JP2007096372A - Surface mounting piezoelectric oscillator and its manufacturing process - Google Patents

Surface mounting piezoelectric oscillator and its manufacturing process Download PDF

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JP2007096372A
JP2007096372A JP2005278931A JP2005278931A JP2007096372A JP 2007096372 A JP2007096372 A JP 2007096372A JP 2005278931 A JP2005278931 A JP 2005278931A JP 2005278931 A JP2005278931 A JP 2005278931A JP 2007096372 A JP2007096372 A JP 2007096372A
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component
mounting
resin layer
conductor block
wiring pattern
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Tatsuya Anzai
達也 安齊
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Miyazaki Epson Corp
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Miyazaki Epson Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a surface mounting piezoelectric oscillator which does not cause complication of structure or increase in number of manufacturing steps even in such a case as a cavity filled with underfill cannot be secured in a piezoelectric vibrator and the oscillation circuit IC section of three-dimensional arrangement, and to provide its manufacturing process. <P>SOLUTION: The process for manufacturing a surface mounting piezoelectric oscillator comprising a piezoelectric vibrator 21 and an IC component 10 mounted on a packaging substrate 2 and having such a structure as the entirety of the IC component is covered with a resin layer 41 from the upper surface of the substrate to the upper surface level of a conductor block 31 comprises an IC component mounting step performing flip-chip mounting on a wiring pattern 5 through small bumps 7, a hot press step for integrally coating the IC component with a resin layer while embedding, a step for irradiating the resin layer with a laser beam to form a plurality of wiring pattern exposure openings, a step for forming a conductor block on a wiring pattern in contact therewith by filling each opening with a conductive material, and a piezoelectric vibrator mounting step for securing an electrode on the bottom of the piezoelectric vibrator to the exposed upper surface of each conductor block through a connection conductor. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

本発明は、小型化の進展に伴って求められるアンダーフィルレス構造や、キャビティレス構造に対応できる表面実装型圧電発振器、及びその製造方法に関する。   The present invention relates to an underfillless structure required with the progress of miniaturization, a surface-mounted piezoelectric oscillator that can cope with a cavityless structure, and a manufacturing method thereof.

移動体通信市場においては、各種電装部品の実装性、保守・取扱性、装置間での部品の共通性等を考慮して、各機能毎に部品群のモジュール化を推進するメーカーが増えている。また、モジュール化に伴って、小型化、低コスト化も強く求められている。
特に、基準発振回路、PLL回路、及びシンセサイザー回路等、機能及びハード構成が確立し、且つ高安定性、高性能化が要求される回路部品に関してモジュール化への傾向が強まっている。更に、これらの部品群をモジュールとしてパッケージ化することによりシールド構造を確立しやすくなるという利点がある。
複数の関連部品をモジュール化、パッケージ化することにより構築される表面実装用の電子デバイスとしては、例えば圧電振動子、圧電発振器、SAWデバイス等を例示することができる。
ところで、従来の表面実装型発振器にあっては、発振回路、温度補償回路を構成するトランジスタ、抵抗、コンデンサ等の回路素子を個々のチップ部品として実装基板に搭載して使用していたため、小型化に限界があった。そこで、最近では、圧電発振器を小型化する為に、発振回路、温度補償回路等を構成する回路素子を固有の集積回路に集積したワンチップのIC部品が用いられている。
圧電発振器の機能を高く維持しつつ、更なる小型化を図るために、例えは図3に示した如き二階建て構造のモジュールが採用されている。
即ち、図4は二階建て構造型(H型)モジュールとしての表面実装型圧電デバイス(水晶発振器)の従来構成を示す縦断面略図であり、セラミック製の容器本体101と金属リッド102からなる容器の内部に水晶振動素子103を収容した水晶振動子100と、水晶振動子100の底面に接合される容器105の空所(キャビティ)105a内の天井面に発振回路、温度補償回路などを構成するベアチップとしてのIC部品106をフリップチップ実装した底部構造体(IC部品ユニット)107と、を備えている。空所105a内に収納されたIC部品106を保護するために、空所105a内に樹脂(アンダーフィル)110を充填してIC部品全体を被覆している。
In the mobile communications market, an increasing number of manufacturers are promoting modularization of parts groups for each function, taking into account the mounting properties, maintenance and handling characteristics of various electrical components, and the commonality of parts between devices. . Further, along with modularization, there is a strong demand for downsizing and cost reduction.
In particular, there is an increasing tendency toward modularization of circuit components that have established functions and hardware configurations, such as a reference oscillation circuit, a PLL circuit, and a synthesizer circuit, and that require high stability and high performance. Furthermore, there is an advantage that a shield structure can be easily established by packaging these parts as a module.
Examples of the surface mounting electronic device constructed by modularizing and packaging a plurality of related components include a piezoelectric vibrator, a piezoelectric oscillator, a SAW device, and the like.
By the way, in the conventional surface mount type oscillator, circuit elements such as transistors, resistors, capacitors, etc. constituting an oscillation circuit and a temperature compensation circuit are mounted on the mounting substrate as individual chip parts, and thus are downsized. There was a limit. Therefore, recently, in order to reduce the size of the piezoelectric oscillator, a one-chip IC component in which circuit elements constituting an oscillation circuit, a temperature compensation circuit and the like are integrated in a unique integrated circuit is used.
In order to achieve further miniaturization while maintaining the function of the piezoelectric oscillator high, for example, a module having a two-story structure as shown in FIG. 3 is employed.
That is, FIG. 4 is a schematic longitudinal sectional view showing a conventional configuration of a surface-mount type piezoelectric device (quartz oscillator) as a two-story structure type (H type) module, which is a container composed of a ceramic container body 101 and a metal lid 102. A quartz resonator 100 in which a quartz resonator element 103 is housed, and a bare chip that constitutes an oscillation circuit, a temperature compensation circuit, and the like on a ceiling surface in a cavity (cavity) 105a of a container 105 joined to the bottom surface of the quartz resonator 100 And a bottom structure (IC component unit) 107 on which an IC component 106 is flip-chip mounted. In order to protect the IC component 106 accommodated in the void 105a, the void 105a is filled with a resin (underfill) 110 to cover the entire IC component.

この水晶発振器をプリント基板上に実装する際には、容器105の底面に設けた実装端子105bを用いた半田付けが行われる(例えば、特許文献1)。
上記従来のパッケージ構造にあっては、容器105の空所105a内にアンダーフィル110を充填する必要があるが、発振器の小型化が進むに連れて、アンダーフィルを注入するスペースの確保が困難となってきており、アンダーフィルレス構造、或いはキャビティレス構造のパッケージが必要とされてきている。
特許文献2にはアンダーフィルレス構造、或いはキャビティレス構造の圧電発振器のパッケージ構造が開示されている。この従来例は発振回路基板上に回路素子(IC部品)を搭載してから、回路素子のみを樹脂にて被覆し、更に回路基板上の接続端子上に搭載した大径の導電体を介してパッケージ化された圧電振動子を搭載した構成を備えている。
しかし、この従来例には、回路素子を樹脂被覆するに際して近接位置にある接続端子上に樹脂が流入しないようにするための構成、製造方法が複雑化するという不具合がある。つまり、樹脂被覆する際に接続端子に樹脂が入り込まないようにダムを設けたりマスクを形成する必要があり、樹脂被覆以前の工程が複雑化して生産性が低下する。
特開2000−278047公報 特開2004−180012公報
When this crystal oscillator is mounted on a printed board, soldering is performed using mounting terminals 105b provided on the bottom surface of the container 105 (for example, Patent Document 1).
In the conventional package structure described above, it is necessary to fill the space 105a of the container 105 with the underfill 110. However, as the size of the oscillator is reduced, it is difficult to secure a space for injecting the underfill. Accordingly, a package having an underfillless structure or a cavityless structure has been required.
Patent Document 2 discloses a package structure of a piezoelectric oscillator having an underfillless structure or a cavityless structure. In this conventional example, a circuit element (IC component) is mounted on an oscillation circuit board, and then only the circuit element is covered with resin, and further, via a large-diameter conductor mounted on a connection terminal on the circuit board. A packaged piezoelectric vibrator is mounted.
However, this conventional example has a problem that the structure and the manufacturing method for preventing the resin from flowing into the connection terminal located in the proximity when the circuit element is coated with the resin are complicated. That is, it is necessary to provide a dam or a mask so that the resin does not enter the connection terminal when the resin coating is performed, and the process before the resin coating becomes complicated and productivity is lowered.
JP 2000-278047 A JP 2004-180012 A

本発明は上記に鑑みてなされたものであり、実装基板上に、圧電振動子と、発振回路等を構成するワンチップIC部品とを上下位置関係で並置した表面実装型圧電発振器において、小型化の要請によってアンダーフィルを充填するためのキャビティを確保できないことに対応してアンダーフィルレス構造、或いはキャビティレス構造を採用した場合においても、構造の複雑化、製造手数の増大といった不具合を生じることがない表面実装型圧電発振器、及びその製造方法を提供するものである。   The present invention has been made in view of the above, and a surface mount piezoelectric oscillator in which a piezoelectric vibrator and a one-chip IC component constituting an oscillation circuit or the like are juxtaposed in a vertical position on a mounting substrate. Even when an underfillless structure or a cavityless structure is adopted in response to the inability to secure a cavity for filling the underfill at the request of the above, problems such as a complicated structure and an increase in manufacturing steps may occur. The present invention provides a non-surface-mounted piezoelectric oscillator and a method for manufacturing the same.

上記課題を解決するため、請求項1の発明に係る製造方法は、実装基板と、該実装基板上に搭載される圧電振動子及びIC部品と、を備えた表面実装型圧電発振器であって、上記実装基板は、平板状の絶縁基板と、該絶縁基板底部に設けた実装電極と、該絶縁基板上面に設けた配線パターンと、を備え、上記IC部品は、上記絶縁基板上面の配線パターン上に小バンプによってフリップチップ実装され、上記圧電振動子は、上記絶縁基板上面の他の配線パターン上に固定した導体ブロック上面に接続用導体を介して実装され、上記絶縁基板上面から上記導体ブロック上面のレベルまでを被覆する樹脂層によって上記IC部品全体を樹脂被覆した表面実装型圧電発振器を製造する方法であって、上記実装基板上の上記配線パターン上に上記IC部品を上記小バンプによってフリップチップ実装するIC部品搭載工程と、上記実装基板上面に、シート状樹脂を載置して加圧しながら加熱することにより上記IC部品を埋設しつつ樹脂層を被覆一体化する熱プレス工程と、上記樹脂層にレーザ光を照射して上記他の配線パターンを露出させる開口を複数形成するレーザ照射工程と、上記各開口内に導電性材料を充填して上記導体ブロックを上記他の配線パターン上に接続形成する導体ブロック形成工程と、上記各導体ブロックの露出した各上面に接続用導体を介して上記圧電振動素子底部の電極を固定する圧電振動子搭載工程と、から成ることを特徴とする。
平板状の実装基板上の各配線パターン上にIC部品と導体ブロックを搭載完了した後に樹脂被覆することが可能となるので、配線パターン上に樹脂が侵入することを防止するための構造を事前に形成する手間が省ける。従って、製造工数を簡略化し生産性を高め、製造コストを低減できる。大面積の実装基板母材を用いたバッチ処理にも適した発振器構造である。
請求項2の発明は、請求項1において、上記導体ブロック形成工程の後に、上記樹脂層上面適所に接着剤を塗布する接着剤塗布工程を実施することを特徴とする。
樹脂層上面とパッケージ化された圧電発振器底面との間の隙間に接着剤を充填することにより両者の接続強度を高めることが可能となる。
請求項3の発明に係る表面実装型圧電発振器は、請求項1、又は2に記載の製造方法によって製造したことを特徴とする。
In order to solve the above-mentioned problem, a manufacturing method according to the invention of claim 1 is a surface-mount type piezoelectric oscillator comprising a mounting substrate, and a piezoelectric vibrator and an IC component mounted on the mounting substrate, The mounting substrate includes a flat insulating substrate, a mounting electrode provided on the bottom of the insulating substrate, and a wiring pattern provided on the top surface of the insulating substrate, and the IC component is provided on the wiring pattern on the top surface of the insulating substrate. The piezoelectric vibrator is mounted on the upper surface of the conductor block fixed on the other wiring pattern on the upper surface of the insulating substrate via a connecting conductor, and is connected to the upper surface of the conductor block from the upper surface of the insulating substrate. A method of manufacturing a surface-mounted piezoelectric oscillator in which the entire IC component is resin-coated with a resin layer covering up to a level of the IC, wherein the IC is formed on the wiring pattern on the mounting substrate. IC component mounting process for flip-chip mounting products with the above-mentioned small bumps, and mounting the resin layer while embedding the IC components by placing a sheet-like resin on the mounting substrate and heating it with pressure A heat pressing step, a laser irradiation step of irradiating the resin layer with a laser beam to form a plurality of openings for exposing the other wiring patterns, and filling the conductive blocks in the openings to form the conductor block. A conductor block forming step for forming a connection on the other wiring pattern, and a piezoelectric vibrator mounting step for fixing the electrode at the bottom of the piezoelectric vibration element to the exposed upper surface of each conductor block via a connecting conductor. It is characterized by comprising.
Since it is possible to coat the resin after completing the mounting of IC components and conductor blocks on each wiring pattern on the flat mounting board, a structure to prevent the resin from entering the wiring pattern in advance Save time and effort to form. Therefore, the number of manufacturing steps can be simplified, the productivity can be improved, and the manufacturing cost can be reduced. The oscillator structure is suitable for batch processing using a large-area mounting board base material.
According to a second aspect of the present invention, in the first aspect of the present invention, after the conductor block forming step, an adhesive application step of applying an adhesive to an appropriate position on the upper surface of the resin layer is performed.
By filling the gap between the upper surface of the resin layer and the bottom surface of the packaged piezoelectric oscillator, it is possible to increase the connection strength between the two.
A surface-mounted piezoelectric oscillator according to a third aspect of the present invention is manufactured by the manufacturing method according to the first or second aspect.

本発明によれば、IC部品とパッケージ化された圧電振動子を上下位置関係となるように実装基板上に搭載する際に、平板状の実装基板を使用することが可能となるためキャビティレス化による小型化を実現できる。また、実装基板母材を利用したバッチ処理において、配線パターンの一部に樹脂が流入することを防止するための堰き止め手段を設けるといった複雑な工程を経ることなく、IC部品を樹脂被覆することが可能となる。   According to the present invention, when mounting a piezoelectric vibrator packaged with an IC component on a mounting substrate so as to have a vertical positional relationship, it is possible to use a flat mounting substrate, so that a cavity-less configuration is achieved. It is possible to achieve downsizing. Also, in batch processing using mounting board base materials, IC components can be coated with resin without going through complicated steps such as providing damming means to prevent resin from flowing into part of the wiring pattern. Is possible.

以下、本発明を図面に示した実施の形態に基づいて詳細に説明する。
図1(a)及び(b)は本発明の一実施形態に係る表面実装型圧電発振器の構成を示す外観斜視図、及び縦断面図であり、ここでは水晶発振器を一例として説明する。
この表面実装型圧電発振器1は、平板状の実装基板2と、実装基板2上に搭載されるIC部品10、及びパッケージ化された水晶振動子(圧電振動子)21と、を備えている。
実装基板2は、平板状の絶縁基板3と、絶縁基板底部に設けた実装電極4と、絶縁基板上面に設けた配線パターン(ランド)5、6と、を備えている。
IC部品10は、発振回路、温度補償回路等を構成する半導体ベアチップであり、絶縁基板3上面の配線パターン5上に高さの低い小バンプ7によってフリップチップ実装されている。
Hereinafter, the present invention will be described in detail based on embodiments shown in the drawings.
FIGS. 1A and 1B are an external perspective view and a longitudinal sectional view showing a configuration of a surface mount piezoelectric oscillator according to an embodiment of the present invention. Here, a crystal oscillator will be described as an example.
The surface-mount piezoelectric oscillator 1 includes a flat mounting substrate 2, an IC component 10 mounted on the mounting substrate 2, and a packaged crystal resonator (piezoelectric resonator) 21.
The mounting substrate 2 includes a flat insulating substrate 3, mounting electrodes 4 provided on the bottom of the insulating substrate, and wiring patterns (lands) 5 and 6 provided on the upper surface of the insulating substrate.
The IC component 10 is a semiconductor bare chip that constitutes an oscillation circuit, a temperature compensation circuit, and the like, and is flip-chip mounted on the wiring pattern 5 on the upper surface of the insulating substrate 3 by small bumps 7 having a low height.

水晶振動子21は、絶縁基板上面の他の配線パターン6上に固定した背高の導体ブロック31上面に半田等の接続用導体32を介して実装される。水晶振動子21は、セラミック等から成る容器本体22の凹所22a内に設けた接続パッド22b上に導電性接着剤を用いて水晶振動素子23を支持し、該凹所22aを金属蓋24によって封止した構成を備える。容器本体22の底部には外部電極25を備え、この外部電極25と上記接続用導体32を接続することによって水晶振動子21は導体ブロック31上面に固定される。水晶振動素子23は、水晶基板の両主面に導体パターン(励振電極、及び各励振電極から引き出されたリード電極)を形成した構成を備えている。
導体ブロック31は、実装基板2上にフリップチップ実装されたIC部品10よりも背高となるように寸法設定される。つまり、搭載後のIC部品10の上面の高さ位置よりも、導体ブロック31の平坦な上面の方が高い位置関係となるように設定する。導体ブロック31の形成方法は、後述の製造方法において説明する。
更に、絶縁基板3の上面から導体ブロック上面のレベルまでを被覆する樹脂層41によってIC部品全体を樹脂被覆する。
The crystal resonator 21 is mounted on the upper surface of a tall conductor block 31 fixed on the other wiring pattern 6 on the upper surface of the insulating substrate via a connection conductor 32 such as solder. The crystal resonator 21 supports a crystal resonator element 23 using a conductive adhesive on a connection pad 22b provided in a recess 22a of a container body 22 made of ceramic or the like, and the recess 22a is supported by a metal lid 24. It has a sealed configuration. An external electrode 25 is provided at the bottom of the container body 22, and the crystal resonator 21 is fixed to the upper surface of the conductor block 31 by connecting the external electrode 25 and the connecting conductor 32. The quartz resonator element 23 has a configuration in which conductor patterns (excitation electrodes and lead electrodes drawn from the excitation electrodes) are formed on both main surfaces of the quartz substrate.
The conductor block 31 is dimensioned so as to be taller than the IC component 10 flip-chip mounted on the mounting substrate 2. That is, the flat upper surface of the conductor block 31 is set to have a higher positional relationship than the height position of the upper surface of the IC component 10 after mounting. A method of forming the conductor block 31 will be described in the manufacturing method described later.
Further, the entire IC component is resin-coated with a resin layer 41 that covers from the upper surface of the insulating substrate 3 to the level of the upper surface of the conductor block.

なお、樹脂層41の上面と水晶振動子21下面との間隙に接着剤45を充填して両者を一体化してもよい。このように樹脂層上面とパッケージ化された圧電発振器底面との間の隙間に接着剤を充填することにより両者の接続強度を高めることが可能となる。
本発明の発振器1は、IC部品10のみならず、水晶振動子21を実装基板上に搭載する導体ブロック31も含めた基板上面を樹脂層41によって被覆した構造が特徴的であり、このようにIC部品10以外の部分も樹脂被覆する構成とすることにより構成がシンプル化し、後述するように製造工程を簡略化することが可能となる。
従って、本発明によれば、パッケージ化された水晶振動子とワンチップIC部品とを上下位置関係となるように実装基板上に搭載した表面実装型水晶発振器において、小型化の要請によってアンダーフィルを充填するためのキャビティを確保できないことに対応してアンダーフィルレス構造、或いはキャビティレス構造を採用した場合においても、構造の複雑化、製造手数の増大といった不具合を解消できる。
Alternatively, the gap between the upper surface of the resin layer 41 and the lower surface of the crystal unit 21 may be filled with an adhesive 45 to integrate them. Thus, by filling the gap between the upper surface of the resin layer and the bottom surface of the packaged piezoelectric oscillator, it is possible to increase the connection strength between the two.
The oscillator 1 of the present invention is characterized by a structure in which not only the IC component 10 but also the substrate upper surface including the conductor block 31 on which the crystal resonator 21 is mounted on the mounting substrate is covered with the resin layer 41, as described above. The configuration other than the IC component 10 is coated with the resin, thereby simplifying the configuration and simplifying the manufacturing process as described later.
Therefore, according to the present invention, in a surface-mounted crystal oscillator in which a packaged crystal resonator and a one-chip IC component are mounted on a mounting substrate so as to be in a vertical position relationship, an underfill is caused by a request for miniaturization. Even when an underfillless structure or a cavityless structure is employed in response to the inability to secure a cavity for filling, problems such as a complicated structure and an increase in the number of manufacturing steps can be solved.

次に、上記表面実装型水晶発振器の製造方法を図2に示した工程図により説明する。
なお、以下の工程は、多数の実装基板を縦横にシート状に連結した実装基板母材を用いたバッチ処理によって実施されるが、ここでは発振器個片毎の製造手順を明確化するために個片の断面図を用いて説明する。
図2(a)はIC部品搭載工程であり、実装基板2上の配線パターン5上にIC部品10を小バンプ7によってフリップチップ実装する。
図2(b)の熱プレス工程では、実装基板2の上面に、IC部品10を埋設させるために十分な厚みを有した均一厚のシート状樹脂41を載置して熱ローラ45によって加圧しながら加熱(熱プレス)することにより、シート状樹脂41を軟化させてIC部品10を埋設しつつ樹脂層41により実装基板2とIC部品10を被覆一体化する。実装基板2上に上面が平坦化するまで加圧された樹脂層41の上面高さは、当然ながらIC部品10の上面を越えた位置となる。熱プレスは、真空中で行っても良いし、待機中で実施してもよい。
シート状の樹脂41の代表例としては、エポキシ樹脂に熱可塑性樹脂を配合してシート状にしたものや、Bステージ状のもの、或いはドライフィルムレジスト等を例示できる。
多数の実装基板を縦横にシート状に連結した実装基板母材を用いたバッチ処理によって発振器を量産する場合には、この熱プレス工程は、実装基板母材外周を枠体状の堰き止め部材により包囲した状態で、該堰き止め部材の内側に大面積のシート状樹脂を載置した上で熱ローラ45により加圧しながら加熱することによって実施される。つまり、この工程においては、実装基板個片上の特定部分に樹脂が侵入しないようにするための堤防やマスクを設ける等の煩雑な手法を採ることなく、単純にシート状樹脂を載置して加圧、加熱してから固化させればよく、生産性を大幅に高めることができる。
なお、樹脂被覆前に任意の箇所にアンダーフィルを充填しておいてもよい。
Next, a method for manufacturing the surface-mounted crystal oscillator will be described with reference to a process chart shown in FIG.
The following steps are performed by batch processing using a mounting substrate base material in which a large number of mounting substrates are connected in the form of a sheet, but here, in order to clarify the manufacturing procedure for each oscillator piece, This will be described with reference to a sectional view of the piece.
FIG. 2A shows an IC component mounting process, in which the IC component 10 is flip-chip mounted on the wiring pattern 5 on the mounting substrate 2 by the small bumps 7.
In the heat press step of FIG. 2B, a sheet-like resin 41 having a uniform thickness sufficient to embed the IC component 10 is placed on the upper surface of the mounting substrate 2 and pressed by the heat roller 45. The mounting substrate 2 and the IC component 10 are covered and integrated by the resin layer 41 while softening the sheet-like resin 41 and embedding the IC component 10 by heating (hot pressing). The height of the upper surface of the resin layer 41 that is pressed until the upper surface is flattened on the mounting substrate 2 is naturally positioned beyond the upper surface of the IC component 10. The hot pressing may be performed in a vacuum or may be performed during standby.
As a typical example of the sheet-like resin 41, there can be exemplified a sheet-shaped resin compounded with an epoxy resin, a B-stage resin, a dry film resist, and the like.
When mass-producing oscillators by batch processing using a mounting substrate base material in which a large number of mounting substrates are connected in the form of a sheet, the heat press process is performed by using a frame-shaped damming member around the mounting substrate base material. In a surrounded state, the sheet-shaped resin having a large area is placed inside the damming member and then heated while being pressed by the heat roller 45. That is, in this process, the sheet-like resin is simply placed and added without taking a complicated method such as providing a dike or a mask to prevent the resin from entering a specific portion on the mounting board piece. It is sufficient to solidify after pressing and heating, and the productivity can be greatly increased.
In addition, you may fill underfill with arbitrary places before resin coating.

図2(c)のレーザ照射工程では、樹脂層41にレーザ光を照射して他の配線パターン6を露出させる開口41aを複数形成する。レーザ光の照射位置の制御は、樹脂層41の上面に図示しないマスクを添設する等して実施する。
図2(d)の導体ブロック形成工程では、各開口41a内に半田、Agペースト等の導電性材料31を充填して硬化させることにより導体ブロック31を他の配線パターン6上に接続形成する。この結果、実装基板2上の各配線パターン6上に導体ブロック31が搭載された状態となる。導体ブロック31の最上部の高さ位置は、実装基板2上に搭載したIC部品の上面よりも背高となる。
図2(e)の水晶振動子搭載工程では、各導体ブロック31の露出した各上面に接続用導体32を介して水晶振動素子底部の電極25を固定する。この搭載工程では、各導体ブロックの露出した各上面31aに接続用導体32を介して水晶振動素子底部の電極25を半田等によって固定する。
なお、必要に応じて、熱プレス工程(図2(b))の後に、平坦化した樹脂層上面適所に接着剤45を塗布する接着剤塗布工程を実施してもよい。
最後に個片間の境界線に沿ってダイシングすることによって個々の発振器を得る。
このように本発明の製造方法によれば、実装基板母材を用いたシンプルな工程によって生産性よく、超小型且つアンダーフィルレスタイプ、キャビティレスタイプの表面実装型水晶発振器を量産することができる。
In the laser irradiation process of FIG. 2C, a plurality of openings 41a are formed to expose the other wiring patterns 6 by irradiating the resin layer 41 with laser light. The laser beam irradiation position is controlled by attaching a mask (not shown) on the upper surface of the resin layer 41.
In the conductor block forming step of FIG. 2D, the conductor block 31 is connected and formed on the other wiring pattern 6 by filling each opening 41a with a conductive material 31 such as solder or Ag paste and curing it. As a result, the conductor block 31 is mounted on each wiring pattern 6 on the mounting substrate 2. The height position of the uppermost portion of the conductor block 31 is taller than the upper surface of the IC component mounted on the mounting substrate 2.
In the crystal resonator mounting step of FIG. 2E, the electrode 25 at the bottom of the crystal resonator element is fixed to each exposed upper surface of each conductor block 31 via the connecting conductor 32. In this mounting step, the electrode 25 at the bottom of the quartz-crystal vibrating element is fixed to each exposed upper surface 31a of each conductor block via the connection conductor 32 with solder or the like.
In addition, you may implement the adhesive agent application process which apply | coats the adhesive agent 45 to the planarized resin layer upper surface suitable place after a hot press process (FIG.2 (b)) as needed.
Finally, individual oscillators are obtained by dicing along the boundaries between the pieces.
As described above, according to the manufacturing method of the present invention, an ultra-small, underfillless type and cavityless type surface-mount crystal oscillator can be mass-produced with a simple process using a mounting substrate base material. .

次に、図3は本発明の他の実施形態に係る表面実装型水晶発振器の構成を示す断面図であり、この実施形態では水晶振動子21底部の外部電極25に予め固定してあったバンプ26を導体ブロック31の上面から埋め込むようにして固定している。
この実施形態においては、樹脂層41に形成した開口41a内に充填した半田、Agペースト等の導電性材料31が硬化する前に、水晶振動子21を樹脂層41上に載置してバンプ26を導電性材料31内に埋め込み、埋め込み後に導電性材料31を硬化させることで、水晶振動子21を樹脂層41上に固定完了する。
なお、上記実施形態では、水晶発振器の代表例として水晶発振器を例示したが、本発明は圧電材料から成る圧電振動素子を使用した発振器に適用できる。
Next, FIG. 3 is a cross-sectional view showing the configuration of a surface-mount type crystal oscillator according to another embodiment of the present invention. In this embodiment, bumps previously fixed to the external electrode 25 at the bottom of the crystal unit 21 are shown. 26 is fixed so as to be embedded from the upper surface of the conductor block 31.
In this embodiment, before the conductive material 31 such as solder or Ag paste filled in the opening 41a formed in the resin layer 41 is cured, the crystal resonator 21 is placed on the resin layer 41 and the bumps 26 are placed. Is embedded in the conductive material 31, and the conductive material 31 is cured after being embedded to complete the fixing of the crystal unit 21 on the resin layer 41.
In the above embodiment, a crystal oscillator is illustrated as a typical example of a crystal oscillator. However, the present invention can be applied to an oscillator using a piezoelectric vibration element made of a piezoelectric material.

(a)及び(b)は本発明の一実施形態に係る表面実装型圧電発振器の構成を示す外観斜視図、及び縦断面図。(A) And (b) is an external appearance perspective view and longitudinal cross-sectional view which show the structure of the surface mount-type piezoelectric oscillator which concerns on one Embodiment of this invention. (a)乃至(e)は、本発明の表面実装型圧電発振器の製造方法の工程図。(A) thru | or (e) are process drawings of the manufacturing method of the surface mount-type piezoelectric oscillator of this invention. 本発明の他の実施形態に係る表面実装型圧電発振器の一部断面構成説明図。FIG. 6 is a partial cross-sectional configuration explanatory view of a surface-mount piezoelectric oscillator according to another embodiment of the present invention. 従来の圧電発振器の構成説明図。FIG. 6 is a configuration explanatory diagram of a conventional piezoelectric oscillator.

符号の説明Explanation of symbols

1…表面実装型圧電発振器、2…実装基板、3…絶縁基板、4…実装電極、5…配線パターン、6…配線パターン、7…小バンプ、10…IC部品、21…水晶振動子(圧電振動子)、22…容器本体、22a…凹所、22b…接続パッド、23…水晶振動素子、24…金属蓋、25…外部電極、31…導体ブロック、31a…上面、32…接続用導体、41…樹脂層、41a…開口、45…熱ローラ。   DESCRIPTION OF SYMBOLS 1 ... Surface mount type piezoelectric oscillator, 2 ... Mounting board, 3 ... Insulating board, 4 ... Mounting electrode, 5 ... Wiring pattern, 6 ... Wiring pattern, 7 ... Small bump, 10 ... IC component, 21 ... Crystal oscillator (piezoelectric) (Vibrator), 22 ... container body, 22a ... recess, 22b ... connection pad, 23 ... crystal resonator element, 24 ... metal lid, 25 ... external electrode, 31 ... conductor block, 31a ... upper surface, 32 ... connection conductor, 41 ... resin layer, 41a ... opening, 45 ... heat roller.

Claims (3)

実装基板と、該実装基板上に搭載される圧電振動子及びIC部品と、を備えた表面実装型圧電発振器であって、上記実装基板は、平板状の絶縁基板と、該絶縁基板底部に設けた実装電極と、該絶縁基板上面に設けた配線パターンと、を備え、上記IC部品は、上記絶縁基板上面の配線パターン上に小バンプによってフリップチップ実装され、上記圧電振動子は、上記絶縁基板上面の他の配線パターン上に固定した導体ブロック上面に接続用導体を介して実装され、上記絶縁基板上面から上記導体ブロック上面のレベルまでを被覆する樹脂層によって上記IC部品全体を樹脂被覆した表面実装型圧電発振器を製造する方法であって、
上記実装基板上の上記配線パターン上に上記IC部品を上記小バンプによってフリップチップ実装するIC部品搭載工程と、
上記実装基板上面に、シート状樹脂を載置して加圧しながら加熱することにより上記IC部品を埋設しつつ樹脂層を被覆一体化する熱プレス工程と、
上記樹脂層にレーザ光を照射して上記他の配線パターンを露出させる開口を複数形成するレーザ照射工程と、
上記各開口内に導電性材料を充填して上記導体ブロックを上記他の配線パターン上に接続形成する導体ブロック形成工程と、
上記各導体ブロックの露出した各上面に接続用導体を介して上記圧電振動素子底部の電極を固定する圧電振動子搭載工程と、
から成ることを特徴とする表面実装型圧電発振器の製造方法。
A surface-mount type piezoelectric oscillator comprising a mounting substrate, and a piezoelectric vibrator and an IC component mounted on the mounting substrate, wherein the mounting substrate is provided on a flat insulating substrate and a bottom of the insulating substrate The IC component is flip-chip mounted by a small bump on the wiring pattern on the upper surface of the insulating substrate, and the piezoelectric vibrator is connected to the insulating substrate. A surface in which the entire IC component is resin-coated with a resin layer mounted on the upper surface of the conductor block fixed on the other wiring pattern on the upper surface via a connecting conductor and covering from the upper surface of the insulating substrate to the level of the upper surface of the conductor block. A method of manufacturing a mountable piezoelectric oscillator,
An IC component mounting step in which the IC component is flip-chip mounted by the small bumps on the wiring pattern on the mounting substrate;
A heat press step of covering and integrating the resin layer while embedding the IC component by placing the sheet-like resin on the top surface of the mounting substrate and heating while applying pressure;
A laser irradiation step of forming a plurality of openings for irradiating the resin layer with laser light to expose the other wiring patterns;
A conductor block forming step of filling each of the openings with a conductive material and forming the conductor block on the other wiring pattern;
A piezoelectric vibrator mounting step for fixing the electrode at the bottom of the piezoelectric vibration element to each exposed upper surface of each conductor block via a connecting conductor;
A method for manufacturing a surface-mounted piezoelectric oscillator, comprising:
上記導体ブロック形成工程の後に、上記樹脂層上面適所に接着剤を塗布する接着剤塗布工程を実施することを特徴とする請求項1に記載の表面実装型圧電発振器の製造方法。   2. The method of manufacturing a surface-mount piezoelectric oscillator according to claim 1, wherein an adhesive application step of applying an adhesive to an appropriate position on the upper surface of the resin layer is performed after the conductor block forming step. 請求項1、又は2に記載の製造方法によって製造したことを特徴とする表面実装型圧電発振器。   A surface-mount piezoelectric oscillator manufactured by the manufacturing method according to claim 1.
JP2005278931A 2005-09-26 2005-09-26 Surface mounting piezoelectric oscillator and its manufacturing process Pending JP2007096372A (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100963249B1 (en) 2008-08-05 2010-06-10 (주)서안전자 Stack structured Crystal Oscillator
US20110074250A1 (en) * 2005-03-01 2011-03-31 Seiko Epson Corporation Manufacturing method for electronic component, electronic component, and electronic equipment

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20110074250A1 (en) * 2005-03-01 2011-03-31 Seiko Epson Corporation Manufacturing method for electronic component, electronic component, and electronic equipment
US8664730B2 (en) * 2005-03-01 2014-03-04 Seiko Epson Corporation Manufacturing method for electronic component, electronic component, and electronic equipment
KR100963249B1 (en) 2008-08-05 2010-06-10 (주)서안전자 Stack structured Crystal Oscillator

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