KR101977308B1 - Active vibration control apparatus and disturbance control method of conveyer using the same - Google Patents
Active vibration control apparatus and disturbance control method of conveyer using the same Download PDFInfo
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- KR101977308B1 KR101977308B1 KR1020170108597A KR20170108597A KR101977308B1 KR 101977308 B1 KR101977308 B1 KR 101977308B1 KR 1020170108597 A KR1020170108597 A KR 1020170108597A KR 20170108597 A KR20170108597 A KR 20170108597A KR 101977308 B1 KR101977308 B1 KR 101977308B1
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- acceleration
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
- F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
- F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
- F16F15/023—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using fluid means
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
- F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
- F16F15/023—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using fluid means
- F16F15/027—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using fluid means comprising control arrangements
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B11/00—Automatic controllers
- G05B11/01—Automatic controllers electric
- G05B11/36—Automatic controllers electric with provision for obtaining particular characteristics, e.g. proportional, integral, differential
- G05B11/38—Automatic controllers electric with provision for obtaining particular characteristics, e.g. proportional, integral, differential for obtaining a proportional characteristic
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D19/00—Control of mechanical oscillations, e.g. of amplitude, of frequency, of phase
- G05D19/02—Control of mechanical oscillations, e.g. of amplitude, of frequency, of phase characterised by the use of electric means
Abstract
The present invention relates to an active vibration suppression apparatus, and more particularly, to a disturbance control method of a conveyance apparatus using an active vibration suppression apparatus capable of quickly removing vibration by applying a cancellation force to disturbance caused by driving of an upper stage or a gantry.
A disturbance control method of a conveyance apparatus using the active vibration suppression apparatus according to the present invention is characterized in that a vibration suppression apparatus controller of an active vibration suppression apparatus including a vibration suppression mount, a displacement sensor and a servo valve detects a clearance between the upper surface of the clamp ring A step of initializing the value of each of the displacement sensors at the landing position to zero, receiving the position and acceleration information of the linear stage from the motion controller of the linear stage moving on the upper portion of the base provided on the vibration-damping mount, Measuring an acceleration of the base with an upper vibration sensor provided on the upper plate side of the air spring and an acceleration of the ground with a floor vibration sensor provided below the air spring, Based on the position information of the linear stage, the center-of-gravity disturbance per 6 axes and the ground acceleration Estimating a disturbance of floor vibration transmission per three axes (X, Y, Z) from the signal, calculating a cancellation force for the predicted disturbance, calculating a position error signal for the target position of the base, Calculating a rotational inertia moment from the position of the linear stage, and updating the position feedback control parameter and the vibration feedback control parameter in proportion to the calculated rotational moment of inertia, respectively; Calculating a control force for the position and acceleration error of each of the six axes, and calculating a control force for the VCM inverse kinematic matrix, which is a distributor, after adding the control force for the repulsive force disturbance canceling force, the bottom vibration disturbance canceling force and the acceleration error, And the sum of the disturbance cancellation force and the position error control force is added to each servo valve through an inverse kinematic matrix which is a distributor of the servo valve. Times and the step of, characterized in that it comprises the step of waiting for a certain sampling time to match the operating cycle.
Description
The present invention relates to an active type vibration damping device, and more particularly, to a dynamic vibration damping device using an active vibration damping device capable of rapidly removing vibration by applying a canceling force to disturbance caused by driving of a stage or a gantry, And a control method.
In general, an active vibration isolation system is a control system that blocks vibrations coming from the floor or effectively removes disturbance generated in the stage, which is an upper transfer device, and stabilizes the upper stage within a desired time . Therefore, the main performance evaluation items of the system are the transmissibility and the settling time.
The driving method of the active vibration suppression device is classified into a method using electromagnetic force (hereinafter referred to as VCM), a piezoelectric element (piezoelectric element: PZT) and a method using a pneumatic servo valve.
In the case of the large-sized VCM, the power consumption is large and the influence of the electromagnetic field is large. However, in the case of the small VCM, the actuator structure is simple and easy to manufacture. . The piezoelectric element (PZT) method has been widely applied to construct a semi-active type vibration damper system by combining with a small vibration damper system or a passive air spring in parallel by taking advantage of a small response force.
On the other hand, the pneumatic drive system is used for active control of large equipment such as SEM, TEM, and LCD inspection equipment because it is relatively slow in response but can support high load and realize high control performance.
In addition, stepper, mask aligner, 3D geometry, lithography, etc., among the production equipment and inspection equipment in the semiconductor and flat panel display fields, can transfer X, Y stage or gantry These apparatuses are required to be sensitive to the influence of vibrations, and as the process precision increases, it is required to apply a vibration damping apparatus having excellent performance. To achieve such excellent vibration damping performance, a vibration damping apparatus such as an air spring is applied There is a problem in that the base residual vibration and rolling due to the driving of the conveying apparatus become serious.
In order to solve the conventional residual vibration and rolling problem, first, Increase the stiffness and viscosity of the vibration suppression device; Temporarily increasing the viscosity during stage driving by using an MR (fluid) damper to suppress the base vibration; The conveying device itself drives the counter mass in the reverse direction, thereby canceling the base excitation force by driving the conveying device.
However, when the rigidity and viscosity of the vibration damper are increased, the vibration damping performance is weakened. Moreover, when the MR damper is used, the residual vibration due to the repulsive force can be effectively suppressed. However, And the use of a counter mass is disadvantageous in that the equipment configuration on the base becomes complicated.
Therefore, in order to avoid problems when using the precision equipment, the residual vibration must be sufficiently eliminated and the operation must be performed in a balanced state. At this time, the residual vibration and rolling by driving the transfer device increases the operation waiting time and lowers the productivity.
That is, the "Active type vibration isolation device" entitled "Active vibration isolation device", which is registered in the Korean Intellectual Property Office, is required to accurately maintain the position during the loading and unloading processes in order to remove vibration due to floor vibration and stage disturbance, There is a problem that productivity is deteriorated because a waiting time is required until the post-operation.
References: Korean Patent No. 10-1584700 entitled " Active vibration isolation device ".
SUMMARY OF THE INVENTION The present invention has been made in order to solve the above problems, and it is an object of the present invention to suppress the base vibration by feedback control using a vibration sensor (acceleration or speed sensor) and a voice coil motor (VCM) The position feedback control is performed by using the displacement sensor that measures the gap between the top plate of the vibration suppression mount and the displacement sensor and the upper head, and the servo valve that operates in accordance with the value of the displacement sensor in the controller, The motion controller of the conveying device receives the acceleration and the position of the driving part of the conveying device from the controller connected to the vibration suppressing mount so as to prevent the disturbance caused by driving the conveying device by applying the canceling force at the same time, Control method of disturbance of conveying device using active vibration suppression device The present invention has been made in view of the above problems.
In order to attain the above object, the active vibration suppression apparatus according to the present invention is installed on the lower part of the lower frame installed at the lower part of the lower part of the base with the linear stage installed on the upper part thereof, And a vibration damping mount connected to the air spring and adapted to integrally control a plurality of vertical and horizontal VCMs, vertical and horizontal vibration sensors, an upper vibration sensor and a bottom vibration sensor, wherein displacement sensor targets A displacement sensor installed to detect a gap between the lower surface of the air spring upper plate and the upper surface of the clamp ring assembled to the upper portion of the air spring chamber, According to the value of the displacement sensor, the vibration damper controller receives a signal and operates in real time to supply air And a servo valve for adjusting the height of the air spring in real time.
In the active vibration suppression apparatus according to the present invention, the vibration suppression device controller receives the stage position and the acceleration from the stage controller of the linear stage to predict the direction and magnitude of the disturbance, and estimates the disturbance and the size, A feeder disturbance compensator for calculating a canceling force and generating a canceling force by sending a signal to a vertical VCM, a horizontal VCM, and a servo valve, which are actuators, and a sensor for detecting the position of the linear stage And a vibration feedback controller for calculating a change in the mass moment of inertia according to the change and varying the control gain in proportion to the calculated mass moment of inertia.
The active vibration suppression apparatus according to the present invention is characterized in that the conveyance apparatus disturbance compensator comprises a repulsion force compensator for receiving an acceleration signal generated by the movement of the stage and a center-of-gravity movement compensator for receiving a position signal generated by the movement of the stage .
The active vibration suppression apparatus according to the present invention is characterized in that the vibration suppression apparatus controller comprises a low pass filter (LPF) for passing only low frequency components out of signals generated from the displacement sensor to a position feedback controller, And a high pass filter (HPF) which is passed through only the high frequency component of the signal to be transmitted to the vibration feedback controller.
A control method of a transfer apparatus using an active vibration isolator according to the present invention is a control method of a transfer apparatus in which a vibration isolator controller constituting an active vibration isolator is installed below a displacement sensor target installed on an air spring upper plate of a vibration isolating mount, Initializing the value of the angular displacement sensor to zero at the landing position so as to sense the clearance between the lower surface of the air spring upper plate and the upper surface of the clamp ring assembled to the upper portion of the air spring chamber, The position of the linear stage and the acceleration information from the motion controller of the linear stage moving on the upper portion of the vibration mount mounted on the upper portion of the vibration mount, The acceleration and the acceleration of the ground are measured with a bottom vibration sensor installed at the bottom of the air spring. Axis acceleration disturbance for each of six axes from the information of the repulsive force disturbance for each of six axes (X, Y, Z, roll, pitch, yaw) Estimating a disturbance of floor vibration transmission per three axes (X, Y, Z) from the signal, calculating a cancellation force for the predicted disturbance, calculating a position error signal for the target position of the base, Calculating a rotational inertia moment from a position of the linear stage and updating a position feedback control parameter and a vibration feedback control parameter in proportion to the calculated rotational moment of inertia, Calculating a control force for each of the six axes and an acceleration error, calculating a control force for the reaction force based on the repulsive force disturbance canceling force, the bottom vibration disturbance canceling force and the acceleration And the VCM is distributed to each VCM through the inverse kinematic matrix, which is a distributor, and distributed to each servo valve through the inverse kinematic matrix, which is a distributor of the servo valve, after the center-of-gravity disturbance canceling force and the position error control force are summed And waiting for a certain sampling time to match the operation cycle.
A control method of a transfer apparatus using an active vibration suppression apparatus according to the present invention is characterized by receiving position and acceleration information of a linear stage from a motion controller of a linear stage moving on an upper portion of a base provided on the vibration suppression mount, The acceleration of the base with the upper vibration sensor provided on the upper plate side of the air spring and the acceleration of the ground by the floor vibration sensor provided on the lower portion of the air spring respectively and the position error with respect to the target position of the base Prior to the step of generating a signal and an acceleration error signal for the base of the base respectively, the base position signal is passed through only the slow frequency band generated by the displacement sensor and sent to the position feedback controller, (LPF), and only the fast frequency band generated by the upper vibration sensor The operation region of the frequency generated by the displacement sensor and the upper vibration sensor is overlapped by the high pass filter HPF to be sent to the vibration feedback controller to prevent the control signal sent to the VCM from interfering with the control signal sent to the VCM And further comprising a band separating step.
As described above, according to the disturbance control method of the conveyance apparatus using the active vibration suppression apparatus according to the present invention, feedback control is performed using a vibration sensor (acceleration or velocity sensor) and a voice coil motor (VCM) The position feedback control is performed by using the displacement sensor which measures the gap between the top plate of the vibration suppression mount and the upper head and the servo valve which operates in accordance with the value of the displacement sensor in the controller, While the acceleration and the position of the driving part of the conveying device are received from the controller connected to the vibration suppressing mount from the motion controller of the conveying device to compensate for the disturbance caused by the driving of the conveying device and simultaneously the canceling force is applied to the actuator, The effect of enhancing the productivity and safety of precision equipment is have.
As described above, according to the disturbance control method of the conveyance apparatus using the active vibration suppression apparatus according to the present invention, the disturbance generated when the stage is driven can be detected by the controller connected to the vibration suppression mount, By applying the canceling force to the actuator, it is possible to significantly reduce the movement of the object due to the stage driving, thereby minimizing the occurrence of disturbance. Further, unlike the conventional vibration damping apparatus, Therefore, the fixing time after the stage is driven can be shortened.
BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a front view of a conveying apparatus in which a base and a linear stage are installed in an active vibration control apparatus of the present invention,
Fig. 2 is a plan view of Fig. 1,
Fig. 3 is a right side view of Fig. 1,
Fig. 4 is an explanatory view showing an installation state of a vibration damping mount constituting the active vibration damping device of the present invention; Fig.
5 is a front view of a vibration isolation mount constituting the active vibration isolation apparatus of the present invention,
Fig. 6 is a plan view of Fig. 5,
Fig. 7 is a left side view of Fig. 5,
Fig. 8 is a right side view of Fig. 5,
Fig. 9 is a rear view of Fig. 5,
10 is a cross-sectional view illustrating the air spring of FIG. 5,
11 is an explanatory view showing a state in which a vibration isolation mount constituting the active vibration isolation apparatus of the present invention is connected to a controller;
Figure 12 is a control block diagram for the vibration suppression device controller of Figure 11,
13 is a control flowchart of the vibration suppression apparatus controller of the vibration suppression mount constituting the present invention.
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT Hereinafter, an active vibration suppression apparatus and a disturbance control method of a transfer apparatus using the same according to an embodiment of the present invention will be described in detail with reference to the accompanying drawings.
In the drawings, the same reference numerals are given to the same elements even when they are shown in different drawings. In the drawings, the same reference numerals as used in the accompanying drawings are used to designate the same or similar elements. And detailed description of the configuration will be omitted. Also, directional terms such as "top", "bottom", "front", "back", "front", "forward", "rear", etc. are used in connection with the orientation of the disclosed drawing (s). Since the elements of the embodiments of the present invention can be positioned in various orientations, the directional terminology is used for illustrative purposes, not limitation.
As shown in FIGS. 1 to 12, the active
Therefore, when the
5 to 10, the
The clearance between the lower surface of the air spring
As shown in the control block diagram of FIG. 12, the vibration
Accordingly, the transfer device disturbance compensator 1420 (stage disturbance compensator) receives the position and the acceleration of the linear stage from the
The transport
The
As shown in the control block diagram of FIG. 12, the vibration
The operating range of the frequency generated by the
The vibration sensed by the
Hereinafter, a disturbance control method of the conveyance apparatus using the above-described active type vibration damper will be described with reference to FIGS. 1 to 13. FIG.
The
Therefore, the disturbance of the conveyance apparatus using the active vibration suppression apparatus is detected by the vibration
In the position feedback control by the
In the vibration feedback control by the
Here, the parameter of the
A
The
The
That is, the
When the step S9 of waiting for a predetermined sampling time, for example 0.2 ms, is passed in order to match the operation period, the value of the displacement sensor is circulated after the step S1 of initializing the displacement sensor to 0, Receives the position and acceleration information of the
The position and acceleration information of the
Therefore, the
The embodiments of the present invention described above and shown in the drawings should not be construed as limiting the technical idea of the present invention. The scope of protection of the present invention is limited only by the matters described in the claims, and those skilled in the art will be able to modify the technical idea of the present invention in various forms. Accordingly, such modifications and changes will fall within the scope of the present invention if they are apparent to those skilled in the art.
1000: Active vibration isolation device 1100: Linear stage
1200: base 1300: lower frame
1400: vibration suppression device controller 1420: transfer device (stage) disturbance compensator
1421: Repulsive force compensator 1422: Center of gravity compensator
1430: Vibration feedback controller 1450: Band separation filter
1451: Low-pass filter (LPF) 1452: High-pass filter (HPF)
1500: vibration-proof mount 1510: air spring
1520: Vertical VCM 1530: Horizontal VCM
1540: Vertical vibration sensor 1550: Horizontal vibration sensor
1560: Top vibration sensor 1570: Floor vibration sensor
1580: Displacement sensor 1590: Servo valve
Claims (6)
Wherein the vibration suppression device controller comprises:
It is installed so as to be positioned at the lower part of the displacement sensor target installed on the air spring upper plate of the vibration suppression mount so as to detect the gap with the displacement sensor target, so that the lower surface of the air spring upper plate and the upper surface of the clamp ring assembled to the upper part of the air spring chamber Initializing the value of the angular displacement sensor to zero at the landing position so as to sense a gap away from the displacement sensor,
And a vibration sensor for detecting the position of the linear stage and the acceleration information from the motion controller of the linear stage moving on the upper portion of the vibration mount, And a floor vibration sensor provided at a lower portion of the air spring,
(X, Y, Z, roll, pitch, yaw) disturbance disturbances from the linear acceleration information of the linear stage and the positional information of the linear stage, , Y, Z), respectively;
Calculating a cancellation force for the predicted disturbance,
Generating a position error signal with respect to the target position of the base and an acceleration error signal with respect to the target of the base with respect to the velocity (0)
Calculating a rotational inertia moment from the position of the linear stage and updating a position feedback control parameter and a vibration feedback control parameter in proportion to the calculated rotational moment of inertia,
Calculating a control force for the six-axis position and the acceleration error;
The control force for the repulsive force disturbance canceling force, the bottom vibration disturbance canceling force and the acceleration error is distributed to each VCM through a VCM inverse kinematic matrix which is a distributor after the sum of the disturbance cancellation disturbance force and the position error control force, Distributing to each servo valve through an inverse kinematic matrix,
And waiting for a predetermined sampling time in order to adjust the operation period. The method of controlling a conveying apparatus using an active type vibration damper.
And a vibration sensor for detecting the position of the linear stage and the acceleration information from the motion controller of the linear stage moving on the upper portion of the vibration mount, And the acceleration of the ground by the bottom vibration sensor provided at the lower portion of the air spring,
Prior to the step of generating a position error signal for the target position of the base and an acceleration error signal for the base of the base respectively,
The position signal of the base is passed through only a low frequency band generated by the displacement sensor and is sent to a position feedback controller, and a low pass filter (LPF) passing through only a fast frequency band generated by the upper vibration sensor and sent to a vibration feedback controller A high-pass filter (HPF) is provided to prevent the interference of the control signal sent to the VCM and the control signal sent to the VCM by overlapping the operating range of the frequency generated by the displacement sensor and the upper vibration sensor And a control unit for controlling the operation of the conveying device.
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KR1020170108597A KR101977308B1 (en) | 2017-08-28 | 2017-08-28 | Active vibration control apparatus and disturbance control method of conveyer using the same |
PCT/KR2017/009725 WO2019045155A1 (en) | 2017-08-28 | 2017-09-05 | Active-vibration damping system and method for controlling disturbance of transfer apparatus by using same |
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KR20210026742A (en) * | 2019-09-02 | 2021-03-10 | 공주대학교 산학협력단 | Vibration damping device and method of precision stage using magnetic force |
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RU199283U1 (en) * | 2019-12-12 | 2020-08-25 | Федеральное государственное казенное военное образовательное учреждение высшего образования "Военный учебно-научный центр Военно-Морского Флота "Военно-морская академия им. Адмирала Советского Союза Н.Г. Кузнецова" | A model of an active vibration damping system with phase-locked loop frequency |
CN113884004A (en) * | 2021-09-08 | 2022-01-04 | 长江存储科技有限责任公司 | Air floatation system of scanning electron microscope for measuring characteristic dimension and scanning electron microscope |
WO2023083573A1 (en) * | 2021-11-15 | 2023-05-19 | Asml Netherlands B.V. | Method and system of reducing chamber vibration |
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JP2003314610A (en) * | 2002-04-19 | 2003-11-06 | Canon Inc | Active vibration control device, exposing device, and manufacturing method for the devices |
JP3825869B2 (en) * | 1997-03-19 | 2006-09-27 | キヤノン株式会社 | Active vibration isolator |
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JP5064316B2 (en) * | 2008-07-01 | 2012-10-31 | 特許機器株式会社 | Vibration isolator |
JP5438995B2 (en) * | 2009-03-10 | 2014-03-12 | 株式会社ミツトヨ | Shape measuring machine and scanning probe device |
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JP3825869B2 (en) * | 1997-03-19 | 2006-09-27 | キヤノン株式会社 | Active vibration isolator |
JP2003314610A (en) * | 2002-04-19 | 2003-11-06 | Canon Inc | Active vibration control device, exposing device, and manufacturing method for the devices |
KR101162527B1 (en) | 2003-09-03 | 2012-07-09 | 가부시키가이샤 니콘 | Exposure apparatus and device producing method |
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KR20210026742A (en) * | 2019-09-02 | 2021-03-10 | 공주대학교 산학협력단 | Vibration damping device and method of precision stage using magnetic force |
KR102226692B1 (en) * | 2019-09-02 | 2021-03-11 | 공주대학교 산학협력단 | Vibration damping device and method of precision stage using magnetic force |
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