CN102330782B - Air spring vibration isolator based on gas-liquid damping and coupling action - Google Patents
Air spring vibration isolator based on gas-liquid damping and coupling action Download PDFInfo
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- CN102330782B CN102330782B CN201010564362.5A CN201010564362A CN102330782B CN 102330782 B CN102330782 B CN 102330782B CN 201010564362 A CN201010564362 A CN 201010564362A CN 102330782 B CN102330782 B CN 102330782B
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- urceolus
- shock absorber
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- air cushion
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- 238000013016 damping Methods 0.000 title claims abstract description 97
- 239000007788 liquid Substances 0.000 title claims abstract description 23
- 230000001808 coupling effect Effects 0.000 title abstract 2
- 239000006096 absorbing agent Substances 0.000 claims description 31
- 230000035939 shock Effects 0.000 claims description 31
- 230000008878 coupling Effects 0.000 claims description 16
- 238000010168 coupling process Methods 0.000 claims description 16
- 238000005859 coupling reaction Methods 0.000 claims description 16
- 229910000831 Steel Inorganic materials 0.000 claims description 14
- 239000010959 steel Substances 0.000 claims description 14
- 230000005540 biological transmission Effects 0.000 claims description 10
- 230000007246 mechanism Effects 0.000 claims description 8
- 210000000689 upper leg Anatomy 0.000 claims description 4
- 238000007789 sealing Methods 0.000 claims description 3
- 238000009827 uniform distribution Methods 0.000 claims description 2
- 230000033001 locomotion Effects 0.000 abstract description 7
- 238000005259 measurement Methods 0.000 abstract description 5
- 230000001276 controlling effect Effects 0.000 description 10
- 239000003921 oil Substances 0.000 description 10
- 238000002955 isolation Methods 0.000 description 5
- 238000006073 displacement reaction Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000011148 porous material Substances 0.000 description 2
- 230000001105 regulatory effect Effects 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 1
- 239000010425 asbestos Substances 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000002401 inhibitory effect Effects 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 229910052895 riebeckite Inorganic materials 0.000 description 1
- 230000000153 supplemental effect Effects 0.000 description 1
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Abstract
The invention discloses an air spring vibration isolator based on a gas-liquid damping and coupling action, belonging to the fields of ultra precise measurement and processing. Multilayer cylindrical damping sheets of the vibration isolator are assembled at the bottom of an inner cylinder; radial through holes are arranged at the upper ends of the multilayer cylindrical damping sheets; damping oil is injected between the bottom of the inner side of the outer cylinder and the bottom of the inner cylinder; and a gear and rack-driving throttling hole area adjusting device is assembled below a throttling hole on the inner wall of an outer cylinder. The total area of the throttling hole is reasonably adjusted by using air throttling damping and the throttling hole area adjusting device; damping with optimal magnitude can be provided when strong vibration and impact load exist in the vertical direction; the reciprocating motion of liquid viscous damping and the multilayer cylindrical damping sheets relative to the outer cylinder provides damping for the vibration isolator; different viscous dampings are acquired by selecting damping oil with different viscosities; and the damping with optimal magnitude can be provided when strong vibration, microvibration and impact load exist in the vertical direction.
Description
Technical field
The invention belongs to ultra precise measurement and manufacture field, particularly a kind of air cushion shock absorber based on gas-liquid damping coupling.
Background technique
The isolation mounting of excellent performance is one of key technology of ultra precise measurement and processing.Air cushion shock absorber has that good superlow frequency vibration isolating performance, bearing capacity are high, equivalent stiffness is lower, natural frequency is insensitive to load change, system easily realizes, the advantage such as low consumes energy, along with the development of ultra precise measurement and processing technique, nanometer technology and vlsi circuit manufacturing technology, air cushion shock absorber has obtained application more and more widely.The vibration of carrying the gage frame of all exposure elements as lithography machine is isolated.
The leading indicator that affects anti-vibration performance is natural frequency and the damping ratio of isolation mounting, and under the effect of damping, the typical vibration transmissibility of vibrating isolation system as shown in Figure 1.As seen from Figure 1, in resonance region damping, vibration is had to very significant inhibitory action, in resonance region, situation is just in time contrary in addition.Therefore,, in order to guarantee the anti-vibration performance of his vibrating isolation system, must system damping be rationally set according to actual conditions.
Patent US20030006540A1 " Self-aligning mechanism for pneumatic vibration isolators " adopts the damper of single damping hole, for vibration isolator provides air throttle damping, at present typical air cushion shock absorber all adopts the fixing throttle orifice of pore size, utilize air throttle damping for vibration isolator provide damping ，Ru U.S. TMC, Newport and Japan bright vertical smart machine air cushion shock absorber product.
Patent CN1670399 " air cushion shock absorber of adjustable rigidity and damping " proposes to utilize a plurality of damping adjustable levers to regulate respectively the size of a plurality of slit shape axial holes, to realize the adjusting of air throttle damping.The damping regulation structure more complicated of this invention, precision is difficult for assurance, and a plurality of damping adjustable levers are worked respectively in addition, cause the size of respectively organizing axial hole can not guarantee unanimously.
No matter to adopt the fixing damping hole of pore size or the adjustable damping hole of size to provide damping for air cushion shock absorber, all there is a defect in obvious principle, during both for the microvibration of ultralow frequency, low speed, micrometric displacement, damping hole is substantially inoperative, because while there is the superlow frequency vibrating of low speed and micrometric displacement in vibration isolator, the pressure difference of throttle orifice both sides is almost nil, only have indivisible air to flow through throttle orifice, the damping force of generation is almost nil.
Consider vibration isolator exist by force in the vertical direction shake, micro-shaking and the situation such as impulsive load, there is distinct disadvantage in the damping link of the described air cushion shock absorber of foregoing invention.
Summary of the invention
The problem existing in order to solve existing air cushion shock absorber, the present invention proposes a kind of air cushion shock absorber based on gas-liquid damping coupling, to meet the needs of superlow frequency vibration isolating in ultra precise measurement processing and assembling and setting field.For the structural feature of just putting serial mechanism and existing air cushion shock absorber, the present invention proposes to install the throttle hole area controlling device of gear rack transmission below the throttle orifice of urceolus inside, in inner core bottom, multi-layer barrel damping fin is installed, appropriate damping oil is injected in urceolus bottom, forms the air cushion shock absorber based on gas-liquid damping coupling.
The object of the present invention is achieved like this:
An air cushion shock absorber based on gas-liquid damping coupling, its mechanical model as shown in Figure 2.Described air cushion shock absorber is at the inner equipped inner core of urceolus, it is outside that air-spring bellows is sleeved on inner core upper end, urceolus is by its upper end boss and air-spring bellows lower end sealed attachment, inner core is by affixed annular cover plate and the air-spring bellows upper end sealed attachment in its upper end, inlet hole is arranged on outer drum outer wall, the one group of throttle orifice that is circumferential arrangement is arranged on outer tube inner wall, in the equipped circular bottom plate of urceolus lower end sealing, strut is fitted in inner core chamber through annular cover plate, upper end and the annular cover plate of oblique pull wire rope are affixed, the lower end of oblique pull wire rope and strut lower end are affixed, oblique pull wire rope forms simple pendulum, load-bearing plate is packed in post upper, steel spring is arranged on inner core bottom, piston contacts cooperation with steel spring, the lower end of flexible hinge is fitted on piston upper-end surface, the upper end of flexible hinge is fitted in strut lower end, flexible hinge, piston and steel spring form swinging mechanism, multi-layer barrel damping fin is fitted in inner core bottom, and radial direction through hole is arranged on multi-layer barrel damping fin upper end, between urceolus inside bottom and inner core bottom, injects damping oil, the throttle hole area controlling device of gear rack transmission is fitted in the throttle orifice below on outer tube inner wall, and be positioned at homonymy with inlet hole, the throttle hole area controlling device of gear rack transmission is comprised of back-up ring, flange, gear shaft block, gear shaft, back-up ring is liftably sleeved on outer tube inner wall, flange is packed on outer tube inner wall, gear shaft block is arranged on flange, the gear position of gear shaft and the engagement of the tooth bar position of gear shaft block, and the inner end portion of gear shaft is rotatably fitted in the hole of back-up ring.
The present invention has following characteristics and good result:
1. the present invention proposes, in inner core bottom, multi-layer barrel damping fin is installed, appropriate damping oil is injected in urceolus bottom, utilize liquid viscous damping and multi-layer barrel damping fin with respect to the to-and-fro motion of urceolus, for vibration isolator provides damping, select the damping oil of different viscosities to obtain different liquid viscous dampings, exist in the vertical direction shake by force, micro-shake and the situation of impulsive load under the air throttle damping of best size all can be provided, having overcome single or multiple damping holes cannot provide the shortcoming of the damping force of suitable size in the superlow frequency vibrating situation of low speed and micrometric displacement.
The viscous damping force f of multi-layer barrel damping fin output
ddepend on following factor, be shown below.
f
d＝cv
α
In formula: c is damping constant, with area of contact positive correlation; V is relative velocity; α is speed index.
When the vertical vibration from environment is delivered to inner core, cause the vertical vibration of multi-layer barrel damping fin, the damping oil generation relative movement of multi-layer barrel damping fin and urceolus bottom, for air cushion shock absorber provides liquid viscous damping, tubular damping fin adopts multi-layer structure to be conducive to increase the area of contact of damping oil and tubular damping fin in the confined space, thereby guarantees still can export enough large damping force in low speed and micrometric displacement situation.
2. utilize air throttle damping and throttle hole area controlling device, the size of the reasonable adjusting joint discharge orifice gross area, exist in the vertical direction shake by force and the situation of impulsive load under the damping of best size is provided, throttle hole area controlling device can regulate the size of all throttle orifices in the same sizely simultaneously, overcome existing patent damping adjustment device and regulated respectively, to such an extent as to regulated inconsistent shortcoming.
3. one group of throttle orifice that the present invention proposes to be circumferential arrangement is arranged on outer tube inner wall, the throttle hole area controlling device of gear rack transmission is installed below the throttle orifice of urceolus inside, this damping hole set-up mode has taken into full account the structural feature based on just putting the air cushion shock absorber of serial mechanism, makes whole vibration isolator structure compact and reasonable more.
Accompanying drawing explanation
Fig. 1 is the typical vibration transmissibility plotted curve of vibrating isolation system;
Fig. 2 is the mechanical model schematic diagram of the air cushion shock absorber based on gas-liquid damping coupling;
Fig. 3 is the generalized section of the air cushion shock absorber based on gas-liquid damping coupling;
Fig. 4 is the 3D generalized section of the air cushion shock absorber based on gas-liquid damping coupling;
Fig. 5 is the 3D generalized section of the throttle hole area controlling device of gear rack transmission;
Fig. 6 is the 3D generalized section of multi-layer barrel damping fin.
In figure: 1. load-bearing plate; 2. annular cover plate; 3. strut; 4. oblique pull wire rope; 5. air-spring bellows; 6. inner core; 7. urceolus; 8. flexible hinge; 9. piston; 10. throttle orifice; The throttle hole area controlling device of 11. gear rack transmissions; 11a. back-up ring; 11b. flange; 11c. gear shaft block; 11d. gear shaft; 12. steel springs; 13. suction ports; 14. circular bottom plate; 15. damping oils; 16. multi-layer barrel damping fins; 17. radial direction through hole.
Embodiment
Below in conjunction with accompanying drawing, specific embodiments of the invention are elaborated, as shown in Fig. 3, Fig. 4, Fig. 5 and Fig. 6, have shown an embodiment of air cushion shock absorber of the present invention.
Described air cushion shock absorber is at the inner equipped inner core 6 of urceolus 7, it is outside that air-spring bellows 5 is sleeved on inner core 6 upper ends, urceolus 7 is by its upper end boss and air-spring bellows 5 lower end sealed attachment, inner core 6 is by its upper end affixed annular cover plate 2 and air-spring bellows 5 upper end sealed attachment, inlet hole 13 is arranged on urceolus 7 outer walls, the one group of throttle orifice 10 that is circumferential arrangement is arranged on urceolus 7 inwalls, in the equipped circular bottom plate 14 of urceolus 7 lower end sealing, strut 3 is fitted in inner core 6 chambeies through annular cover plate 2, the upper end of oblique pull wire rope 4 and annular cover plate 2 are affixed, the lower end of oblique pull wire rope 4 and strut 3 lower ends are affixed, oblique pull wire rope 4 forms simple pendulum, load-bearing plate 1 is packed in strut 3 upper ends, steel spring 12 is arranged on inner core 6 bottoms, piston 9 contacts cooperation with steel spring 12, the lower end of flexible hinge 8 is fitted on piston 9 upper-end surfaces, the upper end of flexible hinge 8 is fitted in strut 3 lower ends, flexible hinge 8, piston 9 and steel spring 12 form swinging mechanism, multi-layer barrel damping fin 16 is fitted in inner core 6 bottoms, and radial direction through hole 17 is arranged on multi-layer barrel damping fin 16 upper ends, between urceolus 7 inside bottom and inner core 6 bottoms, injects damping oil 15, the throttle hole area controlling device 11 of gear rack transmission is fitted in throttle orifice 10 belows on urceolus 7 inwalls, and be positioned at homonymy with inlet hole 13, the throttle hole area controlling device 11 of gear rack transmission is by back-up ring 11a, flange 11b, gear shaft block 11c, gear shaft 11d forms, back-up ring 11a is liftably sleeved on urceolus 7 inwalls, flange 11b is packed on urceolus 7 inwalls, gear shaft block 11c is arranged on flange 11b, the gear position of gear shaft 11d and the engagement of the tooth bar position of gear shaft block 11c, the inner end portion of gear shaft 11d is rotatably fitted in the hole of back-up ring 11a.
The number of plies of described multi-layer barrel damping fin 16 is 1 layer to 30 layers.
The scope of 40 ℃ of kinematical viscosity of described damping oil 15 is 10mm
2/ s-70mm
2/ s.
The radical of described oblique pull wire rope 4 is 3 to 50, and uniform.
Described oblique pull wire rope 4 is 0 ° to 30 ° with the scope of vertical line angle.
Described oblique pull wire rope 4 is organic independent wire strand core wire rope, Fibre-core cable, asbestos core wire rope, wire-core wire rope that circle thigh, special-shaped thigh or multiply are not reversed.
The hole count of described throttle orifice 10 is 2 to 100, and is circumference uniform distribution.
Described steel spring 12 is helical spring, taper spring, butterfly spring or rubber spring.
Analysis, from the vibration of environment, can be divided into vertical vibration and horizontal vibration according to direction of vibration.Horizontal vibration is successively by urceolus 7, air-spring bellows 5, inner core 6, just put serial mechanism (oblique pull wire rope 4, flexible hinge 8, piston 9 and steel spring 12 form) and strut 3, act on load-bearing plate 1, except just putting serial mechanism, other links are approximately rigid body, therefore horizontal vibration can not cause that inner core 6 is with respect to the motion of urceolus 7, and 16 pairs of horizontal vibrations of throttle orifice 10 and multi-layer barrel damping fin do not play damping function, vertical vibration is successively by urceolus 7, air-spring bellows 5, inner core 6, oblique pull wire rope 4 and strut 3, act on load-bearing plate 1, except air-spring bellows 5, other links are approximately rigid body, flexible hinge 8, the pendulum that falls that piston 9 and steel spring 12 form only plays the effect of supplemental support in vertical direction, therefore vertical vibration can cause that inner core 6 is with respect to the to-and-fro motion of urceolus 7, the air of interior outer chamber passes in and out by throttle orifice 10, for vertical vibration provides air throttle damping, multi-layer barrel damping fin 16 is along with the to-and-fro motion of inner core 6 with respect to urceolus 7, there is relative movement with the damping oil 15 of urceolus 7 bottoms, thereby for vertical vibration provides liquid viscous damping.
Claims (8)
1. the air cushion shock absorber based on gas-liquid damping coupling, at the inner equipped inner core (6) of urceolus (7), it is outside that air-spring bellows (5) is sleeved on inner core (6) upper end, urceolus (7) is by its upper end boss and air-spring bellows (5) lower end sealed attachment, inner core (6) is by its upper end affixed annular cover plate (2) and air-spring bellows (5) upper end sealed attachment, inlet hole (13) is arranged on urceolus (7) outer wall, the one group of throttle orifice (10) that is circumferential arrangement is arranged on urceolus (7) inwall, in the equipped circular bottom plate (14) of urceolus (7) lower end sealing, strut (3) is fitted in inner core (6) chamber through annular cover plate (2), the upper end of oblique pull wire rope (4) and annular cover plate (2) are affixed, the lower end of oblique pull wire rope (4) and strut (3) lower end are affixed, oblique pull wire rope (4) forms simple pendulum, load-bearing plate (1) is packed in strut (3) upper end, steel spring (12) is arranged on inner core (6) bottom, piston (9) contacts cooperation with steel spring (12), the lower end of flexible hinge (8) is fitted on piston (9) upper-end surface, the upper end of flexible hinge (8) is fitted in strut (3) lower end, flexible hinge (8), piston (9) and steel spring (12) form swinging mechanism, described air cushion shock absorber is characterised in that: multi-layer barrel damping fin (16) is fitted in inner core (6) bottom, radial direction through hole (17) is arranged on multi-layer barrel damping fin (16) upper end, between urceolus (7) inside bottom and inner core (6) bottom, inject damping oil (15), the throttle hole area controlling device (11) of gear rack transmission is fitted in throttle orifice (10) below on urceolus (7) inwall, and be positioned at homonymy with inlet hole (13), the throttle hole area controlling device (11) of gear rack transmission is by back-up ring (11a), flange (11b), gear shaft block (11c), gear shaft (11d) forms, back-up ring (11a) is liftably sleeved on urceolus (7) inwall, flange (11b) is packed on urceolus (7) inwall, gear shaft block (11c) is arranged on flange (11b), the tooth bar position engagement of the gear position of gear shaft (11d) and gear shaft block (11c), the inner end portion of gear shaft (11d) is rotatably fitted in the hole of back-up ring (11a).
2. the air cushion shock absorber based on gas-liquid damping coupling according to claim 1, is characterized in that: the number of plies of described multi-layer barrel damping fin (16) is 1 layer to 30 layers.
3. the air cushion shock absorber based on gas-liquid damping coupling according to claim 1, is characterized in that: the scope of 40 ℃ of kinematical viscosity of described damping oil (15) is 10mm
2/ s-70mm
2/ s.
4. the air cushion shock absorber based on gas-liquid damping coupling according to claim 1, is characterized in that: the radical of described oblique pull wire rope (4) is 3 to 50, and uniform.
5. the air cushion shock absorber based on gas-liquid damping coupling according to claim 1, is characterized in that: described oblique pull wire rope (4) is 0 ° to 30 ° with the scope of vertical line angle.
6. the air cushion shock absorber based on gas-liquid damping coupling according to claim 1, is characterized in that: described oblique pull wire rope (4) is organic independent wire strand core wire rope, Fibre-core cable, the wire-core wire rope that circle thigh, special-shaped thigh or multiply are not reversed.
7. the air cushion shock absorber based on gas-liquid damping coupling according to claim 1, is characterized in that: the hole count of described throttle orifice (10) is 2 to 100, and is circumference uniform distribution.
8. the air cushion shock absorber based on gas-liquid damping coupling according to claim 1, is characterized in that: described steel spring (12) is helical spring, taper spring, butterfly spring.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201010564362.5A CN102330782B (en) | 2010-11-30 | 2010-11-30 | Air spring vibration isolator based on gas-liquid damping and coupling action |
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| CN201010564362.5A CN102330782B (en) | 2010-11-30 | 2010-11-30 | Air spring vibration isolator based on gas-liquid damping and coupling action |
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| CN102330782A CN102330782A (en) | 2012-01-25 |
| CN102330782B true CN102330782B (en) | 2014-02-05 |
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| CN103062324B (en) * | 2012-12-19 | 2015-02-11 | 哈尔滨工业大学 | Spring vibration isolation platform based on spring zero position reference and laser auto-collimation measurement |
| CN104912992B (en) * | 2014-03-14 | 2017-03-15 | 长春孔辉汽车科技股份有限公司 | Membrane type amplitude correlation vibroshock |
| CN108468739B (en) * | 2018-05-30 | 2024-06-04 | 浙江科技学院 | Cylinder ring type damping adjustable hydraulic shock absorber |
| CN110762155B (en) * | 2019-11-14 | 2021-04-20 | 北京航空航天大学 | Passive air spring vibration reduction mechanism with universal damper and variable rubber membrane |
| CN111188870B (en) * | 2020-03-02 | 2020-12-01 | 中国地震局工程力学研究所 | Electrical equipment anti-pulling shock isolation device with vertical tuning mass |
| CN112648483B (en) * | 2020-12-12 | 2021-10-15 | 山东金桥保安器材有限公司 | Intelligent vehicle speed monitoring device for intelligent transportation |
| CN113074211B (en) * | 2021-03-25 | 2022-10-04 | 天津大学 | Frequency-dependent passive intelligent variable damping control device |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5779010A (en) * | 1996-07-12 | 1998-07-14 | Technical Manufacturing Corporation | Suspended low-frequency horizontal pendulum isolator for vibration isolation systems |
| US6123312A (en) * | 1998-11-16 | 2000-09-26 | Dai; Yuzhong | Proactive shock absorption and vibration isolation |
| US6547225B1 (en) * | 2001-04-17 | 2003-04-15 | Technical Manufacturing Corporation | Pneumatic isolator with barometric insensitivity |
| CN2700639Y (en) * | 2004-05-08 | 2005-05-18 | 杨德君 | Air spring shock damper capable of changing toughness and damping automatically |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6953109B2 (en) * | 2002-10-08 | 2005-10-11 | Nikon Corporation | Vibration isolator with low lateral stiffness |
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2010
- 2010-11-30 CN CN201010564362.5A patent/CN102330782B/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5779010A (en) * | 1996-07-12 | 1998-07-14 | Technical Manufacturing Corporation | Suspended low-frequency horizontal pendulum isolator for vibration isolation systems |
| US6123312A (en) * | 1998-11-16 | 2000-09-26 | Dai; Yuzhong | Proactive shock absorption and vibration isolation |
| US6547225B1 (en) * | 2001-04-17 | 2003-04-15 | Technical Manufacturing Corporation | Pneumatic isolator with barometric insensitivity |
| CN2700639Y (en) * | 2004-05-08 | 2005-05-18 | 杨德君 | Air spring shock damper capable of changing toughness and damping automatically |
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