JP2007064664A5 - - Google Patents

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Publication number
JP2007064664A5
JP2007064664A5 JP2005247664A JP2005247664A JP2007064664A5 JP 2007064664 A5 JP2007064664 A5 JP 2007064664A5 JP 2005247664 A JP2005247664 A JP 2005247664A JP 2005247664 A JP2005247664 A JP 2005247664A JP 2007064664 A5 JP2007064664 A5 JP 2007064664A5
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JP
Japan
Prior art keywords
diffraction grating
light source
light
light receiving
output signal
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JP2005247664A
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English (en)
Japanese (ja)
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JP2007064664A (ja
JP4724495B2 (ja
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Priority to JP2005247664A priority Critical patent/JP4724495B2/ja
Priority claimed from JP2005247664A external-priority patent/JP4724495B2/ja
Priority to US11/467,697 priority patent/US7385179B2/en
Publication of JP2007064664A publication Critical patent/JP2007064664A/ja
Publication of JP2007064664A5 publication Critical patent/JP2007064664A5/ja
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Publication of JP4724495B2 publication Critical patent/JP4724495B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2005247664A 2005-08-29 2005-08-29 光学式エンコーダ Expired - Fee Related JP4724495B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2005247664A JP4724495B2 (ja) 2005-08-29 2005-08-29 光学式エンコーダ
US11/467,697 US7385179B2 (en) 2005-08-29 2006-08-28 Optical encoder for measuring displacement

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005247664A JP4724495B2 (ja) 2005-08-29 2005-08-29 光学式エンコーダ

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2011007094A Division JP2011075581A (ja) 2011-01-17 2011-01-17 光学式エンコーダ

Publications (3)

Publication Number Publication Date
JP2007064664A JP2007064664A (ja) 2007-03-15
JP2007064664A5 true JP2007064664A5 (cg-RX-API-DMAC7.html) 2008-10-09
JP4724495B2 JP4724495B2 (ja) 2011-07-13

Family

ID=37927052

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005247664A Expired - Fee Related JP4724495B2 (ja) 2005-08-29 2005-08-29 光学式エンコーダ

Country Status (2)

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US (1) US7385179B2 (cg-RX-API-DMAC7.html)
JP (1) JP4724495B2 (cg-RX-API-DMAC7.html)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7659996B2 (en) * 2006-11-08 2010-02-09 Ricoh Company, Ltd. Relative position detection device and detector for rotary body and image forming apparatus including the relative position detection device
EP1959674A1 (de) * 2007-02-08 2008-08-20 Texmag GmbH Vertriebsgesellschaft Kamera und Verfahren zu deren Betrieb
JP2010256081A (ja) * 2009-04-22 2010-11-11 Fujifilm Corp 光学式位置検出器及び光学装置
JP5679643B2 (ja) * 2009-09-11 2015-03-04 キヤノン株式会社 光学式エンコーダ
JP5170045B2 (ja) * 2009-09-18 2013-03-27 株式会社安川電機 リニアエンコーダ、リニアモータ、リニアモータシステム、メインスケール及びリニアエンコーダの製造方法
CN101872065B (zh) * 2010-06-11 2012-04-18 南京中科天文仪器有限公司 一种光电角轴编码器的组合式光栅扫描系统
US8829421B2 (en) * 2011-02-21 2014-09-09 Mitsubishi Electric Corporation Optical encoder
JP6032924B2 (ja) * 2011-04-13 2016-11-30 キヤノン株式会社 エンコーダ
US9029757B2 (en) * 2011-12-23 2015-05-12 Mitutoyo Corporation Illumination portion for an adaptable resolution optical encoder
DE102012222077A1 (de) * 2012-12-03 2014-06-05 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
JP6593868B2 (ja) * 2015-07-28 2019-10-23 株式会社ミツトヨ 変位検出装置
US9683869B1 (en) 2015-12-11 2017-06-20 Mitutoyo Corporation Electronic absolute position encoder
US9871595B2 (en) 2016-04-27 2018-01-16 Industrial Technology Research Institute Decoding device and method for absolute positioning code
TWI623200B (zh) * 2016-04-27 2018-05-01 財團法人工業技術研究院 定位絕對碼的解碼裝置及解碼方法
CN106500606B (zh) * 2016-12-26 2022-02-25 清华大学深圳研究生院 一种多码道光栅尺
US10094685B2 (en) * 2016-12-27 2018-10-09 Mitutoyo Corporation Displacement encoder
US10274344B2 (en) 2016-12-27 2019-04-30 Mitutoyo Corporation Displacement encoder
EP3593092B1 (en) * 2017-03-07 2023-07-26 Renishaw PLC Encoder apparatus
US10295648B2 (en) * 2017-06-29 2019-05-21 Mitutoyo Corporation Contamination and defect resistant optical encoder configuration including a normal of readhead plane at a non-zero pitch angle relative to measuring axis for providing displacement signals
TWI798331B (zh) * 2018-02-02 2023-04-11 日商三共製作所股份有限公司 檢測移動體之運動之位置變化量的方法及裝置
CN109916598A (zh) * 2019-04-26 2019-06-21 北京航空航天大学 一种基于衍射光栅的显微物镜数值孔径测量方法
JP7475973B2 (ja) * 2020-06-08 2024-04-30 キヤノン株式会社 光学式エンコーダ及び制御装置
DE102021208006A1 (de) * 2021-07-26 2023-01-26 Siemens Aktiengesellschaft Druckmessvorrichtung und Messverfahren zur nicht-invasiven Druckmessung und Computerprogrammprodukt
US11823406B1 (en) * 2023-07-19 2023-11-21 Mloptic Corp. Moiré-based distance measurement system

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3616144A1 (de) * 1986-05-14 1987-11-19 Heidenhain Gmbh Dr Johannes Fotoelektrische messeinrichtung
US4979827A (en) * 1988-02-26 1990-12-25 Kabushiki Kaisha Okuma Tekkosho Optical linear encoder
JP2539269B2 (ja) * 1989-07-17 1996-10-02 オークマ株式会社 光学式エンコ―ダ
DE4323712C2 (de) * 1993-07-15 1997-12-11 Heidenhain Gmbh Dr Johannes Lichtelektrische Längen- oder Winkelmeßeinrichtung
DE4404564A1 (de) * 1994-02-12 1995-08-17 Henkel Kgaa Verwendung von 1,2,3,4-Tetrahydrochinoxalinen als Oxidationsfarbstoffvorprodukte in Oxidationsfärbemitteln
JP2695623B2 (ja) * 1994-11-25 1998-01-14 株式会社ミツトヨ 光学式エンコーダ
DE19511068A1 (de) * 1995-03-25 1996-09-26 Heidenhain Gmbh Dr Johannes Lichtelektrische Positionsmeßeinrichtung
JP3215289B2 (ja) * 1995-04-17 2001-10-02 オークマ株式会社 スケール及びエンコーダ
JPH09196705A (ja) * 1996-01-23 1997-07-31 Mitsutoyo Corp 変位測定装置
JP3209914B2 (ja) * 1996-03-19 2001-09-17 オークマ株式会社 光学式エンコーダ
US6094307A (en) * 1996-05-17 2000-07-25 Okuma Corporation Optical grating and encoder
EP1028309B1 (de) * 1999-02-04 2003-04-16 Dr. Johannes Heidenhain GmbH Optische Positionsmesseinrichtung
US7470892B2 (en) * 2004-03-03 2008-12-30 Mitsubishi Denki Kabushiki Kaisha Optical encoder
US20070024865A1 (en) * 2005-07-26 2007-02-01 Mitchell Donald K Optical encoder having slanted optical detector elements for harmonic suppression

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