CN102937141A - Low-vibration static pressure gas bearing - Google Patents
Low-vibration static pressure gas bearing Download PDFInfo
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- CN102937141A CN102937141A CN2012104585602A CN201210458560A CN102937141A CN 102937141 A CN102937141 A CN 102937141A CN 2012104585602 A CN2012104585602 A CN 2012104585602A CN 201210458560 A CN201210458560 A CN 201210458560A CN 102937141 A CN102937141 A CN 102937141A
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Abstract
The invention relates to a low-vibration static pressure gas bearing which is composed of a bearing body (1), an orifice (2) in the bearing body (1) and a gas chamber (5) at the bottom of the bearing body (1). The low-vibration static pressure gas bearing is characterized in that a turbulence platform (4) is arranged in the gas chamber (5), the orifice (2) is connected with the gas chamber (5) through a connection curved surface (3), and the height h of the turbulence platform (4) is smaller than or equal to the depth H of the gas chamber (5).
Description
Technical field:
The present invention relates to a kind of low vibrating static-pressure gas bearing, especially relate to a kind of Oscillation Amplitude of gas bearing, static pressure air-bearing support technology field of improving air supporting supporting movement locating platform precision of reducing.
Background technique:
Hydrostatic gas-lubricated bearing because of have precision high, do not occur creeping during without friction,, low speed strong without wearing and tearing, service free, adaptive capacity to environment and the excellent performance such as hysteresis is widely used in the microelectronic manufacturing and measures equipment.Along with the microelectronic manufacturing and measure improving constantly of equipment required precision, the motion positions precision of the motion locating platform that gas bearing is supported proposes harsher requirement.
Be subjected to the impact of the factors such as throttling form, air-film thickness, preload mode, geometrical shape, machining accuracy, supply gas pressure and operating mode, gas is in the utmost point repeatedly variation of flowing state generation in the short time in the gas bearing, air pressure fluctuation in the air film gap makes gas bearing produce amplitude from several nanometers to tens nanometers, the wideband a little self-excited vibration of frequency from tens hertz to several Kilohertzs, this self-excited vibration produces totally unfavorable impact to the motion positions precision of platform, and the restriction gas bearing is further applied in microelectronic manufacturing and measurement equipment thereof.
A kind of ring restrictor static thrust gas bearing without air cavity is arranged in the prior art, its Oscillation Amplitude ratio is much smaller with the Oscillation Amplitude of the gas bearing of air cavity, but the former bearing capacity and rigidity is far away from the latter, in the practical application or take with the gas bearing of air cavity as main.And with the gas bearing of air cavity in course of normal operation, near the throttle orifice outlet, can form complexity and unsettled whirlpool, the continuous generation of whirlpool and break and cause the fluid field pressure acute variation is to cause a little one of the main reasons of self-excited vibration of this bearing.
For the problems referred to above, the present invention proposes a kind of low vibrating static-pressure thrust gas bearing, and to reducing the amplitude of hydrostatic gas-lubricated bearing vibration, the motion positions precision that improves air floating platform all has extremely important meaning.
Summary of the invention:
The present invention's purpose is: propose a kind of low vibrating static-pressure gas bearing, the deficiency that exists to solve prior art.
In order to realize the present invention's purpose, intend by the following technical solutions:
The present invention is comprised of the throttle orifice of bearing support, bearing support inside and the air cavity of bearing support bottom, and it is characterized in that: be provided with the flow-disturbing platform in described air cavity, throttle orifice is connected curved surface with the employing of air cavity and is connected.---the height h of above-mentioned flow-disturbing platform is less than or equal to the depth H of air cavity.
The present invention's characteristics compared with the prior art:
Be provided with the flow-disturbing platform in the air cavity bottom the bearing support, this has just created condition for the formation and the realization second throttle that destroy whirlpool, effectively improves near the gas flow characteristic of throttle orifice, reduces the amplitude of flow field internal pressure fluctuation, significantly reduces the vibration of bearing.Simultaneously, throttle orifice is connected curved surface with the air cavity employing and is connected, and the air-flow path area of throttle orifice end is slowly changed, and increases to a certain extent again the stability that gas flow, has reduced the pressure surge of gas in the bearing, reduces bear vibration.The present invention is simple in structure, is easy to realize.
Description of drawings:
Figure l has illustrated the internal cross section structure of hydrostatic gas-lubricated bearing of the present invention.
Fig. 2 has illustrated the overall structure of hydrostatic gas-lubricated bearing of the present invention.
1, bearing support; 2, throttle orifice; 3, connect curved surface; 4, flow-disturbing platform; 5, air cavity; 6, air film; 7, supporting surface; P, pressurized gas airintake direction.
Embodiment:
The present invention is comprised of the throttle orifice 2 of bearing support 1, bearing support 1 inside and the air cavity of bearing support 1 bottom 5, it is characterized in that: be provided with flow-disturbing platform 4 in described air cavity 5, throttle orifice 2 is connected curved surface 3 with air cavity 5 employings and is connected.---the height h of above-mentioned flow-disturbing platform 4 is less than or equal to the depth H of air cavity 5.
Hydrostatic gas-lubricated bearing of the present invention in the course of the work, pressurized gas along the P direction from throttle orifice 2 upper end flow into, in the end ejection of throttle orifice 2, make and form the air film 6 with certain pressure between the lower surface of bearing support 1 and the supporting surface 7, thereby bearing support 1 is suspended, and make it have certain bearing capacity.Owing in the air cavity 5 of bearing support 1 bottom, being provided with flow-disturbing platform 4, destroy the formation of whirlpool and realized second throttle, simultaneously, throttle orifice 2 is connected curved surface 3 with the employing of air cavity 5 and is connected, so that the air-flow path area of throttle orifice 2 ends slowly changes, this just for improving near throttle orifice 2 gas flow characteristics, reduces fluid field pressure fluctuation amplitude, reduces the vibration of bearing and has created condition.
Claims (2)
1. one kind low vibrating static-pressure gas bearing, formed by the throttle orifice (2) of bearing support (1), bearing support (1) inside and the air cavity (5) of bearing support (1) bottom, it is characterized in that: be provided with flow-disturbing platform (4) in described air cavity (5), throttle orifice (2) is connected curved surface (4) with air cavity (5) employing and is connected.
2. a kind of low vibrating static-pressure gas bearing according to claim 1, it is characterized in that: the height h of described flow-disturbing platform (4) is less than or equal to the depth H of air cavity (5).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012104585602A CN102937141A (en) | 2012-11-06 | 2012-11-06 | Low-vibration static pressure gas bearing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012104585602A CN102937141A (en) | 2012-11-06 | 2012-11-06 | Low-vibration static pressure gas bearing |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN102937141A true CN102937141A (en) | 2013-02-20 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2012104585602A Pending CN102937141A (en) | 2012-11-06 | 2012-11-06 | Low-vibration static pressure gas bearing |
Country Status (1)
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| CN (1) | CN102937141A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105275992A (en) * | 2015-11-18 | 2016-01-27 | 中国计量学院 | Composite throttling type static-pressure gas bearing for vacuum environment and use method of composite throttling type static-pressure gas bearing |
| CN106640970A (en) * | 2016-12-31 | 2017-05-10 | 北京工业大学 | Air cavity structure capable of weakening air film fluctuation |
| CN107504066A (en) * | 2017-08-14 | 2017-12-22 | 武汉科技大学 | A kind of integral shaft symmetrical jet pressure stabilizing cavity supplied to high pressure disk gas bearing |
| CN108105257A (en) * | 2017-12-12 | 2018-06-01 | 大连理工大学 | A kind of H-shaped shallow cavity hybrid water lubrication journal bearing for being equipped with circumferential communication groove |
| CN111720440A (en) * | 2019-03-22 | 2020-09-29 | 上海微电子装备（集团）股份有限公司 | Air floatation cushion structure |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3726573A (en) * | 1970-04-21 | 1973-04-10 | Toyoda Machine Works Ltd | High rigidity fluid bearings |
| JP2009092196A (en) * | 2007-10-11 | 2009-04-30 | Daiya Seiki Co Ltd | Static pressure gas bearing |
| US20100322540A1 (en) * | 2008-01-14 | 2010-12-23 | Frank Peter Wardle | Aerostatic bearing |
| CN202867562U (en) * | 2012-11-06 | 2013-04-10 | 中国计量学院 | Low vibration static pressure gas bearing |
-
2012
- 2012-11-06 CN CN2012104585602A patent/CN102937141A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3726573A (en) * | 1970-04-21 | 1973-04-10 | Toyoda Machine Works Ltd | High rigidity fluid bearings |
| JP2009092196A (en) * | 2007-10-11 | 2009-04-30 | Daiya Seiki Co Ltd | Static pressure gas bearing |
| US20100322540A1 (en) * | 2008-01-14 | 2010-12-23 | Frank Peter Wardle | Aerostatic bearing |
| CN202867562U (en) * | 2012-11-06 | 2013-04-10 | 中国计量学院 | Low vibration static pressure gas bearing |
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105275992A (en) * | 2015-11-18 | 2016-01-27 | 中国计量学院 | Composite throttling type static-pressure gas bearing for vacuum environment and use method of composite throttling type static-pressure gas bearing |
| CN105275992B (en) * | 2015-11-18 | 2017-09-01 | 中国计量学院 | A kind of composite throttling formula hydrostatic gas-lubricated bearing being used in vacuum environment and its application method |
| CN106640970A (en) * | 2016-12-31 | 2017-05-10 | 北京工业大学 | Air cavity structure capable of weakening air film fluctuation |
| CN106640970B (en) * | 2016-12-31 | 2019-02-15 | 北京工业大学 | A kind of air cavity structure of reduction air film fluctuation |
| CN107504066A (en) * | 2017-08-14 | 2017-12-22 | 武汉科技大学 | A kind of integral shaft symmetrical jet pressure stabilizing cavity supplied to high pressure disk gas bearing |
| CN107504066B (en) * | 2017-08-14 | 2019-05-17 | 武汉科技大学 | A kind of integral shaft symmetrical jet pressure stabilizing cavity supplied to high pressure disk gas bearing |
| CN108105257A (en) * | 2017-12-12 | 2018-06-01 | 大连理工大学 | A kind of H-shaped shallow cavity hybrid water lubrication journal bearing for being equipped with circumferential communication groove |
| CN108105257B (en) * | 2017-12-12 | 2019-05-28 | 大连理工大学 | A kind of H-shaped shallow cavity hybrid water lubrication transverse bearing equipped with circumferential communication groove |
| CN111720440A (en) * | 2019-03-22 | 2020-09-29 | 上海微电子装备（集团）股份有限公司 | Air floatation cushion structure |
| WO2020192554A1 (en) * | 2019-03-22 | 2020-10-01 | 上海微电子装备（集团）股份有限公司 | Air-float cushion structure |
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Application publication date: 20130220 |