CN202468825U - Ultrasonic suspension and air floatation mixed suspension shock-absorbing device - Google Patents
Ultrasonic suspension and air floatation mixed suspension shock-absorbing device Download PDFInfo
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- CN202468825U CN202468825U CN2011205129364U CN201120512936U CN202468825U CN 202468825 U CN202468825 U CN 202468825U CN 2011205129364 U CN2011205129364 U CN 2011205129364U CN 201120512936 U CN201120512936 U CN 201120512936U CN 202468825 U CN202468825 U CN 202468825U
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Abstract
The utility model relates to a novel ultrasonic suspension and air floatation mixed suspension shock-absorbing device, which achieves a shock-absorbing purpose with the mixed suspension of ultrasonic suspension and air floatation and belongs to the field of precise driving. An ultrasonic transducer disc is fixedly connected with an ultrasonic transducer. A working platform is fixedly connected with an air floatation support; a platform base is fixedly connected with the air floatation support; and axial orifices and pressure cavities are distributed on the air floatation support. Radial orifices and pressure cavities are distributed on the platform base. The air floatation support is arranged on the ultrasonic transducer disc. Consequently, the whole connected air floatation support is commonly suspended by ultrasonic suspension and air floatation. When the mixed suspension is carried out, a cyclone phenomenon and air hammer vibration when an air floater works solely are improved by the ultrasonic suspension. The novel mixed suspension device has the advantages that the operation is easy, the structure is simple, the suspension rigidity is higher compared with that of a single air floatation device works solely, and the micro low-frequency vibration of the air floatation device is reduced.
Description
Technical field
The utility model relates to a kind of employing ultrasound and suspend and pneumatically supported mix suspending vibration damping equipment, belong to accurate driving field.
Background technique
Along with the development of technology, the ultraprecise moving platform has developed into the important composition parts of many highi degree of accuracy, complex device, and the precision of its motion has directly determined the device motion to require the precision that reaches.The actuator of traditional ultraprecise moving platform mainly is made up of the sliding pair and the revolute of contact-type; So phenomenons such as friction, wearing and tearing, heating are inevitably arranged between each kinematic pair; And rigid construction can not eliminate the vibration of mechanical structure preferably, the more important thing is that the kinematic accuracy of this class formation can only reach micron order at present.Thereby can not satisfy IC and make the kinematic accuracy requirement of processing with ultraprecise.So some scholar and company adopted contactless gas suspension to replace the kinematic pair of traditional mechanical in the last few years.
Compare with traditional motion structure, pneumatically supported contactless kinematic pair has improved the dynamics of ultraprecise moving platform, but the vibration that the inner air motion of gas suspension causes can not be ignored.Along with the lifting to Subnano-class of the Location accuracy of air supporting moving platform, cyclone phenomenon that this air motion causes and pneumatic hammer vibration are restricting the key factor of ultraprecise moving platform precision especially, thereby have caused widely and pay close attention to.In addition, pneumatically supported suspension rigidity a little less than, be easy to generate low-frequency vibration under the heavy condition.
Patent of invention " Mechanical assembly of shaft and static pressure the bearing " (patent No.: US5800066) proposed the composite throttling form of a kind of porous matter, balancing slit and orifice restriction; Improved antiwhip; Yet the porous material processing technology is complicated, and manufacture difficulty is big; And the hole of porous medium is by material self attributes decision, and the little pore size distribution on the material is irregular, and the aperture is tens nanometers only, easy blocking in the practical application.
Patent of invention " a kind of air-bearing of single-cavity porous throttling structure " (application publication number: CN101825142A) proposed a kind of air-bearing of single-cavity porous throttling structure; It is characterized in that on air-bearing, having center hole, in center hole, inlay cylindrical body, have the micro-hole array on the cylindrical body; The lower end of center hole has a cylindrical pressure chamber; This structure makes gas stream through many passages, and the air-flow of outflow is more stable, makes the bearing capacity of gas bearing strengthen; But, still can not well solve the cyclone phenomenon of pressure chamber and the pneumatic hammer vibration of air-flow because employing is the rectangle pressure chamber.
Patent of invention " is all pressed the chamber air-floating thrust bearing " (application publication number: CN102109011A) proposed a kind of brand-new air-floating thrust bearing structure; Adopted the gradually expansion type pyramid all to press chamber, chamber shape; Make pressurized gas flow into the bearing play process and more be prone to go out along the parallel stream linear flow through throttle orifice, thus the vibration that the cyclone of inhibition throttle orifice annex causes.Though there is better advantage in this prismatic chamber than rectangular cavity, still can not well solve the gas hammer phenomenon and the cyclone phenomenon of air-bearing.
More than three kinds of patents all well do not weaken the cyclone phenomenon and the pneumatic hammer vibration of air-floating apparatus, and the suspension rigidity of this single air floatation device a little less than.
Summary of the invention
To the problem of the cyclone phenomenon of single air floatation device, pneumatic hammer vibration and suspension rigidity, the utility model provides a kind of ultrasound to suspend and pneumatically supported mix suspending vibration damping equipment.This device is used to solve cyclone phenomenon and the pneumatic hammer vibration that present air-floating apparatus exists.Compare with the single air floatation device, improved air-floating apparatus rigidity and the small low-frequency vibration that reduces air-floating apparatus.
For reaching the above object, the utility model adopts following technological scheme:
Through bolt (5) gas suspension (4) is linked together with working platform (1), platform base (6) three.Ultrasonic transducer disk (9) is fixedly connected with ultrasonic transducer (11) through screw (10).Supersonic transducer (11) is fixedly connected with instrument support (14) through screw (12).Ultrasonic transducer (11) links to each other with ultrasonic signal generator (15).Gas suspension (4) is placed on the ultrasonic transducer disk (9).The gas that air compressor (16) comes out enters into suction port (2) after filtering.
Have circular equally distributed 16 axial throttle orifices (17) and 16 axial pressure chambeies (18) on the described gas suspension (4).When pressurized gas get into throttle orifice (17) and pressure chamber (18), play the effect of axial suspension.
Described ultrasound suspends and pneumatically supported mix suspending device, and its working platform (1), gas suspension (4) and platform base (6) are fixed together and have formed a flow channel (3).Flow channel is in order to give throttle orifice (7) air feed on the platform base (6).
Described platform base (6) inboard distributing 4 radially throttle orifice (7) and 4 radial pressure chambeies (8).When pressurized gas get into throttle orifice (7) and pressure chamber (8), play the radial suspension effect, reduce the radially disturbance of mix suspending device.
The device of described ultrasound suspension and pneumatically supported mix suspending, the axis of its ultrasonic transducer disk (9) will remain on same position with the axis that is fixedly connected good gas suspension.
Its working principle is: the vibration damping equipment of the utility model is divided into three operating modes: air supporting operating mode, ultrasound near sound field suspension operating mode, mix suspending operating mode.
Air supporting operating mode: working platform (1), platform base (6) are linked together with gas suspension (4) three through bolt (5);, the gas process that air compressor (16) comes out enters into suction port (2) after filtering; Pressurized gas enter into axial throttle orifice (17) and pressure chamber (18) then; Wherein there is portion gas to enter into flow channel (3), flows to radially throttle orifice (7) and pressure chamber (8).The gas that pressure chamber (18) comes out acts on the upper surface of ultrasonic transducer disk (9), and the gas that pressure chamber (8) comes out acts on the side of ultrasonic transducer disk (9).So just constitute an air supporting operating mode.
Ultrasound near sound field suspension operating mode: ultrasonic transducer disk (9) is fixedly connected with ultrasonic transducer (11) through screw (10); Ultrasonic transducer (11) is fixedly connected with instrument support (14) through screw (12), and the output terminal of ultrasonic signal generator (15) links to each other with ultrasonic transducer (11).The output frequency of regulating ultrasonic signal generator (15) this moment is consistent with the natural frequency of ultrasonic transducer (11), to form resonance.Produce acoustic radiation pressure on ultrasonic transducer disk (9) surface this moment.So just constitute a ultrasound near sound field suspension operating mode.
The mix suspending operating mode: the ultrasound near sound field suspends and air supporting is worked simultaneously, is called the mix suspending operating mode.Under this operating mode: the bearing capacity of vibration damping equipment is ultrasound near sound field suspending power and pneumatically supported bearing capacity summation.When the air supporting operating mode was worked: gas flow had caused the cyclone phenomenon in the gas suspension pressure chamber.Since the compressibility of pressure intracavity gas in the working zone greater than the compressibility of gas in the air film; Make gas compression in the pressure chamber; The phase place that the compression of pressure intracavity gas and release and air floating structure move up and down is opposite; So the gas self-forming in the air cavity energy supply source, thereby formed the pneumatic hammer vibration of gas suspension.Simultaneously the work of ultrasound near sound field suspension operating mode utilizes the gas in the ultrasonic action pressure chamber, has influenced the swirl flow in the pressure chamber, thereby has reduced cyclone in the pressure chamber to the disturbance of gas suspension.Because the effect of acoustic radiation pressure has improved the levitation gap that air-floating apparatus works independently, compare with gas suspension reduced the pressure intracavity gas compressibility in the working zone greater than the compressible degree of gas in the air film.Thereby improve whole device rigidity, reduced the small low-frequency vibration of air-floating apparatus.
Under the situation of divided working status operation, operating mode is followed successively by: air supporting operating mode, ultrasound near sound field suspension operating mode, mix suspending operating mode.Certainly the order of ultrasound near sound field suspension operating mode and air supporting operating mode also can be operated conversely.
The advantage of the utility model is: suspending the ultrasound near sound field is applied in the air-bearing structure, deeper cyclone phenomenon and the pneumatic hammer vibration that has reduced air-bearing.Install easy to operately, simple in structure, reliability is high, and higher rigidity is arranged when working independently than air-floating apparatus, has reduced the small low-frequency vibration that air-floating apparatus self exists.
Description of drawings
Fig. 1 is the vortex schematic representation of the gas suspension cyclone phenomenon of Fluent software analysis
Fig. 2 is the working principle schematic representation of gas suspension pneumatic hammer vibration
Fig. 3 is the utility model embodiment 1 a structural representation
Fig. 4 is the utility model embodiment 2 a structural representation
Fig. 5 is the two-dimentional complete section structural drawing of the gas suspension of the utility model
Fig. 6 is the three-dimensional structure schematic representation of suspension of the utility model ultrasound and pneumatically supported mix suspending vibration damping equipment
Fig. 1 is the vortex schematic representation with cyclone phenomenon in the gas suspension pressure chamber of Fluent software analysis; When the mix suspending device is worked; Utilize the gas in the ultrasonic action gas suspension pressure chamber, influenced the swirl flow in the pressure chamber, make the streamline of its air-flow even; Thereby reduce the cyclone disturbance of gas suspension, reduced vibration.
Fig. 2 is the working principle schematic representation of gas suspension pneumatic hammer vibration.The vibration of the pneumatic hammer of gas suspension produce be since the compressibility of pressure intracavity gas in the working zone greater than the compressibility of gas in the air film gap; Make gas compression in the pressure chamber; The phase place that the compression of pressure intracavity gas and release and air floating structure move up and down is opposite; So the gas self-forming in the air cavity energy supply source, thereby formed the pneumatic hammer vibration of gas suspension.When the mix suspending device is worked; Because the effect of acoustic radiation pressure; Improved the levitation gap that air-floating apparatus works independently, compare with gas suspension reduced the pressure intracavity gas compressibility in the working zone greater than the compressible degree of gas in the air film gap.Thereby weakened the pneumatic hammer vibration of air-floating apparatus.
Embodiment
Referring to Fig. 3, be fixed together gas suspension (4) and working platform (1), platform base (6) through bolt (5).Ultrasonic transducer (11) is fixedly connected through screw (10) ultrasonic transducer disk (9).Supersonic transducer (11) is fixedly connected with instrument support (14) through screw (12).Ultrasonic transducer (11) links to each other with ultrasonic signal generator (15).Gas suspension (4) is placed on the ultrasonic transducer disk (9).The gas that air compressor (16) comes out enters into suction port (2) after filtering.
Its working principle is: through bolt (5) working platform (1), platform base (6) are linked together with gas suspension (4) three;, the gas process that air compressor (17) comes out enters into suction port (2) after filtering; Pressurized gas enter into axial throttle orifice (17) and pressure chamber (18) then; Wherein there is portion gas to enter into flow channel (3), flows to radially throttle orifice (7) and pressure chamber (8).The gas that pressure chamber (18) comes out acts on the upper surface of ultrasonic transducer disk (9), and the gas that pressure chamber (8) comes out acts on the side of ultrasonic transducer disk (9).So just constituted an air supporting operating mode.Ultrasonic transducer disk (9) is fixedly connected with ultrasonic transducer (11) through screw (10); Ultrasonic transducer (11) is fixedly connected with instrument support (14) through screw (12), and the output terminal of ultrasonic signal generator (15) links to each other with ultrasonic transducer (11).The output frequency of regulating ultrasonic signal generator (15) this moment is consistent with the natural frequency of ultrasonic transducer (9), to form resonance.Produce acoustic radiation pressure on ultrasonic transducer disk (9) surface this moment.So just constituted a ultrasound near sound field suspension operating mode.When ultrasound near sound field suspension operating mode and these two operating modes of air supporting operating mode are worked simultaneously, just formed ultrasound and suspended and pneumatically supported mix suspending vibration damping equipment.
Referring to Fig. 4; Through bolt (5) working platform (1), platform base (6) are linked together with gas suspension (4) three;, the gas process that air compressor (16) comes out enters into suction port (2) after filtering; Pressurized gas enter into axial throttle orifice (17) and axial spherical pressure chamber (19) then, wherein have portion gas to enter into flow channel (3), flow to radially throttle orifice (7) and radial bulbous pressure chamber (20).The gas that comes out in axial spherical pressure chamber (19) acts on the upper surface of ultrasonic transducer disk (9), and the gas that radial bulbous pressure chamber (20) comes out acts on the side of ultrasonic transducer disk (9).So just constituted an air supporting operating mode.Ultrasonic transducer disk (9) is fixedly connected with ultrasonic transducer (11) through screw (10); Ultrasonic transducer (11) is fixedly connected with instrument support (14) through screw (12), and the output terminal of ultrasonic signal generator (15) links to each other with ultrasonic transducer (11).The output frequency of regulating ultrasonic signal generator (15) this moment is consistent with the natural frequency of ultrasonic transducer (9), to form resonance.Produce acoustic radiation pressure on ultrasonic transducer disk (9) surface this moment.So just constituted a ultrasound near sound field suspension operating mode.When ultrasound near sound field suspension operating mode and these two operating modes of air supporting operating mode are worked simultaneously, just formed ultrasound and suspended and pneumatically supported mix suspending vibration damping equipment.
Claims (3)
1. a ultrasound suspends and pneumatically supported mix suspending vibration damping equipment; Be to suspend and two kinds of mix suspending formula sides realizations of air supporting mix suspending vibration damping through the ultrasound near sound field; This ultrasound suspends and pneumatically supported mix suspending vibration damping equipment comprises: working platform (1), inlet hole (2), flow channel (3), gas suspension (4), platform base (6), ultrasonic transducer disk (9), ultrasonic transducer (11), instrument support (14), ultrasonic signal generator (15), air compressor (16); It is characterized in that: gas suspension (4) upper surface is fixedly connected with working platform (1); Gas suspension (4) lower surface is fixedly connected with platform base (6); Ultrasonic transducer (11) is fixedly connected with ultrasonic transducer disk (9); Ultrasonic transducer (11) links to each other with ultrasonic signal generator (15); Ultrasonic transducer (11) is fixedly connected with instrument support (14), and gas suspension (4) is placed on the ultrasonic transducer disk (9), and the gas that air compressor (16) comes out enters into suction port (2) after filtering.
2. ultrasound according to claim 1 suspends and pneumatically supported mix suspending vibration damping equipment; It is characterized in that: working platform (1), gas suspension (4) and platform base (6) are fixed together and have formed a flow channel (3), and flow channel (3) is in order to give throttle orifice (7) air feed on the platform base (6).
3. platform base according to claim 1 (6); It is characterized in that: the inboard of platform base (6) distributing 4 radially throttle orifice (7) and corresponding pressure chambers (8); When pressurized gas get into radially throttle orifice (7) and pressure chamber (8), can reduce the radially disturbance of mix suspending device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011205129364U CN202468825U (en) | 2011-11-24 | 2011-11-24 | Ultrasonic suspension and air floatation mixed suspension shock-absorbing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011205129364U CN202468825U (en) | 2011-11-24 | 2011-11-24 | Ultrasonic suspension and air floatation mixed suspension shock-absorbing device |
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| Publication Number | Publication Date |
|---|---|
| CN202468825U true CN202468825U (en) | 2012-10-03 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011205129364U Withdrawn - After Issue CN202468825U (en) | 2011-11-24 | 2011-11-24 | Ultrasonic suspension and air floatation mixed suspension shock-absorbing device |
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| CN (1) | CN202468825U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102518740A (en) * | 2011-11-24 | 2012-06-27 | 吉林大学 | Ultrasonic levitation and air floatation mixed suspension damping device |
| CN113866045A (en) * | 2021-08-24 | 2021-12-31 | 中国核电工程有限公司 | Non-contact type high-temperature melt basic physical property measuring device and measuring method |
-
2011
- 2011-11-24 CN CN2011205129364U patent/CN202468825U/en not_active Withdrawn - After Issue
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102518740A (en) * | 2011-11-24 | 2012-06-27 | 吉林大学 | Ultrasonic levitation and air floatation mixed suspension damping device |
| CN113866045A (en) * | 2021-08-24 | 2021-12-31 | 中国核电工程有限公司 | Non-contact type high-temperature melt basic physical property measuring device and measuring method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20121003 Effective date of abandoning: 20131211 |
|
| RGAV | Abandon patent right to avoid regrant |