JP2007098565A5 - - Google Patents

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Publication number
JP2007098565A5
JP2007098565A5 JP2006229501A JP2006229501A JP2007098565A5 JP 2007098565 A5 JP2007098565 A5 JP 2007098565A5 JP 2006229501 A JP2006229501 A JP 2006229501A JP 2006229501 A JP2006229501 A JP 2006229501A JP 2007098565 A5 JP2007098565 A5 JP 2007098565A5
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JP
Japan
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layer
forming
opening
structural
structural layer
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JP2006229501A
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English (en)
Japanese (ja)
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JP4939873B2 (ja
JP2007098565A (ja
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Priority to JP2006229501A priority Critical patent/JP4939873B2/ja
Priority claimed from JP2006229501A external-priority patent/JP4939873B2/ja
Publication of JP2007098565A publication Critical patent/JP2007098565A/ja
Publication of JP2007098565A5 publication Critical patent/JP2007098565A5/ja
Application granted granted Critical
Publication of JP4939873B2 publication Critical patent/JP4939873B2/ja
Expired - Fee Related legal-status Critical Current
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JP2006229501A 2005-09-06 2006-08-25 微小電気機械式装置の作製方法 Expired - Fee Related JP4939873B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2006229501A JP4939873B2 (ja) 2005-09-06 2006-08-25 微小電気機械式装置の作製方法

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2005258072 2005-09-06
JP2005258072 2005-09-06
JP2006229501A JP4939873B2 (ja) 2005-09-06 2006-08-25 微小電気機械式装置の作製方法

Publications (3)

Publication Number Publication Date
JP2007098565A JP2007098565A (ja) 2007-04-19
JP2007098565A5 true JP2007098565A5 (https=) 2009-08-27
JP4939873B2 JP4939873B2 (ja) 2012-05-30

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ID=38026003

Family Applications (1)

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JP2006229501A Expired - Fee Related JP4939873B2 (ja) 2005-09-06 2006-08-25 微小電気機械式装置の作製方法

Country Status (1)

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JP (1) JP4939873B2 (https=)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104051357B (zh) 2013-03-15 2017-04-12 财团法人工业技术研究院 环境敏感电子装置以及其封装方法
TWI549290B (zh) * 2013-11-12 2016-09-11 財團法人工業技術研究院 摺疊式封裝結構
CN104637886B (zh) 2013-11-12 2017-09-22 财团法人工业技术研究院 折叠式封装结构
WO2015103688A1 (en) * 2014-01-09 2015-07-16 Motion Engine Inc. Integrated mems system
US9799829B2 (en) * 2014-07-25 2017-10-24 Semiconductor Energy Laboratory Co., Ltd. Separation method, light-emitting device, module, and electronic device
WO2016154960A1 (en) * 2015-04-01 2016-10-06 Goertek.Inc Transfer method, manufacturing method, device and electronic apparatus of mems

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06296380A (ja) * 1993-04-07 1994-10-21 Nippondenso Co Ltd 積層型伸縮アクチュエータ
US6225688B1 (en) * 1997-12-11 2001-05-01 Tessera, Inc. Stacked microelectronic assembly and method therefor
US6300679B1 (en) * 1998-06-01 2001-10-09 Semiconductor Components Industries, Llc Flexible substrate for packaging a semiconductor component
JP3443066B2 (ja) * 2000-03-10 2003-09-02 株式会社国際電気通信基礎技術研究所 半導体装置およびその製造方法
JP2005161464A (ja) * 2003-12-02 2005-06-23 Advanced Telecommunication Research Institute International 半導体装置およびその製造方法
US7202552B2 (en) * 2005-07-15 2007-04-10 Silicon Matrix Pte. Ltd. MEMS package using flexible substrates, and method thereof

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