CN102338188B - Air spring vibration isolator based on piston type liquid viscous damping action - Google Patents
Air spring vibration isolator based on piston type liquid viscous damping action Download PDFInfo
- Publication number
- CN102338188B CN102338188B CN 201010564271 CN201010564271A CN102338188B CN 102338188 B CN102338188 B CN 102338188B CN 201010564271 CN201010564271 CN 201010564271 CN 201010564271 A CN201010564271 A CN 201010564271A CN 102338188 B CN102338188 B CN 102338188B
- Authority
- CN
- China
- Prior art keywords
- piston
- type liquid
- liquid viscous
- shock absorber
- viscous damping
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000013016 damping Methods 0.000 title claims abstract description 80
- 239000007788 liquid Substances 0.000 title claims abstract description 27
- 230000035939 shock Effects 0.000 claims abstract description 29
- 229910000831 Steel Inorganic materials 0.000 claims abstract description 17
- 239000010959 steel Substances 0.000 claims abstract description 17
- 239000006096 absorbing agent Substances 0.000 claims description 28
- 238000007789 sealing Methods 0.000 claims description 3
- 238000004891 communication Methods 0.000 claims description 2
- 238000009827 uniform distribution Methods 0.000 claims description 2
- 238000005259 measurement Methods 0.000 abstract description 5
- 238000012545 processing Methods 0.000 abstract description 4
- 230000000694 effects Effects 0.000 description 6
- 238000002955 isolation Methods 0.000 description 6
- 238000006073 displacement reaction Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 210000000689 upper leg Anatomy 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 1
- 239000010425 asbestos Substances 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000002401 inhibitory effect Effects 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 229910052895 riebeckite Inorganic materials 0.000 description 1
- 230000000153 supplemental effect Effects 0.000 description 1
Images
Landscapes
- Fluid-Damping Devices (AREA)
- Vibration Prevention Devices (AREA)
Abstract
The invention discloses an air spring vibration isolator based on piston type liquid viscous damping action, and belongs to the field of ultra-precise measurement and processing. The upper end and the lower end of a cable-stayed steel wire rope of the vibration isolator are fixedly connected with an annular cover plate and the lower end of a supporting rod respectively to form a simple pendulum mechanism; a steel spring is arranged at the bottom of an inner cylinder; a piston is contacted and matched with the steel spring; the upper end and the lower end of a flexure hinge are arranged at thelower end of the supporting rod and the upper end face of the piston respectively to form an inverted pendulum mechanism; a spiral damper tube is arranged outside a piston cavity; damping oil is injected into the bottom of the inner cylinder to enclose the spiral damper tube; and one port of the spiral damper tube is communicated with the interior of the piston, and the other end of the spiral damper tube is communicated with the damping oil. The air spring vibration isolator provides damp for a positive-inverted pendulum serial mechanism by using the liquid viscous damping action and the reciprocating motion of the piston, obtains different liquid viscous damping by selecting the damping oil with different viscosities, and can provide the optimal damping under the condition that strong vibration, micro vibration and shock loads exist in the horizontal direction of the vibration isolator.
Description
Technical field
The invention belongs to ultra precise measurement and manufacture field, particularly a kind of air cushion shock absorber based on piston type liquid viscous damping action.
Background technique
The isolation mounting of excellent performance is one of key technology of ultra precise measurement and processing.Air cushion shock absorber has that good superlow frequency vibration isolating performance, bearing capacity are high, equivalent stiffness is lower, natural frequency is insensitive to load change, system easily realizes, the advantage such as low consumes energy, along with the development of ultra precise measurement and processing technique, nanometer technology and vlsi circuit manufacturing technology, air cushion shock absorber has obtained using more and more widely.Carry the vibration isolation of the gage frame of all exposure elements such as lithography machine.
The leading indicator that affects anti-vibration performance is natural frequency and the damping ratio of isolation mounting, and under the effect of damping, the typical vibration transmissibility of vibrating isolation system as shown in Figure 1.As seen from Figure 1, in the resonance region damping vibration is had very significant inhibitory action, situation is just in time opposite in addition in the resonance region.Therefore, in order to guarantee the anti-vibration performance of his vibrating isolation system, must system damping rationally be set according to actual conditions.
Patent US2003006540A1 " Self-aligning mechanism for pneumatic vibration isolators " proposes the vibration isolator of pneumatic spring and simple pendulum series connection, it is characterized in that: an amount of damping oil is injected in the inner core bottom, the lower end of simple pendulum is immersed in the damping oil, utilize the effect of liquid viscous damping and simple pendulum with respect to the swing of inner core, produce horizontal damping, this damping mode is very common in the pendulum-type air cushion shock absorber.The liquid viscous damping force depends on following factor, is shown below.
f
d＝cv
α
In the formula: c is damping constant, with area of contact positive correlation; V is relative velocity; α is the speed index.
Because the area of contact of simple pendulum and damping oil is very limited, the damping function that can provide is very little, especially in the ultralow frequency of low speed and micrometric displacement in the situation, almost can't provide damping function.In addition, because the contact segment shape of simple pendulum and damping oil is very irregular, its damping function that provides has the shortcoming of strong nonlinearity, is unfavorable for the reasonable utilization of liquid viscous damping.
The substantially horizontal that considers vibration isolator exist shake by force, little shaking and the situation such as impulsive load, there is distinct disadvantage in the damping link in the described air cushion shock absorber of foregoing invention.
Summary of the invention
The problem that exists in order to solve existing air cushion shock absorber, the present invention proposes a kind of air cushion shock absorber based on piston type liquid viscous damping action, to satisfy the needs of superlow frequency vibration isolating in ultra precise measurement processing and the assembling and setting field.For the structural feature of just putting serial mechanism, the present invention proposes the external spirality damp tube of piston chamber of pendulum, and an amount of damping oil is injected in the inner core bottom, forms the air cushion shock absorber based on piston type liquid viscous damping action.
The object of the present invention is achieved like this:
A kind of air cushion shock absorber based on piston type liquid viscous damping action, its mechanical model as shown in Figure 2.Described air cushion shock absorber is at the inner equipped inner core of urceolus, it is outside that air-spring bellows is sleeved on the inner core upper end, urceolus is by its upper end boss and air-spring bellows lower end sealed attachment, inner core is by its upper end affixed annular cover plate and air-spring bellows upper end sealed attachment, inlet hole is arranged on the outer drum outer wall, the one group of throttle orifice that is circumferential arrangement is arranged on the outer tube inner wall, in the equipped circular bottom plate of urceolus lower end sealing, strut passes annular cover plate and is fitted in the inner core chamber, upper end and the annular cover plate of oblique pull wire rope are affixed, the lower end of oblique pull wire rope and strut lower end are affixed, the oblique pull wire rope consists of simple pendulum, load-bearing plate is packed in post upper, steel spring is installed in the inner core bottom, and piston contacts cooperation with steel spring, and the lower end of flexible hinge is fitted on the piston upper-end surface, the upper end of flexible hinge is fitted in strut lower end, flexible hinge, piston and steel spring consist of swinging mechanism; The spirality damp tube is fitted in the piston chamber outside, and damping oil is injected in the inner core bottom, and damping oil contains the spirality damp tube, and a port of spirality damp tube is communicated with internal piston, and its another port is communicated with damping oil.
The present invention has following characteristics and good result:
1. be delivered to from the horizontal vibration of environment and just put serial mechanism, cause reciprocating motion of the pistons, under the pressure difference effect of piston thrust and damping oil, damping oil in the spirality damp tube and the inwall generation relative movement of spirality damp tube, thus viscous damping provided for just putting serial mechanism.Adopt the spirality damp tube to be conducive in the confined space, increase to greatest extent the area of contact of damping oil and damp tube inwall, thereby guarantee in the superlow frequency vibrating situation of low speed and micrometric displacement, still can export enough large damping force.The viscous damping force of spirality damp tube output depends on following factor, is shown below.
f
d＝cv
α
In the formula: c is damping constant, with area of contact positive correlation; V is relative velocity; α is the speed index.
2. viscous damping force and the area of contact positive correlation of the output of spirality damp tube, the area of contact of spirality damp tube and damping oil depends primarily on spirality damp tube length L in the present invention
s, be shown below.
S＝dL
s
In the formula: d is form factor, with relative displacement positive correlation; S is area of contact; L
sBe spirality damp tube length.
By following formula as can be known, the present invention has solved because the shortcoming of the damping strong nonlinearity that the contact segment out-of-shape of simple pendulum and damping oil causes is conducive to the reasonable utilization of liquid viscous damping from structure.
3. the present invention utilizes the to-and-fro motion of the effect of liquid viscous damping and piston, provide damping for just putting serial mechanism, obtain the viscous dampings of different sizes by the damping oil of selecting different viscosities, exist in the horizontal direction shake by force, little shake and the situation of impulsive load under air cushion shock absorber disclosed by the invention all can provide sizeable damping.
4. the present invention proposes the external spirality damp tube of piston chamber of pendulum, and an amount of damping oil is injected in the inner core bottom, has formed the air cushion shock absorber based on piston type liquid viscous damping action.The setting of this damping structure has taken into full account the structural feature of just putting serial mechanism, so that whole vibration isolator structure compact and reasonable more.
Description of drawings
Fig. 1 is the typical vibration transmissibility plotted curve of vibrating isolation system;
Fig. 2 is the mechanical model schematic diagram based on the air cushion shock absorber of piston type liquid viscous damping action;
Fig. 3 is the generalized section based on the air cushion shock absorber of piston type liquid viscous damping action;
Fig. 4 is the 3D generalized section based on the air cushion shock absorber of piston type liquid viscous damping action;
Fig. 5 is the 3D generalized section of spirality damp tube.
Among the figure: 1. load-bearing plate; 2. annular cover plate; 3. strut; 4. oblique pull wire rope; 5. air-spring bellows; 6. inner core; 7. urceolus; 8. flexible hinge; 9. piston; 10. throttle orifice; 11. steel spring; 12. suction port; 13. circular bottom plate; 14. spirality damp tube; 15. damping oil.
Embodiment
Below in conjunction with accompanying drawing specific embodiments of the invention are elaborated, such as Fig. 3, Fig. 4 and shown in Figure 5, have shown an embodiment of air cushion shock absorber of the present invention.
Described air cushion shock absorber is at urceolus 7 inner equipped inner cores 6, it is outside that air-spring bellows 5 is sleeved on inner core 6 upper ends, urceolus 7 is by its upper end boss and air-spring bellows 5 lower end sealed attachment, inner core 6 is by its upper end affixed annular cover plate 2 and air-spring bellows 5 upper end sealed attachment, inlet hole 12 is arranged on urceolus 7 outer walls, the one group of throttle orifice 10 that is circumferential arrangement is arranged on urceolus 7 inwalls, in the equipped circular bottom plate 13 of urceolus 7 lower ends sealing, strut 3 passes annular cover plate 2 and is fitted in inner core 6 chambeies, the upper end of oblique pull wire rope 4 and annular cover plate 2 are affixed, the lower end of oblique pull wire rope 4 and strut 3 lower ends are affixed, oblique pull wire rope 4 consists of simple pendulum, load-bearing plate 1 is packed in strut 3 upper ends, steel spring 11 is installed in inner core 6 bottoms, and piston 9 contacts cooperation with steel spring 11, and the lower end of flexible hinge 8 is fitted on piston 9 upper-end surfaces, the upper end of flexible hinge 8 is fitted in strut 3 lower ends, flexible hinge 8, piston 9 and steel spring 11 consist of swinging mechanism; It is outside that spirality damp tube 14 is fitted in piston 9 chambers, and damping oil 15 is injected in inner core 6 bottoms, and damping oil 15 contains spirality damp tube 14, a port of spirality damp tube 14 and piston 9 internal communication, and its another port is communicated with damping oil 15.
Described spirality damp tube 14 is clockwise spiral damping pipe or counterclockwise spirality damp tube.
The inside diameter ranges of described spirality damp tube 14 is 5mm to 100mm.
The number of described spirality damp tube 14 is 1 to 30.
The radical of described oblique pull wire rope 4 is 3 to 50, and uniform.
Described oblique pull wire rope 4 is 0 ° to 30 ° with the scope of vertical line angle.
Described oblique pull wire rope 4 is organic independent wire strand core wire rope, Fibre-core cable, asbestos core wire rope, wire-core wire rope that circle thigh, special-shaped thigh or multiply are not reversed.
The hole count of described throttle orifice 10 is 2 to 100, and is circumference uniform distribution.
Described steel spring 11 is helical spring, taper spring, butterfly spring or rubber spring.
Analysis can be divided into vertical vibration and horizontal vibration from the vibration of environment according to direction of vibration.Horizontal vibration is successively by urceolus 7, air-spring bellows 5, inner core 6, just put serial mechanism (oblique pull wire rope 4, flexible hinge 8, piston 9 and steel spring 11) and strut 3, act on the load-bearing plate 1, except just putting serial mechanism, other links are approximately rigid body, therefore horizontal vibration can cause piston 9 to-and-fro motion, under the pressure difference effect of the thrust of piston 9 and damping oil 15, damping oil 15 in the spirality damp tube 14 and the inwall generation relative movement of spirality damp tube 14, thus viscous damping provided for just putting serial mechanism; Vertical vibration is successively by urceolus 7, air-spring bellows 5, inner core 6, oblique pull wire rope 4 and strut 3, act on the load-bearing plate 1, except air-spring bellows 5, other links are approximately rigid body, the pendulum that flexible hinge 8, piston 9 and steel spring 11 form only plays the effect of supplemental support in vertical direction, vertical vibration can not cause piston 9 to-and-fro motion, so 14 pairs of vertical vibrations of spirality damp tube do not play damping function.
Claims (9)
1. air cushion shock absorber based on piston type liquid viscous damping action, at the inner equipped inner core (6) of urceolus (7), it is outside that air-spring bellows (5) is sleeved on inner core (6) upper end, urceolus (7) is by its upper end boss and air-spring bellows (5) lower end sealed attachment, inner core (6) is by its upper end affixed annular cover plate (2) and air-spring bellows (5) upper end sealed attachment, inlet hole (12) is arranged on urceolus (7) outer wall, the one group of throttle orifice (10) that is circumferential arrangement is arranged on urceolus (7) inwall, in the equipped circular bottom plate (13) of urceolus (7) lower end sealing, strut (3) passes annular cover plate (2) and is fitted in inner core (6) chamber, the upper end of oblique pull wire rope (4) and annular cover plate (2) are affixed, the lower end of oblique pull wire rope (4) and strut (3) lower end are affixed, oblique pull wire rope (4) consists of simple pendulum, load-bearing plate (1) is packed in strut (3) upper end, steel spring (11) is installed in inner core (6) bottom, piston (9) contacts cooperation with steel spring (11), the lower end of flexible hinge (8) is fitted on piston (9) upper-end surface, the upper end of flexible hinge (8) is fitted in strut (3) lower end, flexible hinge (8), piston (9) and steel spring (11) consist of swinging mechanism, described air cushion shock absorber is characterised in that: it is outside that spirality damp tube (14) is fitted in piston (9) chamber, damping oil (15) is injected in inner core (6) bottom, damping oil (15) contains spirality damp tube (14), one port of spirality damp tube (14) and piston (9) internal communication, its another port is communicated with damping oil (15).
2. the air cushion shock absorber based on piston type liquid viscous damping action according to claim 1 is characterized in that: described spirality damp tube (14) is clockwise spiral damping pipe or counterclockwise spirality damp tube.
3. the air cushion shock absorber based on piston type liquid viscous damping action according to claim 1, it is characterized in that: the inside diameter ranges of described spirality damp tube (14) is 5mm to 100mm.
4. the air cushion shock absorber based on piston type liquid viscous damping action according to claim 1, it is characterized in that: the number of described spirality damp tube (14) is 1 to 30.
5. the air cushion shock absorber based on piston type liquid viscous damping action according to claim 1, it is characterized in that: the radical of described oblique pull wire rope (4) is 3 to 50, and uniform.
6. the air cushion shock absorber based on piston type liquid viscous damping action according to claim 1 is characterized in that: described oblique pull wire rope (4) is 0 ° to 30 ° with the scope of vertical line angle.
7. the air cushion shock absorber based on piston type liquid viscous damping action according to claim 1 is characterized in that: described oblique pull wire rope (4) is Fibre-core cable, the wire-core wire rope that circle strand, special-shaped strand or multiply are not reversed.
8. the air cushion shock absorber based on piston type liquid viscous damping action according to claim 1, it is characterized in that: the hole count of described throttle orifice (10) is 2 to 100, and is circumference uniform distribution.
9. the air cushion shock absorber based on piston type liquid viscous damping action according to claim 1, it is characterized in that: described steel spring (11) is helical spring, taper spring, butterfly spring.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201010564271 CN102338188B (en) | 2010-11-30 | 2010-11-30 | Air spring vibration isolator based on piston type liquid viscous damping action |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201010564271 CN102338188B (en) | 2010-11-30 | 2010-11-30 | Air spring vibration isolator based on piston type liquid viscous damping action |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102338188A CN102338188A (en) | 2012-02-01 |
| CN102338188B true CN102338188B (en) | 2013-09-18 |
Family
ID=45514081
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201010564271 Expired - Fee Related CN102338188B (en) | 2010-11-30 | 2010-11-30 | Air spring vibration isolator based on piston type liquid viscous damping action |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102338188B (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103363010B (en) * | 2013-08-01 | 2015-02-25 | 湖南大学 | Buckling plate type quasi-zero stiffness vibration isolator |
| CN105090317B (en) * | 2015-08-04 | 2018-01-16 | 郑州宇通客车股份有限公司 | Air spring and vehicle |
| CN110469625A (en) * | 2019-08-30 | 2019-11-19 | 上海交通大学 | By the fluid pressure type antiresonance vibration isolator of air spring frequency modulation |
| CN110762155B (en) * | 2019-11-14 | 2021-04-20 | 北京航空航天大学 | Passive air spring vibration reduction mechanism with universal damper and variable rubber membrane |
| CN110836032B (en) * | 2019-11-25 | 2021-03-12 | 海南大学 | Swing self-resetting damper |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5779010A (en) * | 1996-07-12 | 1998-07-14 | Technical Manufacturing Corporation | Suspended low-frequency horizontal pendulum isolator for vibration isolation systems |
| CN1670399A (en) * | 2005-04-22 | 2005-09-21 | 清华大学 | Rigidity and damp adjustable air spring vibration isolator |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20030006540A1 (en) * | 2001-07-09 | 2003-01-09 | Houghton Worthington B. | Self-aligning mechanism for pneumatic vibration isolators |
-
2010
- 2010-11-30 CN CN 201010564271 patent/CN102338188B/en not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5779010A (en) * | 1996-07-12 | 1998-07-14 | Technical Manufacturing Corporation | Suspended low-frequency horizontal pendulum isolator for vibration isolation systems |
| CN1670399A (en) * | 2005-04-22 | 2005-09-21 | 清华大学 | Rigidity and damp adjustable air spring vibration isolator |
Also Published As
| Publication number | Publication date |
|---|---|
| CN102338188A (en) | 2012-02-01 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102338188B (en) | Air spring vibration isolator based on piston type liquid viscous damping action | |
| CN102330782B (en) | Air spring vibration isolator based on gas-liquid damping and coupling action | |
| CN101398052B (en) | Heavy load precision damper and vibration reduction system formed thereby | |
| CN202790279U (en) | Vibration isolator of damping spring | |
| CN108087473B (en) | Gas-liquid bullet dual-frequency vibration isolator | |
| CN106122353B (en) | A kind of automobile power assembly active control type hydraulic mount | |
| CN102072275A (en) | Pneumatic spring vibration isolator of air flotation type forward and backward swing concatenation mechanism based on ball head connecting rod | |
| CN201747854U (en) | Hydraulic elastic support of gear box of large wind generating set | |
| CN110685212B (en) | External granule damping device of suspension cable | |
| JPWO2016051461A1 (en) | Vibration isolator for vehicle | |
| CN102330767B (en) | Air spring vibration isolator based on gas-solid damping and coupling action adjusted by air cylinder | |
| CN101725660A (en) | High-frequency decoupling piston magneto-rheological damper | |
| CN102146976A (en) | Sliding block adjustment-based air spring vibration isolator with gas-solid damping coupling effect | |
| CN216111915U (en) | Quasi-zero rigidity combined ultralow frequency vibration reduction system | |
| CN201007333Y (en) | Composite type magnetic floating damping vibration attenuation device | |
| CN202001552U (en) | Suspension device of power assembly | |
| CN117759676A (en) | Vibration damper for offshore wind power tower | |
| RU2325568C1 (en) | Pneumatic suspension | |
| CN206530641U (en) | The isolation mounting of damping oil cylinder in parallel | |
| CN207161326U (en) | A kind of screw compressor with shock-absorbing function | |
| CN115263992A (en) | Three-way wide-frequency large-load vibration reduction device based on frequency-adjustable vibration absorption and active vibration isolation | |
| CN102619925B (en) | Variable damping magnetic spring | |
| CN101798742A (en) | Power shock-absorbing device and washing machine provided with same | |
| CN112943844B (en) | Tower barrel structure vibration damper of high-flexibility tower wind generating set | |
| CN107606020A (en) | A kind of composite damping structure for airborne lidar for fluorescence |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130918 |