CN102486215A - Gravity compensation device - Google Patents
Gravity compensation device Download PDFInfo
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- CN102486215A CN102486215A CN2010105715178A CN201010571517A CN102486215A CN 102486215 A CN102486215 A CN 102486215A CN 2010105715178 A CN2010105715178 A CN 2010105715178A CN 201010571517 A CN201010571517 A CN 201010571517A CN 102486215 A CN102486215 A CN 102486215A
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Abstract
The invention discloses a gravity compensation device which is used for supporting a micropositioner of a worktable and a reticle stage in a photoetching machine and is communicated with a gas circuit of a gas supplying gas source. The gravity compensation device comprises a first gas chamber, a piston, a supporting plate and a pneumatic valve, wherein the piston is supported by the first gas chamber; the supporting plate is used for supporting the micropositioner, is positioned above the piston and is fixedly connected with the piston; and the valve is communicated with the first gas chamber and is used for adjusting the air pressure of the first air chamber. The gravity compensation device has the advantages that: firstly, the gravity compensation device has a simple structure; secondly, the gravity compensation device has lower rigidity so as to isolate low-frequency vibration; thirdly, the gravity compensation device has certain damping so as to reduce resonance; thirdly, the gravity compensation device has no action of exhausting gas to the environment and can be applied to a vacuum environment; and fourthly, when a load changes, the error of a static position of the reticle stage can be eliminated by adjusting the air pressure of the first gas chamber.
Description
Technical field
The present invention relates to a kind of integrated circuit fabrication process equipment, relate in particular to a kind of gravity-compensated device.
Background technique
In the front end of large-scale semiconductive intergrated circuit was made, photoetching was wherein very important one processing procedure, and it is that the graphics chip on a series of mask plates is transferred to the complicated technology processing procedure on the wafer equivalent layer successively through exposure system.Whole photoetching process approximately consumes 60% of the preceding road of chip manufacturing time, and nearly 40% the cost that occupies that entire chip makes.These a series of complicacies, costliness, photo-etching technological process consuming time concentrate on the corresponding group for photo etching machine of the preceding pipeline production line of chip and accomplish; And said lithography machine the most complicated during also to be the front end of semiconductor integrated circuit make, require the highest equipment; Said lithography machine light harvesting, power technology, the lithographic accuracy of lithography machine and productive rate height directly affects chip integration and manufacture cost.Along with the development of semiconductor integrated circuit technique, the accuracy of mechanical system and the requirement of stability have almost been reached the limit especially.In order to reach such requirement, in the design and production of lithography machine, need to pay attention to the problem of following two aspects:
It at first is the perturbed problem of each side such as external environment condition and earth shock.In the working procedure of lithography machine; In order to reach the working environment of microcosmic precision (micron order or nanometer); Need utilize shock isolation system the disturbance of this respect to be carried out the elimination or the inhibition of maximum possible; At present with the most use is to utilize air spring system to carry out vibration isolation; Because air spring system has lower natural frequency, can wideer frequency range disturbance be isolated subdue, secondly be the perturbed problem that the motion of internal motion parts such as work stage, mask stage causes, this mainly is because the variation of the tilting moment that the skew of center of gravity causes.Generally be to carry out Torque Compensation and positioning control at present through the active vibration damping control system.Along with the raising of lithography machine internal motion part quality and movement velocity, thisly do not become control to face great pressure and difficulty.
In lithography machine; The micropositioner of work stage and mask platform adopts the gravity-compensated device of low rigidity to support; Can avoid adopting motor to support the violent heating that causes, for example also run into similar problem at TFT-LCD (Thin Film Transistor-Liquid Crystal Display) lithography machine.
In the patent No. is the U. S. Patent of US20050036126, disclose a kind of micropositioner that adopts steel spring to support, there is following several shortcoming in micropositioner described in this patent: 1, the mass change of micropositioner, cause firm spring to produce the static position skew; 2, for keeping the positional stability of micropositioner, the rigidity of steel spring is bigger, and the vibration of pedestal is easy to pass to micropositioner; 3, steel spring undamped, excitation resonance easily.
In the patent No. is the U. S. Patent of US6473161, disclose a kind of micropositioner that adopts air supporting to support, had following several shortcoming in this patent: 1, the air floating structure design is very complicated; 2, this structure can not be applied to vacuum environment to environmental emission gas; 3, air floating structure is very responsive to the particle contamination of gas, needs to adopt particulate filter arrangement to eliminate particle contamination, has improved user cost; 4, the processed complex of the internal pipeline of air floating structure and aperture, cost is higher.
Summary of the invention
The technical problem that the present invention will solve is, provides a kind of and has lower rigidity, can reduce resonance phenomenon, can be used in vacuum environment and gravity-compensated device simple in structure.
For addressing the above problem; The present invention provides a kind of gravity-compensated device, is used for supporting the micropositioner of lithography machine work stage and mask platform, and communicates with air feed source of the gas gas circuit; Comprise first air chamber, piston, dunnage and pneumatic valve, wherein said first air chamber supports said piston; Said dunnage is used to support said micropositioner, is positioned at said piston top, and is fixedly connected with said piston; Said valve is connected with said first air chamber, regulates the first air chamber air pressure.
Further, said first air chamber is formed by the first air chamber shell, membrane structure and lining; Said lining is positioned at said first air chamber shell top; The two ends of said membrane structure are between said lining and the said first air chamber shell, between said membrane structure and the said first air chamber shell, to form said first air chamber.
Further, said piston is positioned at said membrane structure top, and said membrane structure supports said piston.
Further, also be provided with second air chamber between said first air chamber and the said pneumatic valve.
Further, said first air chamber is connected with second air chamber through the first air chamber aperture and the second air chamber aperture.
Further, the said first air chamber aperture is positioned on said first air chamber; The said second air chamber aperture is positioned on said second air chamber.
Further, the said first air chamber aperture and the second air chamber aperture are connected through pipeline.
Further, also be provided with driver element between said first air chamber and the said dunnage.
Further, said driver element comprises electric mover, motor stator, mover support, stator support; Said motor stator is connected on the said stator support, and the mover of said motor is connected on the mover support; Said stator support is connected the said first air chamber shell; Said mover support is connected on the dunnage.
Optional, also be provided with driver element between said lining and the said dunnage.
Further, said driver element comprises electric mover, motor stator, mover support, stator support; Said motor stator is connected on the said stator support, and the mover of said motor is connected on the mover support; Said stator support is connected on said first air chamber shell or the said lining; Said mover support is connected on the dunnage.
Further, said pneumatic valve is a proportional flow control valve, and said gravity-compensated device also comprises pressure transducer and controller, and said pressure transducer is used to measure the said first air chamber air pressure inside; Said controller receives the signal of said pressure transducer, and the said proportional flow control valve of feedback control.
In sum, gravity-compensated device described in the present invention adopts piston to be supported on first air chamber through membrane structure, and the first air chamber inside is full of high-pressure air, and said first air chamber is used to reduce structural rigidity; Between said lining and said dunnage, also be provided with driver element, said driver element adopts Lorentz lorentz's motor, is used for the fast driving micropositioner.Therefore, have the following advantages: 1, simple in structure; 2, have lower rigidity, can isolate low frequencies; 3, said gravity-compensated device has certain damping, can reduce resonance; 3, not to environmental emission gas, can be applied to vacuum environment; 4, during load variations, regulate the error that air pressure in first air chamber can be eliminated the static position of micropositioner.
Description of drawings
Fig. 1 is the structural representation of gravity-compensated device in one embodiment of the invention.
Fig. 2 is the structural representation of gravity-compensated device in another embodiment of the present invention.
Fig. 3 is the vibration isolating effect figure of gravity-compensated device in the embodiment of the invention.
Embodiment
For making content of the present invention clear more understandable,, content of the present invention is described further below in conjunction with Figure of description.Certainly the present invention is not limited to this specific embodiment, and the general replacement that those skilled in the art knew also is encompassed in protection scope of the present invention.
Secondly, the present invention utilizes schematic representation to carry out detailed statement, and when instance of the present invention was detailed, for the ease of explanation, schematic representation did not amplify according to general ratio is local, should be with this as to qualification of the present invention.
Core concept of the present invention is: through first air chamber is provided; The said first air chamber inside is full of high-pressure air; Said first air chamber top is a membrane structure; The dunnage of said membrane structure support piston and piston top, and then support load, thus adopt said first air chamber of airbag structure to reach reduction structural rigidity purpose; Combine driver element simultaneously, the fast driving micropositioner.Thereby the purpose of reach low rigidity, finely tuning fast.
[specific embodiment one]
Fig. 1 is the structural representation of gravity-compensated device in one embodiment of the invention; Please refer to Fig. 1 and combine above-mentioned core concept; The present invention provides a kind of gravity-compensated device; Communicate with air feed source of the gas 118 gas circuits, comprise the first air chamber shell 107, lining 106, membrane structure 115, piston 116, dunnage 101 and pneumatic valve 112, wherein said lining 106 is positioned at the said first air chamber shell 107 tops; Between said lining 106 in the two ends of said membrane structure 115 and the said first air chamber shell 107, between said membrane structure 115 and the said first air chamber shell 107, to form first air chamber 114; Said piston 116 is supported on the said membrane structure 115; Said dunnage 101 is fixed in said piston 116 tops; Said pneumatic valve 112 1 ends communicate with said first air chamber, 114 gas circuits, and the other end communicates with said air feed source of the gas 118 gas circuits.Said gas circuit communicates and is meant through tracheae and is communicated with.The below of said membrane structure 115 is sandwiched between said first air chamber shell 107 and the said lining 106, and the said first air chamber shell 107 can pass through the nut body close proximity with said lining 106, is positioned at its membrane structure between the two thereby clamp; Or the below of said membrane structure 115 is fixed on the said lining 106 but said membrane structure is non-through being adhesive between said first air chamber shell 107 and the said lining 106, but is being attached on the said lining 106 under the tension force effect of internal high pressure gas.
Preferable, said membrane structure 115 is made up of base cloth upper and lower surfaces coating rubber material sandwich structure.Described scrim material is polyester material or nylon material; Described rubber is nitrile rubber or fluorine rubber.Adopt scrim material to be used to bear bigger tensile stress, rubber then is used for sealing.The thickness of described membrane structure 115 is 0.1mm～1mm, has better elastic and tenacious and persistent will, and the load that can bear said first air chamber 114 causes the tensile stress of membrane structure, has better seal property simultaneously.Preferable, the thickness of membrane structure can be kept the pressure of 10bar with interior air chamber between 0.2mm～0.4mm.
The membrane structure 115 and the first air chamber shell 107 form first air chamber 114 of sealing, in first air chamber 114 of sealing, be full of high-pressure air, thereby piston 116 is supported.Piston 116 forms pneumatic spring with the membrane structure 115 and first air chamber 114.Effective Area of bearing of supposing piston 116 is A, and the air pressure in first air chamber 114 is P, and then effectively support force is G.
G＝PA
Through dynamic control pneumatic valve 112, can realize the dynamic change of the pressure P of first air chamber 114.When load quality changes, can regulate air pressure P in first air chamber 114 to keep the equilibrium position of dunnage 101 at pneumatic spring; May command pneumatic valve 112 driven plunger 115 also are with the gravity of dynamic compensation dunnage 101.
The rigidity k of pneumatic spring can adopt following formula to calculate:
Suppose that parameter is:
κ=1.41 (heat transfer ratio)
A=0.0003m
2(piston supports area)
P=5.2bar (air pressure)
V=1.57*10
-5m
3(air chamber total volume)
M=20kg (supporting the quality of load)
Can calculate rigidity k=5.5 * 10
3N/m, so the vertical natural frequency under this kind operating mode is:
Calculate and to find out from above-mentioned formula, adopt that gravity-compensated device in the embodiment of the invention one is vertical all to have lower natural frequency and rigidity.
In addition; Membrane structure 115 is not to be fastenedly connected with lining 106, but interacts through the tension force of air, and between the inwall of the outer wall of said piston 116 and said lining 106 certain distance is arranged; Therefore, piston 116 in level to can be with extremely low rigidity unrestricted motion.Therefore, gravity-compensated device described in the present invention has lower rigidity, thereby can isolate the vibration that is delivered to dunnage 101 of first air chamber 114.
Further, the distance between said piston 116 outer walls and said lining 106 inwalls is 0.3mm～5mm.Said gravity-compensated device is in application; Has the vertical stroke that certain distance has directly determined gravity-compensated device between said piston 116 outer walls and said lining 106 inwalls; Help not disturbing other devices that the fine setting of level or other directions is carried out in the load on the dunnage 101, and can assurance level to low rigidity.
Further, the said first air chamber shell 107 is provided with the first air chamber aperture 108, and the said first air chamber aperture 108 communicates with said pneumatic valve 112 gas circuits.Preferable, the said first air chamber aperture 108 is a damping hole.After increasing damping hole, the damping ratio that can make said gravity compensator is between 0.01～0.85, thereby the reduction gravity compensator has the resonance at frequency place in event.
The valve 112 of gravity compensator can be proportional flow control valve or proportional pressure valve, respectively corresponding two kinds of control modes, and details are as follows:
(1) said pneumatic valve 112 is a proportional flow control valve.In first air chamber, install gas pressure sensor 120 additional, the measurement of gas chamber pressure.Add cartridge controller 117, linking to each other with said pressure sensor signal links to each other with proportional flow control valve 112, is used to accept the measurement signal of pressure transducer 117, and feedback control selects proportional flow control valve 112 for use, realizes the air chamber pressure inside is regulated.
(2) pneumatic valve 112 also can be proportional pressure valve, and valve inner integrated pressure transducer and controller are used for the pressure of air chamber 114 is regulated.Need not boost pressure sensor 120 and controller 117.
Further, said gravity-compensated device also comprises driver element 119, and said driver element 119 is the Lorentz motor, between said dunnage 101 and said lining 106.Wherein, Said driver element 119 comprises mover support 102, stator support 105, mover 103 and stator 104; Wherein, Said stator support 105 is fixed on the said lining 106 or on the first air chamber shell 107, wherein indicates said stator support 105 among Fig. 1 and be fixed on the said lining 106, and said stator 104 is fixed on the said stator support 105; Said mover support 102 is fixedly connected said dunnage 101, and said mover 103 is fixed in said mover support 102; Said mover 103 is relative with said stator 104.In the present embodiment, being shaped as that said driver element is overlooked is circular or square.Said Lorentz motor corresponding speed is fast, is used for high-frequency drive dunnage 101.After said mover 103 energisings, the direction that 103 pairs of said stators 104 of said mover produce power is parallel with the direction of gravity.In addition, other common driver elements are like sound figure motor etc., also in thought range of the present invention.
In the present invention, through the pressure of pneumatic control first air chamber 114, then can be with lower frequency drives dunnage 101, it is minimum to generate heat simultaneously.The speed of response of the driver element Lorentz lorentz motor in the present embodiment is fast, but heating is big, is used for high-frequency drive dunnage 101.The mode that adopts pneumatic drive dunnage 101 and Lorentz motor simultaneously is quick adjustment both, reduce exerting oneself of Lorentz lorentz's motor simultaneously, thereby the heating of Lorentz lorentz's motor coil can significantly reduce also.
In sum, adopt gravity-compensated device in the embodiment of the invention one in level to all having lower rigidity with vertical, can isolate the vibration of pedestal, reduced the heating of Lorentz lorentz's motor simultaneously.
[specific embodiment two]
Fig. 2 is the structural representation of gravity-compensated device in another embodiment of the present invention, please refer to Fig. 2.On the basis of specific embodiment one, increase is provided with second air chamber 113 between said first air chamber 114 and said pneumatic valve 112.Said second air chamber 113 is sealed within the second air chamber shell 111; The said second air chamber shell 113 is provided with the second air chamber aperture 110; The said second air chamber aperture 110 communicates with said first air chamber, 114 gas circuits, and wherein the second air chamber aperture 110 is communicated with through tracheae with the first air chamber aperture 108.Preferable, the said second air chamber aperture is a damping hole.The design damping hole, the damping ratio that can make gravity-compensated device is between 0.01 to 0.85, and is wherein preferred, and damping ratio is 0.4～0.7.In the time of in above-mentioned scope, gravity compensator can control to lower level so there is the frequency place that the vibration of ground is amplified.
Further, the volume of said first air chamber 114 is 1～10 times of said second air chamber, 113 volumes, and preferred, the volume multiple is 4 times.In the given volume ratio scope, can isolate most of dither that transmits from the outside, simultaneously also less in the resonance at natural frequency place.
Further, between said first air chamber 114 and said second air chamber 113, also be provided with orifice valve.Said orifice valve does not indicate in the drawings.Adopt orifice valve can easily adjust the aperture of damping hole, realize dynamic adjustments damping.
Rigidity formula according to pneumatic spring
In the present embodiment, the frequency f of gravity-compensated device between 0.1 to 25Hz, increased second air chamber 113 after, can make the structure frequency of gravity-compensated device fall lowlyer.Present embodiment increases to 1.1*10 with the volume of embodiment's one air spring
-4m
3, then the natural frequency of pneumatic spring can be reduced to 0.5Hz.
In embodiments of the invention two, between second air chamber 113 and first air chamber, design damping hole, the first air chamber aperture 108 is designed to damping hole or the second air chamber aperture 110 is designed to damping hole; According to reference (Jeung-Hoon Lee; Kwang-Joon Kim; A method of transmissibility design fordual-chamber pneumatic vibration isolator.Journal of Sound and Vibration.2009.doi:10.1016/j.jsv.2008.12.028), the size of damping and the opening of damping hole have corresponding relation.In this article, the size of design damping hole, the damping that realizes gravity-compensated device is between 0.01 to 0.85.Wherein preferred, damping ratio is 0.4～0.7.In the time of in this scope, gravity compensator can control to lower level so there is the frequency place that the vibration of ground is amplified.
Fig. 3 is the vibration isolating effect figure of gravity-compensated device in the embodiment of the invention.As shown in Figure 3, be delivered to the vibration transmissibility of dunnage 101 from the first air chamber shell 107.Curve 10 is not for when having second air chamber 113, and the resonant frequency of gravity-compensated device is higher, and resonance peak is higher.Curve 20 is for when having second air chamber, 113, the second air chamber apertures 110 not design damping hole, and the resonant frequency of gravity-compensated device is lower, but resonance peak is higher.Curve 30 is for there to be second air chamber 113, and when first air chamber 114 or second air chamber, 113 design damping holes, the resonant frequency of gravity-compensated device is lower, and resonance peak is less relatively.
So see that from Fig. 3 illustrated embodiments is on the basis of specific embodiment one among the present invention, increase is provided with second air chamber 113 between said first air chamber 114 and said pneumatic valve 112, and at first air chamber 114 or second air chamber, 113 design damping holes.Adopt gravity-compensated device of the present invention, can effectively isolate the vibration of transmitting from the gravity-compensated device supporting base.
In sum, gravity-compensated device described in the present invention adopts piston 116 to be supported on first air chamber 114 through membrane structure 115, and first air chamber, 114 inside are full of high-pressure air, and said first air chamber 114 is used to reduce structural rigidity; Between said lining 106 and said dunnage 101, also be provided with driver element 119, said driver element 119 adopts Lorentz lorentz's motor, is used for the fast driving micropositioner.Therefore, have the following advantages: 1, simple in structure; 2, have lower rigidity, can isolate low frequencies; 3, said gravity-compensated device has certain damping, can reduce resonance; 3, not to environmental emission gas, can be applied to vacuum environment; 4, during load variations, regulate the error that air pressure in first air chamber 114 can be eliminated the static position of micropositioner.
Though the present invention discloses as above with preferred embodiment; Right its is not in order to limit the present invention; Has common knowledge the knowledgeable in the technical field under any; Do not breaking away from the spirit and scope of the present invention, when can doing a little change and retouching, so protection scope of the present invention is as the criterion when looking claims person of defining.
Claims (12)
1. gravity-compensated device is used for supporting the micropositioner of lithography machine work stage and mask platform, and communicates with air feed source of the gas gas circuit, it is characterized in that comprise first air chamber, piston, dunnage and pneumatic valve, wherein said first air chamber supports said piston; Said dunnage is used to support said micropositioner, is positioned at said piston top, and is fixedly connected with said piston; Said pneumatic valve is connected with said first air chamber, regulates the first air chamber air pressure.
2. gravity-compensated device as claimed in claim 1 is characterized in that, said first air chamber is formed by the first air chamber shell, membrane structure and lining; Said lining is positioned at said first air chamber shell top; The two ends of said membrane structure are between said lining and the said first air chamber shell, between said membrane structure and the said first air chamber shell, to form said first air chamber.
3. gravity-compensated device as claimed in claim 2 is characterized in that, said piston is positioned at said membrane structure top, and said membrane structure supports said piston.
4. gravity-compensated device as claimed in claim 1 is characterized in that, also is provided with second air chamber between said first air chamber and the said pneumatic valve.
5. gravity-compensated device as claimed in claim 4 is characterized in that, said first air chamber is connected with second air chamber through the first air chamber aperture and the second air chamber aperture.
6. gravity-compensated device as claimed in claim 5 is characterized in that, the said first air chamber aperture is positioned on said first air chamber; The said second air chamber aperture is positioned on said second air chamber.
7. like claim 5 or 6 described gravity-compensated devices, it is characterized in that the said first air chamber aperture and the second air chamber aperture are connected through pipeline.
8. gravity-compensated device as claimed in claim 1 is characterized in that, also is provided with driver element between said first air chamber and the said dunnage.
9. gravity-compensated device as claimed in claim 8 is characterized in that, said driver element comprises electric mover, motor stator, mover support, stator support; Said motor stator is connected on the said stator support, and the mover of said motor is connected on the mover support; Said stator support is connected the said first air chamber shell; Said mover support is connected on the dunnage.
10. gravity-compensated device as claimed in claim 2 is characterized in that, also is provided with driver element between said lining and the said dunnage.
11. gravity-compensated device as claimed in claim 10 is characterized in that, said driver element comprises electric mover, motor stator, mover support, stator support; Said motor stator is connected on the said stator support, and the mover of said motor is connected on the mover support; Said stator support is connected on said first air chamber shell or the said lining; Said mover support is connected on the dunnage.
12. gravity-compensated device as claimed in claim 1 is characterized in that, said pneumatic valve is a proportional flow control valve, and said gravity-compensated device also comprises pressure transducer and controller, and said pressure transducer is used to measure the said first air chamber air pressure inside; Said controller receives the signal of said pressure transducer, and the said proportional flow control valve of feedback control.
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|---|---|---|---|
| CN201010571517.8A CN102486215B (en) | 2010-12-02 | 2010-12-02 | Gravity compensation device |
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| CN102486215B CN102486215B (en) | 2014-02-19 |
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