CN104295606A - Annular belt compound throttling static-pressure air thrust bearing - Google Patents
Annular belt compound throttling static-pressure air thrust bearing Download PDFInfo
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- CN104295606A CN104295606A CN201410489849.XA CN201410489849A CN104295606A CN 104295606 A CN104295606 A CN 104295606A CN 201410489849 A CN201410489849 A CN 201410489849A CN 104295606 A CN104295606 A CN 104295606A
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- thrust bearing
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Abstract
The invention aims to provide an annular belt compound throttling static-pressure air thrust bearing, which comprises a working surface, wherein static-pressure floating air supply points are uniformly arranged on the working surface along the circumferential direction and form a static-pressure floating air supply point distribution circle; with the static-pressure floating air supply point distribution circle as the center, annular shallow cavities are formed in both inner and outer sides of the working surface of the thrust bearing; the width of the annular shallow cavities are 30%-70% of that of the working surface and the depth of the annular shallow cavities is 1-50 microns. The annular belt compound throttling static-pressure air thrust bearing is simple in structure, low in process cost, simple in quality test and control and stable in technical quality; the bearing capacity and rigidity of the bearing is far higher than those of a traditional static-pressure bearing; compared with a traditional air static-pressure bearing, the static-pressure air thrust bearing has the advantage that the homogenization effect of an air film on positioning surface processing error is further improved.
Description
Technical field
What the present invention relates to is a kind of bearing, specifically thrust bearing.
Background technique
At present, the pressurized air thrust bearing used in engineering, only utilizes outer throttling static pressure air-bearing or surface throttle carry out bearing load and provide rigidity, usually runs into that bearing capacity is low, rigidity is little, the problem of poor anti jamming capability in the middle of practical application.The pressurized air thrust bearing of these kinds does not make full use of composite throttling effect, thus can not provide large bearing capacity and rigidity, and poor anti jamming capability, rotating accuracy are difficult to improve; Patent (US6164827A) proposes the air floating structure with surperficial very low power, and this structure only just works under little air-film thickness, does not have remarkable effect to raising air supporting block combination property; Patent (TOHKEMY 2009-209962A) proposes the air-float guide rail that the outlet of a kind of flow controller improves, but its improved confinement area only accounts for and makes 6.25% of area, cannot play surface throttle effect; Patent (CN1651784A) discloses a kind of bicharacteristic surface throttle thrust bearing, have employed the dark models such as bicharacteristic based on traditional etching process, each throttle orifice is relatively independent, cannot make full use of the bearing capacity that the working surface between throttle orifice can provide.Patent (CN1654840A) discloses a kind of composite throttling pressurized air thrust bearing, equally the dark model such as to have employed based on traditional etching process, each throttle orifice is relatively independent, cannot make full use of the bearing capacity that the working surface between throttle orifice can provide.Part researcher is also attempted adopting annular shallow slot to link up each throttle orifice, even require annular shallow slot narrow as far as possible (1 mm wide), to improving the utilization to working surface between throttle orifice, but facts have proved that bearing performance does not significantly improve, due to ' annular shallow slot is narrow as far as possible ', surface throttle effect could not be played simultaneously.
Summary of the invention
The object of the present invention is to provide the endless belt composite throttling pressurized air thrust bearing making full use of working surface and surface throttle principle between throttle orifice.
The object of the present invention is achieved like this:
Endless belt composite throttling pressurized air thrust bearing of the present invention, comprise thrust bearing working surface, it is characterized in that: thrust bearing working surface along the circumferential direction evenly arranges static pressure air-bearing air feed point, all static pressure air-bearing air feed points form static pressure air-bearing air feed point distribution circle, on thrust bearing working surface centered by static pressure air-bearing air feed point distribution circle, inside and outside it, both sides are processed with the shallow chamber of ring-type, and the width in the shallow chamber of ring-type is the 30%-70% of thrust bearing face width, and the degree of depth in the shallow chamber of ring-type is 1-50 micron.
The present invention can also comprise:
1, each static pressure air-bearing air feed point place arranges air vent, and air vent outlet port is provided with flow controller.
2, described flow controller is orifice restriction device, chink type flow controller, circular seam type flow controller or porous material flow controller.
3, each static pressure air-bearing air feed point place arranges air vent, and air vent outlet port arranges the throttle orifice communicated with it.
Advantage of the present invention is:
(1) structure is simple, and processing cost is low; Quality testing is simple, and quality control is simple, and processing quality is stablized.
(2) bearing capacity and rigidity are far away higher than traditional hydrostatic bearing.
(3) compared with traditional gas hydrostatic bearing, the leveling effect of air film to locating face machining error is further enhanced.
Accompanying drawing explanation
Fig. 1 is working surface schematic diagram of the present invention;
Fig. 2 is the sectional view of static pressure air-bearing air feed point place when arranging flow controller;
Fig. 3 is the sectional view of static pressure air-bearing air feed point place when arranging throttle orifice.
Embodiment
Below in conjunction with accompanying drawing citing, the present invention is described in more detail:
Mode of execution 1:
Accompanying drawing 1 is endless belt composite throttling pressurized air thrust bearing working surface schematic diagram, and on pressurized air thrust bearing working surface 1, distribute multiple static pressure air-bearing air feed point 2, centered by static pressure air-bearing air feed point 2 distribution circle 3, be processed with the shallow chamber 4 of ring-type.
Accompanying drawing 2 is endless belt composite throttling pressurized air thrust bearing static pressure air-bearing air feed point 2 schematic cross-sections, on pressurized air thrust bearing working surface 1, distribute multiple static pressure air-bearing air feed point 2, the shallow chamber 4 of ring-type is processed with centered by static pressure air-bearing air feed point 2, ring-type shallow chamber 4 width L1 is the 30%-70% of bearing working face width L2, the depth H in the shallow chamber 4 of ring-type is 1-50 micron, static pressure air-bearing air feed point 2 is air vents 6, be provided with flow controller 5 in air vent outlet, pressure air enters bearing through air vent 6 and flow controller 5.
As shown in Figure 1, on pressurized air thrust bearing working surface 1, distribute multiple static pressure air-bearing air feed point 2, and distributing centered by garden 3 by static pressure air-bearing air feed point 2 is processed with the shallow chamber 4 of ring-type.
Endless belt composite throttling pressurized air thrust bearing static pressure air-bearing air feed point 2 cross section as shown in Figure 2, on pressurized air thrust bearing working surface 1, distribute multiple static pressure air-bearing air feed point 2, the shallow chamber 4 of ring-type is processed with centered by static pressure air-bearing air feed point 2, ring-type shallow chamber 4 width L1 is the 30%-70% of bearing working face width L2, the depth H in the shallow chamber 4 of ring-type is 1-50 micron, static pressure air-bearing air feed point 2 is air vents 6, be provided with flow controller 5 in air vent outlet, pressure air enters bearing through air vent 6 and flow controller 5.
Affiliated flow controller 5 can be the flow controller of multiple different principle, such as orifice restriction device, chink type flow controller, circular seam type flow controller, and porous material flow controller etc.
Be static working surface with above-mentioned working surface, being equipped with corresponding ring plain, to form thrust bearing secondary.
Mode of execution 2:
Accompanying drawing 3 is endless belt composite throttling pressurized air thrust bearing static pressure air-bearing air feed point 2 schematic cross-sections, on pressurized air thrust bearing working surface 1, distribute multiple static pressure air-bearing air feed point 2, the shallow chamber 4 of ring-type is processed with centered by static pressure air-bearing air feed point 2, ring-type shallow chamber 4 width L1 is the 30%-70% of bearing working face width L2, the depth H in the shallow chamber 4 of ring-type is 1-50 micron, static pressure air-bearing air feed point 2 is throttle orifices 7, throttle orifice 7 is connected with air vent 6, and pressure air enters bearing through air vent 6 and throttle orifice 7.
As shown in Figure 1, on pressurized air thrust bearing working surface 1, distribute multiple static pressure air-bearing air feed point 2, and distributing centered by garden 3 by static pressure air-bearing air feed point 2 is processed with the shallow chamber 4 of ring-type.
Endless belt composite throttling pressurized air thrust bearing static pressure air-bearing air feed point 2 cross section as shown in Figure 3, on pressurized air thrust bearing working surface 1, distribute multiple static pressure air-bearing air feed point 2, the shallow chamber 4 of ring-type is processed with centered by static pressure air-bearing air feed point 2, ring-type shallow chamber 4 width L1 is the 30%-70% of bearing working face width L2, the depth H in the shallow chamber 4 of ring-type is 1-50 micron, static pressure air-bearing air feed point 2 is throttle orifices 7, throttle orifice 7 is connected with air vent 6, and pressure air enters bearing through air vent 6 and throttle orifice 7.
Be static working surface with above-mentioned working surface, being equipped with corresponding ring plain, to form thrust bearing secondary.
Claims (4)
1. endless belt composite throttling pressurized air thrust bearing, comprise thrust bearing working surface, it is characterized in that: thrust bearing working surface along the circumferential direction evenly arranges static pressure air-bearing air feed point, all static pressure air-bearing air feed points form static pressure air-bearing air feed point distribution circle, on thrust bearing working surface centered by static pressure air-bearing air feed point distribution circle, inside and outside it, both sides are processed with the shallow chamber of ring-type, and the width in the shallow chamber of ring-type is the 30%-70% of thrust bearing face width, and the degree of depth in the shallow chamber of ring-type is 1-50 micron.
2. endless belt composite throttling pressurized air thrust bearing according to claim 1, is characterized in that: each static pressure air-bearing air feed point place arranges air vent, and air vent outlet port is provided with flow controller.
3. endless belt composite throttling pressurized air thrust bearing according to claim 2, is characterized in that: described flow controller is orifice restriction device, chink type flow controller, circular seam type flow controller or porous material flow controller.
4. endless belt composite throttling pressurized air thrust bearing according to claim 1, is characterized in that: each static pressure air-bearing air feed point place arranges air vent, and air vent outlet port arranges the throttle orifice communicated with it.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410489849.XA CN104295606A (en) | 2014-09-23 | 2014-09-23 | Annular belt compound throttling static-pressure air thrust bearing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410489849.XA CN104295606A (en) | 2014-09-23 | 2014-09-23 | Annular belt compound throttling static-pressure air thrust bearing |
Publications (1)
| Publication Number | Publication Date |
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| CN104295606A true CN104295606A (en) | 2015-01-21 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201410489849.XA Pending CN104295606A (en) | 2014-09-23 | 2014-09-23 | Annular belt compound throttling static-pressure air thrust bearing |
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Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105275992A (en) * | 2015-11-18 | 2016-01-27 | 中国计量学院 | Composite throttling type static-pressure gas bearing for vacuum environment and use method of composite throttling type static-pressure gas bearing |
| CN108061096A (en) * | 2017-12-22 | 2018-05-22 | 天津大学 | A kind of porous gas static pressure revolving platform |
| CN108825656A (en) * | 2018-08-10 | 2018-11-16 | 天津大学 | A kind of vacuum adsorption porous gas static pressure thrust bearing |
| CN110081082A (en) * | 2019-06-04 | 2019-08-02 | 中国工程物理研究院机械制造工艺研究所 | A kind of static pressure air-bearing transverse bearing |
| CN110617272A (en) * | 2019-09-27 | 2019-12-27 | 广东工业大学 | Air bearing |
| CN111237341A (en) * | 2020-03-09 | 2020-06-05 | 南京工业大学 | Gas thrust bearing with hybrid action of dynamic pressure and static pressure |
| CN111720440A (en) * | 2019-03-22 | 2020-09-29 | 上海微电子装备（集团）股份有限公司 | Air floatation cushion structure |
| CN112922961A (en) * | 2021-03-23 | 2021-06-08 | 哈尔滨工业大学 | Static pressure air flotation unit based on porous throttling unit and processing method |
| CN113124057A (en) * | 2021-04-27 | 2021-07-16 | 北京工业大学 | Static pressure air-float thrust bearing based on multi-ring belt exhaust |
| CN113124055A (en) * | 2021-04-27 | 2021-07-16 | 北京工业大学 | Air-float thrust bearing based on radial dense-bead adsorption |
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| US2695198A (en) * | 1947-07-16 | 1954-11-23 | Sperry Corp | Air bearing |
| US3672733A (en) * | 1970-03-02 | 1972-06-27 | Skf Ind Trading & Dev | Axial bearing |
| JPS5838648B2 (en) * | 1980-03-24 | 1983-08-24 | 日本精工株式会社 | Porous hydrostatic gas bearing |
| DE3337776A1 (en) * | 1983-10-18 | 1985-04-25 | Kugler Feinmechanik und Optik, 7777 Salem | Air bearing spindle comprising a conical rotor and a freely levelling flat plate |
| JPH0571535A (en) * | 1991-09-11 | 1993-03-23 | Canon Inc | Static pressure fluid bearing |
| JPH06249240A (en) * | 1993-03-02 | 1994-09-06 | Koyo Seiko Co Ltd | Static pressure fluid bearing |
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| CN101813127A (en) * | 2010-04-28 | 2010-08-25 | 上海启元科技发展有限公司 | Salient shoulder type static pressure tangential small-hole gas bearing |
| CN203161836U (en) * | 2013-04-10 | 2013-08-28 | 中国计量学院 | High-bearing capacity high-rigidity aerostatic bearing |
| CN204175793U (en) * | 2014-09-23 | 2015-02-25 | 哈尔滨工程大学 | Endless belt composite throttling pressurized air thrust bearing |
-
2014
- 2014-09-23 CN CN201410489849.XA patent/CN104295606A/en active Pending
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| US2695198A (en) * | 1947-07-16 | 1954-11-23 | Sperry Corp | Air bearing |
| US3672733A (en) * | 1970-03-02 | 1972-06-27 | Skf Ind Trading & Dev | Axial bearing |
| JPS5838648B2 (en) * | 1980-03-24 | 1983-08-24 | 日本精工株式会社 | Porous hydrostatic gas bearing |
| DE3337776A1 (en) * | 1983-10-18 | 1985-04-25 | Kugler Feinmechanik und Optik, 7777 Salem | Air bearing spindle comprising a conical rotor and a freely levelling flat plate |
| JPH0571535A (en) * | 1991-09-11 | 1993-03-23 | Canon Inc | Static pressure fluid bearing |
| JPH06249240A (en) * | 1993-03-02 | 1994-09-06 | Koyo Seiko Co Ltd | Static pressure fluid bearing |
| CN2261529Y (en) * | 1995-08-25 | 1997-09-03 | 西安交通大学 | High toughness static pressure gas thrust bearings |
| DE19826519C2 (en) * | 1998-06-15 | 2000-05-18 | Freundeskreis Des Lehrstuhles | Hydrostatic guidance |
| CN1651784A (en) * | 2005-02-17 | 2005-08-10 | 哈尔滨工业大学 | Double characteristic composite throttling static pressure gas thrust bearing |
| CN101813127A (en) * | 2010-04-28 | 2010-08-25 | 上海启元科技发展有限公司 | Salient shoulder type static pressure tangential small-hole gas bearing |
| CN203161836U (en) * | 2013-04-10 | 2013-08-28 | 中国计量学院 | High-bearing capacity high-rigidity aerostatic bearing |
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| 北京航空精密机械研究所: "《航空精密超精密制造技术》", 31 December 2013 * |
Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105275992B (en) * | 2015-11-18 | 2017-09-01 | 中国计量学院 | A kind of composite throttling formula hydrostatic gas-lubricated bearing being used in vacuum environment and its application method |
| CN105275992A (en) * | 2015-11-18 | 2016-01-27 | 中国计量学院 | Composite throttling type static-pressure gas bearing for vacuum environment and use method of composite throttling type static-pressure gas bearing |
| CN108061096A (en) * | 2017-12-22 | 2018-05-22 | 天津大学 | A kind of porous gas static pressure revolving platform |
| CN108061096B (en) * | 2017-12-22 | 2023-03-14 | 天津大学 | Porous gas static pressure rotary platform |
| CN108825656A (en) * | 2018-08-10 | 2018-11-16 | 天津大学 | A kind of vacuum adsorption porous gas static pressure thrust bearing |
| CN111720440A (en) * | 2019-03-22 | 2020-09-29 | 上海微电子装备（集团）股份有限公司 | Air floatation cushion structure |
| CN110081082A (en) * | 2019-06-04 | 2019-08-02 | 中国工程物理研究院机械制造工艺研究所 | A kind of static pressure air-bearing transverse bearing |
| CN110617272B (en) * | 2019-09-27 | 2021-08-13 | 广东工业大学 | Air bearing |
| CN110617272A (en) * | 2019-09-27 | 2019-12-27 | 广东工业大学 | Air bearing |
| CN111237341A (en) * | 2020-03-09 | 2020-06-05 | 南京工业大学 | Gas thrust bearing with hybrid action of dynamic pressure and static pressure |
| CN112922961B (en) * | 2021-03-23 | 2022-06-24 | 哈尔滨工业大学 | Static pressure air flotation unit based on porous throttling unit and processing method |
| CN112922961A (en) * | 2021-03-23 | 2021-06-08 | 哈尔滨工业大学 | Static pressure air flotation unit based on porous throttling unit and processing method |
| CN113124055A (en) * | 2021-04-27 | 2021-07-16 | 北京工业大学 | Air-float thrust bearing based on radial dense-bead adsorption |
| CN113124057A (en) * | 2021-04-27 | 2021-07-16 | 北京工业大学 | Static pressure air-float thrust bearing based on multi-ring belt exhaust |
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| PB01 | Publication | ||
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Application publication date: 20150121 |