CN108825656A - A kind of vacuum adsorption porous gas static pressure thrust bearing - Google Patents
A kind of vacuum adsorption porous gas static pressure thrust bearing Download PDFInfo
- Publication number
- CN108825656A CN108825656A CN201810910337.4A CN201810910337A CN108825656A CN 108825656 A CN108825656 A CN 108825656A CN 201810910337 A CN201810910337 A CN 201810910337A CN 108825656 A CN108825656 A CN 108825656A
- Authority
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- China
- Prior art keywords
- bearing
- endless groove
- negative pressure
- porous material
- matrix
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003068 static effect Effects 0.000 title claims abstract description 19
- 238000001179 sorption measurement Methods 0.000 title claims abstract description 14
- 239000011159 matrix material Substances 0.000 claims abstract description 28
- 239000011148 porous material Substances 0.000 claims abstract description 23
- 229910000838 Al alloy Inorganic materials 0.000 claims abstract description 4
- 239000000956 alloy Substances 0.000 claims abstract description 4
- 229910000596 Oilite Inorganic materials 0.000 claims description 3
- KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical compound [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 claims description 3
- 229920006335 epoxy glue Polymers 0.000 claims description 3
- 229910000906 Bronze Inorganic materials 0.000 claims description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 2
- 239000010974 bronze Substances 0.000 claims description 2
- 229910002804 graphite Inorganic materials 0.000 claims description 2
- 239000010439 graphite Substances 0.000 claims description 2
- 239000000463 material Substances 0.000 claims description 2
- 239000010935 stainless steel Substances 0.000 claims description 2
- 229910001220 stainless steel Inorganic materials 0.000 claims description 2
- 239000000047 product Substances 0.000 description 2
- 206010037660 Pyrexia Diseases 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 238000004026 adhesive bonding Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000002706 hydrostatic effect Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000012466 permeate Substances 0.000 description 1
- 238000005303 weighing Methods 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
- F16C32/0603—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion
- F16C32/0614—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings
- F16C32/0618—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings via porous material
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Dispersion Chemistry (AREA)
- Mechanical Engineering (AREA)
- Magnetic Bearings And Hydrostatic Bearings (AREA)
Abstract
The invention discloses a kind of vacuum adsorption porous gas static pressure thrust bearings, including bearing matrix, aerostatic bearing flow controller and thrust plate, bearing matrix is made of aluminum alloy materials, round negative pressure cavity is equipped at the lower end surface center of bearing matrix, its top is equipped with the central blind hole coaxial with round negative pressure cavity, endless groove is equipped on the lower end surface of bearing matrix, around round negative pressure cavity, the section of endless groove is rectangle, and the groove top face of endless groove is equipped with two annular balancing slits；Porous material ring as aerostatic bearing flow controller is installed, porous material ring is made of isotropic porous material, and end face protrudes from the lower end surface of bearing matrix in endless groove；The side of bearing matrix is equipped with air vent and venthole, and air vent is communicated with two annular balancing slits, and venthole is communicated with central blind hole.The present invention can be by improving Sa/ S value effectively improves bearing rigidity, to solve the problems, such as aerostatic bearing insufficient rigidity under a low load.
Description
Technical field
The present invention relates to high rigidity under a kind of gas static pressure thrust bearing more particularly to a kind of low carrying and high stabilities
Porous gas static pressure thrust bearing.
Background technique
Aerostatic bearing is high because having kinematic accuracy, and frictional dissipation, fever deformation are small, be widely used in Precision Machining and
In measurement equipment.The difference of bearing flow controller directly affects its bearing capacity and rigidity, the throttling side that aerostatic bearing uses
Formula is mainly orifice restriction, slit throttling, surface throttle and porous restriction etc..Since porous restriction device gas supply area is big,
Pressure field distribution is uniform, and porous gas static pressure bearing has bearing capacity and rigidity big compared with other traditional gas hydrostatic bearings,
Stability is good, advantages of simple structure and simple.With the variation of air-film thickness, the rigidity of bearing when porous gas static pressure bearing working
Also it can change, when bearing load is lower, air-film thickness is larger, and bearing rigidity at this time is relatively low.Therefore low in bearing
Under load, the rigidity of common porous matter aerostatic bearing is not able to satisfy design requirement still.
Summary of the invention
In order to overcome prior art problem, the object of the present invention is to provide a kind of vacuum adsorption type porous gas static pressures to stop
Thrust bearing, to solve the problems, such as aerostatic bearing insufficient rigidity under a low load.
The present invention adopts the technical scheme that in order to solve the above technical problems：A kind of vacuum adsorption porous gas static pressure
Thrust bearing, including bearing matrix, aerostatic bearing flow controller and thrust plate, the bearing matrix is by aluminum alloy materials system
At equipped with round negative pressure cavity at the lower end surface center of the bearing matrix, the top of the circle negative pressure cavity is equipped with and the circle
Shape negative pressure cavity coaxial central blind hole is equipped with endless groove on the lower end surface of the bearing matrix, around the round negative pressure cavity,
The section of the endless groove is rectangle, and the groove top face of the endless groove is equipped with two annular balancing slits；Installation in the endless groove
There is the porous material ring as aerostatic bearing flow controller, the porous material ring uses isotropic porous material system
At, material can be porous graphite, Oilite bronze, porous stainless steel etc., and the end face of the porous material ring protrudes from the bearing
The lower end surface of matrix；The side of the bearing matrix is equipped with air vent and venthole, the air vent and two annular balancing slits
It communicates, the venthole is communicated with the central blind hole, and the air vent and venthole are crossed as 90 degree in space.
Further, in the present invention, the endless groove of the porous material ring and bearing matrix lower end surface cooperates, and is used in combination
Epoxy glue bonding.
The end face of the porous material ring is bearing working face, and the thrust plate is oppositely arranged with the bearing working face.
The circular cross-section product of the circle negative pressure cavity is Sa, the circular cross-section of the circle negative pressure cavity is accumulated and the endless groove
The sum of annular cross-sectional area be S, 0.2 < Sa/ S < 0.35.
Compared with prior art, the beneficial effects of the invention are as follows：
(1) in case of a low load, the rigidity of bearing, and the area tune by changing negative pressure cavity be can effectively improve
The bearing capacity and rigidity that bearing is held.
(2) flow controller of the isotropism porous material as aerostatic bearing is used, ensure that voidage is uniform, permeates
Rate is consistent and isotropism, sky throttle air static pressure spring bearing small compared with absorption type compare, due to not having pneumatic presence, be not easy
There is " pneumatic hammer " phenomenon, improves the stability of aerostatic bearing asked.
Detailed description of the invention
Fig. 1 is vacuum adsorption porous gas static pressure thrust bearing main sectional view of the invention；
Fig. 2 is vacuum adsorption porous gas static pressure thrust bearing bearing matrix cross-sectional view of the invention；
Fig. 3 is vacuum adsorption porous gas static pressure thrust bearing working principle diagram of the invention；
Fig. 4 is that rigidity compares vacuum adsorption porous gas static pressure thrust bearing of the invention under different loads.
Specific embodiment
Technical solution of the present invention is described in further detail in the following with reference to the drawings and specific embodiments, it is described specific
Embodiment is only explained the present invention, is not intended to limit the invention.
As shown in Figure 1, a kind of vacuum adsorption porous gas static pressure thrust bearing proposed by the present invention, including bearing base
Body 2, aerostatic bearing flow controller and thrust plate 1.
As shown in Fig. 2, the bearing matrix 2 is made of aluminum alloy materials, set at the lower end surface center of the bearing matrix 2
There is round negative pressure cavity 5, the top of the circle negative pressure cavity 5 is equipped with the central blind hole coaxial with the round negative pressure cavity 5, the axis
It holds on the lower end surface of matrix 2, be equipped with endless groove around the round negative pressure cavity 5, the section of the endless groove 6 is rectangle, institute
The groove top face for stating endless groove 6 is equipped with two annular balancing slits 7.
As shown in Figure 1, the porous material ring 3 as aerostatic bearing flow controller is installed in the endless groove 6, it is described
Porous material ring 3 is made of isotropic porous material, the porous material ring 3 and 2 lower end surface of bearing matrix
Endless groove 6 cooperate, and be bonded with epoxy glue.The end face of the porous material ring 3 protrudes from the lower end of the bearing matrix 2
Face；The end face of the porous material ring 3 is that bearing working face 4 (carries out ultra-precise cutting to the bearing working face 4, set with meeting
Count requirement), the thrust plate 1 is oppositely arranged with the bearing working face 4.The side of the bearing matrix 2 is equipped with air vent 8
With venthole 9, the air vent 8 is communicated with two annular balancing slits 9, and the venthole 8 is communicated with the central blind hole, described
Air vent 8 and venthole 9 are crossed as 90 degree in space.
In the present invention, the circular cross-section product for the round negative pressure cavity 5 being arranged on 2 lower end surface of bearing matrix is Sa, described
The long-pending annular cross-sectional area with the endless groove 6 being arranged on 2 lower end surface of bearing matrix of the circular cross-section of round negative pressure cavity 5 it
With for S, in the present invention, it is proposed that 0.2 < Sa/ S < 0.35.
As shown in figure 3, gas source is connect with air vent 8, vacuum generator is connect with venthole 9.High pressure gas Ps passes through
Air flue (air inlet 8-two annular balancing slits 7), isotropic porous material ring, as Oilite bronze ring 3 enters bearing clearance
H (gap between bearing working face 4 and thrust plate 1), forms relatively thin air film in the h of bearing clearance, into air film gap
Gas point both direction is discharged：Gap of a part of Pa vertically between supporting element is flowed outwardly into atmosphere, and pressure is reduced to atmosphere
Pressure；Another part Pv inwardly flows through round negative pressure cavity 5 to venthole 9 and is taken away by vacuum generator.To in the workplace of bearing
Barotropic field and negative pressure region are formed in gap.Barotropic field generates buoyancy and floats bearing thrust face, makes it have certain hold
Loading capability, and negative pressure region applies certain load to bearing thrust face, reduces the bearing capacity of bearing.When the two reaches flat
Weighing apparatus state, air film gap maintain in a stable range, so that bearing is had a suitable rigidity, and can improve the steady of bearing
It is qualitative.Bearing is being lightly loaded, and 0.2<Sa/S<Under 0.35 operating condition, by improving Sa/ S value can effectively improve bearing rigidity, such as Fig. 4
Show the rigidity ratio of the bearing under different loads.
Although above in conjunction with attached drawing, invention has been described, and the invention is not limited to above-mentioned specific implementations
Mode, the above mentioned embodiment is only schematical, rather than restrictive, and those skilled in the art are at this
Under the enlightenment of invention, without deviating from the spirit of the invention, many variations can also be made, these belong to of the invention
Within protection.
Claims (4)
1. a kind of vacuum adsorption porous gas static pressure thrust bearing, including bearing matrix (2), aerostatic bearing flow controller
With thrust plate (1), it is characterised in that：
The bearing matrix (2) is made of aluminum alloy materials, and round negative pressure is equipped at the lower end surface center of the bearing matrix (2)
Chamber (5), the top of the circle negative pressure cavity (5) are equipped with the central blind hole coaxial with the round negative pressure cavity (5), the bearing base
It is equipped with endless groove on the lower end surface of body (2), around the round negative pressure cavity (5), the section of the endless groove (6) is rectangle,
The groove top face of the endless groove (6) is equipped with two annular balancing slits (7)；
Porous material ring (3) as aerostatic bearing flow controller, the porous material ring are installed in the endless groove (6)
(3) it is made of isotropic porous material, material selects porous graphite, Oilite bronze, any one in porous stainless steel
Kind, the end face of the porous material ring (3) protrudes from the lower end surface of the bearing matrix (2)；
The side of the bearing matrix (2) is equipped with air vent (8) and venthole (9), and the air vent (8) is pressed with two annulars
Slot (9) communicates, and the venthole (8) communicates with the central blind hole, and the air vent (8) is handed in space with venthole (9)
Pitch into 90 degree.
2. vacuum adsorption porous gas static pressure thrust bearing according to claim 1, which is characterized in that the porous material
Expect that the endless groove (6) of ring (3) and bearing matrix (2) lower end surface cooperates, and is bonded with epoxy glue.
3. vacuum adsorption porous gas static pressure thrust bearing according to claim 1, which is characterized in that the porous material
The end face for expecting ring (3) is bearing working face (4), and the thrust plate (1) is oppositely arranged with the bearing working face (4).
4. vacuum adsorption porous gas static pressure thrust bearing according to claim 1, which is characterized in that described round negative
The circular cross-section product for pressing chamber (5) is Sa, the long-pending annular section with the endless groove (6) of the circular cross-section of the circle negative pressure cavity (5)
The sum of area is S, 0.2 < Sa/ S < 0.35.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810910337.4A CN108825656A (en) | 2018-08-10 | 2018-08-10 | A kind of vacuum adsorption porous gas static pressure thrust bearing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810910337.4A CN108825656A (en) | 2018-08-10 | 2018-08-10 | A kind of vacuum adsorption porous gas static pressure thrust bearing |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108825656A true CN108825656A (en) | 2018-11-16 |
Family
ID=64152926
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810910337.4A Pending CN108825656A (en) | 2018-08-10 | 2018-08-10 | A kind of vacuum adsorption porous gas static pressure thrust bearing |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108825656A (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110848259A (en) * | 2019-12-17 | 2020-02-28 | 中国工程物理研究院机械制造工艺研究所 | Static pressure gas thrust bearing with adjustable throttling effect |
| CN112110323A (en) * | 2020-08-04 | 2020-12-22 | 大族激光科技产业集团股份有限公司 | Vacuum adsorption device and system |
| CN112780679A (en) * | 2021-01-29 | 2021-05-11 | 广东工业大学 | Prepressing type porous air bearing with non-uniformly distributed vacuum cavities |
| CN113958607A (en) * | 2021-11-02 | 2022-01-21 | 上海复阅材料科技有限公司 | Porous static pressure air bearing and preparation method thereof |
| US11473621B2 (en) * | 2018-06-11 | 2022-10-18 | Trane International Inc. | Porous gas bearing |
| CN116877577A (en) * | 2023-07-10 | 2023-10-13 | 通用技术集团机床工程研究院有限公司 | Annular thin-sheet porous throttling air bearing |
| CN110848259B (en) * | 2019-12-17 | 2024-07-02 | 中国工程物理研究院机械制造工艺研究所 | Static pressure gas thrust bearing with adjustable throttling effect |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07145815A (en) * | 1993-11-25 | 1995-06-06 | Nippon Seiko Kk | Porous hydrostatic bearing |
| CN1858653A (en) * | 2006-06-07 | 2006-11-08 | 上海微电子装备有限公司 | Air float support base for regulating air diaphragm two-way rigidity |
| CN101435466A (en) * | 2008-12-25 | 2009-05-20 | 哈尔滨工业大学 | Porous gas static pressure thrust bearing |
| CN102109011A (en) * | 2009-12-25 | 2011-06-29 | 上海微电子装备有限公司 | Pressure-sharing cavity air thrust bearing |
| CN102606864A (en) * | 2012-03-26 | 2012-07-25 | 西安交通大学 | Hemisphere centering plane supporting turntable structure of large-caliber ultra-precise measuring machine |
| CN104295606A (en) * | 2014-09-23 | 2015-01-21 | 哈尔滨工程大学 | Annular belt compound throttling static-pressure air thrust bearing |
| CN205117990U (en) * | 2015-11-18 | 2016-03-30 | 中国计量学院 | A compound throttle formula static pressure gas bearing for among vacuum environment |
| CN208919085U (en) * | 2018-08-10 | 2019-05-31 | 天津大学 | A kind of vacuum adsorption porous gas static pressure thrust bearing |
-
2018
- 2018-08-10 CN CN201810910337.4A patent/CN108825656A/en active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07145815A (en) * | 1993-11-25 | 1995-06-06 | Nippon Seiko Kk | Porous hydrostatic bearing |
| CN1858653A (en) * | 2006-06-07 | 2006-11-08 | 上海微电子装备有限公司 | Air float support base for regulating air diaphragm two-way rigidity |
| CN101435466A (en) * | 2008-12-25 | 2009-05-20 | 哈尔滨工业大学 | Porous gas static pressure thrust bearing |
| CN102109011A (en) * | 2009-12-25 | 2011-06-29 | 上海微电子装备有限公司 | Pressure-sharing cavity air thrust bearing |
| CN102606864A (en) * | 2012-03-26 | 2012-07-25 | 西安交通大学 | Hemisphere centering plane supporting turntable structure of large-caliber ultra-precise measuring machine |
| CN104295606A (en) * | 2014-09-23 | 2015-01-21 | 哈尔滨工程大学 | Annular belt compound throttling static-pressure air thrust bearing |
| CN205117990U (en) * | 2015-11-18 | 2016-03-30 | 中国计量学院 | A compound throttle formula static pressure gas bearing for among vacuum environment |
| CN208919085U (en) * | 2018-08-10 | 2019-05-31 | 天津大学 | A kind of vacuum adsorption porous gas static pressure thrust bearing |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11473621B2 (en) * | 2018-06-11 | 2022-10-18 | Trane International Inc. | Porous gas bearing |
| US11867230B2 (en) | 2018-06-11 | 2024-01-09 | Trane International Inc. | Porous gas bearing |
| CN110848259A (en) * | 2019-12-17 | 2020-02-28 | 中国工程物理研究院机械制造工艺研究所 | Static pressure gas thrust bearing with adjustable throttling effect |
| CN110848259B (en) * | 2019-12-17 | 2024-07-02 | 中国工程物理研究院机械制造工艺研究所 | Static pressure gas thrust bearing with adjustable throttling effect |
| CN112110323A (en) * | 2020-08-04 | 2020-12-22 | 大族激光科技产业集团股份有限公司 | Vacuum adsorption device and system |
| CN112780679A (en) * | 2021-01-29 | 2021-05-11 | 广东工业大学 | Prepressing type porous air bearing with non-uniformly distributed vacuum cavities |
| CN112780679B (en) * | 2021-01-29 | 2024-04-30 | 广东工业大学 | Pre-pressed porous air bearing with unevenly distributed vacuum cavities |
| CN113958607A (en) * | 2021-11-02 | 2022-01-21 | 上海复阅材料科技有限公司 | Porous static pressure air bearing and preparation method thereof |
| CN116877577A (en) * | 2023-07-10 | 2023-10-13 | 通用技术集团机床工程研究院有限公司 | Annular thin-sheet porous throttling air bearing |
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