JP5438995B2 - Shape measuring machine and scanning probe device - Google Patents

Description

  The present invention relates to a shape measuring machine and a scanning probe apparatus. Specifically, shape measurement that measures the shape of the object to be measured while relatively moving the probe having a force sensor that detects the measurement force generated when contacting the object to be measured and outputs it as a force detection signal. Machine and scanning probe.

In a shape measuring machine that measures the shape or the like of a measurement object while relatively moving a probe having a force sensor and the measurement object in contact with each other, the shape measurement machine is affected by disturbance vibration when measuring the shape of the measurement object.
For example, when a master ball (ruby ball or the like) is copied and measured, a measurement result as shown in FIG. 6 is obtained. The residual after subtracting the shape of the master ball from this measurement result, as shown in FIG. 7, always includes disturbance vibration components of the measurement environment in addition to the shape error. This becomes more prominent as the order to be measured becomes smaller, and the proportion of the residual result becomes larger. In other words, the measured value obtained is
Measurement value = shape of measured object + disturbance vibration.

In the contact-type scanning measurement system, the influence of disturbance vibrations causes variations in the contact force (measurement force) on the object to be measured, which is one of the factors that form contact marks on the object to be measured.
Therefore, in order to prevent the measurement object from being damaged, a scanning measurement system having a control function for keeping the measurement force as small as possible and keeping it constant has been proposed (for example, see Patent Document 1).

  In the system disclosed in Patent Document 1, in order to reduce the influence of vibration and perform measurement, a method of increasing the response of force control can be considered. However, it has technical problems such as miniaturization, lightening of the probe, and introduction of advanced control technology, which are difficult to realize.

In general, the measurement shape contains many relatively low-frequency shape components, and the disturbance vibration is composed of relatively high-frequency components. Therefore, the measuring instrument does not respond to the disturbance vibration, and only the shape component of the object to be measured. To respond to.
For that purpose, it is conceivable to lower the force control gain, but at the same time, the shape followability also decreases, and in particular, it is difficult to measure short wavelength components such as surface roughness. . Therefore, the shape measuring machine cannot take the technique of suppressing the disturbance vibration by reducing the gain.

  If the measurement system takes into account the frequency of the disturbance vibration and the natural frequency (response frequency) of the measuring machine, it is possible to reduce the effect, but in many cases the two frequencies are different and For this reason, the measurement force with respect to the object to be measured varies, and it is difficult to perform the copying measurement with a constant measurement force.

For this reason, it is considered that the obtained measurement value becomes vibration and nondestructive measurement becomes difficult. For example, as shown in FIG. 8, when measuring an object to be measured at a certain scanning speed, if a sudden input of a disturbance vibration component is applied in the vertical direction, the stylus has a low response frequency. Therefore, in the portion where the object to be measured is uneven, an excessive measuring force is applied to the surface of the object to be measured, and the surface is damaged.
Therefore, conventionally, in order to reduce the influence of this disturbance vibration, a passive type or an active type vibration isolation table is generally used.

JP 2007-309684 A

  The passive vibration isolator is a structure that attenuates incoming vibration by an elastic body such as an air spring or rubber. This passive type vibration isolation table is inexpensive, but has the disadvantages that the vibration attenuation performance is relatively low and the attenuation frequency band is narrow.

An active vibration isolator is a system that cancels vibrations by applying a force opposite to that of incoming vibrations by electrical control. However, the frequency band that can be reduced is limited, and the vibration isolation table itself is very expensive, so it cannot be said that it is widely used as a measure against disturbance vibration.
Therefore, a measurement system that can easily reduce the influence of disturbance vibration is desired from these reasons.

  In view of such circumstances, an object of the present invention is to provide a shape measuring machine and a scanning probe apparatus that can reduce the influence of disturbance vibration with a simple and inexpensive structure.

The shape measuring machine according to the present invention includes a table on which an object to be measured is mounted, a probe having a force sensor that detects a measurement force generated upon contact with the object to be measured and outputs a force detection signal, and holds the probe. A shape measuring unit that measures the shape of the object to be measured while controlling the force detection signal from the force sensor to be substantially constant, and a relative movement mechanism that relatively moves the probe holding member and the table. In the machine, the probe includes a case body held by the probe holding member, a probe main body provided in a reciprocating manner inside the case body, and the force sensor provided at the tip of the probe main body, A force sensor moving means for reciprocating the probe main body, and provided between the case body and the probe main body for reciprocating movement of the probe main body. A vibration element capable vibration to direction, and canceling the vibration generating means for a vibration for canceling disturbance vibration transmitted power detection signal to the probe body based from the force sensor is generated from the vibrating element possess, the vibrating element Is driven with higher response than the force sensor moving means .
Here, as the vibration element, for example, a piezoelectric element or a voice coil motor can be used.

According to such a configuration, in a state where the object to be measured is placed on the table and the force sensor of the probe is in contact with the surface of the object to be measured, the force detection signal from the force sensor is substantially constant. The probe main body is reciprocated with respect to the object to be measured, and the probe holding member holding the probe and the table are relatively moved by the relative movement mechanism. Then, the surface of the object to be measured is copied and measured with a constant measuring force by the force sensor.
At this time, when disturbance vibration is transmitted to the probe body via the relative movement mechanism and the case body of the probe, the disturbance vibration component is detected in a state of being superimposed on the force detection signal from the force sensor. Then, the canceling vibration generating means generates a vibration from the vibration element that cancels the disturbance vibration transmitted to the probe body based on the force detection signal from the force sensor. Thereby, disturbance vibration is canceled. Therefore, the influence of disturbance vibration can be reduced with a simple and inexpensive structure.
In particular, in the present invention, since the vibration element is interposed between the case body of the probe and the probe main body, it is not necessary to add a special attachment mechanism to attach the probe to the probe holding member of the relative movement mechanism. The probe can be easily attached to an existing measuring machine.

The shape measuring machine according to the present invention includes a table on which an object to be measured is mounted, a probe having a force sensor that detects a measurement force generated upon contact with the object to be measured and outputs a force detection signal, and holds the probe. A shape measuring unit that measures the shape of the object to be measured while controlling the force detection signal from the force sensor to be substantially constant, and a relative movement mechanism that relatively moves the probe holding member and the table. In the machine, the probe includes a probe main body provided so as to be capable of reciprocating, the force sensor provided at the tip of the probe main body, and force sensor moving means for reciprocating the probe main body, disturbance vibration transmitted to the probe based on a vibration element capable vibration provided, the force detection signal from the force sensor between the probe holding member and the probe Canceling vibrating possess a canceling vibration generating means for generating from the vibrating element, the vibrating element, characterized in that it is driven at a high response than the force sensor moving unit.

According to such a configuration, the above-described scanning measurement can be performed, and disturbance vibration transmitted to the probe via the relative movement mechanism can be canceled by the vibration element provided between the probe and the probe holding member. Can do. Therefore, the influence of disturbance vibration can be reduced with a simple and inexpensive structure as described above.
In the present invention, there is an advantage that the probe can be kept small without increasing the size of the probe, since it is not necessary to incorporate the vibration element in the case body of the probe.

In the shape measuring machine of the present invention, the canceling vibration generating means has a high-pass filter circuit that passes a signal mainly composed of disturbance vibrations from the force detection signal of the force sensor, and an output from the high-pass filter circuit as an input. A configuration including a drive circuit that drives a vibration element and generates a vibration that cancels the disturbance vibration from the vibration element is preferable.
According to such a configuration, the cancellation vibration generating means passes the signal mainly including disturbance vibration from the force detection signal of the force sensor, and the vibration element is input with the output from the high-pass filter circuit as an input. Since it can be comprised from the drive circuit which drives and generates the vibration which cancels the said disturbance vibration from a vibration element, it can comprise simply.

In the shape measuring instrument of the present invention, it is preferable that a gain adjustment circuit is inserted between the high-pass filter circuit and the drive circuit.
According to such a configuration, since the force detection signal detected by the force sensor can be adjusted to an optimum vibration amplitude according to the measurement force, vibration that cancels disturbance vibration can be generated from the vibration element.

The scanning probe apparatus according to the present invention includes a probe having a force sensor that detects a measurement force generated upon contact with an object to be measured and outputs it as a force detection signal, and a disturbance vibration that generates a vibration that cancels the disturbance vibration applied to the probe. The probe includes a case body, a probe main body provided inside the case body so as to be reciprocally movable, the force sensor provided at the tip of the probe main body, and the probe main body. A force sensor moving means for moving, the disturbance vibration canceling means being provided between the case body and the probe main body and capable of vibrating in the reciprocating direction of the probe main body, and the force Canceling vibration generating means for generating, from the vibration element, vibration that cancels disturbance vibration transmitted to the probe body based on a force detection signal from a sensor. Made is, the vibrating element, characterized in that it is driven at a high response than the force sensor moving unit.

  According to such a configuration, the probe having a force sensor that detects a measurement force generated upon contact with the object to be measured and outputs it as a force detection signal, and a disturbance vibration that generates a vibration that cancels the disturbance vibration applied to the probe. Since the canceling means is provided, if the scanning probe is attached to the probe holding member of the relative movement mechanism in the existing measuring machine, it can be configured as a shape measuring machine that performs scanning measurement.

Hereinafter, an embodiment of the present invention will be described with reference to the drawings.
<Description of shape measuring machine (see FIGS. 1 and 2)>
FIG. 1 is a front view of a shape measuring machine according to an embodiment of the present invention, and FIG. 2 is a side view of the shape measuring machine.
The shape measuring machine according to the present embodiment includes a base 1, an XY stage 2 as a table on which an object to be measured is placed, and an X and Y axis directions that displace the XY stage 2 in the X and Y axis directions orthogonal to each other in a horizontal plane. The axis drive mechanism 3 and the Y axis drive mechanism 4, the portal frame 5 provided on the upper surface of the base 1 across the XY stage 2, and the Z axis slider 6 provided on the cross rail 5A of the portal frame 5 And a Z-axis drive mechanism 7 for displacing the Z-axis slider 6 in a Z-axis direction orthogonal to the X- and Y-axis directions, and a probe 10 attached to the Z-axis slider 6.

The XY stage 2 has a flat placement surface on which an object to be measured is placed on the upper surface, and is provided so as to be movable in the X and Y axis directions orthogonal to each other in a plane parallel to the placement surface.
The X-axis drive mechanism 3 and the Y-axis drive mechanism 4 are constituted by, for example, a feed screw mechanism having a ball screw shaft and a nut member screwed to the ball screw shaft.
Similarly to the X-axis drive mechanism 3 and the Y-axis drive mechanism 4, the Z-axis drive mechanism 7 is also configured by, for example, a feed screw mechanism having a ball screw shaft and a nut member screwed to the ball screw shaft. Yes.
The X-axis drive mechanism 3 and the Y-axis drive mechanism 4, the portal frame 5, the Z-axis slider 6, the Z-axis drive mechanism 7 and the like are a table and a Z-axis slider 6 as a probe holding member that holds the probe 10. The XY stage 2 is relatively moved in the X-axis direction, the Y-axis direction, and the Z-axis direction, that is, in the three-dimensional direction.

<Explanation of probe (see FIG. 3)>
As shown in FIG. 3, the probe 10 has a substantially rectangular box-shaped case body 11 provided on a Z-axis slider 6 as a probe holding member of a relative movement mechanism, and one end (lower end) in the longitudinal direction inside the case body 11. ) Is exposed to the outside, and the probe body 12 is moved forward and backward in the Z-axis direction. The probe body 12 is moved forward and backward in the Z-axis direction. A drive actuator 14 as a force sensor moving means, a scale 15 attached to the probe main body 12, and a displacement amount of the force sensor 20 by the drive actuator 14 based on the scale 15 (that is, a measurement position of an object to be measured by the force sensor 20) Scale detector 16 as position detecting means for detecting information), the upper wall of the case body 11 and the other longitudinal end of the probe body 12 And a vibrating element 17 provided between the upper end).

The force sensor 20 includes a metal base 21, a stylus 22 formed integrally with the base 21, a vibration element 23 that vibrates (vibrates in the axial direction) the stylus 22, and a vibration state of the stylus 22. It comprises a detection element 24 that detects and outputs as a detection signal. The vibration element 23 and the detection element 24 are constituted by a single piezoelectric element, and are respectively bonded and fixed to the front and back of the base 21.
When a vibration signal having a specific frequency and amplitude is given to the vibration element 23, the detection element 24 obtains a detection signal having a specific frequency and amplitude. When the stylus 22 contacts the object to be measured, the amplitude of the detection signal is attenuated. Since there is a certain relationship between the attenuation rate and the measurement force, the force sensor 20 outputs a signal corresponding to the measurement force generated upon contact with the object to be measured as a force detection signal. That is, the force sensor 20 can detect a measurement force generated when contacting the object to be measured and output this as a force detection signal.
Therefore, if the distance between the force sensor 20 and the object to be measured is controlled so that the attenuation rate is always constant, the surface shape of the object to be measured can be measured with a constant measuring force.

  The vibration element 17 vibrates the probe main body 12 in the same direction as the reciprocating movement direction (Z-axis direction), and is constituted by a piezoelectric element 17A having a higher response than a drive actuator that reciprocates the probe main body 12.

<Description of controller and canceling vibration generating means (see FIG. 4)>
FIG. 4 is a block diagram showing the controller 30 that controls the probe 10 and the canceling vibration generating means 50.
As shown in FIG. 4, the controller 30 counts the signal from the A / D conversion circuit 31 that converts the force detection signal from the force sensor 20 from analog to digital and the scale detector 16 to measure the position of the force sensor 20. A counter 32 that outputs information as a position measurement value, a calculator 33 that calculates a deviation between an output (force feedback signal) from the A / D conversion circuit 31 and a target measurement force, and an output from the calculator 33 are input. The force control compensator 34, the addition / subtraction processing circuit 35 for performing acceleration / deceleration processing on the target position, and the deviation between the output from the addition / subtraction processing circuit 35 and the measured value (position feedback signal) of the counter 32 are calculated. The calculator 36, the position control compensator 37 that receives the output from the calculator 36, and the position feedback signal from the counter 32 are differentiated into a speed signal. The time differential circuit 38, the switch 39 as the control loop switching means, and the deviation between the output from the force control compensator 34 or the position control compensator 37 and the output from the time differential circuit 38 taken in via the switch 39. , A speed compensator 41 having the output from the arithmetic unit 40 as an input, a drive amplifier 42 for driving the drive actuator 14 based on the output from the speed compensator 41, and A / D conversion A contact determination circuit 43 that switches the switch 39 based on an output (force feedback signal) from the circuit 31 is included.

Here, the force sensor 20 includes an A / D conversion circuit 31, a calculator 33, a force control compensator 34, a calculator 40, a speed compensator 41, a drive amplifier 42, and a drive actuator 14. A force control loop RF is configured to drive the drive actuator 14 so that the detection signal is compared with the target measurement force as a force feedback signal and the force feedback signal matches the target measurement force.
The measurement position information from the scale detector 16 includes the scale detector 16, counter 32, calculator 36, position control compensator 37, calculator 40, speed compensator 41, drive amplifier 42 and drive actuator 14. A position control loop RP that drives the drive actuator 14 so that the position feedback signal matches the target position as a position feedback signal is configured.

The switch 39 is controlled to be switched between the force control side and the position control side according to a switching command from the contact determination circuit 43, and validates one of the force control loop RF and the position control loop RP.
When the attenuation rate of the force detection signal from the force sensor 20 exceeds a certain value, that is, when the attenuation rate of the amplitude of the force detection signal exceeds a preset value, the contact determination circuit 43 causes the stylus 22 of the force sensor 20 to be covered. It is determined that the measurement object has been touched, and the switch 39 is switched from the position control side to the force control side.

  The canceling vibration generating means 50 generates vibration from the vibration element 17 that cancels disturbance vibration transmitted to the probe main body 12 based on the force detection signal from the force sensor 20, and generates disturbance vibration from the force detection signal of the force sensor 20. A high-pass filter circuit 51 that passes a signal as a main component; a gain adjustment circuit 52 that receives an output from the high-pass filter circuit 51 as an input and adjusts an oscillation amplitude of an output from the high-pass filter circuit 51 according to a target measurement force; A drive amplifier 53 is provided as a drive circuit that drives the piezoelectric element 17A, which is the vibration element 17, based on the output from the gain adjustment circuit 52 and generates vibration that cancels out disturbance vibration from the piezoelectric element 17A.

<Scanning measurement operation>
In the measurement, first, the probe 10 is approached to the object to be measured. For this purpose, the probe 10 is brought close to the object to be measured by the position control loop RP in a state where the switch 39 is switched to the position control side.
When the probe 10 approaches the object to be measured and the stylus 22 contacts the object to be measured, the contact force (that is, measuring force) is detected by the force sensor 20. When the attenuation rate of the force detection signal from the force sensor 20 exceeds a certain value, that is, when the amplitude attenuation rate of the force detection signal exceeds a preset value, the contact determination circuit 43 causes the stylus 22 of the force sensor 20 to be measured. It is determined that an object has been touched, and the switch 39 is switched from the position control side to the force control side. Thereby, the position control loop RP is switched to the force control loop RF.

Then, since the force detection signal from the force sensor 20 is fed back to the force control loop RF as a force feedback signal, the drive actuator so that the force detection signal (force feedback signal) from the force sensor 20 matches the target measurement force. 14 is driven. That is, scanning measurement with a constant measurement force is executed.
Therefore, if the coordinate values in the scanning direction at this time, that is, the coordinate values in the X, Y and Z axis directions of the relative movement mechanism and the detection value of the scale detector 16 are read, the surface properties (shape and roughness) of the object to be measured are read. )).

  In this scanning measurement, when disturbance vibration is transmitted to the probe main body 12 via the relative movement mechanism and the case body 11 of the probe 10, the disturbance vibration component is superimposed on the force detection signal from the force sensor 20. Then, in the canceling vibration generating means 50, a signal mainly composed of disturbance vibration among the force detection signals from the force sensor 20 passes through the high-pass filter circuit 51 and is input to the gain adjustment circuit 52, where the target measurement force is obtained. The amplitude is adjusted accordingly, and then input to the drive amplifier 53. Then, the drive amplifier 53 drives the piezoelectric element 17A based on the output from the gain adjustment circuit 52, and generates a vibration from the piezoelectric element 17A that cancels the disturbance vibration. That is, the probe main body 12 is driven (vibrated) in the same direction as the disturbance vibration component. As a result, disturbance vibrations are canceled out, so that it is possible to realize scanning measurement with a small variation in measuring force.

<Effects of Embodiment>
(1) The vibration element 17 generated between the case body 11 and the probe main body 12 and the vibration element 17 cancels disturbance vibration transmitted to the probe main body 12 based on the force detection signal from the force sensor 20. Therefore, if disturbance vibration is transmitted to the probe main body 12 via the relative movement mechanism and the case body 11 of the probe 10 at the time of scanning measurement, the disturbance vibration component is transmitted from the force sensor 20. It is detected in a state superimposed on the force detection signal. Then, since the canceling vibration generating means 50 generates vibration from the piezoelectric element 17A that cancels the disturbance vibration transmitted to the probe body 12 based on the force detection signal from the force sensor 20, the disturbance vibration can be canceled. Therefore, the influence of disturbance vibration can be reduced with a simple and inexpensive structure.

(2) Particularly, in this embodiment, since the piezoelectric element 17A is interposed between the case body 11 and the probe main body 12 of the probe 10, the probe 10 is moved to the probe holding member (Z-axis slider 6) of the relative movement mechanism. In addition, it is not necessary to add a special attachment mechanism, and the probe 10 can be easily attached to an existing measuring machine.
(3) Since the probe 10 incorporating the piezoelectric element 17A and the canceling vibration generating means 50 for generating the vibration canceling the disturbance vibration applied to the probe 10 are provided, the relative movement mechanism is used in the existing measuring machine. If a probe is attached to the probe holding member (Z-axis slider 6), it is possible to configure a shape measuring machine that performs scanning measurement.

(4) The canceling vibration generating means 50 drives the piezoelectric element 17A by the high-pass filter circuit 51 that passes a signal mainly composed of disturbance vibrations from the force detection signal of the force sensor 20 and the output from the high-pass filter circuit 51. Since it includes the drive amplifier 53 that generates vibration that cancels out disturbance vibration from the piezoelectric element 17 </ b> A, it can be easily configured.
(5) Further, since the gain adjustment circuit 52 is inserted between the high-pass filter circuit 51 and the drive amplifier 53, the force detection signal detected by the force sensor 20 is converted to an optimum vibration amplitude corresponding to the measurement force. Can be adjusted. Therefore, vibration that cancels disturbance vibration can be generated from the piezoelectric element 17A.

(6) Since the vibration-type force sensor 20 including the stylus 22, the vibration element 23, and the detection element 24 is used as the force sensor 20, high-precision measurement can be performed with a small measurement force. is there. As a result, it is possible to provide a shape measuring machine capable of measuring with high accuracy.

<Modification of Embodiment>
In addition, this invention is not limited to embodiment mentioned above, In the range which can achieve the objective of this invention, the following modifications are also included.
In the above embodiment, the piezoelectric element 17A is incorporated in the case body 11 of the probe 10, but the present invention is not limited to this. For example, as shown in FIG. 5, the piezoelectric element 17 </ b> A as the vibration element 17 can vibrate in the movement direction (relative movement direction) of the probe body 12 between the probe 10 and the Z-axis slider 6 as the probe holding member. It may be incorporated. In this case, a bracket containing a piezoelectric element 17A as the vibration element 17 may be interposed between the probe 10 and the Z-axis slider 6 as the probe holding member.

In this way, in the same manner as in the above-described embodiment, it is possible to perform scanning measurement, and to provide disturbance vibration transmitted to the probe 10 via the relative movement mechanism between the probe 10 and the Z-axis slider 6. The vibration element 17 can cancel out. Therefore, the influence of disturbance vibration can be reduced with a simple and inexpensive structure as described above.
Further, in this example, since the vibration element 17 does not have to be incorporated in the case body 11 of the probe 10, there is an advantage that the probe 10 can be kept small without increasing the size.

In the embodiment, the example in which the probe 10 having the force sensor 20 is attached to the Z-axis slider 6 of the shape measuring machine has been described. However, the probe 10 having the force sensor 20 and the vibration element 17 and disturbance vibration applied to the probe 10 are described. The scanning probe device may be configured with disturbance vibration canceling means for generating vibration that cancels the vibration. The disturbance vibration canceling means here is a vibration element 17 provided between the case body 11 of the probe 10 and the probe main body 12 and capable of vibrating in the reciprocating direction of the probe main body 12, and the force from the force sensor 20. It includes a canceling vibration generating means 50 that generates vibration from the vibration element 17 that cancels disturbance vibration transmitted to the probe main body 12 based on the detection signal.
In this way, in the existing measuring machine, if the probe 10 is attached to the probe holding member (Z-axis slider 6) of the relative movement mechanism, the shape measuring machine that performs the scanning measurement can be configured easily.

  In the embodiment, the vibration type force sensor is used as the force sensor 20, but is not limited thereto. For example, a structure in which a strain gauge is integrally attached to a stylus may be used. When the stylus comes into contact with the object to be measured, the stylus bends according to the measurement force. A structure in which the amount of bending is detected by a strain gauge and a detection signal corresponding to the measurement force is output may be used. The point is that the present invention is not limited to the above example as long as it is a structure that can detect a measuring force generated upon contact with the object to be measured and output it as a force detection signal.

  In the above-described embodiment, the shape measuring machine in which the XY stage 2 as a table and the probe holding member (Z-axis slider 6) can move in a three-dimensional direction is taken as an example, but the table and the probe holding member are not necessarily tertiary. It is not limited to a structure that can move in the original direction. For example, a shape measuring machine movable in a two-dimensional direction may be used.

  The present invention can be applied to general measuring machines that measure the surface roughness, shape, contour, roundness, etc. of an object to be measured.

The front view of the shape measuring machine which concerns on one Embodiment of this invention. The side view of the said embodiment. Sectional drawing of the probe in the said embodiment. The block diagram which shows the controller and cancellation vibration generation means of the said embodiment. The figure which shows the modification of the said embodiment. The figure which shows the measurement result which copied and measured the master ball (ruby ball etc.). The figure which shows the residual after subtracting the shape of a master ball from the measurement result of FIG. The figure explaining the measurement state when a disturbance signal is given.

2 ... XY stage (table),
6 ... Z-axis slider (probe holding member),
10 ... probe,
11 ... Case body,
12 ... Probe body,
14 ... Drive actuator (force sensor moving means),
17 ... vibration element,
17A ... piezoelectric element,
20 ... force sensor,
50. Canceling vibration generating means,
51. High pass filter circuit,
52 ... Gain adjustment circuit,
53... Drive amplifier (drive circuit).

Claims (5)

A table on which the object to be measured is placed; a probe having a force sensor that detects a measurement force generated upon contact with the object to be measured and outputs it as a force detection signal; a probe holding member that holds the probe; and the table A shape measuring machine that measures the shape of the object to be measured while controlling the force detection signal from the force sensor to be substantially constant,
The probe includes a case body held by the probe holding member, a probe main body provided in a reciprocating manner inside the case body, the force sensor provided at a tip of the probe main body, and the probe main body. And a force sensor moving means for reciprocating the
A vibration element provided between the case body and the probe body and capable of vibrating in a reciprocating direction of the probe body, and a vibration that cancels disturbance vibration transmitted to the probe body based on a force detection signal from the force sensor. the possess a canceling vibration generating means for generating from the vibrating element,
The vibration measuring device is driven with a higher response than the force sensor moving means . A table on which the object to be measured is placed; a probe having a force sensor that detects a measurement force generated upon contact with the object to be measured and outputs it as a force detection signal; a probe holding member that holds the probe; and the table A shape measuring machine that measures the shape of the object to be measured while controlling the force detection signal from the force sensor to be substantially constant,
The probe is configured to include a probe main body provided so as to be able to reciprocate, the force sensor provided at the tip of the probe main body, and force sensor moving means for reciprocating the probe main body,
An oscillating vibration element provided between the probe and the probe holding member, and an offset that generates vibration from the oscillating element that cancels disturbance vibration transmitted to the probe based on a force detection signal from the force sensor. It has a vibration generating means,
The vibration measuring device is driven with a higher response than the force sensor moving means . In the shape measuring machine according to claim 1 or 2,
The canceling vibration generating means passes a signal having a disturbance vibration as a main component from a force detection signal of the force sensor, and drives the vibration element with an output from the high-pass filter circuit as an input. And a drive circuit for generating vibration that cancels the disturbance vibration from
A shape measuring machine characterized by that. In the shape measuring machine according to claim 3,
A gain adjustment circuit is inserted between the high-pass filter circuit and the drive circuit.
A shape measuring machine characterized by that. A probe having a force sensor that detects a measurement force generated upon contact with the object to be measured and outputs it as a force detection signal;
Disturbance vibration canceling means for generating vibration that cancels the disturbance vibration applied to the probe, and
The probe includes a case body, a probe main body provided in a reciprocating manner inside the case body, the force sensor provided at the tip of the probe main body, and a force sensor moving means for reciprocating the probe main body. And comprising
The disturbance vibration canceling means is provided between the case body and the probe main body and is capable of vibrating in the reciprocating direction of the probe main body and the probe main body based on a force detection signal from the force sensor. Canceling vibration generating means for generating vibration from the vibration element to cancel transmitted disturbance vibration ,
The scanning probe apparatus characterized in that the vibration element is driven with a higher response than the force sensor moving means .

Images