JP2007093593A5 - - Google Patents

Claims (7)

Fluorescence X generated from the sample surface that has received primary X-rays from a detector that is made to enter primary X-rays from an X-ray source at an incident angle that causes total reflection toward the sample surface and is opposed to the sample surface. In the total reflection X-ray fluorescence analysis method for detecting a line,
The primary X-rays irradiated on the sample surface are condensed using a polycapillary X-ray lens ,
The total reflection fluorescent X-ray analysis characterized in that the primary X-ray emitted from the polycapillary X-ray lens has a cross-sectional shape in a direction orthogonal to the traveling direction in a line parallel to the sample surface. Method. Of primary X-rays to be irradiated to the sample surface, total reflection X-ray fluorescence analysis method according to claim 1 for shielding the primary X-ray having an incident angle that does not satisfy the total reflection condition with respect to the sample surface. The whole of claim 1 or 2 , wherein a polycapillary X-ray lens is also arranged on a detector side that detects fluorescent X-rays generated from the sample surface, and only fluorescent X-rays from a minute region on the sample surface are detected. Reflected fluorescent X-ray analysis method. A sample stage on which the sample is placed;
An X-ray source that generates primary X-rays and a polycapillary X-ray lens that collects the primary X-rays and irradiates the sample placed on the sample stage. A primary X-ray irradiator that is incident at an incident angle causing total reflection on the surface;
In the total reflection X-ray fluorescence analyzer , which is disposed opposite to the surface of the sample placed on the sample stage and includes a detector that detects fluorescent X-rays generated from the sample ,
The polycapillary X-ray lens is formed by bundling a large number of monocapillaries, and each monocapillary has a shape in which the inner diameter is once enlarged from the proximal end on the light receiving unit side to the distal end on the radiation side and gradually becomes narrower toward the distal end. And
In the polycapillary X-ray lens, the end of the monocapillary is arranged in a circular shape on the incident surface facing the X-ray light source, and the end of the monocapillary is linear on the exit surface facing the sample. A total reflection fluorescent X-ray analyzer characterized by being arranged so that the radiation direction is condensed toward one point . The primary X-ray irradiator includes a slit between the exit side of the polycapillary X-ray lens and the sample stage, and the slit has a total reflection condition with respect to the surface of the sample placed on the sample stage. The total reflection X-ray fluorescence analyzer according to claim 4 , which is arranged so as to shield primary X-rays having an incident angle that is not satisfied. Wherein said sample stage according to claim 4 or 5 has an adjustment mechanism for adjusting the inclination direction of the surface of the sample with respect to the horizontal plane direction, the height direction and the incident X-ray of the loading surface of the specimen thereon Total reflection X-ray fluorescence analyzer. Includes a polycapillary X-ray lens in between the detector and the sample mounted on the sample stage, claim 4 which is adapted to detect only the fluorescent X-rays from very small area on the sample surface The total reflection X-ray fluorescence analyzer according to any one of claims 6 to 6 .