CN102146976A - Sliding block adjustment-based air spring vibration isolator with gas-solid damping coupling effect - Google Patents
Sliding block adjustment-based air spring vibration isolator with gas-solid damping coupling effect Download PDFInfo
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- CN102146976A CN102146976A CN 201010564306 CN201010564306A CN102146976A CN 102146976 A CN102146976 A CN 102146976A CN 201010564306 CN201010564306 CN 201010564306 CN 201010564306 A CN201010564306 A CN 201010564306A CN 102146976 A CN102146976 A CN 102146976A
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Abstract
The invention discloses a sliding block adjustment-based air spring vibration isolator with gas-solid damping coupling effect, and belongs to the field of super-precision measurement and processing. Circumferentially arranged strip-type damping fins of the vibration isolator are assembled at the bottom of an inner cylinder, sliding block sets uniformly distributed in the radial direction are assembled on the upper end face of the bottom of the inner side of an outer cylinder, a worm gear-worm device is assembled on the lower end face of the bottom of the inner side of the outer cylinder, and a throttling hole area adjusting device of cam transmission is assembled below a throttling hole on the inner wall of the outer cylinder. By using an air throttling damper and the throttling hole area adjusting device, the magnitude of the total area of the throttling hole is reasonably adjusted, and damping of optimal magnitude is provided at strong vibration and impact load in the vertical direction; and damping is provided for the vibration isolator by using the reciprocating motion of Coulomb damping and strip-type damping fins relative to the outer cylinder, the magnitude of the Coulomb damping is changed by adjusting the positions of radial sliding blocks, and the damping of the optimal magnitude is provided at strong vibration, micro vibration and impact load in the vertical direction.
Description
Technical field
The invention belongs to ultra precise measurement and manufacture field, particularly a kind of air cushion shock absorber of the gas-solid damping coupling of regulating based on slide block.
Background technique
The isolation mounting of excellent performance is one of key technology of ultra precise measurement and processing.Air cushion shock absorber has good superlow frequency vibration isolating performance, bearing capacity height, equivalent stiffness is lower, natural frequency is insensitive to load change, system realizes easily, advantage such as low consumes energy, along with the development of ultra precise measurement and processing technique, nanometer technology and vlsi circuit manufacturing technology, air cushion shock absorber has obtained application more and more widely.The vibration of carrying the gage frame of all exposure elements as lithography machine is isolated.
The leading indicator that influences anti-vibration performance is the natural frequency and the damping ratio of isolation mounting, and under the effect of damping, the typical vibration transmissibility of vibrating isolation system as shown in Figure 1.As seen from Figure 1, in the resonance region damping vibration is had very significant inhibitory effect, situation is just in time opposite in addition in the resonance region.Therefore, in order to guarantee the anti-vibration performance of his vibrating isolation system, must system damping rationally be set according to actual conditions.
Patent US20030006540A1 " Self-aligning mechanism for pneumatic vibration isolators " adopts the damper of single damping hole, for vibration isolator provides air throttling damping, at present typical air cushion shock absorber all adopts the fixing throttle orifice of pore size, utilize air throttling damping to provide damping, as the air cushion shock absorber product of the bright upright smart machine of U.S. TMC, Newport and Japan for vibration isolator.
Patent CN1670399 " air cushion shock absorber of can regulate rigidity and damping " proposes to utilize a plurality of damping adjustable levers to regulate the size of a plurality of slit oblique crank Zs to through hole respectively, to realize the adjusting of air throttling damping.The damping regulation structure more complicated of this invention, precision are difficult for guaranteeing that a plurality of in addition damping adjustable levers are worked respectively, cause the size of respectively organizing axial hole can not guarantee unanimity.
No matter be to adopt the pore size fixing damping hole or the damping hole of size adjustable to provide damping for air cushion shock absorber, all there is a defective on the tangible principle, damping hole is inoperative substantially during both at the microvibration of ultralow frequency, low speed, micrometric displacement, because when there is the superlow frequency vibrating of low speed and micrometric displacement in vibration isolator, the pressure difference of throttle orifice both sides is almost nil, have only indivisible air to flow through throttle orifice, the damping force of generation is almost nil.
Take all factors into consideration vibration isolator exist in Vertical direction shake by force, little shaking and situation such as impulsive load, there is distinct disadvantage in the damping link of the described air cushion shock absorber of foregoing invention.
Summary of the invention
In order to remedy the deficiency of existing air cushion shock absorber, the present invention proposes a kind of air cushion shock absorber of the gas-solid damping coupling of regulating based on slide block, to satisfy the needs of superlow frequency vibration isolating in ultra precise measurement processing and the assembling and setting field.At the structural feature of just putting serial mechanism and existing air cushion shock absorber, the present invention proposes to install the throttle hole area controlling device of cam drive below the throttle orifice of urceolus inside, the bar shaped damping fin that is circumferential arrangement is installed at interior tube bottom, tube bottom is installed the slide block of radial equipartition outside, the tube bottom another side is installed the turbine and worm device outside, forms the air cushion shock absorber of the gas-solid damping coupling of regulating based on slide block.
The object of the present invention is achieved like this:
A kind of air cushion shock absorber of the gas-solid damping coupling of regulating based on slide block, its mechanical model as shown in Figure 1.Described air cushion shock absorber is at the inner equipped inner core of urceolus, it is outside that air-spring bellows is sleeved on the inner core upper end, urceolus is by its upper end boss and air-spring bellows lower end sealed attachment, inner core is by its upper end affixed annular cover plate and air-spring bellows upper end sealed attachment, inlet hole is arranged on the outer drum outer wall, the one group of throttle orifice that is circumferential arrangement is arranged on the outer tube inner wall, in the equipped circular bottom plate of urceolus lower end sealing, strut passes annular cover plate and is fitted in the inner core chamber, the upper end and the annular cover plate of oblique rollering steel silk rope are affixed, the lower end and the strut lower end of oblique rollering steel silk rope are affixed, oblique rollering steel silk rope constitutes single pendulum mechanism, load-bearing plate is packed in post upper, steel spring is installed in interior tube bottom, piston and steel spring contact matching, and the lower end of flexible hinge is fitted on the piston upper-end surface, the upper end of flexible hinge is fitted in strut lower end, flexible hinge, piston and steel spring constitute swinging mechanism; The bar shaped damping fin that is circumferential arrangement is fitted in interior tube bottom, the slide block assembly that is radial equipartition is contained on the urceolus inside bottom upper-end surface, by worm-wheel shaft, the worm gear axle bed, the worm and gear device that the cone boss worm screw is formed is fitted on the urceolus inside bottom lower end surface, and be positioned at homonymy with inlet hole, slide block group lateral part and bar shaped damping fin contact matching, slide block group inside portion and cone boss worm screw contact matching, worm-wheel shaft is fitted on the worm gear axle bed rotationally, the cone boss worm screw liftably is fitted in urceolus inside bottom center, its lower end and worm-wheel shaft contact matching; The throttle hole area controlling device of cam drive is fitted in the throttle orifice below on the outer tube inner wall, and be positioned at homonymy with inlet hole, the throttle hole area controlling device of cam drive is made up of back-up ring, flange, camshaft holder, camshaft, back-up ring liftably is sleeved on the outer tube inner wall, flange is packed on the outer tube inner wall, camshaft holder is installed on the flange, and camshaft is fitted on the camshaft holder rotationally, the cam of camshaft and back-up ring contact matching.
The present invention has following characteristics and good result:
1. the present invention proposes at interior tube bottom the bar shaped damping fin that is circumferential arrangement to be installed, tube bottom is installed the slide block of radial equipartition outside, tube bottom is installed the turbine and worm device outside, utilize the to-and-fro motion of Coulomb damping and bar shaped damping fin with respect to urceolus, for vibration isolator provides damping, drive radial slider by the turbine and worm device, can realize the adjusting of Coulomb damping, shake by force in the Vertical direction existence, little shake and the situation of impulsive load under the damping of best size is provided, overcome single or multiple damping holes can't provide the damping force of suitable size under the superlow frequency vibrating situation of low speed and micrometric displacement shortcoming.
The Coulomb damping power f of bar shaped damping fin output
dDepend on following factor, be shown below.
f
d＝μN
In the formula: μ is a dynamic friction coefficient, with area of contact and relative velocity positive correlation; N is a normal pressure.
When the vertical vibration from environment is delivered to inner core, cause the vertical vibration of bar shaped damping fin, bar shaped damping fin and slide block rub, for air cushion shock absorber provides Coulomb damping, adopt a plurality of bar shaped damping fins to help in the confined space, increasing the area of contact of bar shaped damping fin and slide block, thereby guarantee the enough big damping force of output under the situation of low speed and micrometric displacement.
2. utilize air throttling damping and throttle hole area controlling device, rationally regulate the size of the throttle orifice gross area, Vertical direction exist shake by force and the situation of impulsive load under the damping of best size is provided, the size that the throttle hole area controlling device can big or small as one man be regulated all throttle orifices simultaneously, overcome existing patent damping controlling device and regulated respectively, to such an extent as to regulate inconsistent shortcoming.
3. connect with the horizontal rigidity of just putting serial mechanism because bar shaped damping fin rigidity in the horizontal direction is in parallel with the horizontal rigidity of pneumatic spring, cause the horizontal global stiffness of bar shaped damping fin and pneumatic spring to be far longer than the horizontal rigidity of just putting serial mechanism, therefore, air cushion shock absorber equivalent level rigidity is further near the horizontal rigidity of just putting serial mechanism, slightly promoted the anti-vibration performance of vibration isolator substantially horizontal to a certain extent, the bar shaped damping fin has played leading role to the inner core of air cushion shock absorber in vertical direction in addition.
4. the present invention's one group of throttle orifice proposing to be circumferential arrangement is arranged on the outer tube inner wall, the throttle hole area controlling device of cam drive is installed below the throttle orifice of urceolus inside, this damping hole set-up mode has taken into full account the structural feature based on the air cushion shock absorber of just putting serial mechanism, makes whole vibration isolator structure compact and reasonable more.
Description of drawings
Fig. 1 is the typical vibration transmissibility plotted curve of vibrating isolation system;
Fig. 2 is the mechanical model schematic representation based on the air cushion shock absorber of the gas-solid damping coupling of slide block adjusting;
Fig. 3 is the generalized section based on the air cushion shock absorber of the gas-solid damping coupling of slide block adjusting;
Fig. 4 is the 3D generalized section based on the air cushion shock absorber of the gas-solid damping coupling of slide block adjusting;
Fig. 5 is the 3D generalized section of the throttle hole area controlling device of cam drive;
Fig. 6 is the 3D generalized section of bar shaped damping fin;
Fig. 7 drives the 3D generalized section of radial slider for the turbine and worm device.
Among the figure: 1. load-bearing plate; 2. annular cover plate; 3. strut; 4. oblique rollering steel silk rope; 5. air-spring bellows; 6. inner core; 7. urceolus; 8. flexible hinge; 9. piston; 10. throttle orifice; 11. the throttle hole area controlling device of cam drive; 11a. back-up ring; 11b. flange; 11c. camshaft holder; 11d. camshaft; 12. steel spring; 13. suction port; 14. circular bottom plate; 15. worm and gear device; 15a. worm-wheel shaft; 15b. worm gear axle bed; 15c. cone boss worm screw; 16. slide block group; 17. bar shaped damping fin.
Embodiment
Below in conjunction with accompanying drawing specific embodiments of the invention are elaborated,, have shown an embodiment of air cushion shock absorber of the present invention as Fig. 3, Fig. 4, Fig. 5, Fig. 6 and shown in Figure 7.
Described air cushion shock absorber is at urceolus 7 inner equipped inner cores 6, air-spring bellows 5 is sleeved on outside, inner core 6 upper end, urceolus 7 is by its upper end boss and air-spring bellows 5 lower end sealed attachment, inner core 6 is by its upper end affixed annular cover plate 2 and air-spring bellows 5 upper end sealed attachment, inlet hole 13 is arranged on urceolus 7 outer walls, the one group of throttle orifice 10 that is circumferential arrangement is arranged on urceolus 7 inwalls, in the equipped circular bottom plate 14 of urceolus 7 lower ends sealing, strut 3 passes annular cover plate 2 and is fitted in inner core 6 chambeies, the upper end and the annular cover plate 2 of oblique rollering steel silk rope 4 are affixed, the lower end and strut 3 lower ends of oblique rollering steel silk rope 4 are affixed, oblique rollering steel silk rope 4 constitutes single pendulum mechanism, load-bearing plate 1 is packed in strut 3 upper ends, steel spring 12 is installed in inner core 6 bottoms, piston 9 and steel spring 12 contact matching, and the lower end of flexible hinge 8 is fitted on piston 9 upper-end surfaces, the upper end of flexible hinge 8 is fitted in strut 3 lower ends, flexible hinge 8, piston 9 and steel spring 12 constitute swinging mechanism; The bar shaped damping fin 17 that is circumferential arrangement is fitted in inner core 6 bottoms, the slide block group 16 that is radial equipartition is fitted on the urceolus 7 inside bottom upper-end surfaces, by worm-wheel shaft 15a, worm gear axle bed 15b, the worm and gear device 15 that cone boss worm screw 15c forms is fitted on the urceolus 7 inside bottom lower end surfaces, and be positioned at homonymy with inlet hole 13, slide block group 16 lateral parts and bar shaped damping fin 17 contact matching, slide block group 16 inside portions and cone boss worm screw 15c contact matching, worm-wheel shaft 15a is fitted on the worm gear axle bed 15b rotationally, cone boss worm screw 15c liftably is fitted in urceolus 7 inside bottom centers, its lower end and worm-wheel shaft 15a contact matching; The throttle hole area controlling device 11 of cam drive is fitted in throttle orifice 10 belows on urceolus 7 inwalls, and be positioned at homonymy with inlet hole 13, the throttle hole area controlling device 11 of cam drive is made up of back-up ring 11a, flange 11b, camshaft holder 11c, camshaft 11d, back-up ring 11a liftably is sleeved on urceolus 7 inwalls, flange 11b is packed on urceolus 7 inwalls, camshaft holder 11c is installed on the flange 11b, camshaft 11d is fitted on the camshaft holder 11c rotationally, the cam of camshaft 11d and back-up ring 11a contact matching.
The sheet number of described bar shaped damping fin 17 is 2 to 100, and is circumference uniform distribution.
The slide block group 16 of described radial equipartition is made up of 2 to 100 slide blocks, and is circumference uniform distribution.
The radical of described oblique rollering steel silk rope 4 is 3 to 50, and uniform.
Described oblique rollering steel silk rope 4 is 0 ° to 30 ° with the scope of vertical line angle.
Described oblique rollering steel silk rope 4 is organic independent wire strand core wire rope, fiber core wire rope, asbestos core wire rope, wire-core wire rope that circle thigh, special-shaped thigh or multiply are not reversed.
The hole count of described throttle orifice 10 is 2 to 100, and is circumference uniform distribution.
Described steel spring 12 can be helical spring, taper spring, butterfly spring or rubber spring.
Analysis can be divided into vertical vibration and horizontal vibration from the vibration of environment according to direction of vibration.Horizontal vibration is successively by urceolus 7, air-spring bellows 5, slide block group 16, bar shaped damping fin 17, inner core 6, just put serial mechanism (oblique rollering steel silk rope 4, flexible hinge 8, piston 9 and steel spring 12) and strut 3, act on the load-bearing plate 1, except just putting serial mechanism, other links are approximately rigid body, therefore horizontal vibration can not cause the motion of inner core 6 with respect to urceolus 7, throttle orifice 10 and the effect of 17 pairs of horizontal vibration undampeds of bar shaped damping fin; Vertical vibration is successively by urceolus 7, air-spring bellows 5, inner core 6, oblique rollering steel silk rope 4 and strut 3, act on the load-bearing plate 1, except air-spring bellows 5, other links are approximately rigid body, flexible hinge 8, the pendulum that falls that piston 9 and steel spring 12 are formed only plays the supplemental support effect in vertical direction, therefore vertical vibration can cause the to-and-fro motion of inner core 6 with respect to urceolus 7, the air of interior outer chamber is by throttle orifice 10 turnover, for vertical vibration provides air throttling damping, bar shaped damping fin 17 is along with inner core 6 with respect to slide block group 16 to-and-fro motion takes place, rub with the surface of slide block group 16, for vertical vibration provides Coulomb damping.
Claims (8)
1. the air cushion shock absorber of a gas-solid damping coupling of regulating based on slide block, at the inner equipped inner core (6) of urceolus (7), it is outside that air-spring bellows (5) is sleeved on inner core (6) upper end, urceolus (7) is by its upper end boss and air-spring bellows (5) lower end sealed attachment, inner core (6) is by its upper end affixed annular cover plate (2) and air-spring bellows (5) upper end sealed attachment, inlet hole (13) is arranged on urceolus (7) outer wall, the one group of throttle orifice (10) that is circumferential arrangement is arranged on urceolus (7) inwall, in the equipped circular bottom plate (14) of urceolus (7) lower end sealing, strut (3) passes annular cover plate (2) and is fitted in inner core (6) chamber, the upper end of oblique rollering steel silk rope (4) and annular cover plate (2) are affixed, the lower end of oblique rollering steel silk rope (4) and strut (3) lower end are affixed, oblique rollering steel silk rope (4) constitutes single pendulum mechanism, load-bearing plate (1) is packed in strut (3) upper end, steel spring (12) is installed in inner core (6) bottom, piston (9) and steel spring (12) contact matching, the lower end of flexible hinge (8) is fitted on piston (9) upper-end surface, the upper end of flexible hinge (8) is fitted in strut (3) lower end, flexible hinge (8), piston (9) and steel spring (12) constitute swinging mechanism, described air cushion shock absorber is characterised in that: the bar shaped damping fin (17) that is circumferential arrangement is fitted in inner core (6) bottom, the slide block group (16) that is radial equipartition is fitted on urceolus (7) the inside bottom upper-end surface, by worm-wheel shaft (15a), worm gear axle bed (15b), the worm and gear device (15) that cone boss worm screw (15c) is formed is fitted on urceolus (7) the inside bottom lower end surface, and be positioned at homonymy with inlet hole (13), slide block group (16) lateral part and bar shaped damping fin (17) contact matching, slide block group (16) inside portion and cone boss worm screw (15c) contact matching, worm-wheel shaft (15a) is fitted on the worm gear axle bed (15b) rotationally, cone boss worm screw (15c) liftably is fitted in urceolus (7) inside bottom center, its lower end and worm-wheel shaft (15a) contact matching; The throttle hole area controlling device (11) of cam drive is fitted in throttle orifice (10) below on urceolus (7) inwall, and be positioned at homonymy with inlet hole (13), the throttle hole area controlling device (11) of cam drive is by back-up ring (11a), flange (11b), camshaft holder (11c), camshaft (11d) is formed, back-up ring (11a) liftably is sleeved on urceolus (7) inwall, flange (11b) is packed on urceolus (7) inwall, camshaft holder (11c) is installed on the flange (11b), camshaft (11d) is fitted on the camshaft holder (11c) rotationally, the cam of camshaft (11d) and back-up ring (11a) contact matching.
2. the air cushion shock absorber of the gas-solid damping coupling of regulating based on slide block according to claim 1, it is characterized in that: the sheet number of described bar shaped damping fin (17) is 2 to 100, and is circumference uniform distribution.
3. the air cushion shock absorber of the gas-solid damping coupling of regulating based on slide block according to claim 1, it is characterized in that: the slide block group (16) of described radial equipartition is made up of 2 to 100 slide blocks, and is circumference uniform distribution.
4. the air cushion shock absorber of the gas-solid damping coupling of regulating based on slide block according to claim 1, it is characterized in that: the radical of described oblique rollering steel silk rope (4) is 3 to 50, and uniform.
5. the air cushion shock absorber of the gas-solid damping coupling of regulating based on slide block according to claim 1, it is characterized in that: described oblique rollering steel silk rope (4) is 0 ° to 30 ° with the scope of vertical line angle
6. the air cushion shock absorber of the gas-solid damping coupling of regulating based on slide block according to claim 1 is characterized in that: described oblique rollering steel silk rope (4) is organic independent wire strand core wire rope, fiber core wire rope, asbestos core wire rope, the wire-core wire rope that circle strand, special-shaped strand or multiply are not reversed.
7. air cushion shock absorber according to claim 1 is characterized in that: the hole count of described throttle orifice (10) is 2 to 100, and is circumference uniform distribution.
8. air cushion shock absorber according to claim 1 is characterized in that: described steel spring (12) can be helical spring, taper spring, butterfly spring or rubber spring.
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| Application Number | Priority Date | Filing Date | Title |
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| CN 201010564306 CN102146976A (en) | 2010-11-30 | 2010-11-30 | Sliding block adjustment-based air spring vibration isolator with gas-solid damping coupling effect |
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| CN 201010564306 CN102146976A (en) | 2010-11-30 | 2010-11-30 | Sliding block adjustment-based air spring vibration isolator with gas-solid damping coupling effect |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102506112A (en) * | 2011-10-17 | 2012-06-20 | 杨洁 | Air spring capable of adjusting static stiffness and dynamic stiffness in volume occupation and pressure difference classification manners |
| CN107606033A (en) * | 2017-09-26 | 2018-01-19 | 苏州西捷克缓冲科技有限公司 | Side adjustment type oil buffer |
| CN108413195A (en) * | 2018-03-15 | 2018-08-17 | 重庆熊猫快收供应链管理有限公司 | A kind of display screen pedestal |
| CN113074211A (en) * | 2021-03-25 | 2021-07-06 | 天津大学 | Frequency-dependent passive intelligent variable damping control device |
| CN115538634A (en) * | 2022-10-03 | 2022-12-30 | 北京工业大学 | Universal grading yielding combined damping device with torsion and overturning resisting functions |
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| US5779010A (en) * | 1996-07-12 | 1998-07-14 | Technical Manufacturing Corporation | Suspended low-frequency horizontal pendulum isolator for vibration isolation systems |
| US20020190447A1 (en) * | 2001-06-13 | 2002-12-19 | Houghton, Worthington B. | Method for providing high vertical damping to pneumatic isolators during large amplitude disturbances of isolated payload |
| CN1510318A (en) * | 2002-11-28 | 2004-07-07 | �ٲ�� �ҵ��ʽ���� | Vibrating separating tables |
| US6953109B2 (en) * | 2002-10-08 | 2005-10-11 | Nikon Corporation | Vibration isolator with low lateral stiffness |
| CN101718327A (en) * | 2009-11-26 | 2010-06-02 | 重庆师范大学 | Precise vibration isolation system |
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2010
- 2010-11-30 CN CN 201010564306 patent/CN102146976A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5779010A (en) * | 1996-07-12 | 1998-07-14 | Technical Manufacturing Corporation | Suspended low-frequency horizontal pendulum isolator for vibration isolation systems |
| US20020190447A1 (en) * | 2001-06-13 | 2002-12-19 | Houghton, Worthington B. | Method for providing high vertical damping to pneumatic isolators during large amplitude disturbances of isolated payload |
| US6953109B2 (en) * | 2002-10-08 | 2005-10-11 | Nikon Corporation | Vibration isolator with low lateral stiffness |
| CN1510318A (en) * | 2002-11-28 | 2004-07-07 | �ٲ�� �ҵ��ʽ���� | Vibrating separating tables |
| CN101718327A (en) * | 2009-11-26 | 2010-06-02 | 重庆师范大学 | Precise vibration isolation system |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102506112A (en) * | 2011-10-17 | 2012-06-20 | 杨洁 | Air spring capable of adjusting static stiffness and dynamic stiffness in volume occupation and pressure difference classification manners |
| CN107606033A (en) * | 2017-09-26 | 2018-01-19 | 苏州西捷克缓冲科技有限公司 | Side adjustment type oil buffer |
| CN108413195A (en) * | 2018-03-15 | 2018-08-17 | 重庆熊猫快收供应链管理有限公司 | A kind of display screen pedestal |
| CN108413195B (en) * | 2018-03-15 | 2019-07-09 | 重庆熊猫快收供应链管理有限公司 | A kind of display screen pedestal |
| CN113074211A (en) * | 2021-03-25 | 2021-07-06 | 天津大学 | Frequency-dependent passive intelligent variable damping control device |
| CN115538634A (en) * | 2022-10-03 | 2022-12-30 | 北京工业大学 | Universal grading yielding combined damping device with torsion and overturning resisting functions |
| CN115538634B (en) * | 2022-10-03 | 2023-11-24 | 北京工业大学 | Universal graded yielding combined damping device with torsion-resistant and anti-overturning functions |
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Application publication date: 20110810 |