CN102507065B - Device for reducing thrust and vibration at pipeline ends - Google Patents

Device for reducing thrust and vibration at pipeline ends Download PDF

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Publication number
CN102507065B
CN102507065B CN 201110386266 CN201110386266A CN102507065B CN 102507065 B CN102507065 B CN 102507065B CN 201110386266 CN201110386266 CN 201110386266 CN 201110386266 A CN201110386266 A CN 201110386266A CN 102507065 B CN102507065 B CN 102507065B
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movable table
table top
spring
central axis
cabin
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CN102507065A (en
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周东
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No401 Institute Fourth Research Academy Of China Aerospace Science And Technology Corp
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No401 Institute Fourth Research Academy Of China Aerospace Science And Technology Corp
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Abstract

The invention provides a device for reducing thrust and vibration at pipeline ends, which comprises a movable floater supporting component and a buffer chamber. The movable floater supporting component supports a movable table through supporting springs and an air spring, the height of the air spring is controlled by an air spring height control component, the movable table is connected with the buffer chamber through a slide chute, and the buffer chamber is connected with an external vertical air inlet pipeline and an external engine inlet duct. According to the technical scheme, physical isolation of combined load affection between the air inlet duct and the external air inlet pipeline is realized. During operation, the movable table moves axially, the rigidity of the air inlet end of the pipeline on the movable table is close to zero, affection of the external air inlet pipeline to a measurement system is avoided, and the device can be suitable for sites having requirements for thrust measurement of testing targets such as the same type gas or liquid medium. According to the testing results, the device can evidently reduce affection of pipe end thrust and coupled vibration under composite load action and the requirement on thrust measurement can be met.

Description

A kind of device that reduces pipe end thrust and vibration
Technical field
The present invention relates to the survey control technology field, be specially a kind of device that reduces pipe end thrust and vibration.
Background technology
In the engines ground simulation test, need subjects is directly linked to each other with pipeline, because the simulation air inlet has high pressure, high temperature, characteristics at a high speed, and owing to there is the influence of pipeline, fluid and gas-solid coupling, the high precision thrust measurement that realizes subjects is comparatively difficult, needs to solve following technical matters: 1) thrust frame realizes that with the admission line interface no thrust is connected; 2) realize system's inlet condition change to dynamometric system particularly the dynamic characteristic of docking port part do not have influence; 3) reduction or elimination pipeline are to the vibration of measuring system generation; 4) measure of taking is wanted to guarantee flow quality.Wherein eliminating air inlet is the key problem in technology that improves the motor power measuring accuracy to measuring system generation additional thrust and forced vibration, and the system that will realize is under the air inlet state, the air intake duct leading section has the dual nature of physical connection and aerodynamic characteristics isolation, to eliminate the added influence of thrust frame, improve the precision of thrust measurement.
When pipeline is heated and meet cold contraction, will produces acting force to coupled equipment and structure, and in pipeline, cause stress.When piping system is firmer, this thrust and stress all will enlarge, and therefore, must consider pipeline flexible design and the problem that expands when the design experiment object links to each other with pipeline.The purpose of flexible design is to guarantee that pipeline has enough flexibilities under design conditions, prevent that pipeline from arranging reason such as improper, gas-solid coupling and causing serial problem because heat expansion, shrinkage, end points additional displacement, pipeline support, can make measurement bay not bear the axial thrust that medium internal pressure and thermal walking produce and reduce pipe end thrust.
The metallic conduit element that is used for thermal compensation and increase pipeline flexible mainly contains bellows expansion joint, stuffing-box formula expansion joint and metal hose, and the technological means of taking at present mainly contains following mode:
1. labyrinth and packing washer or stuffing-box array mode; Rely on the relative motion of parts to reach the purpose that absorbs thermal walking.Its weak point is easy to generate leakage, and because the pipeline configuration temperature distortion, sealing ring easily lost efficacy, and the pipeline of butt joint is easily stuck can not to absorb distortional stress, can't accurately measure thrust;
2. graphite collar sealing means; This mode utilizes graphite high temperature deformation amount less and have a self-lubricating property.Service condition is: the pipeline of butt joint axially has hot insensitive characteristic mutually, and axial offset is less in the course of the work; This has relatively high expectations to design and processing technology, and is difficult in practice accomplish, so this method is difficult to implement;
3. corrugated tube bit shift compensation mode; Utilize the distortion of metal corrugated pipe expansion joint to absorb displacement, though can satisfy the bit shift compensation requirement, easily produce vibration, be difficult to realize simultaneously pipe end thrust termination and the system of elimination gas-solid coupled vibrations.Corrugated tube reduces flow quality, and its compensating action to displacement is to be cost with the additional engine axial thrust, therefore engine ran burning and thrust measurement is had considerable influence; Connect metallic bellows at the air intake duct front end, can realize pipeline thermal expansion bit shift compensation, but because corrugated surface makes the flow quality deterioration to the modulating action of air-flow.
4. sleeve expansion joint mode; Pipeline thermal distortion there is better effect, but need takies than large space, air-flow blind plate power influenced the compensating action deficiency;
Dual mode has high requirement to material and mounting process before above-mentioned, be difficult to carry out in practice and use, back dual mode is compensation of pipeline means commonly used both at home and abroad, but for a kind of so specific application scenario of thrust measurement, existing disposal route can not satisfy technical requirement, therefore must carry out the dynamic thrust compensation by specialized designs zero stiffness compensation mechanism, therefore must take all factors into consideration various load influences, a kind of mechanism that reduces pipe end thrust and vibration is provided.
Summary of the invention
The technical matters that solves
For solving the problem that prior art exists, the present invention proposes a kind of device that reduces pipe end thrust and vibration, to realize the purpose of high-acruracy survey motor power.
Technical scheme
The present invention is based on pipe conveying fluid road dynamic characteristic, propose to utilize the movable table top of air-flotation type to eliminate: a. thermal force is to the distortional stress influence of pipeline; B. high speed energy stream is to the shock load of pipeline generation; C. fluid and structure coupling are to the forced vibration of system's generation, and its gordian technique is to utilize air spring mechanical characteristic and positive negative stiffness principle of parallel, have taken all factors into consideration the compound action of various load.
Technical scheme of the present invention is:
Described a kind of device that reduces pipe end thrust and vibration is characterized in that: comprise movable floating platform supporting component and buffering cabin;
Described movable floating platform supporting component comprises load casing, movable table top, support spring, air spring and air spring height control assembly; Load casing one end opening is evenly equipped with some Connection Blocks at the load wall box; Movable table top is placed on load casing opening one end, be provided with chute at movable table top upper surface, movable table top fixedly has some connecting links on the bottom surface, the connecting link of movable table top bottom surface is identical with the Connection Block number on the load wall box, and position correspondence, each is to connecting by support spring between connecting link and the Connection Block, and the central axis of all support springs is parallel to each other, and support spring support activity table top is in horizontality; Air spring comprises air bag, lower chambers and auxiliary chamber, air bag one end is fixedlyed connected with middle part, movable table top bottom surface by top cover, the air bag other end is connected with lower chambers sealing crimping, the connecting portion of lower chambers and air bag is provided with damping hole, lower chambers is connected by pipeline with auxiliary chamber, and auxiliary chamber is fixed on the load bottom half; Air spring height control assembly comprises height control lever, the levelling valve group, admission line and gas exhaust duct, height control lever one end is fixed on movable table top bottom surface, the other end passes the levelling valve group, height control lever is parallel to the support spring central axis, when movable table top reduces, height control lever moves downward, inlet open in the control levelling valve group, admission line from external feed stream to auxiliary chamber, when movable table top raises, height control lever moves upward, and the vent valve in the control levelling valve group is opened, gas exhaust duct from auxiliary chamber to outside exhaust;
Described buffering shape out of my cabin is cylindrical, and the cylinder two ends are sphere, and the buffering cabin was connected by some web members between buffering cabin inner casing and the shell, and had vent hole on each web member by inside and outside two-layer the composition, also has some vent holes of crossing on the inner casing of buffering cabin; Horizontal direction one side fixedly has the outlet pipe that connects the outer air intake duct in the buffering cabin, and outlet pipe and buffering cabin inner casing and shell difference sealing and fixing; The shell outside surface is provided with slide block cushioning out of my cabin, and the slide block direction is parallel with the outlet pipe central axis, and slide block is corresponding with the chute of movable table top upper surface, constitutes sliding pair; Connect the outside vertically air admission hole of draft tube cushioning also to have on the shell out of my cabin, the air admission hole central axis is perpendicular to the outlet pipe central axis; Outside surface at buffering cabin horizontal direction opposite side shell fixedly has the connection platform, it is hinged in the balance stem center to connect platform and balance stem, the balance stem two ends tiltedly draw the swivel of spring one end hinged with two respectively, two are tiltedly drawn the other end of spring tiltedly to draw spring-fixed structure to fixedly connected with two that are fixed on movable table top upper surface both sides respectively, tiltedly draw spring-fixed structure to comprise the fixed bar that is fixed on movable table top, rotation axis and adapter, adapter is fixedlyed connected with tiltedly drawing spring end, rotation axis is parallel to the central axis of buffering cabin cylindrical section, and adapter and fixed bar are rotationally connected by rotation axis; Connect you portion and be connected by the middle part spring with the main fixed bar that is fixed on movable table top upper surface middle part, and the central axis of middle part spring is perpendicular to the central axis of buffering cabin cylindrical section.
Described a kind of device that reduces pipe end thrust and vibration is characterized in that: air bag is constrained to 4 bent air bags by girdle ring, and the cross-sectional area of girdle ring place air bag is 2/3 of movable table top base area.
Described a kind of device that reduces pipe end thrust and vibration is characterized in that: setting nut is installed on the adapter, is used for regulating the tension force that tiltedly draws spring; On the main fixed bar of movable table top upper surface middle part the main regulation nut is installed also, is used for regulating the tension force of middle part spring.
Described a kind of device that reduces pipe end thrust and vibration is characterized in that: the vent hole of crossing on the inner casing of buffering cabin circumferentially evenly distributes along the inner casing xsect.
Described a kind of device that reduces pipe end thrust and vibration is characterized in that: the chute of movable table top upper surface adopts metal rubber material.
Described a kind of device that reduces pipe end thrust and vibration, it is characterized in that: buffering cabin horizontal direction has two outlet pipes, two outlet pipe central axis are parallel to each other, and the plane of two outlet pipe central axis formations is parallel with the central axis of buffering cabin cylindrical section, and two outlet pipe central axis cushion cabin cylindrical section center cross-sectional symmetry relatively; The balance stem center is on the cylindrical section center cross-sectional of buffering cabin, and the central axis of middle part spring is on the cylindrical section center cross-sectional of buffering cabin.
Described a kind of device that reduces pipe end thrust and vibration is characterized in that: cushioning out of my cabin has two air admission holes on the shell, and the central axis of buffering cabin cylindrical section is crossed on the plane that the central axis of two air admission holes constitutes.
Beneficial effect
Technical scheme provided by the present invention has realized the physical isolation of the combined load influence of air intake duct and external feed stream pipeline.Moving axially owing to movable table top in the course of work of system, guarantee that pipeline is approximately zero in the rigidity of the inlet end of movable table top, make the external feed stream pipeline obtain isolating to the influence of measuring system, the occasion that need carry out thrust measurement applicable to a class air inlet or liquid medium subjects, test findings shows the influence that can significantly be reduced in pipe end thrust and coupled vibrations under the Action of Combined Loads, satisfies the needs of thrust measurement.
Description of drawings
Fig. 1: structural representation of the present invention; (front view, and remove load casing one side sidewall)
Fig. 2: structural representation of the present invention; (left view, and remove load casing one side sidewall)
Fig. 3: structural representation of the present invention; (vertical view)
Fig. 4: buffering cabin structure cut-open view;
Fig. 5: tiltedly draw the spring-fixed structure synoptic diagram;
Fig. 6: fixed bar synoptic diagram;
Fig. 7: adapter synoptic diagram;
Wherein: 1, feet; 2, gas exhaust duct; 3, levelling valve group; 4, Connection Block; 5, height control lever; 6, support spring; 7, girdle ring; 8, air bag; 9, connecting link; 10, tiltedly draw spring-fixed structure; 10-1, rotation axis; 10-2, fixed bar; 10-3, adapter; 11, chute; 12, outlet pipe; 13, induction port joint flange; 14, main fixed bar; 15, movable table top; 16, buffering cabin; 17, tiltedly draw spring; 18, damping hole; 19, Connection Block guide rod; 20, lower chambers; 21, auxiliary chamber; 22, admission line; 23, load casing; 24, main regulation nut; 25, balance stem; 26, middle part spring; 27, connect platform; 28, swivel; 29, setting nut; 30, slide block; 31, cushion shell out of my cabin; 32, buffering cabin inner casing; 33, cross vent hole; 34, web member.
Embodiment
Below in conjunction with specific embodiment the present invention is described:
Embodiment:
Present embodiment is applied in the punching engine ground simulation test, is used for high-acruracy survey punching engine thrust.
With reference to accompanying drawing 1, a kind of device that reduces pipe end thrust and vibration of the present invention comprises movable floating platform supporting component and buffering cabin 16.
With reference to accompanying drawing 1 and accompanying drawing 2, described movable floating platform supporting component comprises load casing 23, movable table top 15, support spring 6, air spring and air spring height control assembly.The load casing is an end opening square structure, and each fixedly has a Connection Block 4 on four sidewalls of load casing, and four Connection Blocks are in four corners of load casing, at each Connection Block a Connection Block guide rod is arranged fixedly.
Movable table top is placed on load casing opening one end, is provided with two chutes at movable table top upper surface, be used for the buffering cabin on slide block cooperates the formation sliding pair.Movable table top fixedly has four cylindrical connecting links 9 on the bottom surface, the position of four connecting links is corresponding with the Connection Block position on the load wall box, and it is coaxial with the Connection Block guide rod on the Connection Block, each is to connecting by support spring between connecting link and the Connection Block guide rod, the support spring two ends are fixed with connecting link and the socket of Connection Block guide rod respectively, the central axis of all support springs is parallel to each other, and support spring support activity table top is in horizontality.Here four support springs mainly play supplemental support and highly spacing, and the static load anchorage force of movable table top and load bearing component thereof is provided.
Air spring comprises air bag 8, lower chambers 20 and auxiliary chamber 21, and air bag is constrained to 4 bent air bags by girdle ring 7, and the cross-sectional area of girdle ring place air bag is 2/3 of movable table top base area.Air bag one end is fixedlyed connected with middle part, movable table top bottom surface by top cover, the air bag other end is connected with lower chambers sealing crimping, the connecting portion of lower chambers and air bag is provided with damping hole 18, lower chambers is connected by pipeline with auxiliary chamber, auxiliary chamber is fixed on the load bottom half, and air spring provides the main support power of movable table top under the duty.
Air spring height control assembly comprises height control lever 5, levelling valve group 3, admission line 22 and gas exhaust duct 2, height control lever one end is fixed on movable table top bottom surface, the other end passes the levelling valve group, and height control lever is parallel to the support spring central axis.When movable table top reduced, height control lever moved downward thereupon, the inlet open in the control levelling valve group, and admission line to auxiliary chamber, and then has auxiliary chamber to enter in the air bag from external feed stream, makes movable table top return to original height; When movable table top raises, height control lever moves upward thereupon, vent valve in the control levelling valve group is opened, gas exhaust duct from auxiliary chamber to outside exhaust, just with the air in the air bag discharged in the outside atmosphere, thereby make platform return to original height, therefore can keep setting height by assurance activity table top.The levelling valve group be detecting element be again control element; it detects the distortion of air spring and inflation and the exhaust of control air spring at any time; make the vibration displacement amplitude of air spring less than 0.1mm; make movable table top keep Metacentre Height with the levelness of the outside horizontal outlet pipe guaranteeing to link to each other with the buffering cabin on the movable table top; air spring has constant rigidity characteristic and good shock-absorbing properties, has guaranteed the stability of buffering cabin link on the movable table top.
During air spring work, 4 bent air bags charge into pressurized air, form a pressurized air gas column.Along with the increase of oscillating load amount, the height of air spring reduces, and cavity volume reduces, and the rigidity of air spring increases, and the effective bearing area of 4 bent air bags strengthens, and this moment, the load-bearing capacity of air spring increased; When the oscillating load amount reduced, the height of air spring raise, and 4 bent bag volumes increase, and the rigidity of air spring reduces, and the effective bearing area of 4 bent air bags reduces, and this moment, the load-bearing capacity of air spring reduced.Like this, air spring is in effective stroke, and the height of air spring, cavity volume, load-bearing capacity are along with oscillating load increases progressively and reduce to have taken place that flexible transmission, amplitude and oscillating load are efficiently controlled stably.Utilize the levelling valve group, make air spring under any load, keep certain working depth.
With reference to accompanying drawing 3 and accompanying drawing 4, cushion out of my cabin that shape is cylindrical, the cylinder two ends are sphere, and stainless steel material is adopted in the buffering cabin, and the buffering cabin is by inside and outside two-layer the composition.Connect by 6 circumferentially uniform web members 34 between buffering cabin inner casing 32 and the shell 31, the length of web member equals to cushion the axial length of cabin cylindrical section, and had vent hole on each web member, on the inner casing of buffering cabin, also have some vent holes 33 of crossing, and the vent hole of crossing on the inner casing of buffering cabin circumferentially evenly distributes along the inner casing xsect, the purpose that vent hole was set is to improve flow quality, make the high speed field of turbulent flow homogenizing that enters, and reduce outside vertically draft tube to the shock load of movable table top.
In buffering cabin horizontal direction one side the horizontal outlet pipe 12 that connects outside ramjet engine air inlet is arranged fixedly, and outlet pipe is sealedly and fixedly connected respectively with buffering cabin inner casing and shell, cushions that air-flow enters horizontal outlet pipe from cushioning inner casing chamber, cabin in the cabin.The outlet pipe of buffering cabin horizontal direction has two, two outlet pipe central axis are parallel to each other, and the plane of two outlet pipe central axis formations is parallel with the central axis of buffering cabin cylindrical section, and two outlet pipe central axis cushion cabin cylindrical section center cross-sectional symmetry relatively.
Shell outside surface bottom is provided with two slide blocks 30 cushioning out of my cabin, and the slide block direction is parallel with the outlet pipe central axis, and slide block is corresponding with the chute 11 of movable table top upper surface, constitutes sliding pair.The chute material adopts metal rubber material, utilizes the bigger damping characteristic of metal-rubber, makes horizontal outlet pipe thermal expansion stress obtain discharging, and then makes along the buffering cabin axially and decay fast along the vibration of chute direction.
Connect the outside vertically air admission hole of draft tube cushioning also to have on the shell out of my cabin, the air admission hole central axis has joint flange 13 to connect outside vertically draft tube perpendicular to the outlet pipe central axis at induction port.Outside vertically draft tube is used the insensitive multiply bellows of pressure, stainless steel material, and length-diameter ratio should satisfy: 15≤L/D≤50 make this part-structure have better flexibility.The air admission hole that cushions on the shell out of my cabin has two, and the central axis of buffering cabin cylindrical section is crossed on the plane that the central axis of two air admission holes constitutes.
Outer surface of outer cover at buffering cabin horizontal direction opposite side fixedly has the platform 27 of connection, and it is hinged at center and the balance stem of balance stem 25 to connect platform, and the balance stem center is on the cylindrical section center cross-sectional of buffering cabin.The balance stem two ends tiltedly draw the swivel 28 of spring 17 1 ends hinged with two respectively, two are tiltedly drawn the other end of spring tiltedly to draw spring-fixed structure 10 to fixedly connected with two that are fixed on movable table top upper surface both sides respectively, fixed bar 10-2, the rotation axis 10-1 and the adapter 10-3 that tiltedly draw spring-fixed structure to comprise to be fixed on movable table top, adapter is fixedlyed connected with tiltedly drawing spring end, rotation axis is parallel to the central axis of buffering cabin cylindrical section, and adapter and fixed bar are rotationally connected by rotation axis; Connecting you portion is connected by middle part spring 26 with the main fixed bar 14 that is fixed on movable table top upper surface middle part, and the central axis of middle part spring is perpendicular to the central axis of buffering cabin cylindrical section, and the central axis of middle part spring is on the cylindrical section center cross-sectional of buffering cabin.Setting nut 29 also is installed on adapter, is used for regulating the tension force that tiltedly draws spring; On the main fixed bar of movable table top upper surface middle part main regulation nut 24 is installed also, is used for regulating tension force and the locking middle part spring of middle part spring.
After the buffering cabin connects outside vertically draft tube and outer air intake duct, outside air feed is by the flexible bellow vertical air inlet, according to the vibration principle system, constitute positive and negative pendulum structure at the movable table top of vertical direction and flexible bellow, thereby form vertical ultralow frequency small magnitude vibration; The horizontal outlet pipe of two connection outer air intake ducts and the buffering middle part spring of cabin opposite side setting and two tiltedly draw spring to constitute positive negative stiffness parallel institution, and dynamic rate is reduced greatly, improve axial misalignment frequency stabilization rate with steady air flow.Special employing air spring height is regulated has soft and smooth excessive characteristic, air spring is inflated to the set pressure state before test, be used for subduing the gravity of table top upper member, by the height control lever that makes, control inlet and outlet solenoid valve makes table top keep Metacentre Height, be superlow frequency vibrating and because vibrational energy is absorbed so vibration amplitude is little, can guarantee to cushion the levelness of the horizontal outlet pipe in cabin and outer air intake duct in vertical and axial vibration frequency like this; Owing to adopt sliding pair to absorb the thermal expansion distortion, thermal stress fully discharges in addition, so horizontal direction is very little to the additional thrust that engine inlets produce, and can satisfy the technical requirement of high precision thrust measurement.
Technical scheme provided by the present invention has realized the physical isolation of the combined load influence of air intake duct and external feed stream pipeline.Moving axially owing to movable table top in the course of work of system, guarantee that pipeline is approximately zero in the rigidity of the inlet end of movable table top, make the external feed stream pipeline obtain isolating to the influence of measuring system, the occasion that need carry out thrust measurement applicable to a class air inlet or liquid medium subjects, test findings shows the influence that can significantly be reduced in pipe end thrust and coupled vibrations under the Action of Combined Loads, satisfies the needs of thrust measurement.

Claims (7)

1. a device that reduces pipe end thrust and vibration is characterized in that: comprise movable floating platform supporting component and buffering cabin;
Described movable floating platform supporting component comprises load casing, movable table top, support spring, air spring and air spring height control assembly; Load casing one end opening is evenly equipped with some Connection Blocks at the load wall box; Movable table top is placed on load casing opening one end, be provided with chute at movable table top upper surface, movable table top fixedly has some connecting links on the bottom surface, the connecting link of movable table top bottom surface is identical with the Connection Block number on the load wall box, and position correspondence, each is to connecting by support spring between connecting link and the Connection Block, and the central axis of all support springs is parallel to each other, and support spring support activity table top is in horizontality; Air spring comprises air bag, lower chambers and auxiliary chamber, air bag one end is fixedlyed connected with middle part, movable table top bottom surface by top cover, the air bag other end is connected with lower chambers sealing crimping, the connecting portion of lower chambers and air bag is provided with damping hole, lower chambers is connected by pipeline with auxiliary chamber, and auxiliary chamber is fixed on the load bottom half; Air spring height control assembly comprises height control lever, the levelling valve group, admission line and gas exhaust duct, height control lever one end is fixed on movable table top bottom surface, the other end passes the levelling valve group, height control lever is parallel to the support spring central axis, when movable table top reduces, height control lever moves downward, inlet open in the control levelling valve group, admission line from external feed stream to auxiliary chamber, when movable table top raises, height control lever moves upward, and the vent valve in the control levelling valve group is opened, gas exhaust duct from auxiliary chamber to outside exhaust;
Described buffering shape out of my cabin is cylindrical, and the cylinder two ends are sphere, and the buffering cabin was connected by some web members between buffering cabin inner casing and the shell, and had vent hole on each web member by inside and outside two-layer the composition, also has some vent holes of crossing on the inner casing of buffering cabin; In buffering cabin horizontal direction one side the outlet pipe that connects the outer air intake duct is arranged fixedly, and outlet pipe and cushion the cabin inner casing and shell is tightly connected respectively; The shell outside surface is provided with slide block cushioning out of my cabin, and the slide block direction is parallel with the outlet pipe central axis, and slide block is corresponding with the chute of movable table top upper surface, constitutes sliding pair; Connect the outside vertically air admission hole of draft tube cushioning also to have on the shell out of my cabin, the air admission hole central axis is perpendicular to the outlet pipe central axis; Outside surface at buffering cabin horizontal direction opposite side shell fixedly has the connection platform, it is hinged in the balance stem center to connect platform and balance stem, the balance stem two ends tiltedly draw the swivel of a spring end separately hinged with two respectively, two are tiltedly drawn the other end of spring tiltedly to draw spring-fixed structure to fixedly connected with two that are fixed on movable table top upper surface both sides respectively, tiltedly draw spring-fixed structure to comprise the fixed bar that is fixed on movable table top, rotation axis and adapter, adapter is fixedlyed connected with tiltedly drawing spring end, rotation axis is parallel to the central axis of buffering cabin cylindrical section, and adapter and fixed bar are rotationally connected by rotation axis; Connect you portion and be connected by the middle part spring with the main fixed bar that is fixed on movable table top upper surface middle part, and the central axis of middle part spring is perpendicular to the central axis of buffering cabin cylindrical section.
2. a kind of device that reduces pipe end thrust and vibration according to claim 1, it is characterized in that: air bag is constrained to 4 bent air bags by girdle ring, and the cross-sectional area of girdle ring place air bag is 2/3 of movable table top base area.
3. a kind of device that reduces pipe end thrust and vibration according to claim 1 is characterized in that: setting nut is installed on the adapter, is used for regulating the tension force that tiltedly draws spring; On the main fixed bar of movable table top upper surface middle part the main regulation nut is installed also, is used for regulating the tension force of middle part spring.
4. according to the arbitrary described a kind of device that reduces pipe end thrust and vibration of claim 1-3, it is characterized in that: the vent hole of crossing on the inner casing of buffering cabin circumferentially evenly distributes along the inner casing xsect.
5. a kind of device that reduces pipe end thrust and vibration according to claim 1 is characterized in that: the chute employing metal rubber material of movable table top upper surface.
6. a kind of device that reduces pipe end thrust and vibration according to claim 1, it is characterized in that: buffering cabin horizontal direction has two outlet pipes, two outlet pipe central axis are parallel to each other, and the plane of two outlet pipe central axis formations is parallel with the central axis of buffering cabin cylindrical section, and two outlet pipe central axis cushion cabin cylindrical section center cross-sectional symmetry relatively; The balance stem center is on the cylindrical section center cross-sectional of buffering cabin, and the central axis of middle part spring is on the cylindrical section center cross-sectional of buffering cabin.
7. according to claim 1 or 6 described a kind of devices that reduce pipe end thrust and vibration, it is characterized in that: cushioning out of my cabin has two air admission holes on the shell, and the central axis of buffering cabin cylindrical section is crossed on the plane that the central axis of two air admission holes constitutes.
CN 201110386266 2011-11-28 2011-11-28 Device for reducing thrust and vibration at pipeline ends Active CN102507065B (en)

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CN102141733B (en) * 2010-01-28 2012-11-14 上海微电子装备有限公司 Vibration absorption device and photolithographic device using same

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