CN108646519B - A kind of high permanent gravity-compensated device of acceleration reciprocating motion - Google Patents
A kind of high permanent gravity-compensated device of acceleration reciprocating motion Download PDFInfo
- Publication number
- CN108646519B CN108646519B CN201810436997.3A CN201810436997A CN108646519B CN 108646519 B CN108646519 B CN 108646519B CN 201810436997 A CN201810436997 A CN 201810436997A CN 108646519 B CN108646519 B CN 108646519B
- Authority
- CN
- China
- Prior art keywords
- cylinder
- moving linearly
- guide rail
- parts moving
- gravity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
Abstract
The present invention discloses a kind of high permanent gravity-compensated device of acceleration reciprocating motion；The parts moving linearly of the device can be moved vertically and is fitted on guide rail, and the piston rod of low rubbing cylinder is connect by decoupling unit with parts moving linearly；The device can accelerate to move back and forth for parts moving linearly height provides constant gravity compensation, it is smooth, compact-sized, small in size with moving, it is widely used, it is applicable in the strong feature of ability, is especially suitable for the high use for accelerating to move back and forth in small space in exposure system of photo-etching machine.
Description
Technical field
The invention belongs to precision instrument field of mechanical technique, in particular to a kind of high constant weight power for accelerating reciprocating mechanism
Compensation device.
Background technique
In exposure system of photo-etching machine, the light-knife piece that blocks of vertical direction needs to meet high acceleration and high-precision movement need
It asks, therefore the control precision of blade becomes the major technique key for restricting photo-etching machine exposal precision and efficiency.In order to improve blade
Movement and positioning accuracy, gravity-compensated device is added in system design and balances the weight for blocking light-knife piece and its corresponding component
Power.In exposure system of photo-etching machine, the high acceleration reciprocating motion of vertical direction blocked light-knife piece and need to carry out high frequency, therefore such as
It is the main skill for blocking light-knife piece for controlling vertical direction that, which compensates high block the light-knife piece and its gravity of component for accelerating to move back and forth,
Art problem.
2001, the Twinscan A T1100 type litho machine that Dutch ASML company is researched and developed can achieve the set of 20nm
Carve precision.Gravity-compensated device in its exposure system is to realize gravity compensation using the pulling force of spring, and reached 20m/s2
Acceleration movement；But it is unstable in the power of control upper spring compensation using spring as gravity-compensated device；And spring accounts for
It is big with space, it is not able to satisfy the requirement of exposure system structure small design.
Patent CN101477316A " gravity compensator " proposes a kind of gravity compensator, mainly includes thrust bearing, floating
Plate, guide post and compression fluid container；The device forms high-pressure fluid film using high-pressure fluid access, provides friction free decoupling
Technology solves vertical and horizontal decoupling problem；But the invention is to carry out gravity compensation for Chuck micropositioner, stroke is too
It is small, and can not achieve reciprocating.
Patent CN2201843961U " a kind of reciprocator with gravity compensation " proposes a kind of motor-driven
Up-and-down movement device includes mainly motor, by the motor-driven lead screw and pallet, it is characterized in that: further including outer circle
Cylinder, inner cylinder, spring, the spring are placed between the outer cylinder and the inner cylinder, and the inner cylinder withstands on the spring
Upper end, and connect by circular flange with the pallet；The device overcomes gravity to influence by the elastic force of spring, so as to so that
The vertically reciprocating telecontrol equipment rapid increase of lower-powered motor driven；But the spring in the device can only compensate specific matter
The gravity of amount, and the power of spring-compensating is unstable.
Patent CN103298729A " gravity-compensated device and the lifting device using the gravity-compensated device " proposes one
Kind has the gravity-compensated device of elevating function, mainly includes pedestal, connecting rod, air actuator, lifting unit, linking part；The dress
The both ends for setting middle connecting rod are axially moveable two axis for being installed on the datum mark by pedestal freely and intersecting, and are promoted using air
The air pressure of the inner space of dynamic device presses one end of connecting rod towards datum mark, to pass through internal volume one relative to connecting rod
The volume variation of one end position at end extrapolated and the volume that acquires be zero in the state of connecting rod an end position and benchmark
Interval between point becomes the mode of the distance between connecting rod two end or more, so that one end of connecting rod is moved, is connected by linking part
Knot can be along the other end for the lifting unit and connecting rod that vertical direction moves relative to pedestal；The device can compensate reciprocating section
The gravity of part, but the apparatus structure occupied space is too big, is not able to satisfy and adapts to the Miniaturization Design of exposure system of photo-etching machine
Demand.
Patent CN104698766A " gravity-compensated device " proposes a kind of gravity-compensated device, is used to support in litho machine
The micropositioner of work stage and mask platform, including pedestal, piston, sheath, swinging mechanism, airbag structure and load board；Wherein, the bottom
It is equipped with gas chamber in seat, is used to support the piston sheath positioned at the plenum roof and is set on piston and is rigidly connected institute with pedestal
Airbag structure is stated to be connected between piston and sheath, the swinging mechanism of connecting with the swinging mechanism be connected to load board and piston it
Between；The device occupied space is too big, and can not compensate the gravity of reciprocating member.
The problem of foregoing invention is that the high gravity for accelerating reciprocating member cannot be compensated in small range space；However
In exposure system of photo-etching machine, the light-knife piece needs that block of vertical direction are moved reciprocatingly with very high acceleration, and this requires compensation
Height accelerates the gravity for blocking light-knife piece and its component moved back and forth, and then improves the control precision for blocking light-knife piece of vertical direction.
Summary of the invention
The purpose of the present invention is to above-mentioned prior art there are the problem of, a kind of high acceleration of researching and designing moves back and forth
The permanent gravity-compensated device of mechanism, by pressure regulation valve regulation air pressure, the power needed with low rubbing cylinder output system, and utilize storage
Gas cylinder makes low rubbing cylinder export constant power as temporary location, thus reach compensation it is high accelerate reciprocating member gravity,
It occupies little space, adaptable purpose.
The purpose of the present invention is realized by the following technical solution:
A kind of high permanent gravity-compensated device of acceleration reciprocating motion, including parts moving linearly, it is characterised in that: on backboard
Installation pedestal, 2 snap rings, 2 adjusting seats and 2 guiderail bases respectively, are led by pedestal, 2 snap rings, 2 adjusting seats and 2
Pressure regulator valve, storage cylinder, low rubbing cylinder and guide rail are successively mounted on backboard by rail bottom seat respectively；The parts moving linearly can
Catenary motion is fitted on guide rail, between parts moving linearly and guide rail in such a way that static pressure air-bearing supports and is oriented to,
The piston rod of low rubbing cylinder is connect by decoupling unit with parts moving linearly, and the decoupling unit can carry out 1 to piston rod
A freedom degree adjustment, the low rubbing cylinder can carry out 2 freedom degree adjustment by 2 adjusting seats, can by 2 guiderail bases
2 freedom degree adjustment are carried out to guide rail, inlet manifold are equipped on pressure regulator valve, gas cylinder air inlet pipe connects pressure regulator valve and storage cylinder
Logical, the both ends of gas cylinder exhaust pipe are connected on storage cylinder and low rubbing cylinder, are connected to.
The invention has the characteristics that and the utility model has the advantages that
1, the low rubbing cylinder in the present apparatus adjusts air pressure by pressure regulator valve, the moving component suitable for different quality；Storage
Gas cylinder can be such that low rubbing cylinder provides in the case where high frequency high acceleration in component constant as intermediate pressure stabilizing link
Balancing force.
2, the adjusting seat that includes in the present apparatus, guiderail base can carry out multivariant adjustment to device, it is ensured that low friction
The piston rod central axes of cylinder and guide rail axis parallel keep component movement smooth.
3, the decoupling unit in the present apparatus can carry out the adjustment of 1 freedom degree to piston rod, to ensure piston rod axis
Line coincides with the direction vector of support force.
4, the present apparatus is small in size, compact-sized, widely used, is particularly suitable for the height in small space in exposure system of photo-etching machine
Accelerate to move back and forth occasion.
Detailed description of the invention
Fig. 1 is that high acceleration moves back and forth constant weight force compensating equipments overall structure schematic diagram.
Fig. 2 is that high acceleration moves back and forth permanent gravity-compensated device partial structure diagram.
Fig. 3 is scheme of installation of the linear guide in backboard.
In figure: 1, gas cylinder exhaust pipe；2, storage cylinder；3, gas cylinder air inlet pipe；4, guide rail；5, low rubbing cylinder；6, straight line is transported
Dynamic component；7, decoupling unit；8, piston rod；9, total inlet pipe；10, pressure regulator valve；11, backboard；12, snap ring；13, adjusting seat；14,
Guiderail base；15, pedestal.
Specific embodiment
It elaborates with reference to the accompanying drawing to the embodiment of the present invention.
With reference to Fig. 1-3, a kind of high permanent gravity-compensated device of acceleration reciprocating motion, including parts moving linearly, on backboard
Installation pedestal, 2 snap rings, 2 adjusting seats and 2 guiderail bases respectively, are led by pedestal, 2 snap rings, 2 adjusting seats and 2
Pressure regulator valve, storage cylinder, low rubbing cylinder and guide rail are successively mounted on backboard by rail bottom seat respectively；The parts moving linearly can
Catenary motion is mounted on guide rail, the side for being supported and being oriented to using static pressure air-bearing between parts moving linearly 6 and guide rail 4
Formula, the piston rod of low rubbing cylinder are connect by decoupling unit with parts moving linearly, the decoupling unit can to piston rod into
1 freedom degree adjustment of row, the low rubbing cylinder can carry out 2 freedom degree adjustment by 2 adjusting seats, pass through 2 guide rail bottoms
Seat can carry out the adjustment of 2 freedom degrees to guide rail, be equipped with inlet manifold on pressure regulator valve, and gas cylinder air inlet pipe is by pressure regulator valve and storage cylinder
Connection, the both ends of gas cylinder exhaust pipe are connected on storage cylinder and low rubbing cylinder, are connected to.
The present apparatus is core with low rubbing cylinder 5, realizes parts moving linearly 6 and accelerates in reciprocatory movement in height
Gravity compensation；Support force provided by the adjustable piston rod 8 of pressure regulator valve 10 is consistent with the gravity of parts moving linearly 6；Straight line
When moving component 6 does vertical high acceleration linear motion along guide rail 4, storage cylinder 2 can maintain the gas into low rubbing cylinder 5
Pressure is constant.
Pressure regulator valve 10 is mounted on backboard 11 by the present apparatus in assembly and calibration phase, by pedestal 15；Pass through 2 snap rings
12 are mounted on storage cylinder 2 on backboard 11；Low rubbing cylinder 5 is installed and adjusted by 2 adjusting seats 13；Pass through 2
Guiderail base 14 is installed and is adjusted to guide rail 4；Piston rod 8 is adjusted by decoupling unit 7；By assembling above and
Calibration, can make piston rod 8 parallel with guide rail 4, keep mechanism kinematic smooth.
The present apparatus adjusts the air pressure of pressure regulator valve 10 in service stage, the power for exporting low rubbing cylinder 5 and linear motion portion
The gravity of part 6 is identical；Piston rod 8 in gas push low rubbing cylinder 5, and be that parts moving linearly 6 mentions by decoupling unit 7
For vertical support force；When parts moving linearly 6 carries out high acceleration linear motion along guide rail 4, gas passes through pressure regulator valve 10, storage
The pressure stabilization function of gas cylinder 2, can drive the support force of constant size provided by low rubbing cylinder 5, and with parts moving linearly 6
Gravity keep balance.
Claims (1)
1. a kind of high acceleration moves back and forth permanent gravity-compensated device, including parts moving linearly (6), it is characterised in that: in backboard
(11) installation pedestal (15), 2 snap rings (12), 2 adjusting seats (13) and 2 guiderail bases (14) are distinguished on, pass through pedestal
(15), 2 snap rings (12), 2 adjusting seats (13) and 2 guiderail bases (14) are successively respectively by pressure regulator valve (10), storage cylinder
(2), low rubbing cylinder (5) and guide rail (4) are mounted on backboard (11)；The parts moving linearly (6) can do catenary motion
It is fitted on guide rail (4), it is low to rub between parts moving linearly (6) and guide rail (4) in such a way that static pressure air-bearing supports and is oriented to
The piston rod (8) for wiping cylinder (5) is connect by decoupling unit (7) with parts moving linearly (6), and the decoupling unit (7) can be right
Piston rod (8) carries out 1 freedom degree adjustment；The low rubbing cylinder (5) can carry out 2 freedom degrees by 2 adjusting seats (13)
Adjustment can carry out 2 freedom degree adjustment by 2 guiderail bases (14) to guide rail (4), it is total that air inlet is equipped on pressure regulator valve (10)
It manages (9), pressure regulator valve (10) is connected to by gas cylinder air inlet pipe (1) with storage cylinder (2), and the both ends of gas cylinder exhaust pipe (3) are connected to
On storage cylinder (2) and low rubbing cylinder (5), it is connected to.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810436997.3A CN108646519B (en) | 2018-05-09 | 2018-05-09 | A kind of high permanent gravity-compensated device of acceleration reciprocating motion |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810436997.3A CN108646519B (en) | 2018-05-09 | 2018-05-09 | A kind of high permanent gravity-compensated device of acceleration reciprocating motion |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108646519A CN108646519A (en) | 2018-10-12 |
| CN108646519B true CN108646519B (en) | 2019-05-07 |
Family
ID=63753791
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810436997.3A Active CN108646519B (en) | 2018-05-09 | 2018-05-09 | A kind of high permanent gravity-compensated device of acceleration reciprocating motion |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108646519B (en) |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7468589B2 (en) * | 2006-01-13 | 2008-12-23 | Asml Netherlands B.V. | Lithographic apparatus having a controlled motor, and motor control system and method |
| CN101477316B (en) * | 2009-01-22 | 2011-02-02 | 上海微电子装备有限公司 | Gravity compensator |
| CN104698766B (en) * | 2013-12-10 | 2017-01-18 | 上海微电子装备有限公司 | Gravity compensation device |
| CN104847825B (en) * | 2014-02-14 | 2018-03-13 | 上海微电子装备（集团）股份有限公司 | Array magnetic suspension gravity compensator |
-
2018
- 2018-05-09 CN CN201810436997.3A patent/CN108646519B/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| CN108646519A (en) | 2018-10-12 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103062283B (en) | Zero stiffness vibration isolator and vibration isolation system for air floating ball bearing angle decoupling | |
| US9423000B2 (en) | Magnetically suspended vibration isolator with zero stiffness whose angle degree of freedom is decoupled with a joint ball bearing | |
| CN201876344U (en) | Resonant vibration table with adjustable supporting rigidity | |
| CN101398636A (en) | Precision vibration damping assembly and vibration damping platform composed of the assembly | |
| CN112576689A (en) | Low-frequency heavy-load quasi-zero stiffness vibration isolation device | |
| CN108646519B (en) | A kind of high permanent gravity-compensated device of acceleration reciprocating motion | |
| TW202001442A (en) | Workpiece table system and photolithography device | |
| CN103062284A (en) | Zero-rigidity vibration isolator of double-layer air-flotation orthogonal decoupling and flexible film angle decoupling | |
| Takahashi et al. | A newly developed long-stroke vertical nano-motion platform with gravity compensator | |
| CN111195828A (en) | Direct-acting mechanism, balancing device and machine tool | |
| CN104070518B (en) | A kind of Three-degree-of-freeprecision precision adjustment device based on eccentric structure | |
| CN103062303A (en) | Magnetic levitation zero-stiffness vibration isolator and vibration isolation system for air floatation ball bearing angle decoupling | |
| CN103062285A (en) | Coplane air floatation orthogonal decoupling and flexible membrane angle decoupling zero-stiffness vibration isolator | |
| CN103062321A (en) | Zero-rigidity vibration isolator with coplace air flotation orthogonal decoupling and sliding knuckle bearing angle decoupling | |
| US20050158134A1 (en) | Weight-compensating device | |
| CN103062319B (en) | Zero-stiffness vibration isolator with two-dimensional flexible hinge angle decoupling characteristic and vibration isolating system | |
| CN103032515B (en) | Zero rigidity vibration isolator and vibration isolation system for angularly decoupling sliding oscillating bearing | |
| CN109493981A (en) | The magnet support mechanism of fusion reactor plasma and material interaction test platform | |
| CN112008457B (en) | Quick positioner is used in building furniture material processing | |
| CN210549848U (en) | Double-cylinder counterweight device of spindle box of vertical machining center | |
| CN203725359U (en) | Vibrostand moving-coil reverse bearing device and vibrostand comprising same | |
| CN2088241U (en) | Vibration-isolating and shock-absorbing table for precision instruments | |
| RU2443911C1 (en) | Magnetic rheological positioning and vibration isolating system | |
| CN109108720A (en) | A kind of machine ram balancing device | |
| CN103062317A (en) | Vibration isolator with characteristics of two-dimensional flexible hinge angle decoupling and magnetic levitation plane drive positioning |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |