JP2007073542A5

JP2007073542A5 -

Info

Publication number: JP2007073542A5
Application number: JP2005255294A
Authority: JP
Filing date: 2005-09-02
Publication date: 2008-10-02
Anticipated expiration: 2025-09-02

Description

上記課題を解決するため、本発明の第１の観点は、多角形状に形成され、底部をなす底板を有し、該底板に対向する上面が開口した主枠体と、
前記主枠体の対向する側部にそれぞれ接合される少なくとも一対の補強枠体と、
前記主枠体の上部に着脱自在に接合される部材と、
を備え、
前記主枠体と前記補強枠体とが接合され、一体となって被処理基板を収容する空間を形成するようにしたことを特徴とする、真空チャンバを提供する。 In order to solve the above-described problem, a first aspect of the present invention is a main frame body that is formed in a polygonal shape and has a bottom plate that forms a bottom portion, and an upper surface that faces the bottom plate is opened.
At least a pair of reinforcing frames respectively joined to opposite sides of the main frame;
A member detachably joined to the upper part of the main frame;
With
A vacuum chamber is provided, wherein the main frame and the reinforcing frame are joined together to form a space for accommodating a substrate to be processed.

また、本発明の第２の観点は、多角形状に形成され、底部をなす底板を有し、該底板に対向する上面が開口した主枠体と、
前記主枠体の対向する側部にそれぞれ接合される少なくとも一対の補強枠体と、
前記主枠体の上部に着脱自在に接合される部材と、
を備え、
前記主枠体と前記補強枠体とを接合することにより耐真空強度を持たせたことを特徴とする、真空チャンバを提供する。 In addition, a second aspect of the present invention is a main frame body that is formed in a polygonal shape and has a bottom plate that forms a bottom portion, and an upper surface facing the bottom plate is opened,
At least a pair of reinforcing frames respectively joined to opposite sides of the main frame;
A member detachably joined to the upper part of the main frame;
With
There is provided a vacuum chamber characterized by having a vacuum resistance strength by joining the main frame and the reinforcing frame.

また、前記内部補強部材は、前記主枠体の上端近傍において前記開口の内側に向けて突設されたフランジと、前記主枠体の壁面と、に接合される断面Ｌ字型の補強部材であることが好ましい。また、前記接合される部材は、前記フランジの上面に載置され、接合されるものであることが好ましい。 The internal reinforcing member is an L-shaped reinforcing member joined to a flange projecting toward the inside of the opening in the vicinity of the upper end of the main frame and a wall surface of the main frame. Preferably there is. Moreover, it is preferable that the member to be joined is placed on the upper surface of the flange and joined.

Claims

A main frame that is formed in a polygonal shape and has a bottom plate that forms a bottom portion, and an upper surface that faces the bottom plate is opened;
At least a pair of reinforcing frames respectively joined to opposite sides of the main frame;
A member detachably joined to the upper part of the main frame;
With
A vacuum chamber characterized in that the main frame and the reinforcing frame are joined together to form a space for accommodating a substrate to be processed.

A main frame that is formed in a polygonal shape and has a bottom plate that forms a bottom portion, and an upper surface that faces the bottom plate is opened;
At least a pair of reinforcing frames respectively joined to opposite sides of the main frame;
A member detachably joined to the upper part of the main frame;
With
A vacuum chamber having vacuum resistance strength by joining the main frame and the reinforcing frame.

The vacuum chamber according to claim 8, wherein the member to be joined is placed on and joined to the upper surface of the flange.