TW202001442A - Workpiece table system and photolithography device - Google Patents

Abstract

A workpiece table system and a photolithography device, wherein the workpiece table system comprises a base frame, a base, a moving assembly, a balance mass assembly, a gravity compensation apparatus, and a transmission apparatus; the base is fixed on the base frame; the moving assembly is configured to provide a driving force for the movement of a stage; the balance mass assembly is movably arranged on the base frame; a stator portion of the moving assembly is fixed to the balance mass assembly; a mover portion drives the stage to move relative to the stator portion, and a reverse force thereof drives the balance mass assembly to move in the opposite direction; the gravity compensation apparatus is located between the base frame and the base and is configured to perform vertical gravity compensation on a load on the base; the balance mass assembly drives the gravity compensation apparatus to synchronously move in the same direction as the stage by means of the transmission apparatus.

Description

Workpiece table system and lithography equipment

The embodiments of the present invention relate to the technical field of semiconductor manufacturing equipment, for example, to a workpiece table system and lithography equipment.

A lithography device is a device that exposes and images a photomask pattern onto a silicon wafer, and is mainly used for manufacturing integrated circuits (ICs) or other micro devices. The worktable system plays a very important role in the lithography device. In the stepping and scanning lithography machine, the worktable is used to carry silicon wafers and perform precise movement to meet the needs of lithography. In the lithography equipment, the workpiece table is responsible for the precise movement of the silicon wafer. Generally, the coarse and fine positioning method is used, that is, the long-stroke coarse moving table realizes long-distance coarse positioning, and the fine moving table realizes nanometer-level precise positioning. The function of the micro-motion table is to carry the silicon wafer. Through the horizontal and vertical six degrees of freedom precise adjustment and positioning, the silicon wafer can complete the alignment and leveling and focusing tasks.

1 is a schematic diagram of a longitudinal cross-sectional structure of a related-art workpiece table in the X-axis direction, and FIG. 2 is a schematic diagram of a longitudinal cross-sectional structure of FIG. 1 in the Y-axis direction. Referring to FIGS. 1 and 2, the X-axis assembly 10 and the Y-axis assembly of the workpiece table The weights of the 20 and the stage 30 are all supported on the base 50 by the air bearing support rails 40. The Y-axis assembly 20 moves in the Y-direction long stroke, driving the entire X-axis assembly 10 and the stage 30 to move in the Y-direction together. In this way, the load on the base 50 caused by the X-axis assembly 10, the Y-axis assembly 20, and the stage 30 will cause a change in the profile of the base 50, which in turn will cause a change in the profile of the air bearing support rail 40 of the Y-axis assembly 20, which will affect The motion accuracy of the stroke component ultimately affects the exposure accuracy. In addition, the profile of the air bearing support rail 40 is done when the load is in a fixed position. If the deformation is severe, the air bearing will be stuck, resulting in equipment failure and normal operation. The change in the surface shape of the base 50 caused by the change in the load position can only be reduced by increasing the rigidity of the base. If the load and the stroke are large, the base 50 needs to have sufficient rigidity, that is, a sufficient thickness to ensure the air floatation performance. However, with the advancement of technology, the weight and running speed of the stroke assembly will increase accordingly. Simply increasing the thickness of the base 50 can no longer meet the requirements of exposure accuracy, and also increases the difficulty of designing the workpiece table.

Therefore, it is necessary to consider how to more effectively reduce or even eliminate the deformation of the base 50 caused by the load movement without increasing the thickness of the base 50.

This specification provides a workpiece table system and lithography equipment for real-time compensation of the load generated by the travel component on the base to reduce or even eliminate the deformation of the base caused by the load movement, thereby ensuring exposure accuracy and reducing the probability of equipment failure .

In a first aspect, an embodiment of the present invention provides a workpiece table system. The characteristics of the workpiece table system include: a base frame; a base, fixed on the base frame, which is arranged to provide support for the movement of the stage; and a motion component, which is arranged as Provides driving force for the movement of the stage; the balanced mass component is movably arranged on the base frame; the movement component includes a mover part and a stator part, the stator part is fixed on the balanced mass component, and the mover part is set to connect the stage, And drive the stage relative to the stator part, the reverse force generated when the mover part moves drives the balanced mass component to move in the opposite direction of the mover part; the gravity compensation device is located between the base frame and the base , The aforementioned gravity compensation device is configured to perform vertical gravity compensation on the load on the base; the transmission device is configured to connect the balanced mass component and the gravity compensation device, and the balanced mass component is configured to drive the gravity compensation device to generate load with the transmission device The platform moves in the same direction.

In some embodiments, the motion component includes a Y axis component and an X axis component, the Y axis component includes a Y axis stator portion and a Y axis mover portion, and the X axis component includes an X axis stator portion and an X axis mover portion; a stage The X-axis stator part realizes the X-direction movement on the X-axis stator part by being arranged on the X-axis mover part, and the Y-axis stator part realizes the Y-direction movement on the Y-axis stator part by connecting the Y-axis mover part. Fixed on the balanced mass assembly, the X-axis stator part is supported on the base.

In some embodiments, the transmission device includes two sets of pulleys and two transmission belts, and each set of pulleys includes a coaxially rotating first pulley and a second pulley; the two first pulleys are connected by a first transmission belt, two The second pulley is connected by a second transmission belt; the radius of the second pulley is greater than the radius of the first pulley, the rotational angular velocity of the first pulley and the second pulley is equal; the balance mass component is connected to the A transmission belt is connected, and the gravity compensation device is connected to the second transmission belt through an adapter.

In some embodiments, the ratio of the second pulley and the first pulley radius R2 of radius of R ₁ satisfy the following relationship:

Among them, M ₁ is the load on the base, that is, the mass of the X-axis component, the Y-axis mover part and the stage; M ₂ is the mass of the balanced mass component; M ₃ is the mass of the gravity compensation device; J is the aforementioned two The moment of inertia of a group of pulleys in the group of pulleys.

In some embodiments, the gravity compensation device includes a cylinder, a push rod, and a flexible hinge. The bottom of the cylinder is connected to the base frame through a first air float pad. The flexible hinge is located on the top of the push rod. The top of the flexible hinge is an air float surface. The floating surface is in air floating contact with the bottom surface of the aforementioned base.

In some embodiments, the gravity compensation device further includes a pressure sensor and a proportional pressure regulating valve, the pressure sensor is located inside the cylinder, and is configured to detect the air pressure fluctuation inside the cylinder; the proportional pressure regulating valve is set to The air pressure inside the cylinder fluctuates to adjust the air pressure in the cylinder to maintain a constant air pressure in the cylinder.

In some embodiments, the cylinder block and the push rod material include aluminum alloy or stainless steel.

In some embodiments, the push rod has a honeycomb structure.

In some embodiments, the X-axis stator part is supported on the base by the air-float support rail, and the X-axis stator part can move along the air-float support rail.

In some embodiments, the balanced mass component is supported on the base frame by the second air float cushion.

In some embodiments, the workpiece table system further includes a shock absorbing unit, the aforementioned shock absorbing unit is located at the bottom of the base frame; the aforementioned shock absorbing unit includes a plurality of shock absorbers, and the plurality of shock absorbers are evenly distributed at the bottom of the base frame.

In a second aspect, an embodiment of the present invention also provides a lithographic apparatus, which is characterized in that it includes a stage and a workpiece stage system according to any one of the first aspects of the present invention.

The workpiece table system provided by the embodiment of the invention does not increase the thickness of the base, uses the movement of the balanced mass component, and drives the gravity compensation device to synchronize the movement of the mover part of the moving component by the transmission device to carry out the load on the base Instant gravity compensation reduces or even eliminates the deformation of the base caused by the load movement, thereby reducing or even eliminating the influence of the base deformation on the motion accuracy of the moving component, thereby ensuring the exposure accuracy and reducing the probability of equipment failure.

10‧‧‧X axis assembly

100‧‧‧Basic framework

1000‧‧‧second air cushion

20‧‧‧Y axis assembly

200‧‧‧Base

30‧‧‧stage

300‧‧‧X axis assembly

301‧‧‧X-axis stator part

302‧‧‧X axis mover part

303‧‧‧Air float support rail

304‧‧‧slider

40‧‧‧Air float support rail

400‧‧‧Y axis assembly

401‧‧‧Y-axis stator part

402‧‧‧Y axis mover part

50‧‧‧Base

500‧‧‧stage

600‧‧‧Balanced quality components

700‧‧‧Gravity compensation device

701‧‧‧ cylinder

702‧‧‧Putter

7011‧‧‧First air cushion

703‧‧‧flexible hinge

7031‧‧‧Floating surface

704‧‧‧pressure sensor

801‧‧‧The first pulley

802‧‧‧The second pulley

90‧‧‧Shock absorption unit

900‧‧‧Shock absorber

901‧‧‧ First transmission belt

902‧‧‧Second transmission belt

R ₁ ‧‧‧ radius of the first pulley

R ₂ ‧‧‧ radius of the second pulley

[Figure 1] is a schematic diagram of a longitudinal cross-sectional structure of a related-art workpiece table in the X-axis direction.

[FIG. 2] is a schematic diagram of the longitudinal cross-sectional structure of FIG. 1 in the Y-axis direction.

Fig. 3 is a schematic diagram of the longitudinal cross-sectional structure of the workpiece table system in the embodiment of the present invention in the X-axis direction.

[FIG. 4] is a schematic diagram of the longitudinal cross-sectional structure of FIG. 3 in the Y-axis direction.

[Figure 5] is a schematic structural diagram of a transmission device in an embodiment of the present invention.

[Fig. 6] is a schematic structural diagram of a gravity compensation device according to an embodiment of the present invention.

7 is a schematic structural diagram of the air pressure control system of the gravity compensation device in the embodiment of the present invention.

The specification will be further described in detail below with reference to the drawings and examples. It can be understood that the specific embodiments described herein are only used to explain this specification, not to limit this specification. In addition, it should also be noted that, in order to facilitate description, the drawings only show parts but not all structures related to this specification.

An embodiment of the present invention provides a workpiece table system. FIG. 3 is a schematic diagram of the longitudinal cross-sectional structure of the workpiece table system in the X-axis direction in the embodiment of the present invention. FIG. 4 is a schematic diagram of the longitudinal cross-sectional structure of FIG. 3 in the Y-axis direction. 4, the workpiece table system includes: a base frame 100, a base 200, a motion component, a stage 500, a balanced mass component 600, a gravity compensation device 700, and a transmission device.

Wherein, the base 200 is fixed on the base frame 100 by a support member, and there is a certain distance between the bottom surface of the base 200 and the upper surface of the base frame 100. The moving component includes an X-axis component 300 and a Y-axis component 400. The X-axis component 300 includes an X-axis stator portion 301 and an X-axis mover portion 302, and the Y-axis component 400 includes a Y-axis stator portion 401 and a Y-axis mover portion 402. The object table 500 realizes the X-direction (ie, X-direction) movement on the X-axis stator part 301 by being disposed on the X-axis mover part 302, and the X-axis stator part 301 is realized by connecting the Y-axis mover part 402 The Y-axis stator portion 401 moves in the Y direction (ie, Y direction), and the X-axis stator portion 301 is supported on the base 200 by air floatation. The Y-axis stator portion 401 is formed on the balanced mass assembly 600. Optionally, the Y-axis stator portion 401 is provided with a guide groove, the Y-axis mover portion 402 and the guide groove are connected by an air bearing, and the Y-axis mover portion 402 is The guide groove moves in the Y direction, thereby driving the X-axis stator portion 301 to move in the Y direction. The balanced mass assembly 600 is movably disposed on the base frame 100, and optionally, the balanced mass assembly 600 is supported on the base frame 100 by air floatation. When the Y-axis mover portion 402 accelerates, the generated reverse force drives the balancing mass assembly 600 to perform a reverse movement in the opposite direction of the Y-axis mover portion 402 to balance the Y-axis mover portion 402 along the Y direction The reverse force generated during acceleration. The gravity compensation device 700 is provided between the base frame 100 and the base 200 corresponding to the X-axis mover portion 302. The gravity compensation device 700 is connected to the balance mass assembly 600 through a transmission device. When the balance mass component 600 moves, the gravity compensation device 700 and the X-axis mover part 302 are driven in the same direction by the transmission device, and the gravity compensation device 700 loads the base 200 (including the X-axis component 300 and the Y-axis mover) Part 402 and the load generated by the stage 500 on the base 200) perform vertical gravity compensation, which can reduce or even eliminate the deformation of the base 200 caused by the load movement, thereby reducing or even eliminating the deformation of the base 200 on the X-axis mover part 302 movement The influence of accuracy, thereby ensuring the exposure accuracy, reducing the probability of equipment failure, and avoiding increasing the rigidity and thickness of the base to overcome the adverse effects of high space requirements and high costs caused by the deformation of the base 200.

It should be noted that, since the load generated by the long-stroke movement of the motion component on the base 200 has a great influence on the change in the shape of the base 200, in this embodiment and subsequent embodiments, the gravity compensation device 700 is used in the Y direction Simultaneously moving in the same direction as the stage 500 and performing vertical gravity compensation on the load on the base 200 as an example, the scheme of this specification will be described. In fact, the gravity compensation device 700 can also move synchronously and in the same direction (including the X direction and the Y direction) with the stage 500, which will not be repeated here. It is understandable that in the embodiment of the present invention, the X direction and the Y direction are arranged at an angle, and the X direction and the Y direction may be arranged perpendicularly. Both the X direction and the Y direction may be perpendicular to the vertical direction.

The workpiece table system provided by the embodiment of the invention does not increase the thickness of the base, uses the motion of the balanced mass component, and drives the gravity compensation device to synchronize the movement with the carrier table by the transmission device to perform real-time gravity compensation on the load on the base. Reduce or even eliminate the deformation of the base caused by the load movement, thereby reducing or even eliminating the influence of the deformation of the base on the movement accuracy of the moving component, thereby ensuring the exposure accuracy, and reducing the probability of equipment failure.

FIG. 5 is a schematic structural diagram of a transmission device in an embodiment of the present invention. Optionally, referring to FIG. 5, the transmission device includes two sets of pulleys and two transmission belts, and each set of pulleys includes a coaxially rotating first pulley 801 and a first Two pulleys 802. The first pulley 801 of the two sets of pulleys is connected by the first transmission belt 901, and the second pulley 802 of the two sets of pulleys is connected by the second transmission belt 902. The radius of the second pulley 802 is greater than the radius of the first pulley 801, and the rotational angular velocity of the first pulley 801 and the second pulley 802 are equal. The balanced mass assembly 600 is connected to the first transmission belt 901 through an adapter, and the gravity compensation device 700 is connected to the second transmission belt 902 through an adapter. When the Y-axis mover part 402 moves in the Y direction, the generated reverse force drives the balanced mass assembly 600 to generate a movement opposite to the movement direction of the Y-axis mover part 402, and the balanced mass assembly 600 drives the first transmission belt 901 to move. A transmission belt 901 drives the two sets of pulleys to rotate, which in turn drives the gravity compensation device 700 on the second transmission belt 902 to move synchronously with the X-axis stator part 301, and the gravity compensation device 700 loads the load on the base 200 (including the X-axis assembly 300 and Y-axis The movable part 402 of the assembly 400 and the load generated by the stage 500 on the base 200) perform vertical gravity compensation.

It should be noted that the aforementioned adapter only needs to play a connecting role, which is generally a rigid part, and the aforementioned adapter may specifically be a screw or a bolt.

Alternatively, the radius of the second pulley 802 and the pulley 801 of the first radius R _{2 1} R ratio satisfies the following relationship:

Where, M ₁ is the load on the base 200, that is, the mass of the aforementioned X-axis assembly 300, the Y-axis mover portion 402 and the stage 500; M ₂ is the mass of the balance mass assembly 600; M ₃ is the gravity compensation device 700 J is the moment of inertia of one set of pulleys in the aforementioned two sets of pulleys. J is only related to the mass and radius of the two pulleys in the set of pulleys. The mass of the pulley is a known quantity.

Specifically, the total energy of the transmission system is:

Where, [omega] is the angular velocity of rotation of the pulley; total energy E of the transmission system is converted to the equivalent mass of M ₂ M ₂ ^', the equivalent weight to obtain M ₂ M ^_2'.

According to the law of conservation of momentum _{M 1 V 1 = M 2 '} V 2

The need to ensure consistent speed M ₁ and M _3, the radius of the second pulley 802 and the ratio R ₂ of the radius of the first pulley 801 for R ₁ satisfy the following relationship:

Among them, M ₁ , M ₂ , and M ₃ are known quantities, and J is only related to the mass and radius of two pulleys in the set of pulleys, and the pulley mass is a known quantity. Thus, as needed, select one of the pulleys the radius value (e.g., a first pulley 801), R _1, and then according to the relationship between the R ₁ and R _2, the radius R ₂ is calculated.

It should be noted that the transmission device shown in FIG. 5 is only an exemplary description of the embodiment of the present invention. In other embodiments of the present invention, the transmission device may also be in other forms, as long as the balanced quality component can be guaranteed by transmission The device drives the gravity compensation device to move synchronously with the mover part of the Y-axis assembly.

FIG. 6 is a schematic structural diagram of a gravity compensation device according to an embodiment of the present invention. Referring to FIG. 6, optionally, the gravity compensation device 700 includes a cylinder 701, a push rod 702, and a flexible hinge 703. The bottom of the cylinder 701 is supported by a first air cushion 7011 Connected to the base frame 100, a flexible hinge 703 is located on the top of the push rod 702. The top of the flexible hinge 703 is an air floating surface 7031, which is in air floating contact with the bottom surface of the base 200. In this embodiment, the flexible hinge 703 is a flexible hinge block that can be twisted along Rx, Ry, and Rz, and is used to adapt to changes in the surface shape of the base 200. In this way, the gravity compensation device 700 can move synchronously with the X-axis stator portion 301 in the Y direction between the base frame 100 and the base 200, driven by the transmission device. In addition, it should be noted that the aforementioned flexible hinge 703 may also be a standard spherical hinge, and its working principle will not be repeated here.

Specifically, the air pressure of the cylinder 701 and the diameter of the push rod 702 can be designed according to the load to achieve the effect of gravity compensation. When the piston diameter of the gravity compensator is 100mm and the air pressure is 5bar, the thrust generated is F=3925N, which can support a load of 392.5Kg.

7 is a schematic structural diagram of an air pressure control system of a gravity compensation device according to an embodiment of the present invention. Referring to FIGS. 6 and 7, optionally, the gravity compensation device 700 also includes a pressure sensor 704 and a proportional pressure regulating valve 705. The air pressure control system of the gravity compensation device also includes an air control box 706 and a PID controller 707 (proportional-integral-derivative controller). The gas control box 706 is used to deliver gas to the cylinder 701; the pressure sensor 704 is located inside the cylinder 701 to detect the pressure fluctuation within the cylinder 701; the PID controller 707 is used to receive the pressure fluctuation data detected by the pressure sensor 704, According to the pressure fluctuation data, a control message is sent to the proportional pressure regulating valve 705. The proportional pressure regulating valve 705 controls the valve opening according to the control message, and then adjusts the air pressure in the cylinder 701 to maintain the air pressure in the cylinder 701 constant. When the gravity compensation device 700 moves in the Y direction, it will cause the air pressure fluctuation in the cylinder 701, resulting in a change in the shape of the base. The air pressure control system using this gravity compensation device 700 detects the air pressure fluctuation in the cylinder 701 and uses a proportional pressure regulating valve The air pressure in the cylinder 701 is adjusted in real time to maintain the air pressure in the cylinder 701 constant, thereby maintaining the thrust of the push rod 702 (compensating for the load on the base 200) constant.

Optionally, with continued reference to FIG. 7, the air pressure control system of the gravity compensation device also includes a silencer device 708 and a feedforward control module 709. The silencer 708 is used to reduce the noise generated when the proportional pressure regulating valve 705 operates; the feedforward control module 709 is connected to the proportional pressure regulating valve 705 to measure the amount of interference (such as the fluctuation of the output air pressure of the air control box 706) Change, and through calculation, directly overcome the influence of the amount of interference on the control message output by the proportional pressure regulating valve 705, so that the control message is not affected by interference or less affected by interference, thereby ensuring a constant air pressure in the cylinder 701.

Optionally, the materials of the cylinder block 701 and the push rod 702 include materials with high strength and rigidity such as aluminum alloy and stainless steel.

Optionally, without loss of vertical rigidity, the push rod 702 can be designed to be lightweight. In one of the embodiments, the push rod 702 uses 3D printing technology to make a honeycomb structure.

Optionally, with continued reference to FIGS. 3 and 4, the X-axis stator part 301 is supported on the base 200 by a plurality of parallel air bearing support rails 303, and the bottom surface of the X-axis stator part 301 is provided with the air bearing support rails 303. The slider 304, the air bearing support rail 303 and the slider 304 are connected by an air bearing, and the slider 304 can slide back and forth on the air bearing support rail 303 to realize the movement of the X-axis stator part 301 in the Y direction. Alternatively, the X-axis mover portion 302 may be connected to the X-axis stator portion 301 by air bearings to achieve movement in the X direction.

Optionally, with continued reference to FIGS. 3 and 4, the balanced mass assembly 600 is supported on the base frame 100 by the second air float cushion 1000. When the Y-axis mover part 402 accelerates in the Y-direction, the reverse force it generates acts on the Y-axis stator part 401, which in turn drives the balanced mass assembly 600 to produce a movement in the opposite direction of the Y-axis mover part 402. The balanced mass assembly 600 is used to balance the force generated by the Y-axis mover part 402 during the acceleration movement in the Y direction, to prevent the reverse acting force from directly acting on the base frame 100, and to improve the displacement accuracy of the stroke assembly of the workpiece table system.

Optionally, with continued reference to FIGS. 3 and 4, the workpiece table system also includes a shock absorbing unit 90. The shock absorbing unit 90 includes a plurality of shock absorbers 900, evenly distributed at the bottom of the base frame 100, for absorbing energy of ground vibration , To avoid ground vibration affecting the basic frame 100, to ensure exposure accuracy.

An embodiment of the present invention also provides a lithographic apparatus, including a stage, and a workpiece stage system as provided in any of the above embodiments of the present invention.

100‧‧‧Basic framework

1000‧‧‧second air cushion

200‧‧‧Base

300‧‧‧X axis assembly

301‧‧‧X-axis stator part

302‧‧‧X axis mover part

303‧‧‧Air float support rail

304‧‧‧slider

400‧‧‧Y axis assembly

401‧‧‧Y-axis stator part

402‧‧‧Y axis mover part

500‧‧‧stage

600‧‧‧Balanced quality components

700‧‧‧Gravity compensation device

90‧‧‧Shock absorption unit

900‧‧‧Shock absorber

Claims (12)

A workpiece table system, characterized in that it includes: a base frame (100); a base (50), which is fixed on the aforementioned base frame (100) and is arranged to provide support for the movement of the stage; a motion component is arranged as the aforementioned load The motion of the object table provides the driving force; the balanced mass component (600) is movably arranged on the aforementioned basic frame (100); the aforementioned motion component includes a mover part and a stator part, and the stator part is fixed on the balanced mass component, the aforementioned dynamic part The sub-portion is configured to connect to the stage and drive the stage to move relative to the stator section. The reverse acting force generated when the mover section moves drives the balanced mass assembly (600) to move with the mover section Movement in opposite directions; gravity compensation device (700), located between the aforementioned base frame (100) and the base (50), the gravity compensation device (700) is configured to apply vertical gravity to the load on the aforementioned base (50) Compensation; the transmission device is configured to connect the balance mass component (600) and the gravity compensation device (700), the balance mass component (600) is configured to drive the gravity compensation device (700) by the transmission device to generate the load The platform moves in the same direction. The workpiece table system as described in item 1 of the patent application scope, wherein the motion component includes a Y-axis component (20) and an X-axis component (10), and the Y-axis component (20) includes a Y-axis stator portion (401) and Y-axis mover part (402), the aforementioned X-axis assembly (10) includes an X-axis stator part (301) and an X-axis mover part (302); the stage is set on the X-axis mover part (302) Realize the X-direction movement on the X-axis stator part (301), the X-axis stator part (301) realizes the Y-direction movement on the Y-axis stator part (401) by connecting the Y-axis mover part (402), the Y-axis The stator part (401) is fixed on the aforementioned balanced mass assembly (600), and the aforementioned X-axis stator part (301) is supported on the aforementioned base (50). The workpiece table system as described in item 2 of the patent application scope, wherein the aforementioned transmission device includes two sets of pulleys and two drive belts, and each set of pulleys includes a coaxially rotating first pulley (801) and a second pulley ( 802); the two aforementioned first pulleys (801) are connected by a first transmission belt (901), and the two aforementioned second pulleys (802) are connected by a second transmission belt (902); the aforementioned second pulley (802) ) Has a radius greater than the radius of the first pulley (801), the rotational angular velocity of the first pulley (801) and the second pulley (802) is equal; the balance mass component (600) through the adapter and the first A transmission belt (901) is connected, and the gravity compensation device (700) is connected to the second transmission belt (902) through an adapter. As described in Item 3 of the patent application scope, the ratio of the radius R ₂ of the second pulley to the radius R ₁ of the first pulley satisfies the following relationship:

Among them, M1 is the load on the base, that is, the mass of the X-axis component, the Y-axis mover part and the stage; M2 is the mass of the balanced mass component; M3 is the mass of the gravity compensation device; J is the two The moment of inertia of a group of pulleys in the group of pulleys. The workpiece table system described in item 1 of the patent application scope, wherein the gravity compensation device (700) includes a cylinder (701), a push rod (702) and a flexible hinge (703), and the bottom of the cylinder (701) is determined by the An air cushion (7011) is connected to the basic frame (100), the flexible hinge (703) is located on the top of the push rod (702), the top of the flexible hinge (703) is the air floating surface (7031), the air floating surface ( 7031) Air float contact with the bottom surface of the aforementioned base (200). The workpiece table system as described in item 5 of the patent application scope, wherein the gravity compensation device (700) further includes a pressure sensor (704) and a proportional pressure regulating valve (705), and the pressure sensor (704) is located at Inside the cylinder and set to detect the pressure fluctuation inside the cylinder (701); the proportional pressure regulator (705) is set to adjust the pressure fluctuation in the cylinder (701) according to the detected pressure fluctuation inside the cylinder (701) Air pressure, keep the air pressure in the cylinder (701) constant. The workpiece table system as described in item 5 of the patent application scope, wherein the cylinder (701) cylinder body and the push rod (702) material include aluminum alloy or stainless steel. According to the worktable system described in item 5 of the patent application scope, the push rod (702) has a honeycomb structure. The workpiece table system as described in item 2 of the patent application scope, wherein the X-axis stator part (301) is supported on the base (50) by an air bearing support rail (303), and the X-axis stator part (301) It can move along the air bearing support rail (303). The workpiece table system described in item 1 of the patent application range, wherein the balanced mass component (600) is supported on the basic frame (100) by a second air cushion (1000). The workpiece table system as described in item 1 of the patent application scope further includes a shock absorbing unit (90), the shock absorbing unit (90) is located at the bottom of the base frame (100); the shock absorbing unit (90) includes multiple Shock absorbers (900), a plurality of the aforementioned shock absorbers (900) are evenly distributed on the bottom of the aforementioned basic frame (100). A lithographic apparatus characterized by including a stage and a workpiece stage system as described in any one of items 1 to 11 of the patent application.

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