JP2007093316A - X線集束装置 - Google Patents
X線集束装置 Download PDFInfo
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- JP2007093316A JP2007093316A JP2005281022A JP2005281022A JP2007093316A JP 2007093316 A JP2007093316 A JP 2007093316A JP 2005281022 A JP2005281022 A JP 2005281022A JP 2005281022 A JP2005281022 A JP 2005281022A JP 2007093316 A JP2007093316 A JP 2007093316A
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Abstract
【解決手段】 マルチキャピラリX線レンズ(MCX)2の出口側の集束端2aの外側に多層膜フレネルゾーンプレートによるX線レンズ(FZP)3を配置し、MCX2によりX線源から出たX線を効率良く収集して或る程度径を絞って小径のFZP3に導入し、FZP3によりX線の集束径をさらに絞る。これにより、ごく狭い領域4にX線を集中させることができる
【選択図】 図1
Description
2…マルチキャピラリX線レンズ
2a…集束端
2b…平行端
3…多層膜フレネルゾーンプレート(FZP)X線レンズ
Claims (1)
- 多数の束ねられたX線案内用の細管から成り、少なくとも一方の端面がその外方において微小領域にX線を集中的に照射する集束端となっている細管集合体と、
該細管集合体の集束端の外側に配置されたフレネルゾーンプレートによる集光レンズと、
を備えることを特徴とするX線集束装置。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005281022A JP4492507B2 (ja) | 2005-09-28 | 2005-09-28 | X線集束装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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JP2005281022A JP4492507B2 (ja) | 2005-09-28 | 2005-09-28 | X線集束装置 |
Publications (2)
Publication Number | Publication Date |
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JP2007093316A true JP2007093316A (ja) | 2007-04-12 |
JP4492507B2 JP4492507B2 (ja) | 2010-06-30 |
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JP2005281022A Active JP4492507B2 (ja) | 2005-09-28 | 2005-09-28 | X線集束装置 |
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JP (1) | JP4492507B2 (ja) |
Cited By (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008281421A (ja) * | 2007-05-10 | 2008-11-20 | Nippon Telegr & Teleph Corp <Ntt> | X線集光レンズ |
JP2009047430A (ja) * | 2007-08-13 | 2009-03-05 | Nippon Telegr & Teleph Corp <Ntt> | X線集光レンズ |
JP2009121904A (ja) * | 2007-11-14 | 2009-06-04 | Nippon Telegr & Teleph Corp <Ntt> | X線集光レンズ |
JP2010025662A (ja) * | 2008-07-17 | 2010-02-04 | Nippon Telegr & Teleph Corp <Ntt> | X線集光レンズ |
JP2010276423A (ja) * | 2009-05-27 | 2010-12-09 | Shimadzu Corp | X線集束装置 |
JP2012242165A (ja) * | 2011-05-17 | 2012-12-10 | Hamamatsu Photonics Kk | X線装置 |
US8481932B2 (en) | 2011-04-08 | 2013-07-09 | Hitachi, Ltd. | Charged particle beam analyzer and analysis method |
US9418767B2 (en) | 2009-10-20 | 2016-08-16 | Shimadzu Corporation | X-ray focusing device |
CN108627530A (zh) * | 2018-05-24 | 2018-10-09 | 北京师范大学 | 一种波长色散x射线荧光分析仪 |
WO2020202730A1 (ja) * | 2019-03-29 | 2020-10-08 | 株式会社応用科学研究所 | X線分析装置 |
CN115389538A (zh) * | 2022-08-09 | 2022-11-25 | 深圳市埃芯半导体科技有限公司 | X射线分析装置及方法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02216100A (ja) * | 1989-02-16 | 1990-08-28 | Shimadzu Corp | X線集光器 |
JPH0666997A (ja) * | 1992-08-21 | 1994-03-11 | Olympus Optical Co Ltd | 照明光学系 |
JPH0784096A (ja) * | 1993-09-13 | 1995-03-31 | Nikon Corp | X線照明用ゾーンプレート |
-
2005
- 2005-09-28 JP JP2005281022A patent/JP4492507B2/ja active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02216100A (ja) * | 1989-02-16 | 1990-08-28 | Shimadzu Corp | X線集光器 |
JPH0666997A (ja) * | 1992-08-21 | 1994-03-11 | Olympus Optical Co Ltd | 照明光学系 |
JPH0784096A (ja) * | 1993-09-13 | 1995-03-31 | Nikon Corp | X線照明用ゾーンプレート |
Cited By (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4705606B2 (ja) * | 2007-05-10 | 2011-06-22 | 日本電信電話株式会社 | X線集光レンズ |
JP2008281421A (ja) * | 2007-05-10 | 2008-11-20 | Nippon Telegr & Teleph Corp <Ntt> | X線集光レンズ |
JP2009047430A (ja) * | 2007-08-13 | 2009-03-05 | Nippon Telegr & Teleph Corp <Ntt> | X線集光レンズ |
JP4700034B2 (ja) * | 2007-08-13 | 2011-06-15 | 日本電信電話株式会社 | X線集光レンズ |
JP2009121904A (ja) * | 2007-11-14 | 2009-06-04 | Nippon Telegr & Teleph Corp <Ntt> | X線集光レンズ |
JP4659015B2 (ja) * | 2007-11-14 | 2011-03-30 | 日本電信電話株式会社 | X線集光レンズ |
JP2010025662A (ja) * | 2008-07-17 | 2010-02-04 | Nippon Telegr & Teleph Corp <Ntt> | X線集光レンズ |
JP2010276423A (ja) * | 2009-05-27 | 2010-12-09 | Shimadzu Corp | X線集束装置 |
US9418767B2 (en) | 2009-10-20 | 2016-08-16 | Shimadzu Corporation | X-ray focusing device |
US8481932B2 (en) | 2011-04-08 | 2013-07-09 | Hitachi, Ltd. | Charged particle beam analyzer and analysis method |
JP2012242165A (ja) * | 2011-05-17 | 2012-12-10 | Hamamatsu Photonics Kk | X線装置 |
CN108627530A (zh) * | 2018-05-24 | 2018-10-09 | 北京师范大学 | 一种波长色散x射线荧光分析仪 |
WO2020202730A1 (ja) * | 2019-03-29 | 2020-10-08 | 株式会社応用科学研究所 | X線分析装置 |
JP6851107B2 (ja) * | 2019-03-29 | 2021-03-31 | 株式会社応用科学研究所 | X線分析装置 |
CN115389538A (zh) * | 2022-08-09 | 2022-11-25 | 深圳市埃芯半导体科技有限公司 | X射线分析装置及方法 |
CN115389538B (zh) * | 2022-08-09 | 2023-12-29 | 深圳市埃芯半导体科技有限公司 | X射线分析装置及方法 |
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JP4492507B2 (ja) | 2010-06-30 |
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