CN102330782A - Air spring vibration isolator based on gas-liquid damping and coupling action - Google Patents

Air spring vibration isolator based on gas-liquid damping and coupling action Download PDF

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Publication number
CN102330782A
CN102330782A CN201010564362A CN201010564362A CN102330782A CN 102330782 A CN102330782 A CN 102330782A CN 201010564362 A CN201010564362 A CN 201010564362A CN 201010564362 A CN201010564362 A CN 201010564362A CN 102330782 A CN102330782 A CN 102330782A
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CN
China
Prior art keywords
damping
urceolus
shock absorber
core
gas
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CN201010564362A
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Chinese (zh)
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CN102330782B (en
Inventor
谭久彬
夏超
王雷
闻荣伟
杨文国
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哈尔滨工业大学
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Priority to CN201010564362.5A priority Critical patent/CN102330782B/en
Publication of CN102330782A publication Critical patent/CN102330782A/en
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Publication of CN102330782B publication Critical patent/CN102330782B/en

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Abstract

The invention discloses an air spring vibration isolator based on a gas-liquid damping and coupling action, belonging to the fields of ultra precise measurement and processing. Multilayer cylindrical damping sheets of the vibration isolator are assembled at the bottom of an inner cylinder; radial through holes are arranged at the upper ends of the multilayer cylindrical damping sheets; damping oil is injected between the bottom of the inner side of the outer cylinder and the bottom of the inner cylinder; and a gear and rack-driving throttling hole area adjusting device is assembled below a throttling hole on the inner wall of an outer cylinder. The total area of the throttling hole is reasonably adjusted by using air throttling damping and the throttling hole area adjusting device; damping with optimal magnitude can be provided when strong vibration and impact load exist in the vertical direction; the reciprocating motion of liquid viscous damping and the multilayer cylindrical damping sheets relative to the outer cylinder provides damping for the vibration isolator; different viscous dampings are acquired by selecting damping oil with different viscosities; and the damping with optimal magnitude can be provided when strong vibration, microvibration and impact load exist in the vertical direction.

Description

Air cushion shock absorber based on gas-liquid damping coupling
Technical field
The invention belongs to ultra precise measurement and manufacture field, particularly a kind of air cushion shock absorber based on gas-liquid damping coupling.
Background technique
The isolation mounting of excellent performance is one of key technology of ultra precise measurement and processing.Air cushion shock absorber has that good superlow frequency vibration isolating performance, bearing capacity are high, equivalent stiffness is lower, natural frequency is insensitive to load change, system realizes easily, advantage such as low consumes energy; Along with the development of ultra precise measurement and processing technique, nanometer technology and vlsi circuit manufacturing technology, air cushion shock absorber has obtained application more and more widely.The vibration of carrying the gage frame of all exposure elements like lithography machine is isolated.
The leading indicator that influences anti-vibration performance is the natural frequency and the damping ratio of isolation mounting, and under the effect of damping, the typical vibration transmissibility of vibrating isolation system is as shown in Figure 1.Visible by Fig. 1, damping has very significant inhibitory effect to vibration in the resonance region, and situation is just in time opposite in addition in the resonance region.Therefore, in order to guarantee the anti-vibration performance of his vibrating isolation system, must system damping rationally be set according to actual conditions.
Patent US20030006540A1 " Self-aligning mechanism for pneumatic vibration isolators " adopts the damper of single damping hole; For vibration isolator provides air throttling damping; At present typical air cushion shock absorber all adopts the fixing throttle orifice of pore size; Utilize air throttling damping damping to be provided, like the air cushion shock absorber product of U.S. TMC, the bright upright smart machine of Newport and Japan for vibration isolator.
Patent CN1670399 " air cushion shock absorber of can regulate rigidity and damping " proposes to utilize a plurality of damping adjustable levers to regulate the size of a plurality of slit oblique crank Zs to through hole respectively, to realize the adjusting of air throttling damping.The damping regulation structure more complicated of this invention, precision are difficult for guaranteeing that a plurality of in addition damping adjustable levers are worked respectively, cause the size of respectively organizing axial hole can not guarantee unanimity.
No matter be that the damping hole or the damping hole of size adjustable that adopts pore size to fix is that air cushion shock absorber provides damping; All there is a defective on the tangible principle; Damping hole is inoperative basically during both to the microvibration of ultralow frequency, low speed, micrometric displacement, because vibration isolator is when existing the superlow frequency vibrating of low speed and micrometric displacement, the pressure difference of throttle orifice both sides is almost nil; Have only indivisible air stream to cross throttle orifice, the damping force of generation is almost nil.
Take all factors into consideration vibration isolator exist in Vertical direction shake by force, little shaking and situation such as impulsive load, there is distinct disadvantage in the damping link of the described air cushion shock absorber of foregoing invention.
Summary of the invention
In order to solve the problem that existing air cushion shock absorber exists, the present invention proposes a kind of air cushion shock absorber based on gas-liquid damping coupling, to satisfy the needs of superlow frequency vibration isolating in ultra precise measurement processing and the assembling and setting field.To the structural feature of just putting serial mechanism and existing air cushion shock absorber; The present invention proposes below the inner throttle orifice of urceolus, to install the throttle hole area controlling device of gear rack transmission; At interior tube bottom the multi-layer barrel damping fin is installed; Outer tube bottom injects an amount of damping oil, forms the air cushion shock absorber based on gas-liquid damping coupling.
The objective of the invention is to realize like this:
A kind of air cushion shock absorber based on gas-liquid damping coupling, its mechanical model is as shown in Figure 2.Described air cushion shock absorber is at the inner equipped inner core of urceolus, and it is outside that air-spring bellows is sleeved on the inner core upper end, and urceolus is through its upper end boss and air-spring bellows lower end sealed attachment; Inner core is through its upper end affixed annular cover plate and air-spring bellows upper end sealed attachment, and inlet hole is arranged on the outer drum outer wall, and the one group of throttle orifice that is circumferential arrangement is arranged on the outer tube inner wall; The equipped circular bottom plate of sealing in the urceolus lower end, strut passes annular cover plate and is fitted in the inner core chamber, and the upper end and the annular cover plate of oblique rollering steel silk rope are affixed; The lower end and the strut lower end of oblique rollering steel silk rope are affixed; Oblique rollering steel silk rope constitutes single pendulum mechanism, and load-bearing plate is packed in post upper, and steel spring is installed in interior tube bottom; Piston and steel spring contact matching; The lower end of flexible hinge is fitted on the piston upper-end surface, and the upper end of flexible hinge is fitted in the strut lower end, and flexible hinge, piston and steel spring constitute swinging mechanism; The multi-layer barrel damping fin is fitted in interior tube bottom, and radial direction through hole is arranged on multi-layer barrel damping fin upper end, injects damping oil between urceolus inside bottom and the interior tube bottom; The throttle hole area controlling device of gear rack transmission is fitted in the throttle orifice below on the outer tube inner wall; And be positioned at homonymy with inlet hole, the throttle hole area controlling device of gear rack transmission is made up of back-up ring, flange, gear shaft block, gear shaft, and back-up ring liftably is sleeved on the outer tube inner wall; Flange is packed on the outer tube inner wall; Gear shaft block is installed on the flange, the gear position of gear shaft and the engagement of the tooth bar position of gear shaft block, and the inner end portion of gear shaft rotatably is fitted in the hole of back-up ring.
The present invention has following characteristics and good result:
1. the present invention proposes at interior tube bottom the multi-layer barrel damping fin to be installed; Outer tube bottom injects an amount of damping oil; Utilize the to-and-fro motion of liquid viscous damping and multi-layer barrel damping fin with respect to urceolus; For vibration isolator provides damping; Select for use the damping oil of different viscosities to obtain the different liquid viscous damping, exist in Vertical direction shake by force, little shake and the situation of impulsive load under the air throttling damping of best size all can be provided, overcome single or a plurality of damping holes can't provide the damping force of suitable size under the superlow frequency vibrating situation of low speed and micrometric displacement shortcoming.
The viscous damping force f of multi-layer barrel damping fin output dDepend on following factor, be shown below.
f d=cv α
In the formula: c is a damping constant, with area of contact positive correlation; V is a relative velocity; α is the speed index.
When the vertical vibration from environment is delivered to inner core; Cause the vertical vibration of multi-layer barrel damping fin; The damping oil generation relative movement of multi-layer barrel damping fin and outer tube bottom; For air cushion shock absorber provides the liquid viscous damping, the tubular damping fin adopts multi-layer structure to help in the confined space, increasing the area of contact of damping oil and tubular damping fin, thereby guarantees under low speed and micrometric displacement situation, still can export enough big damping force.
2. utilize air throttling damping and throttle hole area controlling device; Rationally regulate the size of the throttle orifice gross area; There is the damping that best size is provided under the situation about shaking by force with impulsive load in Vertical direction; The size that the throttle hole area controlling device can big or small as one man be regulated all throttle orifices has simultaneously overcome existing patent damping controlling device and has regulated respectively, to such an extent as to regulate inconsistent shortcoming.
3. the present invention's one group of throttle orifice proposing to be circumferential arrangement is arranged on the outer tube inner wall; The throttle hole area controlling device of gear rack transmission is installed below the inner throttle orifice of urceolus; This damping hole set-up mode has taken into full account the structural feature based on the air cushion shock absorber of just putting serial mechanism, makes whole vibration isolator structure compact and reasonable more.
Description of drawings
Fig. 1 is the typical vibration transmissibility plotted curve of vibrating isolation system;
Fig. 2 is the mechanical model schematic representation based on the air cushion shock absorber of gas-liquid damping coupling;
Fig. 3 is the generalized section based on the air cushion shock absorber of gas-liquid damping coupling;
Fig. 4 is the 3D generalized section based on the air cushion shock absorber of gas-liquid damping coupling;
Fig. 5 is the 3D generalized section of the throttle hole area controlling device of gear rack transmission;
Fig. 6 is the 3D generalized section of multi-layer barrel damping fin.
Among the figure: 1. load-bearing plate; 2. annular cover plate; 3. strut; 4. the oblique rollering steel silk is restricted; 5. air-spring bellows; 6. inner core; 7. urceolus; 8. flexible hinge; 9. piston; 10. throttle orifice; 11. the throttle hole area controlling device of gear rack transmission; 11a. back-up ring; 11b. flange; 11c. gear shaft block; 11d. gear shaft; 12. steel spring; 13. suction port; 14. circular bottom plate; 15. damping oil; 16. multi-layer barrel damping fin; 17. radial direction through hole.
Embodiment
Below in conjunction with accompanying drawing specific embodiment of the present invention is elaborated,, has shown an embodiment of air cushion shock absorber of the present invention like Fig. 3, Fig. 4, Fig. 5 and shown in Figure 6.
Said air cushion shock absorber is at urceolus 7 inner equipped inner cores 6, and it is outside that air-spring bellows 5 is sleeved on inner core 6 upper ends, and urceolus 7 is through its upper end boss and air-spring bellows 5 lower end sealed attachment; Inner core 6 is through its upper end affixed annular cover plate 2 and air-spring bellows 5 upper end sealed attachment, and inlet hole 13 is arranged on urceolus 7 outer walls, and the one group of throttle orifice 10 that is circumferential arrangement is arranged on urceolus 7 inwalls; The equipped circular bottom plate 14 of sealing in urceolus 7 lower ends, strut 3 passes annular cover plate 2 and is fitted in inner core 6 chambeies, and the upper end and the annular cover plate 2 of oblique rollering steel silk rope 4 are affixed; The lower end and strut 3 lower ends of oblique rollering steel silk rope 4 are affixed; Oblique rollering steel silk rope 4 constitutes single pendulum mechanism, and load-bearing plate 1 is packed in strut 3 upper ends, and steel spring 12 is installed in inner core 6 bottoms; Piston 9 and steel spring 12 contact matching; The lower end of flexible hinge 8 is fitted on piston 9 upper-end surfaces, and the upper end of flexible hinge 8 is fitted in strut 3 lower ends, and flexible hinge 8, piston 9 and steel spring 12 constitute swinging mechanism; Multi-layer barrel damping fin 16 is fitted in inner core 6 bottoms, and radial direction through hole 17 is arranged on multi-layer barrel damping fin 16 upper ends, injects damping oil 15 between urceolus 7 inside bottom and inner core 6 bottoms; The throttle hole area controlling device 11 of gear rack transmission is fitted in throttle orifice 10 belows on urceolus 7 inwalls; And be positioned at homonymy with inlet hole 13; The throttle hole area controlling device 11 of gear rack transmission is made up of back-up ring 11a, flange 11b, gear shaft block 11c, gear shaft 11d; Back-up ring 11a liftably is sleeved on urceolus 7 inwalls, and flange 11b is packed on urceolus 7 inwalls, and gear shaft block 11c is installed on the flange 11b; The gear position of gear shaft 11d and the engagement of the tooth bar position of gear shaft block 11c, the inner end portion of gear shaft 11d rotatably is fitted in the hole of back-up ring 11a.
The number of plies of described multi-layer barrel damping fin 16 is 1 layer to 30 layers.
The scope of 40 ℃ of kinematical viscosity of described damping oil 15 is 10mm 2/ s-70mm 2/ s.
The radical of described oblique rollering steel silk rope 4 is 3 to 50, and is uniformly distributed with.
Described oblique rollering steel silk rope 4 is 0 ° to 30 ° with the scope of vertical line angle.
Described oblique rollering steel silk rope 4 is organic independent wire strand core wire rope, fiber core wire rope, asbestos core wire rope, wire-core wire rope that circle thigh, special-shaped thigh or multiply are not reversed.
The hole count of described throttle orifice 10 is 2 to 100, and is circumference uniform distribution.
Described steel spring 12 is helical spring, taper spring, butterfly spring or rubber spring.
Analysis can be divided into vertical vibration and horizontal vibration from the vibration of environment according to direction of vibration.Horizontal vibration is successively through urceolus 7, air-spring bellows 5, inner core 6, just put serial mechanism (oblique rollering steel silk rope 4, flexible hinge 8, piston 9 and steel spring 12 are formed) and strut 3; Act on the load-bearing plate 1; Except just putting serial mechanism; Other links are approximately rigid body, so horizontal vibration can not cause the motion of inner core 6 with respect to urceolus 7, and throttle orifice 10 does not play damping function with 16 pairs of horizontal vibrations of multi-layer barrel damping fin; Vertical vibration is successively through urceolus 7, air-spring bellows 5, inner core 6, oblique rollering steel silk rope 4 and strut 3; Act on the load-bearing plate 1; Except air-spring bellows 5, other links are approximately rigid body, and the pendulum that flexible hinge 8, piston 9 and steel spring 12 are formed only plays the effect of supplemental support in vertical direction; Therefore vertical vibration can cause the to-and-fro motion of inner core 6 with respect to urceolus 7; The air of interior outer chamber is through throttle orifice 10 turnover, and for vertical vibration provides air throttling damping, multi-layer barrel damping fin 16 is along with the to-and-fro motion of inner core 6 with respect to urceolus 7; With the damping oil of urceolus 7 bottoms 15 relative movement taking place, thereby the liquid viscous damping is provided for vertical vibration.

Claims (8)

1. the air cushion shock absorber based on gas-liquid damping coupling is equipped with inner core (6) in urceolus (7) inside, and it is outside that air-spring bellows (5) is sleeved on inner core (6) upper end; Urceolus (7) is through its upper end boss and air-spring bellows (5) lower end sealed attachment; Inner core (6) is through its upper end affixed annular cover plate (2) and air-spring bellows (5) upper end sealed attachment, and inlet hole (13) is arranged on urceolus (7) outer wall, and the one group of throttle orifice (10) that is circumferential arrangement is arranged on urceolus (7) inwall; The equipped circular bottom plate (14) of sealing in urceolus (7) lower end; Strut (3) passes annular cover plate (2) and is fitted in inner core (6) chamber, and the upper end and the annular cover plate (2) of oblique rollering steel silk rope (4) are affixed, and the lower end and strut (3) lower end of oblique rollering steel silk rope (4) are affixed; Oblique rollering steel silk rope (4) constitutes single pendulum mechanism; Load-bearing plate (1) is packed in strut (3) upper end, and steel spring (12) is installed in inner core (6) bottom, piston (9) and steel spring (12) contact matching; The lower end of flexible hinge (8) is fitted on piston (9) upper-end surface; The upper end of flexible hinge (8) is fitted in strut (3) lower end, and flexible hinge (8), piston (9) and steel spring (12) constitute swinging mechanism, and said air cushion shock absorber is characterised in that: multi-layer barrel damping fin (16) is fitted in inner core (6) bottom; Radial direction through hole (17) is arranged on multi-layer barrel damping fin (16) upper end, injects damping oil (15) between urceolus (7) inside bottom and inner core (6) bottom; The throttle hole area controlling device (11) of gear rack transmission is fitted in throttle orifice (10) below on urceolus (7) inwall; And be positioned at homonymy with inlet hole (13); The throttle hole area controlling device (11) of gear rack transmission is made up of back-up ring (11a), flange (11b), gear shaft block (11c), gear shaft (11d); Back-up ring (11a) liftably is sleeved on urceolus (7) inwall, and flange (11b) is packed on urceolus (7) inwall, and gear shaft block (11c) is installed on the flange (11b); The tooth bar position engagement of the gear position of gear shaft (11d) and gear shaft block (11c), the inner end portion of gear shaft (11d) rotatably is fitted in the hole of back-up ring (11a).
2. the air cushion shock absorber based on gas-liquid damping coupling according to claim 1 is characterized in that: the number of plies of described multi-layer barrel damping fin (16) is 1 layer to 30 layers.
3. the air cushion shock absorber based on gas-liquid damping coupling according to claim 1 is characterized in that: the scope of 40 ℃ of kinematical viscosity of described damping oil (15) is 10mm 2/ s-70mm 2/ s.
4. the air cushion shock absorber based on gas-liquid damping coupling according to claim 1 is characterized in that: the radical of described oblique rollering steel silk rope (4) is 3 to 50, and is uniformly distributed with.
5. the air cushion shock absorber based on gas-liquid damping coupling according to claim 1 is characterized in that: described oblique rollering steel silk rope (4) is 0 ° to 30 ° with the scope of vertical line angle.
6. the air cushion shock absorber based on gas-liquid damping coupling according to claim 1 is characterized in that: described oblique rollering steel silk rope (4) is organic independent wire strand core wire rope, fiber core wire rope, asbestos core wire rope, the wire-core wire rope that circle thigh, special-shaped thigh or multiply are not reversed.
7. the air cushion shock absorber based on gas-liquid damping coupling according to claim 1 is characterized in that: the hole count of described throttle orifice (10) is 2 to 100, and is circumference uniform distribution.
8. the air cushion shock absorber based on gas-liquid damping coupling according to claim 1 is characterized in that: described steel spring (12) is helical spring, taper spring, butterfly spring or rubber spring.
CN201010564362.5A 2010-11-30 2010-11-30 Air spring vibration isolator based on gas-liquid damping and coupling action CN102330782B (en)

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103062324A (en) * 2012-12-19 2013-04-24 哈尔滨工业大学 Spring vibration isolation platform based on spring zero position reference and laser auto-collimation measurement
CN104912992A (en) * 2014-03-14 2015-09-16 长春孔辉汽车科技股份有限公司 Membrane-type amplitude-correlation vibration reduction device
CN110762155A (en) * 2019-11-14 2020-02-07 北京航空航天大学 Passive air spring vibration reduction mechanism with universal damper and variable rubber membrane
CN111188870A (en) * 2020-03-02 2020-05-22 中国地震局工程力学研究所 Electrical equipment anti-pulling shock isolation device with vertical tuning mass

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5779010A (en) * 1996-07-12 1998-07-14 Technical Manufacturing Corporation Suspended low-frequency horizontal pendulum isolator for vibration isolation systems
US6123312A (en) * 1998-11-16 2000-09-26 Dai; Yuzhong Proactive shock absorption and vibration isolation
US6547225B1 (en) * 2001-04-17 2003-04-15 Technical Manufacturing Corporation Pneumatic isolator with barometric insensitivity
US20040065517A1 (en) * 2002-10-08 2004-04-08 Watson Douglas C. Vibration isolator with low lateral stiffness
CN2700639Y (en) * 2004-05-08 2005-05-18 杨德君 Air spring shock damper capable of changing toughness and damping automatically

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5779010A (en) * 1996-07-12 1998-07-14 Technical Manufacturing Corporation Suspended low-frequency horizontal pendulum isolator for vibration isolation systems
US6123312A (en) * 1998-11-16 2000-09-26 Dai; Yuzhong Proactive shock absorption and vibration isolation
US6547225B1 (en) * 2001-04-17 2003-04-15 Technical Manufacturing Corporation Pneumatic isolator with barometric insensitivity
US20040065517A1 (en) * 2002-10-08 2004-04-08 Watson Douglas C. Vibration isolator with low lateral stiffness
CN2700639Y (en) * 2004-05-08 2005-05-18 杨德君 Air spring shock damper capable of changing toughness and damping automatically

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103062324A (en) * 2012-12-19 2013-04-24 哈尔滨工业大学 Spring vibration isolation platform based on spring zero position reference and laser auto-collimation measurement
CN104912992A (en) * 2014-03-14 2015-09-16 长春孔辉汽车科技股份有限公司 Membrane-type amplitude-correlation vibration reduction device
CN104912992B (en) * 2014-03-14 2017-03-15 长春孔辉汽车科技股份有限公司 Membrane type amplitude correlation vibroshock
CN110762155A (en) * 2019-11-14 2020-02-07 北京航空航天大学 Passive air spring vibration reduction mechanism with universal damper and variable rubber membrane
CN111188870A (en) * 2020-03-02 2020-05-22 中国地震局工程力学研究所 Electrical equipment anti-pulling shock isolation device with vertical tuning mass

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