CN107781350A - Shock absorber air control unit and its control method and shock absorber - Google Patents
Shock absorber air control unit and its control method and shock absorber Download PDFInfo
- Publication number
- CN107781350A CN107781350A CN201610795171.7A CN201610795171A CN107781350A CN 107781350 A CN107781350 A CN 107781350A CN 201610795171 A CN201610795171 A CN 201610795171A CN 107781350 A CN107781350 A CN 107781350A
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- Prior art keywords
- shock absorber
- control signal
- substrate table
- servo valve
- load
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
- F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
- F16F15/023—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using fluid means
- F16F15/027—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using fluid means comprising control arrangements
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B13/00—Details of servomotor systems ; Valves for servomotor systems
- F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
- F15B13/021—Valves for interconnecting the fluid chambers of an actuator
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- Acoustics & Sound (AREA)
- Aviation & Aerospace Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Fluid Mechanics (AREA)
- Vibration Prevention Devices (AREA)
Abstract
The invention provides a kind of shock absorber air control unit and its control method and shock absorber, the shock absorber air control unit includes：Nozzle flapper type servo valve, the active damping force that the load for receiving the first control signal from control module and being supported according to first control signal adjustment to shock absorber applies；Side valve type servo valve, receive the second control signal from the control module and the position of shock absorber is adjusted according to second control signal.The present invention is controlled using nozzle flapper type servo valve and traditional side valve type servo valve to shock absorber simultaneously, disclosure satisfy that requirement of the shock absorber to servo valve rapidity and big flow in TFT litho machines, while cost is relatively low.
Description
Technical field
The present invention relates to photoetching machine technique field, more particularly to a kind of shock absorber air control unit and its control method with
And shock absorber.
Background technology
Substrate table is the key components in TFT (TFT) litho machine, is mainly used in carrying processing
The substrate of liquid crystal panel.In order to reduce the influence of ground vibration, Substrate table is typically mounted on the inner frame of shock absorber support.
In this case, shock absorber is in addition to isolating foundation vibration, it is necessary to which gravity center shift causes during quick compensation Substrate table motion
Damper position fluctuation, shorten stabilization time of positional fluctuation, in order to carry out substrate delivery/reception, it is ensured that the yield of litho machine.
With being continuously increased for liquid crystal panel size, size, quality, the speed of Substrate table are also being continuously increased, such as TFT 6G photoetching
In machine, the moving-mass of Substrate table alreadys exceed 1000kg.Moving-mass is continuously increased so as to the requirement to shock absorber
More and more higher.
The quality for the load (for example, Substrate table or Substrate table and substrate) that shock absorber supports generally reaches in TFT litho machines
To tens of tons, so shock absorber is generally using pneumatic actuator support load, while carry out active control (position feedback control,
Damp feedback control, Substrate table feedforward control etc.).Fig. 1 shows the structural representation of existing pneumatic actuator 100.Such as Fig. 1
Shown, pneumatic actuator 100 is made up of air cavity 2 and servo valve 1, and the servo valve 1 is the air control unit of shock absorber, is used for
The air pressure in the air cavity 2 of shock absorber is controlled, the air cavity 2 is formed by housing 4 by diaphragm 3 and piston plate 5, and the diaphragm 3 is used
In sealed air-space 2, the load that the piston plate 5 supports with shock absorber is connected.The air cavity 2 passes through servo valve 1 and compressed air
It is connected.Due to carrying out active control, particularly damping feedback control can drive servo valve reciprocating action to apply control to load
Power, so the shock absorber of early stage typically carries out pneumatic control using nozzle flapper type servo valve.With Substrate table moving-mass
, it is necessary to which the balancing force of pneumatic actuator can more greatly, faster, this just needs the bigger servo valve of flow for increase.Because nozzle is kept off
The flow of board-like servo valve is smaller, although and traditional side valve type servo valve flow is big, the friction between valve element and valve body compared with
Greatly, worn when for damping control comparatively fast, so pneumatically being controlled using air supporting side valve type servo valve in current shock absorber
, there is one layer of air film in system, essentially eliminate friction between the valve element and valve body of this servo valve, but cost is higher and easy damage
It is bad.
In summary, because the friction inside small, the traditional side valve type servo valve of nozzle flapper type servo valve flow is larger,
Be unsatisfactory for the requirement of shock absorber in TFT litho machines, though and air supporting side valve type servo valve meet require, cost is higher, therefore, need
One kind is provided and disclosure satisfy that shock absorber requirement and lower-cost shock absorber air control unit and control method.
It should be noted that the information for being disclosed in the background of invention technology segment is merely intended to deepen to the general of the present invention
The understanding of background technology, and be not construed as recognizing or imply that the information structure has been those skilled in the art in any form
Known prior art.
The content of the invention
In view of the above the shortcomings that prior art, the present invention provides a kind of shock absorber air control unit and control method
And shock absorber, disclosure satisfy that requirement of the shock absorber to servo valve rapidity and big flow in TFT litho machines, at the same cost compared with
It is low.
In order to achieve the above object, in the one side of the application, there is provided a kind of shock absorber air control unit, it is described to subtract
The device air control unit that shakes includes：
Nozzle flapper type servo valve, receive the first control signal from control module and according to first control signal
Adjust the active damping force that the load supported to shock absorber applies；
Side valve type servo valve, receive the second control signal from the control module and according to second control signal
The position of shock absorber is adjusted, is disturbed when the Substrate table of compensation support load moves caused by gravity center shift.
In certain embodiments, the control module includes load acceleration sensor, damper position sensor, substrate
Platform position sensor, damping feedback controller, position feedback control device and Substrate table feedforward controller, wherein the damping feedback
Controller damps feedback control signal, institute's rheme based on the load acceleration signal of change from the load acceleration sensor
Feedback controller is put based on the difference between the damper position signal from the damper position sensor and position setting value
Value calculates damper position feedback control signal, and the Substrate table feedforward controller is measured based on Substrate table position sensor
Substrate table position signalling calculate Substrate table feed-forward control signals.
In certain embodiments, first control signal includes damping feedback control signal.
In certain embodiments, second control signal includes damper position feedback control signal and Substrate table feedovers
Control signal.
In certain embodiments, first control signal includes damping feedback control signal and damper position feedback control
Signal processed.
In the another aspect of the application, a kind of shock absorber pneumatic control method is also provided, the control method includes：
The acceleration for providing the load that a nozzle flapper type servo valve is supported according to shock absorber adjusts the shock absorber pair
The active damping force that the load applies,
A side valve type servo valve is provided according to the position of the positional information of the shock absorber and the Substrate table of support load to be believed
Breath adjustment damper position.
The present invention also provides a kind of shock absorber pneumatic control method, and the control method includes：
The acceleration for the load that one nozzle flapper type servo valve is supported according to shock absorber and the position letter of shock absorber are provided
Breath adjusts the active damping force that the shock absorber applies to the load,
A side valve type servo valve is provided according to the position of the positional information of the shock absorber and the Substrate table of support load to be believed
Breath adjustment damper position.
At the another aspect of the application, a kind of shock absorber, including the shock absorber gas described in foregoing one side are also provided
Dynamic control device.
In certain embodiments, the output of the nozzle flapper type servo valve and the side valve type servo valve is connected to described
The same air cavity of shock absorber.
In certain embodiments, the shock absorber includes at least two air cavitys, the nozzle flapper type servo valve and described
The output of side valve type servo valve is respectively connecting to air cavity different in the shock absorber.
The beneficial effects of the invention are as follows：The present invention uses nozzle flapper type servo valve and traditional side valve type servo valve simultaneously
Shock absorber is controlled, damping control is carried out using nozzle flapper type servo valve, enters line position using side valve type servo valve
Control and the control of Substrate table position feed-forward are put, disclosure satisfy that shock absorber in TFT litho machines to servo valve rapidity and big flow
It is required that while cost it is relatively low.
Brief description of the drawings
By Figure of description and then it is used for the specific reality for illustrating some principles of the present invention together with Figure of description
Mode is applied, further feature and advantage will be clear or more specifically illustrated possessed by the present invention.
Fig. 1 shows the structural representation of the shock absorber pneumatic actuator 100 of prior art.
Fig. 2 is shown pneumatically to be performed according to the shock absorber including shock absorber air control unit of one embodiment of the invention
The structural representation of device 200.
Fig. 3 shows the schematic diagram of the control method of the shock absorber air control unit applied to Fig. 2.
Fig. 4 shows that the shock absorber including shock absorber air control unit according to another embodiment of the present invention is pneumatically held
The structural representation of row device 300.
Fig. 5 shows the schematic diagram of the control method of the shock absorber air control unit applied to Fig. 4.
It is to be appreciated that Figure of description shows the concrete structure of the present invention with being not necessarily to scale, and in specification
It is used to illustrate that the n-lustrative feature of some principles of the present invention can also take the slightly simplified technique of painting in accompanying drawing.Disclosed herein
The specific design feature of invention includes for example specific size, direction, position and profile will be partly by specifically to be applied and be made
Environment determines.
In several accompanying drawings of Figure of description, identical reference represents the identical or equivalent part of the present invention.
Embodiment
Many details are elaborated in the following description in order to fully understand the present invention.But the present invention can be with
Much it is different from other manner described here to implement, those skilled in the art can be in the situation without prejudice to intension of the present invention
Under do similar popularization, therefore the present invention is not limited by following public specific embodiment.
Below, the specific embodiment of the present invention is described with reference to accompanying drawing.Refer to shown in Fig. 2-5, the present invention provides
A kind of shock absorber air control unit and control method and shock absorber.
Fig. 2 is shown pneumatically to be performed according to the shock absorber including shock absorber air control unit of one embodiment of the invention
The structural representation of device 200.Shown in Fig. 2 is single air cavity structure, as shown in Fig. 2 shock absorber pneumatic actuator 200 includes air cavity
2 and shock absorber air control unit 6, the output of the shock absorber air control unit 6 be connected to air cavity 2.The air cavity 2 is by living
Seben 5 is formed by diaphragm 3 and housing 4, and the diaphragm 3 is used for sealed air-space 2, and the piston plate 5 is negative with shock absorber support
Carry connection.The shock absorber air control unit 6 include nozzle-flapper servo valve (Nozzle Flapper Servo Valve,
Hereinafter referred NF servo valves) 6a and traditional side valve type servo valve (SPool Servo Valve, hereinafter referred SP servo valve)
6b, the NF servo valves 6a are used for damping control, i.e. the active damping force that the Substrate table that adjustment is supported to shock absorber applies；
The SP servo valves 6b is used for position control and the control of Substrate table position feed-forward, i.e. adjusts position and the compensation substrate of shock absorber
Disturbed when platform moves caused by gravity center shift.The air cavity 2 passes through NF servo valves 6a and SP servo valve 6b and compressed air phase
Even, for single air cavity structure shown in Fig. 2, the gas of NF servo valves 6a outputs and the gas of SP servo valves 6b outputs are output to together
In one air cavity 2, the common air pressure adjusted in air cavity 2.
The NF servo valves 6a receives the first control signal from control module (not shown in Fig. 2) and according to described the
The active damping force that the load that the adjustment of one control signal is supported to the shock absorber applies, the SP servo valves 6b are received and come from
Second control signal of the control module and the position that the shock absorber is adjusted according to second control signal.
The control module includes load acceleration sensor, damper position sensor, Substrate table position sensor, resistance
Buddhist nun's feedback controller, damper position feedback controller and Substrate table feedforward controller (as shown in Figure 3), the control module
It is connected to NF servo valves and SP servo valves.In other embodiments, the load acceleration sensor, damper position sensing
Device, Substrate table position sensor are independently of the control module.
The control module calculates and exports the first and second control signals to NF servo valves and SP servo valves.In the implementation
In example, first control signal includes damping feedback control signal, and second control signal is fed back including damper position
Control signal and Substrate table feed-forward control signals.
Specifically, in the control module, damping feedback controller is watched with load acceleration sensor and NF respectively
Take valve to be connected, the load acceleration signal measured is passed to damping feedback controller, institute by the load acceleration sensor
Damping feedback controller is stated to obtain damping feedback control signal based on the load acceleration signal of change and damp described instead
Feedforward control signal passes to NF servo valves, and NF servo valves are propped up shock absorber according to the damping feedback control signal adjustment received
The active damping force that the load of support applies.
Damper position sensor is connected with damper position feedback controller, Substrate table position sensor and Substrate table
Feedforward controller is connected, and the output of the damper position feedback controller and Substrate table feedforward controller is connected to
SP servo valves.The damper position sensor is by the difference transmission between the damper position signal and position set point that measure
Damper position feedback controller is given, the damper position feedback controller is fed back based on the mathematic interpolation damper position
Control signal, and the Substrate table feedforward controller receive the Substrate table position signalling measured by Substrate table position sensor simultaneously
Substrate table feed-forward control signals are calculated based on the Substrate table position signalling.The damper position feedback controller and Substrate table
The damper position feedback control signal calculated and Substrate table feed-forward control signals are passed to SP servo valves by feedforward controller.
SP servo valves adjust the position of shock absorber according to the damper position feedback control signal and Substrate table feed-forward control signals received
Put, wherein the damper position feedback control signal can be used for the position of regulation shock absorber, the Substrate table feedforward control letter
Number can be used for compensation Substrate table motion when gravity center shift caused by disturb.
Fig. 3 shows the schematic diagram of the control method of the shock absorber air control unit applied to Fig. 2.It is provided by the present invention
Shock absorber pneumatic control method include：The acceleration for the load that one nozzle flapper type servo valve is supported according to shock absorber is provided
Adjust the active damping force that the shock absorber applies to the load, there is provided a side valve type servo valve is according to the position of the shock absorber
Confidence ceases and the positional information of Substrate table adjustment damper position.
Specifically, as shown in figure 3, damping feedback controller is accelerated based on the load measured by load acceleration sensor
Signal of change damping feedback control signal is spent, damper position feedback controller is subtracted based on what is measured by damper position sensor
The mathematic interpolation damper position feedback control signal shaken between device position signalling and position set point, and before the Substrate table
Feedback controller calculates Substrate table feed-forward control signals based on the Substrate table position signalling measured by Substrate table position sensor.NF is watched
The active damping force that the load that valve is supported according to the damping feedback control signal adjustment received to shock absorber applies is taken, SP is watched
Take valve according to the damper position feedback control signal and Substrate table feed-forward control signals that are received adjust shock absorber position and
Disturbed when compensating Substrate table motion caused by gravity center shift.
Fig. 4 shows that the shock absorber including shock absorber air control unit according to another embodiment of the present invention is pneumatically held
The structural representation of row device 300.Fig. 4 and Fig. 2 difference is that Fig. 4 shows a kind of more air cavity structures, plate 10 and shock absorber branch
The load connection of support.In this case, the gas of NF servo valves 6a outputs and the gas of SP servo valves 6b outputs export respectively
Into the first air cavity 8 and the second air cavity 9.Thus, the air pressure in the first air cavity 8 is controlled by NF servo valves 6a, and passes through SP
Servo valve 6b controls the air pressure in the second air cavity 9.
The NF servo valves 6a receives the first control signal from control module and according to the first control signal control
The air pressure in the first air cavity 8 is made, so as to adjust the active damping force that the load supported to the shock absorber applies, the SP is watched
Valve 6b is taken to receive the second control signal from the control module and controlled in the second air cavity 9 according to second control signal
Air pressure, so as to adjust the position of the shock absorber and compensation Substrate table motion when gravity center shift caused by disturbance.
In this embodiment, first control signal includes damping feedback control signal and damper position feedback control
Signal, second control signal include damper position feedback control signal and Substrate table feed-forward control signals.That is,
In the control module of the present embodiment, the output of the damper position feedback controller is connected to NF servo valves simultaneously and SP is watched
Take valve.
Fig. 5 shows the schematic diagram of the control method of the shock absorber air control unit applied to Fig. 4.The present invention's is another
A kind of shock absorber pneumatic control method that embodiment provides includes：A nozzle flapper type servo valve is provided to be supported according to shock absorber
The acceleration of load and the positional information of shock absorber adjust the active damping force that the shock absorber applies to the load, there is provided
One side valve type servo valve adjusts damper position according to the positional information and Substrate table positional information of the shock absorber.
Fig. 5 and Fig. 3 difference is, for more air cavity structures, NF servo valves and SP servo valves can control 1 gas respectively
Pressure in chamber.Control method as shown in Figure 5 and the control method of single air cavity shock absorber are essentially identical, differ only in：Subtract
The control signal of device position feedback control of shaking device output, does not pass only to SP servo valves, also passes to NF servo valves, NF servo valves
The load that damping feedback control signal and damper position feedback control signal adjustment according to being received is supported to shock absorber
The active damping force of application, SP servo valves are believed according to the damper position feedback control signal and Substrate table feedforward control received
Number adjustment shock absorber position and compensation Substrate table motion when gravity center shift caused by disturb.That is, damper position feedback control
The output of device is connected to NF servo valves and SP servo valves simultaneously, can so make pressure in the air cavity of NF servo valve controls compared with
Height, so that it is guaranteed that the bearing capacity of shock absorber will not reduce.
Being illustrative for property of above-described embodiment illustrate the present invention principle and its effect, but the present invention be not limited to it is above-mentioned
Embodiment.Those skilled in the art can be under the spirit and scope without prejudice to the present invention, in claims
It is interior, above-described embodiment is modified.Therefore protection scope of the present invention, should be covered such as claims of the present invention.
Claims (10)
- A kind of 1. shock absorber air control unit, it is characterised in that including：Nozzle flapper type servo valve, receive the first control signal from control module and adjusted according to first control signal The active damping force that the load supported to the shock absorber applies；Side valve type servo valve, receive the second control signal from the control module and adjusted according to second control signal The position of the shock absorber, disturbed when the Substrate table of compensation support load moves caused by gravity center shift.
- 2. shock absorber air control unit as claimed in claim 1, it is characterised in that the control module includes load and accelerated Spend sensor, damper position sensor, Substrate table position sensor, damping feedback controller, position feedback control device and base Pallet feedforward controller, wherein the damping feedback controller is based on the load acceleration from the load acceleration sensor Signal of change damps feedback control signal, and the position feedback control device is based on the vibration damping from the damper position sensor Mathematic interpolation damper position feedback control signal between device position signalling and position setting value, and Substrate table feedforward Controller calculates Substrate table feed-forward control signals based on the Substrate table position signalling that Substrate table position sensor measures.
- 3. shock absorber air control unit as claimed in claim 2, it is characterised in that first control signal includes damping Feedback control signal.
- 4. shock absorber air control unit as claimed in claim 2, it is characterised in that second control signal includes vibration damping Device position feedback control signal and Substrate table feed-forward control signals.
- 5. shock absorber air control unit as claimed in claim 2, it is characterised in that first control signal includes damping Feedback control signal and damper position feedback control signal.
- A kind of 6. shock absorber pneumatic control method, it is characterised in that including：The acceleration for providing the load that a nozzle flapper type servo valve is supported according to shock absorber adjusts the shock absorber to described The active damping force applied is loaded,A side valve type servo valve is provided to be adjusted according to the positional information of the positional information of the shock absorber and the Substrate table of support load Whole damper position.
- A kind of 7. shock absorber pneumatic control method, it is characterised in that including：The positional information of the acceleration and shock absorber that provide the load that a nozzle flapper type servo valve is supported according to shock absorber is adjusted The active damping force that the whole shock absorber applies to the load,A side valve type servo valve is provided to be adjusted according to the positional information of the positional information of the shock absorber and the Substrate table of support load Whole damper position.
- 8. a kind of shock absorber, it is characterised in that including the shock absorber pneumatic control as described in any one of Claims 1 to 5 Device.
- 9. shock absorber as claimed in claim 8, it is characterised in that the nozzle flapper type servo valve and the side valve type servo The output of valve is connected to the same air cavity of the shock absorber.
- 10. shock absorber as claimed in claim 8, it is characterised in that the shock absorber includes at least two air cavitys, the nozzle The output of baffle-type servo valve and the side valve type servo valve is respectively connecting to air cavity different in the shock absorber.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610795171.7A CN107781350B (en) | 2016-08-31 | 2016-08-31 | Damper air control unit and its control method and damper |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610795171.7A CN107781350B (en) | 2016-08-31 | 2016-08-31 | Damper air control unit and its control method and damper |
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| Publication Number | Publication Date |
|---|---|
| CN107781350A true CN107781350A (en) | 2018-03-09 |
| CN107781350B CN107781350B (en) | 2019-05-31 |
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| CN201610795171.7A Active CN107781350B (en) | 2016-08-31 | 2016-08-31 | Damper air control unit and its control method and damper |
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| TW200907196A (en) * | 2007-05-31 | 2009-02-16 | Nikon Corp | Vibration control equipment, control method of vibration control equipment, and exposure device |
| CN102486215A (en) * | 2010-12-02 | 2012-06-06 | 上海微电子装备有限公司 | Gravity compensation device |
| CN102537196A (en) * | 2010-12-24 | 2012-07-04 | 上海微电子装备有限公司 | Active vibration damping system as well as vibration damping unit and absolute displacement measuring device thereof |
| CN103967989A (en) * | 2013-01-25 | 2014-08-06 | 上海微电子装备有限公司 | Damping device |
| CN104880911A (en) * | 2014-02-28 | 2015-09-02 | 上海微电子装备有限公司 | Photoetching machine work-piece table and vertical direction position initialization method |
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2016
- 2016-08-31 CN CN201610795171.7A patent/CN107781350B/en active Active
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20050140961A1 (en) * | 2003-12-11 | 2005-06-30 | Canon Kabushiki Kaisha | Anti-vibration system, method of controlling the same, exposure apparatus, and device manufacturing method |
| JP2007107604A (en) * | 2005-10-13 | 2007-04-26 | Rikogaku Shinkokai | Vibration resistant device, and vibration resistant method |
| TW200907196A (en) * | 2007-05-31 | 2009-02-16 | Nikon Corp | Vibration control equipment, control method of vibration control equipment, and exposure device |
| CN102486215A (en) * | 2010-12-02 | 2012-06-06 | 上海微电子装备有限公司 | Gravity compensation device |
| CN102537196A (en) * | 2010-12-24 | 2012-07-04 | 上海微电子装备有限公司 | Active vibration damping system as well as vibration damping unit and absolute displacement measuring device thereof |
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| CN104880911A (en) * | 2014-02-28 | 2015-09-02 | 上海微电子装备有限公司 | Photoetching machine work-piece table and vertical direction position initialization method |
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| CN107781350B (en) | 2019-05-31 |
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