to quickly attenuate external disturbance.
Although the traditional air bearing is improved in the aspects of surface microstructure, porous throttling mode and the like, the improvement on the dynamic characteristic is limited, so that the application of the traditional air bearing in large-load ultra-precision machining equipment is restricted.
Disclosure of Invention
The present invention is to solve the above technical disadvantages, to improve the disadvantages of the air bearing that the micro-vibration suppression capability is weak and the system is difficult to be fast and stable, and to provide an air bearing with a variable air film shape.
In order to solve the problems, the invention adopts the technical scheme that the active air bearing with the variable air film shape controls the pressure distribution in the air film by changing the shape of the air film through the deformation of a bearing surface, thereby improving the bearing capacity and the rigidity of the air bearing. The pressure control unit is adopted to adjust the pressure inside the cavity of the lower body of the air bearing, and the pressure difference between the upper surface and the lower surface of the flexible structure of the lower body can cause the deformation of the flexible structure. The deformation of the flexible structure changes the shape of the air film, thereby changing the pressure distribution inside the air film. The dynamic deformation of the flexible structure can carry out self-adaptive adjustment on the micro-vibration of the air bearing, and tests show that the dynamic characteristics of the air bearing can be obviously improved, and the high stability of the air bearing is realized; in addition, the air film shape variable air bearing can obviously improve the dynamic characteristics and is suitable for the ultra-precise manufacturing fields of micro/nano electromechanical systems, nano processing and manufacturing technologies and the like.
In order to achieve the purpose, the invention is realized by the following technical means:
provided is an air bearing with a variable air film shape, comprising an air bearing body and a pressure control unit, wherein:
the air bearing device with the variable air film shape mainly comprises an upper body, a pressure control unit and a lower body; the air-float bearing upper body is provided with an air channel, high-pressure air enters the air channel from an air inlet, flows through the air channel and a throttling hole, is diffused to a gap between two bearing surfaces, and is finally discharged to the atmospheric environment, so that a static pressure air lubrication bearing is formed, and the suspension of a supported object is realized;
the pressure control unit comprises a position sensor, a pressure sensor and a pressure controller; the position sensor measurement resolution is preferably above 0.1 micron; the resolution of the pressure sensor is preferably over 100 pa; the range of the pressure controller is-100 kpa-0.6 Mpa, and the frequency is above 50 Hz;
the pressure controller correspondingly controls the pressure in the cavity according to the values measured by the position sensor and the pressure sensor; the pressure difference between the upper surface and the lower surface of the flexible structure can be changed by changing the pressure in the chamber, and the change of the pressure difference can directly cause the deformation of the flexible structure; the deformation of the flexible structure can change the shape of the air film and the pressure distribution in the air film, thereby realizing the active control of the dynamic characteristics of the air bearing.
In general, compared with the prior art, the gas bearing with the variable air film shape provided by the invention has the advantages that the flexible structure is deformed to change the air film shape so as to directly change the pressure distribution of the air film in the air bearing, compared with the prior art, the dynamic characteristics (bearing capacity and rigidity) of the air bearing can be improved more remarkably, and tests show that the amplitude and the frequency bandwidth of the dynamic rigidity of the active air bearing can be effectively improved; self-adaptive adjustment is executed aiming at micro-vibration of the air bearing, and tests show that the dynamic characteristics of the air bearing can be obviously improved, and the strong robustness of the air bearing is realized; in addition, the air film shape variable air bearing according to the invention not only can improve the dynamic characteristics of the air bearing, but also can effectively inhibit the micro-vibration of the air bearing, thereby being particularly suitable for the fields of nano manufacturing and processing, high-speed main shafts and the like.
Drawings
Fig. 1 is a schematic structural view of a gas bearing with a variable gas film shape according to the present invention.
1. An air bearing upper body; 2. a lower body of the air bearing; 2b, a lower flexible hinge; 2c, an upper flexible hinge; 3. a choke; 4. a gas film; 5. a base; 6. a chamber; 7. a gas channel; 8. a pressure sensor; 9. an air inlet; 10. an air inlet; 11. a position sensor; 12. a pressure controller.
Detailed Description
For a more detailed description of the technical means and advantages of the present invention, the following detailed description of the present invention is provided in conjunction with the accompanying drawings. The embodiments described herein are merely illustrative, not restrictive, and the scope of the invention is not limited to these embodiments.
Fig. 1 is a schematic structural view of an air film shape variable active air bearing device constructed according to a preferred embodiment of the present invention, and as shown in fig. 1, the air film shape variable active air bearing device includes two portions, namely an air bearing body (1) and pressure control units (8, 11, 12). The air bearing body comprises an upper body (1) and a lower body (2).
As shown in figure 1, high-pressure gas flows into a gas channel (7) along a gas inlet (10), enters a gap between two bearing surfaces through a throttling hole (3), flows around, and is finally exhausted to the atmosphere through an outer boundary, and a gas film (4) with specific pressure is formed in the process, so that the non-contact suspension of the carrier is realized.
As shown in fig. 1, the air bearing bodies (1, 2) with the variable air film shape in the present embodiment are made of a metal material (Al 7075 or beryllium bronze, etc.), and the upper body (1) and the lower body (2) of the air bearing are coaxially mounted by bolts. And the sealing of the upper body and the lower body is ensured by adopting a sealing piece.
As shown in fig. 1, the orifice (3) of the lower body in this embodiment may be a small orifice, a circular or square slit orifice, or the like.
As shown in fig. 1, the pressure control unit (8, 11, 12) in this embodiment includes three parts, namely, a position sensor (11), a pressure sensor (8), and a pressure controller (12). The position sensor is a laser displacement sensor or an eddy current sensor and the like, the resolution ratio is preferably more than 0.1 micron, the position sensor is fixed on the base (5), the position fluctuation value between the base (5) and the air floatation support upper body (1) is measured, and the position fluctuation value is fed back to the pressure controller (12); a pressure sensor (12) can be fixed to the lower body (2) or to the air inlet (9), measuring the pressure inside the chamber or at the air inlet; the pressure controller (12) filters, amplifies and processes the signals of the pressure sensor (8) and the position sensor (11) correspondingly to generate corresponding pressure control signals. The shape of the flexible structures (1 and 2) is changed by changing the pressure value in the cavity (6), the shape of the air film (4) is actively controlled, and the pressure distribution in the air film gap of the air bearing is dynamically adjusted, so that the dynamic characteristic of the air bearing is improved.
The above description is a preferred embodiment of the present invention, but the present invention should not be limited to the disclosure of the embodiment and the drawings. Therefore, it is intended that all equivalents and modifications which do not depart from the spirit of the invention disclosed herein are deemed to be within the scope of the invention.
Claims (8)
1. The utility model provides a changeable initiative air bearing of air film shape, includes air bearing body (1, 2), air bearing body divide into body (1), pressure control unit (8, 11, 12) and body (2 a, 2b, 2 c) triplex down, pressure control unit (8, 11, 12), its characterized in that: an upper body (1) of the air bearing is provided with an air channel (7), high-pressure air enters the air channel (7) from an air inlet (10) and is connected with the throttling port (3), and a lower cavity (6 a, 6 b) is arranged in the central area of a lower body (2) of the air bearing.
2. The gas film shape modifiable active gas bearing according to claim 1, wherein: the gas bearing upper body (1), the gas bearing lower body (2) and the throttling port (3) are coaxially arranged.
3. The gas film shape modifiable active gas bearing according to claim 1, wherein: high-pressure gas flows through the gas channel (7) and the throttling opening (3) from the gas inlet (10), then is diffused to the gap (4) between the two supporting surfaces (2 and 5 a) to form a gas lubricating film with certain pressure, and the gas in the gas lubricating film is finally discharged through the outer boundary, so that the static pressure gas lubricating support is formed, and the supported object is suspended without rigid contact.
4. The gas film shape modifiable active gas bearing according to claim 1, wherein: the throttling port (3) of the lower body can adopt a small-hole throttling mode, a circular or square slit throttling mode and the like.
5. The active gas bearing of claim 1, wherein: the lower body (2) comprises a lower body base body (2 a), an upper flexible hinge mechanism (2 b) and a lower flexible hinge mechanism (2 c).
6. The gas film shape modifiable active gas bearing according to claim 1, wherein: the pressure control units (8, 11, 12) generate control signals according to signals of the position sensor (11) and the pressure sensor (8) to control the gas pressure of the gas inlet (9).
7. The gas film shape modifiable active gas bearing according to claim 1, wherein: the position sensor (11) is a high-precision sensor such as a laser displacement sensor or an eddy current sensor, and the measurement precision of the sensor is preferably more than 0.1 micrometer.
8. The gas film shape modifiable active gas bearing according to claim 1, wherein: the pressure control unit (8, 11, 12) of the active gas bearing with the variable air film shape mainly comprises a pressure sensor (8), a pressure controller (12) and a position sensor (10), wherein the pressure controller (12) controls the pressure of the air inlet (9) according to detection signals of the pressure sensor (8) and the position sensor (10), the flexible structures (2 b, 2 c) of the lower body deform under the action of the gas pressure difference between the upper surface and the lower surface of the lower body, the active control effect of the air film shape is realized, the pressure distribution in the air film gap (4) of the air bearing is dynamically controlled, and therefore the bearing capacity and the dynamic stiffness of the air bearing are improved.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811094713.3A CN110925308A (en) | 2018-09-19 | 2018-09-19 | Active air bearing with changeable air film shape |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811094713.3A CN110925308A (en) | 2018-09-19 | 2018-09-19 | Active air bearing with changeable air film shape |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN110925308A true CN110925308A (en) | 2020-03-27 |
Family
ID=69855968
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811094713.3A Pending CN110925308A (en) | 2018-09-19 | 2018-09-19 | Active air bearing with changeable air film shape |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110925308A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112815009A (en) * | 2020-12-30 | 2021-05-18 | 江苏集萃精凯高端装备技术有限公司 | Air floatation cushion assembly, air floatation guide rail assembly and calibration method of air floatation guide rail assembly |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000110836A (en) * | 1998-10-06 | 2000-04-18 | Ntn Corp | Static pressure bearing device |
| CN103047362A (en) * | 2012-12-19 | 2013-04-17 | 哈尔滨工业大学 | Zero-rigidity vibration isolator with double-layer air flotation orthogonal decoupling and air floater knuckle bearing angular decoupling |
| CN103836070A (en) * | 2014-03-18 | 2014-06-04 | 华中科技大学 | Active air-floatation support device |
| JP2015218827A (en) * | 2014-05-19 | 2015-12-07 | 株式会社ジェイテクト | Static pressure fluid bearing device |
| CN105179480A (en) * | 2015-09-09 | 2015-12-23 | 华中科技大学 | Air-floatation supporting device for actively regulating and controlling air pressure of throttling hole inlet |
| CN107061493A (en) * | 2017-05-04 | 2017-08-18 | 昆明理工大学 | Device and its control method based on Single electromagnet suspension with air supporting composite support |
| CN206874654U (en) * | 2017-05-04 | 2018-01-12 | 昆明理工大学 | A kind of based superconductive magnetic suspension and the device of air supporting composite support |
| CN108302120A (en) * | 2018-03-12 | 2018-07-20 | 浙江工业大学 | Gas-static main shaft throttle orifice ventilation distribution control device |
-
2018
- 2018-09-19 CN CN201811094713.3A patent/CN110925308A/en active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000110836A (en) * | 1998-10-06 | 2000-04-18 | Ntn Corp | Static pressure bearing device |
| CN103047362A (en) * | 2012-12-19 | 2013-04-17 | 哈尔滨工业大学 | Zero-rigidity vibration isolator with double-layer air flotation orthogonal decoupling and air floater knuckle bearing angular decoupling |
| CN103836070A (en) * | 2014-03-18 | 2014-06-04 | 华中科技大学 | Active air-floatation support device |
| JP2015218827A (en) * | 2014-05-19 | 2015-12-07 | 株式会社ジェイテクト | Static pressure fluid bearing device |
| CN105179480A (en) * | 2015-09-09 | 2015-12-23 | 华中科技大学 | Air-floatation supporting device for actively regulating and controlling air pressure of throttling hole inlet |
| CN107061493A (en) * | 2017-05-04 | 2017-08-18 | 昆明理工大学 | Device and its control method based on Single electromagnet suspension with air supporting composite support |
| CN206874654U (en) * | 2017-05-04 | 2018-01-12 | 昆明理工大学 | A kind of based superconductive magnetic suspension and the device of air supporting composite support |
| CN108302120A (en) * | 2018-03-12 | 2018-07-20 | 浙江工业大学 | Gas-static main shaft throttle orifice ventilation distribution control device |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112815009A (en) * | 2020-12-30 | 2021-05-18 | 江苏集萃精凯高端装备技术有限公司 | Air floatation cushion assembly, air floatation guide rail assembly and calibration method of air floatation guide rail assembly |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US9920790B2 (en) | Active airbearing device | |
| CN105545956B (en) | A kind of active hydrodynamic gas-lubricated bearing that electromagnetism is enabled | |
| CN105179480B (en) | A kind of gas suspension device of active control orifice inlet port air pressure | |
| JP5064316B2 (en) | Vibration isolator | |
| US20100290724A1 (en) | Self-compensating hydrostatic planar bearing device and the method thereof | |
| WO2014094688A2 (en) | Vibration isolator with zero stiffness whose angle degree of freedom is decoupled with a spherical air bearing | |
| CN103016441B (en) | Air flotation cylinder for forming stable air film by microporous material | |
| CN103016442A (en) | Air suspension friction-free air cylinder provided with spherical hinge and uninfluenced by high pressure gas | |
| CN102261984A (en) | Device for detecting vibration characteristics of static pressure gas bearing | |
| CN101737426B (en) | Vacuum negative pressure gas-static super-precision guide rail | |
| CN110925308A (en) | Active air bearing with changeable air film shape | |
| CN110925309A (en) | Air bearing with active control of air film shape | |
| CN103016444A (en) | Air-suspending friction-free air cylinder with cylinder barrels for air supply | |
| CN102937141A (en) | Low-vibration static pressure gas bearing | |
| EP3685061A1 (en) | Active aerostatic bearing | |
| CN105179478B (en) | A kind of Porous gas suspension support system applied to full physical simulation | |
| CN203051294U (en) | Cylinder barrel air supply pressure-equalizing type air flotation non-friction air cylinder | |
| CN110578750A (en) | active air bearing | |
| CN102788087A (en) | Static pressure gas bearing with low vibration and high precision | |
| CN203051292U (en) | Double-acting air-suspending zero-friction air cylinder | |
| CN114251362A (en) | Micro-nano porous throttling air floating ball surface bearing | |
| CN112963449B (en) | Aerostatic spindle based on acoustic levitation and variable throttling | |
| JPH0231043A (en) | Active control precision vibration damping mechanism | |
| CN113833765B (en) | Rigidity-adjustable air-float guide rail | |
| JP2001140883A (en) | Hydrostatic pressure bearing device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |