CN104698766B - Gravity compensation device - Google Patents
Gravity compensation device Download PDFInfo
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- CN104698766B CN104698766B CN201310670339.8A CN201310670339A CN104698766B CN 104698766 B CN104698766 B CN 104698766B CN 201310670339 A CN201310670339 A CN 201310670339A CN 104698766 B CN104698766 B CN 104698766B
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- piston
- gravity
- compensated device
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- flexible link
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Abstract
The invention discloses a gravity compensation device for supporting a micropositioner of a workpiece stage and a mask stage in a lithography machine. The gravity compensation device comprises a base, a piston, a sheath, a swinging mechanism, an air bag structure and a load board, wherein an air chamber is arranged in the base for supporting the piston positioned at the top part of the air chamber; the sheath is arranged on the piston in a sleeving manner and is in rigid connection with the base; the air bag structure is connected between the piston and the sheath and is connected with the swinging mechanism in series; and the swinging mechanism is connected between the load board and the piston. According to the gravity compensation device, the swinging mechanism is additionally arranged between the load board and the piston, the gravity loaded on the load board is transmitted to the piston by the swinging mechanism; the rigidity of two serially connected springs is less than that of any one of spring according to the spring series-connection principle, the swinging mechanism and the air bag structure are interconnected, and low rigidity of the gravity compensation device in vertical and horizontal directions can be achieved.
Description
Technical field
The present invention relates to IC manufacturing field, particularly to a kind of gravity-compensated device.
Background technology
In litho machine, the micropositioner of work stage and mask platform to be supported using low rigid gravity-compensated device, permissible
Avoid the violent heating causing using motor support, isolation simultaneously is delivered to the vibration of micropositioner, improves the positioning accurate of micropositioner
Degree.
At present, the micropositioner that a kind of bellows gravity-compensated device of employing supports, comprising: air chamber, piston, gripper shoe and
Pneumatic operated valve, wherein, described air chamber is used for supporting described piston, and described gripper shoe is used for supporting micropositioner, on described piston
Side, and be fixedly connected with described piston;Described pneumatic operated valve is connected with the first air chamber, adjusts the first air chamber air pressure.This device has
There is low cost, vertical highly low, but its horizontal direction rigidity be larger there is following technical problem:
1., when the frequency of fine motion plate is less than 150hz, ry and rz cannot realize closed loop, subsequently remodifies fine motion plate, must
One stage structure frequency must be brought up to 320hz, just enable the normal closed loop of ry and rz, increase design cost;
2. rigidity counter-force is excessive, leads to rz motor thrust not enough, the stroke of rz does not reach index, needs gravity treatment motor;
3. the motor of high thrust increases the quality of micropositioner, reduces the structural modal frequency of micropositioner.
Content of the invention
The present invention provides a kind of gravity-compensated device, to overcome gravity-compensated device level in prior art larger to rigidity
Problem.
For solving above-mentioned technical problem, the present invention provides a kind of gravity-compensated device, for supporting work stage in litho machine
Micropositioner with mask platform, comprising: base, piston, sheath, swinging mechanism, airbag structure and load board;Wherein, in described base
It is provided with air chamber, for supporting the piston being located at described plenum roof;Sheath is set on piston and is rigidly connected with base;Described
Airbag structure is connected between piston and sheath, connects with described swinging mechanism;Described swinging mechanism be connected to load board and piston it
Between.
Preferably, described swinging mechanism includes rigid rod, flexible link and connecting plate;Wherein, described load board passes through rigidity
Bar is connected with described connecting plate, and described connecting plate is connected with piston by flexible link.
Preferably, described connecting plate is circular.
Preferably, described rigid rod is provided with 3~4, it is symmetricly set on same circumference.
Preferably, described flexible link is provided with 3~4, it is symmetricly set on same circumference.
Preferably, described flexible link and rigid rod are disposed on same circumference.
Preferably, the diameter range of described flexible link is 0.5mm~10mm.
Preferably, described flexible link adopts stainless steel or spring steel.
Preferably, the supporting surface of described airbag structure is perpendicular or parallel with the direction of motion of piston.
Preferably, being provided with sealing ring between described base and sheath.
The present invention also provides a kind of gravity-compensated device, for supporting the micropositioner of work stage and mask platform in litho machine,
Including: base, piston, sheath, swinging mechanism, airbag structure and load board;Wherein, it is provided with air chamber, for supporting in described base
Piston positioned at described plenum roof;Sheath is set on piston and is rigidly connected with base;Described airbag structure is connected to work
Between plug and sheath;Described swinging mechanism includes rigid rod, flexible link and connecting plate, wherein, described load board pass through rigid rod with
Described connecting plate connects, and described connecting plate is connected with piston by flexible link.
Compared with prior art, the invention has the advantages that the present invention is additionally arranged pendulum machine between load board and piston
Structure, for being delivered to piston by the gravity of load by swinging mechanism;According to spring tandem principle, the rigidity of two serial springs
Less than the rigidity of wherein any one spring, therefore, swinging mechanism is interconnected with airbag structure, the weight of the present invention can be realized simultaneously
The vertical and horizontal direction Low rigidity of force compensating device.
Brief description
Fig. 1 is the schematic perspective view of gravity-compensated device in the embodiment of the invention;
Fig. 2 is the profile of gravity-compensated device in the embodiment of the invention;
Fig. 3~4 are respectively the relation schematic diagram of airbag structure and piston and sheath in the embodiment of the invention.
Specific embodiment
Understandable for enabling the above objects, features and advantages of the present invention to become apparent from, below in conjunction with the accompanying drawings to the present invention
Specific embodiment be described in detail.It should be noted that, accompanying drawing of the present invention is all in the form of simplifying and all using non-essence
Accurate ratio, only in order to purpose that is convenient, lucidly aiding in illustrating the embodiment of the present invention.
As shown in Fig. 1~2, the gravity-compensated device that the present invention provides, for supporting work stage and mask platform in litho machine
Micropositioner, comprising: base 100, piston 200, sheath 300, swinging mechanism 500, airbag structure 600 and load board 400;Wherein,
It is provided with air chamber 110, for supporting the piston 200 being located at described air chamber 110 top in described base 100;Sheath 300 is set in work
It is rigidly connected on plug 200 and with base 100;Described airbag structure 600 is connected between piston 200 and sheath 300, with described pendulum
Mechanism 500 connects;Described swinging mechanism 500 is connected between load board 400 and piston 200.By in load board 400 and piston
It is additionally arranged swinging mechanism 500, for the gravity of load is delivered to piston 200 by swinging mechanism 500 between 200;According to spring
Tandem principle, the rigidity of two serial springs is less than the rigidity of wherein any one spring, therefore, by swinging mechanism 500 and air bag
Structure 600 interconnects, and can realize the vertical and horizontal direction Low rigidity of the gravity-compensated device of the present invention simultaneously.
Continue referring to Fig. 1~2, described swinging mechanism 500 includes rigid rod 510, flexible link 530 and connecting plate 520;Its
In, described load board 400 is connected with described connecting plate 520 by rigid rod 510, described connecting plate 520 pass through flexible link 530 with
Piston 200 connects.Specifically, load is using being threaded in load board 400.The gravity of load is transmitted by rigid rod 510
To on connecting plate 520, the gravity of connecting plate 520 is hanging on piston 200 by flexible link 530.Load weight on piston 200
Power is supported on the pressure-air of airbag structure 600 sealing.
Please emphasis with reference to Fig. 3~4, airbag structure 600 is arranged between sheath 300 and piston 200, realizes air chamber 110
Sealing.Described airbag structure 600 has two kinds of set-up modes with piston 200.A kind of as shown in figure 3, described airbag structure 600
Support face is parallel with the direction of motion of piston 200, and now gravity-compensated device has larger radius.Another kind is as shown in figure 4, incite somebody to action
The supporting surface of airbag structure 600 is vertical with the supporting surface of piston 200, and the level that can reduce gravity-compensated device is to size.
It is full of pressure-air inside air chamber 110, airbag structure 600 expands and forms corrugated, realizes the vertical of piston 200
Motion guide.In inflated condition, to having higher rigidity, vertical had airbag structure 600 level by increasing chamber volume
There is relatively low rigidity, vertical structural modal is within 5hz.The level of swinging mechanism 500 is relatively low to rigidity, and vertical stiffness is big, its
Horizontal direction structural modal is less than 5hz.According to spring tandem principle, the rigidity of two serial springs is less than wherein any one bullet
The rigidity of spring.So, using the scheme of airbag structure 600 and swinging mechanism 500 series connection, the vertical of gravity-compensated device and water are realized
Put down to Low rigidity.
Preferably, being provided with sealing ring 700 between described base 100 and sheath 300, realize fully sealing of air chamber 110.
Further, described base 100 is additionally provided with air inlet 120, external air source is inflated to air chamber 110 by this air inlet 120.
By increasing the volume of air chamber 110, the vertical Low rigidity of achievable gravity-compensated device.The meter of its vertical stiffness
Calculating formula is:
Assume that each parameter is respectively as follows:
κ=1.41(heat transfer ratio)
a=0.00159m2(Area of bearing of piston 200)
P=2.62bar(air pressure)
The cumulative volume of v=2.23*10-4m3(air chamber 110)
M=42.5kg(supports the quality of load)
Thus, vertical stiffness k can be calculatedv=5.8×103N/m, therefore the vertical intrinsic frequency under this kind of operating mode is:
In the present embodiment, the level of gravity-compensated device is limited by swinging mechanism 500 to rigidity.In piston 200 and connecting plate
Between 520, multiple flexible link 530 of design, circumferentially symmetrically, that is, are distributed on same circumference, the present embodiment selects 3
Root or 4 flexible link 530, are used for realizing horizontal direction Low rigidity.The level of single flexible bar 530 to Rigidity Calculation formula is:
Assume that parameter is:
e=2.1×1011(elastic modelling quantity)
(i is the rotary inertia of flexible link 530, and d is the diameter of flexible link 530)
The bar length of l=85mm(flexible link 530)
M=42.5kg(load quality)
Take d=2mm, be then calculated kh=14.5×103N/m, therefore horizontal direction intrinsic frequency is under this kind of operating mode:
Bar by increase flexible link 530 is long, and reduces the diameter of flexible link 530, achievable horizontal direction Low rigidity.Enter
One step, the diameter range of described flexible link 530 is 0.5mm~10mm.
Therefore, by way of above-mentioned, it is possible to achieve the vertical and horizontal direction structural modal frequency of gravity-compensated device
Less than 3hz.
Preferably, described connecting plate 520 is circular, it is enclosed within base 100 around;Described rigid rod 510 is provided with 3~
4, it is symmetricly set on same circumference;Described flexible link 530 is provided with 3~4, is symmetricly set on same circumference.Further
, rigid rod 510 and flexible link 530 can also be arranged on same circumference, thus reducing the volume of whole device.
Preferably, the material of described flexible link 530 is steel, preferably stainless steel or spring steel.
In sum, the gravity-compensated device that the present invention provides, for supporting the micro- of work stage and mask platform in litho machine
Dynamic platform, comprising: base 100, piston 200, sheath 300, swinging mechanism 500, airbag structure 600 and load board 400;Wherein, described
It is provided with air chamber 110, for supporting the piston 200 being located at described air chamber 110 top in base 100;Sheath 300 is set in piston
It is rigidly connected on 200 and with base 100;Described airbag structure 600 is connected between piston 200 and sheath 300, with described pendulum machine
Structure 500 is connected;Described swinging mechanism 500 is connected between load board 400 and piston 200.By in load board 400 and piston 200
Between be additionally arranged swinging mechanism 500, for the gravity of load is delivered to piston 200 by swinging mechanism 500;Connected according to spring
Principle, the rigidity of two serial springs is less than the rigidity of wherein any one spring, therefore, by swinging mechanism 500 and airbag structure
600 interconnections, can realize the vertical and horizontal direction Low rigidity of the gravity-compensated device of the present invention simultaneously.
Obviously, those skilled in the art can carry out the various changes and modification spirit without deviating from the present invention to invention
And scope.So, if these modifications of the present invention and modification belong to the claims in the present invention and its equivalent technologies scope it
Interior, then the present invention is also intended to including these changes and modification.
Claims (9)
1. a kind of gravity-compensated device, for supporting the micropositioner of work stage and mask platform in litho machine it is characterised in that wrapping
Include: base, piston, sheath, swing mechanism, airbag structure and load board;Wherein, it is provided with air chamber, for supporting in described base
Piston positioned at described plenum roof;Sheath is set on piston and is rigidly connected with base;Described airbag structure is connected to work
Between plug and sheath, connect with described swing mechanism;Described swing mechanism includes rigid rod, flexible link and connecting plate, described negative
Support plate is connected with described connecting plate by rigid rod, and described connecting plate is connected with piston by flexible link, and described swing mechanism is even
It is connected between load board and piston.
2. gravity-compensated device as claimed in claim 1 is it is characterised in that described connecting plate is circular.
3. gravity-compensated device as claimed in claim 1, it is characterised in that described rigid rod is provided with 3~4, is symmetrical arranged
On same circumference.
4. gravity-compensated device as claimed in claim 1, it is characterised in that described flexible link is provided with 3~4, is symmetrical arranged
On same circumference.
5. gravity-compensated device as claimed in claim 1 is it is characterised in that described flexible link and rigid rod are disposed on together
On one circumference.
6. gravity-compensated device as claimed in claim 1 it is characterised in that described flexible link diameter range be 0.5mm~
10mm.
7. gravity-compensated device as claimed in claim 1 is it is characterised in that described flexible link adopts stainless steel or spring steel.
8. gravity-compensated device as claimed in claim 1 is it is characterised in that the fortune of the supporting surface of described airbag structure and piston
Dynamic direction is perpendicular or parallel.
9. gravity-compensated device as claimed in claim 1 is it is characterised in that be provided with sealing between described base and sheath
Circle.
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CN201310670339.8A CN104698766B (en) | 2013-12-10 | 2013-12-10 | Gravity compensation device |
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CN201310670339.8A CN104698766B (en) | 2013-12-10 | 2013-12-10 | Gravity compensation device |
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CN104698766A CN104698766A (en) | 2015-06-10 |
CN104698766B true CN104698766B (en) | 2017-01-18 |
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CN108646519B (en) * | 2018-05-09 | 2019-05-07 | 哈尔滨工业大学 | A kind of high permanent gravity-compensated device of acceleration reciprocating motion |
EP3670958A1 (en) * | 2018-12-21 | 2020-06-24 | ASML Netherlands B.V. | Positioning device, stiffness reduction device and electron beam apparatus |
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EP1803963A1 (en) * | 2005-12-30 | 2007-07-04 | Integrated Dynamics Engineering GmbH | Hybrid stiffness modul for vibration isolation |
CN201436604U (en) * | 2009-05-27 | 2010-04-07 | 上海微电子装备有限公司 | Gravity compensator |
CN102141733A (en) * | 2010-01-28 | 2011-08-03 | 上海微电子装备有限公司 | Vibration absorption device and photolithographic device using same |
CN102486215A (en) * | 2010-12-02 | 2012-06-06 | 上海微电子装备有限公司 | Gravity compensation device |
CN103034065A (en) * | 2011-09-29 | 2013-04-10 | 上海微电子装备有限公司 | Magnetic suspension gravity compensator and lithographic device |
Family Cites Families (3)
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JP2004176851A (en) * | 2002-11-28 | 2004-06-24 | Fujikura Rubber Ltd | Vibration isolation table |
KR20070011347A (en) * | 2004-03-01 | 2007-01-24 | 가부시키가이샤 니콘 | Pneumatic spring apparatus, vibration-proof apparatus, stage apparatus and exposure apparatus |
US8282281B2 (en) * | 2007-02-14 | 2012-10-09 | Integrated Dynamics Engineering Gmbh | Air bearing with consideration of high-frequency resonances |
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Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1803963A1 (en) * | 2005-12-30 | 2007-07-04 | Integrated Dynamics Engineering GmbH | Hybrid stiffness modul for vibration isolation |
CN201436604U (en) * | 2009-05-27 | 2010-04-07 | 上海微电子装备有限公司 | Gravity compensator |
CN102141733A (en) * | 2010-01-28 | 2011-08-03 | 上海微电子装备有限公司 | Vibration absorption device and photolithographic device using same |
CN102486215A (en) * | 2010-12-02 | 2012-06-06 | 上海微电子装备有限公司 | Gravity compensation device |
CN103034065A (en) * | 2011-09-29 | 2013-04-10 | 上海微电子装备有限公司 | Magnetic suspension gravity compensator and lithographic device |
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Address after: 201203 Pudong New Area East Road, No. 1525, Shanghai Patentee after: Shanghai microelectronics equipment (Group) Limited by Share Ltd Address before: 201203 Pudong New Area East Road, No. 1525, Shanghai Patentee before: Shanghai Micro Electronics Equipment Co., Ltd. |
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