CN102338188A - Air spring vibration isolator based on piston type liquid viscous damping action - Google Patents
Air spring vibration isolator based on piston type liquid viscous damping action Download PDFInfo
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- 230000035939 shock Effects 0.000 claims abstract description 29
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Abstract
The invention discloses an air spring vibration isolator based on piston type liquid viscous damping action, and belongs to the field of ultra-precise measurement and processing. The upper end and the lower end of a cable-stayed steel wire rope of the vibration isolator are fixedly connected with an annular cover plate and the lower end of a supporting rod respectively to form a simple pendulum mechanism; a steel spring is arranged at the bottom of an inner cylinder; a piston is contacted and matched with the steel spring; the upper end and the lower end of a flexure hinge are arranged at the lower end of the supporting rod and the upper end face of the piston respectively to form an inverted pendulum mechanism; a spiral damper tube is arranged outside a piston cavity; damping oil is injected into the bottom of the inner cylinder to enclose the spiral damper tube; and one port of the spiral damper tube is communicated with the interior of the piston, and the other end of the spiral damper tube is communicated with the damping oil. The air spring vibration isolator provides damp for a positive-inverted pendulum serial mechanism by using the liquid viscous damping action and the reciprocating motion of the piston, obtains different liquid viscous damping by selecting the damping oil with different viscosities, and can provide the optimal damping under the condition that strong vibration, micro vibration and shock loads exist in the horizontal direction of the vibration isolator.
Description
Technical field
The invention belongs to ultra precise measurement and manufacture field, particularly a kind of air cushion shock absorber based on the effect of piston type liquid viscous damping.
Background technique
The isolation mounting of excellent performance is one of key technology of ultra precise measurement and processing.Air cushion shock absorber has that good superlow frequency vibration isolating performance, bearing capacity are high, equivalent stiffness is lower, natural frequency is insensitive to load change, system realizes easily, advantage such as low consumes energy; Along with the development of ultra precise measurement and processing technique, nanometer technology and vlsi circuit manufacturing technology, air cushion shock absorber has obtained application more and more widely.The vibration of carrying the gage frame of all exposure elements like lithography machine is isolated.
The leading indicator that influences anti-vibration performance is the natural frequency and the damping ratio of isolation mounting, and under the effect of damping, the typical vibration transmissibility of vibrating isolation system is as shown in Figure 1.Visible by Fig. 1, damping has very significant inhibitory effect to vibration in the resonance region, and situation is just in time opposite in addition in the resonance region.Therefore, in order to guarantee the anti-vibration performance of his vibrating isolation system, must system damping rationally be set according to actual conditions.
Visible by last figure, damping has very significant inhibitory effect to vibration in the resonance region, and situation is just in time opposite in addition in the resonance region.Therefore, in order to guarantee the anti-vibration performance of his vibrating isolation system, must system damping rationally be set according to actual conditions.
Patent US2003006540A1 " Self-aligning mechanism for pneumatic vibration isolators " proposes the vibration isolator of pneumatic spring and single pendulum mechanisms in series; It is characterized in that: interior tube bottom injects an amount of damping oil; The lower end of single pendulum mechanism is immersed in the damping oil; Utilize the swing with respect to inner core of effect of liquid viscous damping and single pendulum mechanism, produce horizontal damping, this damping mode is very common in the pendulum-type air cushion shock absorber.The liquid viscous damping force depends on following factor, is shown below.
f
d=cv
α
In the formula: c is a damping constant, with area of contact positive correlation; V is a relative velocity; α is the speed index.
Because the area of contact of single pendulum mechanism and damping oil is very limited, the damping function that can provide is very little, and especially the ultralow frequency at low speed and micrometric displacement is directed against under the situation, almost damping function can't be provided.In addition, because the contact segment shape of single pendulum mechanism and damping oil is very irregular, its damping function that provides has the shortcoming of strong nonlinearity, is unfavorable for the reasonable utilization of liquid viscous damping.
The substantially horizontal of taking all factors into consideration vibration isolator exist shake by force, little shaking and situation such as impulsive load, there is distinct disadvantage in the damping link in the described air cushion shock absorber of foregoing invention.
Summary of the invention
In order to solve the problem that existing air cushion shock absorber exists, the present invention proposes a kind of air cushion shock absorber based on the effect of piston type liquid viscous damping, to satisfy the needs of superlow frequency vibration isolating in ultra precise measurement processing and the assembling and setting field.To the structural feature of just putting serial mechanism, the present invention proposes the external spirality damp tube of piston chamber of pendulum, and interior tube bottom injects an amount of damping oil, forms the air cushion shock absorber based on the effect of piston type liquid viscous damping.
The objective of the invention is to realize like this:
A kind of air cushion shock absorber based on the effect of piston type liquid viscous damping, its mechanical model is as shown in Figure 1.Described air cushion shock absorber is at the inner equipped inner core of urceolus, and it is outside that air-spring bellows is sleeved on the inner core upper end, and urceolus is through its upper end boss and air-spring bellows lower end sealed attachment; Inner core is through its upper end affixed annular cover plate and air-spring bellows upper end sealed attachment, and inlet hole is arranged on the outer drum outer wall, and the one group of throttle orifice that is circumferential arrangement is arranged on the outer tube inner wall; The equipped circular bottom plate of sealing in the urceolus lower end, strut passes annular cover plate and is fitted in the inner core chamber, and the upper end and the annular cover plate of oblique rollering steel silk rope are affixed; The lower end and the strut lower end of oblique rollering steel silk rope are affixed; Oblique rollering steel silk rope constitutes single pendulum mechanism, and load-bearing plate is packed in post upper, and steel spring is installed in interior tube bottom; Piston and steel spring contact matching; The lower end of flexible hinge is fitted on the piston upper-end surface, and the upper end of flexible hinge is fitted in the strut lower end, and flexible hinge, piston and steel spring constitute swinging mechanism; The spirality damp tube is fitted in the piston chamber outside, and interior tube bottom injects damping oil, and damping oil contains the spirality damp tube, and a port of spirality damp tube is communicated with internal piston, and its another port is communicated with damping oil.
The present invention has following characteristics and good result:
1. be delivered to from the horizontal vibration of environment and just put serial mechanism; Cause reciprocating motion of the pistons; Under the pressure difference effect of piston thrust and damping oil; The damping oil in the spirality damp tube and the inwall generation relative movement of spirality damp tube, thus for just putting serial mechanism viscous damping is provided.Adopt the spirality damp tube to help in the confined space, increasing to greatest extent the area of contact of damping oil and damp tube inwall, thereby guarantee under the superlow frequency vibrating situation of low speed and micrometric displacement, still can export enough big damping force.The viscous damping force of spirality damp tube output depends on following factor, is shown below.
f
d=cv
α
In the formula: c is a damping constant, with area of contact positive correlation; V is a relative velocity; α is the speed index.
2. the viscous damping force and the area of contact positive correlation of the output of spirality damp tube, the area of contact of spirality damp tube and damping oil depends primarily on spirality damp tube length L in the present invention
S, be shown below.
S=dL
S
In the formula: d is a form factor, with relative displacement positive correlation; S is an area of contact; L
SBe spirality damp tube length.
Can know that by following formula the present invention has solved because the shortcoming of the damping strong nonlinearity that the contact segment out-of-shape of single pendulum mechanism and damping oil causes helps the reasonable utilization of liquid viscous damping from structure.
3. the present invention utilizes the to-and-fro motion of effect of liquid viscous damping and piston; For just putting serial mechanism damping is provided; Obtain the viscous dampings of different sizes through the damping oil of selecting different viscosities for use, exist in the horizontal direction shake by force, little shake and the situation of impulsive load under air cushion shock absorber disclosed by the invention all sizeable damping can be provided.
4. the present invention proposes the external spirality damp tube of piston chamber of pendulum, and interior tube bottom injects an amount of damping oil, has formed the air cushion shock absorber based on the effect of piston type liquid viscous damping.The setting of this damping structure has taken into full account the structural feature of just putting serial mechanism, makes whole vibration isolator structure compact and reasonable more.
Description of drawings
Fig. 1 is the typical vibration transmissibility plotted curve of vibrating isolation system;
Fig. 2 is the mechanical model schematic representation based on the air cushion shock absorber of piston type liquid viscous damping effect;
Fig. 3 is the generalized section based on the air cushion shock absorber of piston type liquid viscous damping effect;
Fig. 4 is the 3D generalized section based on the air cushion shock absorber of piston type liquid viscous damping effect;
Fig. 5 is the 3D generalized section of spirality damp tube.
Among the figure: 1. load-bearing plate; 2. annular cover plate; 3. strut; 4. the oblique rollering steel silk is restricted; 5. air-spring bellows; 6. inner core; 7. urceolus; 8. flexible hinge; 9. piston; 10. throttle orifice; 11. steel spring; 12. suction port; 13. circular bottom plate; 14. spirality damp tube; 15. damping oil.
Embodiment
Below in conjunction with accompanying drawing specific embodiment of the present invention is elaborated,, has shown an embodiment of air cushion shock absorber of the present invention like Fig. 2, Fig. 3 and shown in Figure 4.
Said air cushion shock absorber is at urceolus 7 inner equipped inner cores 6, and it is outside that air-spring bellows 5 is sleeved on inner core 6 upper ends, and urceolus 7 is through its upper end boss and air-spring bellows 5 lower end sealed attachment; Inner core 6 is through its upper end affixed annular cover plate 2 and air-spring bellows 5 upper end sealed attachment, and inlet hole 12 is arranged on urceolus 7 outer walls, and the one group of throttle orifice 10 that is circumferential arrangement is arranged on urceolus 7 inwalls; The equipped circular bottom plate 13 of sealing in urceolus 7 lower ends, strut 3 passes annular cover plate 2 and is fitted in inner core 6 chambeies, and the upper end and the annular cover plate 2 of oblique rollering steel silk rope 4 are affixed; The lower end and strut 3 lower ends of oblique rollering steel silk rope 4 are affixed; Oblique rollering steel silk rope 4 constitutes single pendulum mechanism, and load-bearing plate 1 is packed in strut 3 upper ends, and steel spring 11 is installed in inner core 6 bottoms; Piston 9 and steel spring 11 contact matching; The lower end of flexible hinge 8 is fitted on piston 9 upper-end surfaces, and the upper end of flexible hinge 8 is fitted in strut 3 lower ends, and flexible hinge 8, piston 9 and steel spring 11 constitute swinging mechanism; It is outside that spirality damp tube 14 is fitted in piston 9 chambers, and damping oil 15 is injected in inner core 6 bottoms, and damping oil 15 contains spirality damp tube 14, a port of spirality damp tube 14 and piston 9 internal communication, and its another port is communicated with damping oil 15.
Described spirality damp tube 14 is clockwise spiral damping pipe or counterclockwise spirality damp tube.
The inside diameter ranges of described spirality damp tube 14 is 5mm to 100mm.
The number of described spirality damp tube 14 is 1 to 30.
The radical of described oblique rollering steel silk rope 4 is 3 to 50, and is uniformly distributed with.
Described oblique rollering steel silk rope 4 is 0 ° to 30 ° with the scope of vertical line angle.
Described oblique rollering steel silk rope 4 is organic independent wire strand core wire rope, fiber core wire rope, asbestos core wire rope, wire-core wire rope that circle thigh, special-shaped thigh or multiply are not reversed.
The hole count of described throttle orifice 10 is 2 to 100, and is circumference uniform distribution.
Described steel spring 11 is helical spring, taper spring, butterfly spring or rubber spring.
Analysis can be divided into vertical vibration and horizontal vibration from the vibration of environment according to direction of vibration.Horizontal vibration is successively through urceolus 7, air-spring bellows 5, inner core 6, just put serial mechanism (oblique rollering steel silk rope 4, flexible hinge 8, piston 9 and steel spring 11) and strut 3; Act on the load-bearing plate 1; Except just putting serial mechanism; Other links are approximately rigid body, so horizontal vibration can cause piston 9 to-and-fro motion, under the pressure difference effect of the thrust of piston 9 and damping oil 15; The damping oil 15 in the spirality damp tube 14 and the inwall generation relative movement of spirality damp tube 14, thus for just putting serial mechanism viscous damping is provided; Vertical vibration is successively through urceolus 7, air-spring bellows 5, inner core 6, oblique rollering steel silk rope 4 and strut 3; Act on the load-bearing plate 1; Except air-spring bellows 5, other links are approximately rigid body, and the pendulum that flexible hinge 8, piston 9 and steel spring 11 are formed only plays the effect of supplemental support in vertical direction; Vertical vibration can not cause piston 9 to-and-fro motion, so 14 pairs of vertical vibrations of spirality damp tube do not play damping function.
Claims (9)
1. the air cushion shock absorber based on the effect of piston type liquid viscous damping is equipped with inner core (6) in urceolus (7) inside, and it is outside that air-spring bellows (5) is sleeved on inner core (6) upper end; Urceolus (7) is through its upper end boss and air-spring bellows (5) lower end sealed attachment, and inner core (6) is through its upper end affixed annular cover plate (2) and air-spring bellows (5) upper end sealed attachment, and inlet hole (12) is arranged on urceolus (7) outer wall; The one group of throttle orifice (10) that is circumferential arrangement is arranged on urceolus (7) inwall; The equipped circular bottom plate (13) of sealing in urceolus (7) lower end, strut (3) passes annular cover plate (2) and is fitted in inner core (6) chamber, and the upper end and the annular cover plate (2) of oblique rollering steel silk rope (4) are affixed; The lower end and strut (3) lower end of oblique rollering steel silk rope (4) are affixed; Oblique rollering steel silk rope (4) constitutes single pendulum mechanism, and load-bearing plate (1) is packed in strut (3) upper end, and steel spring (11) is installed in inner core (6) bottom; Piston (9) and steel spring (11) contact matching; The lower end of flexible hinge (8) is fitted on piston (9) upper-end surface, and the upper end of flexible hinge (8) is fitted in strut (3) lower end, and flexible hinge (8), piston (9) and steel spring (11) constitute swinging mechanism; Said air cushion shock absorber is characterised in that: spirality damp tube (14) is fitted in the outside inner core of piston (9) chamber (6) bottom and injects damping oil (15); Damping oil (15) contains spirality damp tube (14), a port of spirality damp tube (14) and piston (9) internal communication, and its another port is communicated with damping oil (15).
2. the air cushion shock absorber based on the effect of piston type liquid viscous damping according to claim 1 is characterized in that: described spirality damp tube (14) is clockwise spiral damping pipe or counterclockwise spirality damp tube.
3. the air cushion shock absorber based on the effect of piston type liquid viscous damping according to claim 1 is characterized in that: the inside diameter ranges of described spirality damp tube (14) is 5mm to 100mm.
4. the air cushion shock absorber based on the effect of piston type liquid viscous damping according to claim 1 is characterized in that: the number of described spirality damp tube (14) is 1 to 30.
5. the air cushion shock absorber based on the effect of piston type liquid viscous damping according to claim 1 is characterized in that: the radical of described oblique rollering steel silk rope (4) is 3 to 50, and is uniformly distributed with.
6. the air cushion shock absorber based on the effect of piston type liquid viscous damping according to claim 1 is characterized in that: described oblique rollering steel silk rope (4) is 0 ° to 30 ° with the scope of vertical line angle.
7. the air cushion shock absorber based on the effect of piston type liquid viscous damping according to claim 1 is characterized in that: described oblique rollering steel silk rope (4) is organic independent wire strand core wire rope, fiber core wire rope, asbestos core wire rope, the wire-core wire rope that circle thigh, special-shaped thigh or multiply are not reversed.
8. the air cushion shock absorber based on the effect of piston type liquid viscous damping according to claim 1 is characterized in that: the hole count of described throttle orifice (10) is 2 to 100, and is circumference uniform distribution.
9. the air cushion shock absorber based on the effect of piston type liquid viscous damping according to claim 1 is characterized in that: described steel spring (11) is helical spring, taper spring, butterfly spring or rubber spring.
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CN 201010564271 CN102338188B (en) | 2010-11-30 | 2010-11-30 | Air spring vibration isolator based on piston type liquid viscous damping action |
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Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103363010A (en) * | 2013-08-01 | 2013-10-23 | 湖南大学 | Buckling plate type quasi-zero stiffness vibration isolator |
CN105090317A (en) * | 2015-08-04 | 2015-11-25 | 郑州宇通客车股份有限公司 | Air spring and vehicle |
CN110469625A (en) * | 2019-08-30 | 2019-11-19 | 上海交通大学 | By the fluid pressure type antiresonance vibration isolator of air spring frequency modulation |
CN110762155A (en) * | 2019-11-14 | 2020-02-07 | 北京航空航天大学 | Passive air spring vibration reduction mechanism with universal damper and variable rubber membrane |
CN110836032A (en) * | 2019-11-25 | 2020-02-25 | 海南大学 | Swinging self-resetting damper and combined supporting type installation method thereof |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5779010A (en) * | 1996-07-12 | 1998-07-14 | Technical Manufacturing Corporation | Suspended low-frequency horizontal pendulum isolator for vibration isolation systems |
US20030006540A1 (en) * | 2001-07-09 | 2003-01-09 | Houghton Worthington B. | Self-aligning mechanism for pneumatic vibration isolators |
CN1670399A (en) * | 2005-04-22 | 2005-09-21 | 清华大学 | Rigidity and damp adjustable air spring vibration isolator |
-
2010
- 2010-11-30 CN CN 201010564271 patent/CN102338188B/en not_active Expired - Fee Related
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5779010A (en) * | 1996-07-12 | 1998-07-14 | Technical Manufacturing Corporation | Suspended low-frequency horizontal pendulum isolator for vibration isolation systems |
US20030006540A1 (en) * | 2001-07-09 | 2003-01-09 | Houghton Worthington B. | Self-aligning mechanism for pneumatic vibration isolators |
CN1670399A (en) * | 2005-04-22 | 2005-09-21 | 清华大学 | Rigidity and damp adjustable air spring vibration isolator |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103363010A (en) * | 2013-08-01 | 2013-10-23 | 湖南大学 | Buckling plate type quasi-zero stiffness vibration isolator |
CN103363010B (en) * | 2013-08-01 | 2015-02-25 | 湖南大学 | Buckling plate type quasi-zero stiffness vibration isolator |
CN105090317A (en) * | 2015-08-04 | 2015-11-25 | 郑州宇通客车股份有限公司 | Air spring and vehicle |
CN105090317B (en) * | 2015-08-04 | 2018-01-16 | 郑州宇通客车股份有限公司 | Air spring and vehicle |
CN110469625A (en) * | 2019-08-30 | 2019-11-19 | 上海交通大学 | By the fluid pressure type antiresonance vibration isolator of air spring frequency modulation |
CN110762155A (en) * | 2019-11-14 | 2020-02-07 | 北京航空航天大学 | Passive air spring vibration reduction mechanism with universal damper and variable rubber membrane |
NL2026160A (en) * | 2019-11-14 | 2021-07-20 | Univ Beihang | Passive air-spring vibration reduction mechanism with universal dampers and variable rubber membrane |
CN110836032A (en) * | 2019-11-25 | 2020-02-25 | 海南大学 | Swinging self-resetting damper and combined supporting type installation method thereof |
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